KR940023570U - Structure of wafer holder - Google Patents

Structure of wafer holder

Info

Publication number
KR940023570U
KR940023570U KR2019960003858U KR930003858U KR940023570U KR 940023570 U KR940023570 U KR 940023570U KR 2019960003858 U KR2019960003858 U KR 2019960003858U KR 930003858 U KR930003858 U KR 930003858U KR 940023570 U KR940023570 U KR 940023570U
Authority
KR
South Korea
Prior art keywords
wafer holder
wafer
holder
Prior art date
Application number
KR2019960003858U
Other languages
Korean (ko)
Other versions
KR200158382Y1 (en
Inventor
백영기
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019960003858U priority Critical patent/KR200158382Y1/en
Publication of KR940023570U publication Critical patent/KR940023570U/en
Application granted granted Critical
Publication of KR200158382Y1 publication Critical patent/KR200158382Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
KR2019960003858U 1993-03-16 1993-03-16 Structure of wafer holder KR200158382Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960003858U KR200158382Y1 (en) 1993-03-16 1993-03-16 Structure of wafer holder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960003858U KR200158382Y1 (en) 1993-03-16 1993-03-16 Structure of wafer holder

Publications (2)

Publication Number Publication Date
KR940023570U true KR940023570U (en) 1994-10-22
KR200158382Y1 KR200158382Y1 (en) 1999-10-15

Family

ID=19352153

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960003858U KR200158382Y1 (en) 1993-03-16 1993-03-16 Structure of wafer holder

Country Status (1)

Country Link
KR (1) KR200158382Y1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5406067B2 (en) * 2009-02-16 2014-02-05 キヤノンアネルバ株式会社 Tray and vacuum processing equipment

Also Published As

Publication number Publication date
KR200158382Y1 (en) 1999-10-15

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20050620

Year of fee payment: 7

LAPS Lapse due to unpaid annual fee