KR970051764U - Arm of Wafer Transfer Device - Google Patents

Arm of Wafer Transfer Device

Info

Publication number
KR970051764U
KR970051764U KR2019960003625U KR19960003625U KR970051764U KR 970051764 U KR970051764 U KR 970051764U KR 2019960003625 U KR2019960003625 U KR 2019960003625U KR 19960003625 U KR19960003625 U KR 19960003625U KR 970051764 U KR970051764 U KR 970051764U
Authority
KR
South Korea
Prior art keywords
arm
transfer device
wafer transfer
wafer
transfer
Prior art date
Application number
KR2019960003625U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960003625U priority Critical patent/KR970051764U/en
Publication of KR970051764U publication Critical patent/KR970051764U/en

Links

KR2019960003625U 1996-02-29 1996-02-29 Arm of Wafer Transfer Device KR970051764U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960003625U KR970051764U (en) 1996-02-29 1996-02-29 Arm of Wafer Transfer Device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960003625U KR970051764U (en) 1996-02-29 1996-02-29 Arm of Wafer Transfer Device

Publications (1)

Publication Number Publication Date
KR970051764U true KR970051764U (en) 1997-09-08

Family

ID=60932486

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960003625U KR970051764U (en) 1996-02-29 1996-02-29 Arm of Wafer Transfer Device

Country Status (1)

Country Link
KR (1) KR970051764U (en)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal