KR970046598U - Vacuum Chuck of Semiconductor Equipment - Google Patents

Vacuum Chuck of Semiconductor Equipment

Info

Publication number
KR970046598U
KR970046598U KR2019950044516U KR19950044516U KR970046598U KR 970046598 U KR970046598 U KR 970046598U KR 2019950044516 U KR2019950044516 U KR 2019950044516U KR 19950044516 U KR19950044516 U KR 19950044516U KR 970046598 U KR970046598 U KR 970046598U
Authority
KR
South Korea
Prior art keywords
vacuum chuck
semiconductor equipment
semiconductor
equipment
chuck
Prior art date
Application number
KR2019950044516U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019950044516U priority Critical patent/KR970046598U/en
Publication of KR970046598U publication Critical patent/KR970046598U/en

Links

KR2019950044516U 1995-12-20 1995-12-20 Vacuum Chuck of Semiconductor Equipment KR970046598U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950044516U KR970046598U (en) 1995-12-20 1995-12-20 Vacuum Chuck of Semiconductor Equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950044516U KR970046598U (en) 1995-12-20 1995-12-20 Vacuum Chuck of Semiconductor Equipment

Publications (1)

Publication Number Publication Date
KR970046598U true KR970046598U (en) 1997-07-31

Family

ID=60877763

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950044516U KR970046598U (en) 1995-12-20 1995-12-20 Vacuum Chuck of Semiconductor Equipment

Country Status (1)

Country Link
KR (1) KR970046598U (en)

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination