KR940023569U - Structure of Wafer Vacuum Chuck - Google Patents

Structure of Wafer Vacuum Chuck

Info

Publication number
KR940023569U
KR940023569U KR2019930003528U KR930003528U KR940023569U KR 940023569 U KR940023569 U KR 940023569U KR 2019930003528 U KR2019930003528 U KR 2019930003528U KR 930003528 U KR930003528 U KR 930003528U KR 940023569 U KR940023569 U KR 940023569U
Authority
KR
South Korea
Prior art keywords
vacuum chuck
wafer vacuum
wafer
chuck
vacuum
Prior art date
Application number
KR2019930003528U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019930003528U priority Critical patent/KR940023569U/en
Publication of KR940023569U publication Critical patent/KR940023569U/en

Links

KR2019930003528U 1993-03-11 1993-03-11 Structure of Wafer Vacuum Chuck KR940023569U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930003528U KR940023569U (en) 1993-03-11 1993-03-11 Structure of Wafer Vacuum Chuck

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930003528U KR940023569U (en) 1993-03-11 1993-03-11 Structure of Wafer Vacuum Chuck

Publications (1)

Publication Number Publication Date
KR940023569U true KR940023569U (en) 1994-10-22

Family

ID=60672606

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930003528U KR940023569U (en) 1993-03-11 1993-03-11 Structure of Wafer Vacuum Chuck

Country Status (1)

Country Link
KR (1) KR940023569U (en)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application