KR0108667Y1 - Wafer fixing device - Google Patents

Wafer fixing device

Info

Publication number
KR0108667Y1
KR0108667Y1 KR93017526U KR930017526U KR0108667Y1 KR 0108667 Y1 KR0108667 Y1 KR 0108667Y1 KR 93017526 U KR93017526 U KR 93017526U KR 930017526 U KR930017526 U KR 930017526U KR 0108667 Y1 KR0108667 Y1 KR 0108667Y1
Authority
KR
South Korea
Prior art keywords
fixing device
wafer fixing
wafer
fixing
Prior art date
Application number
KR93017526U
Other languages
Korean (ko)
Inventor
Kwang-Chol Kim
Original Assignee
Lg Semicon Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lg Semicon Co Ltd filed Critical Lg Semicon Co Ltd
Priority to KR93017526U priority Critical patent/KR0108667Y1/en
Application granted granted Critical
Publication of KR0108667Y1 publication Critical patent/KR0108667Y1/en

Links

KR93017526U 1993-09-03 1993-09-03 Wafer fixing device KR0108667Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR93017526U KR0108667Y1 (en) 1993-09-03 1993-09-03 Wafer fixing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR93017526U KR0108667Y1 (en) 1993-09-03 1993-09-03 Wafer fixing device

Publications (1)

Publication Number Publication Date
KR0108667Y1 true KR0108667Y1 (en) 1997-11-05

Family

ID=19362736

Family Applications (1)

Application Number Title Priority Date Filing Date
KR93017526U KR0108667Y1 (en) 1993-09-03 1993-09-03 Wafer fixing device

Country Status (1)

Country Link
KR (1) KR0108667Y1 (en)

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Legal Events

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Payment date: 20080728

Year of fee payment: 12

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