KR940023533U - Wafer Chuck Structure - Google Patents

Wafer Chuck Structure

Info

Publication number
KR940023533U
KR940023533U KR2019930003860U KR930003860U KR940023533U KR 940023533 U KR940023533 U KR 940023533U KR 2019930003860 U KR2019930003860 U KR 2019930003860U KR 930003860 U KR930003860 U KR 930003860U KR 940023533 U KR940023533 U KR 940023533U
Authority
KR
South Korea
Prior art keywords
wafer chuck
chuck structure
wafer
chuck
Prior art date
Application number
KR2019930003860U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019930003860U priority Critical patent/KR940023533U/en
Publication of KR940023533U publication Critical patent/KR940023533U/en

Links

KR2019930003860U 1993-03-16 1993-03-16 Wafer Chuck Structure KR940023533U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930003860U KR940023533U (en) 1993-03-16 1993-03-16 Wafer Chuck Structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930003860U KR940023533U (en) 1993-03-16 1993-03-16 Wafer Chuck Structure

Publications (1)

Publication Number Publication Date
KR940023533U true KR940023533U (en) 1994-10-22

Family

ID=60914904

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930003860U KR940023533U (en) 1993-03-16 1993-03-16 Wafer Chuck Structure

Country Status (1)

Country Link
KR (1) KR940023533U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11324383B2 (en) 2018-12-05 2022-05-10 Samsung Electronics Co., Ltd. Nozzle and dishwasher including the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11324383B2 (en) 2018-12-05 2022-05-10 Samsung Electronics Co., Ltd. Nozzle and dishwasher including the same

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application