KR970054696U - Semiconductor Wafer Transfer Device - Google Patents

Semiconductor Wafer Transfer Device

Info

Publication number
KR970054696U
KR970054696U KR2019960004843U KR19960004843U KR970054696U KR 970054696 U KR970054696 U KR 970054696U KR 2019960004843 U KR2019960004843 U KR 2019960004843U KR 19960004843 U KR19960004843 U KR 19960004843U KR 970054696 U KR970054696 U KR 970054696U
Authority
KR
South Korea
Prior art keywords
semiconductor wafer
transfer device
wafer transfer
semiconductor
wafer
Prior art date
Application number
KR2019960004843U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960004843U priority Critical patent/KR970054696U/en
Publication of KR970054696U publication Critical patent/KR970054696U/en

Links

KR2019960004843U 1996-03-14 1996-03-14 Semiconductor Wafer Transfer Device KR970054696U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960004843U KR970054696U (en) 1996-03-14 1996-03-14 Semiconductor Wafer Transfer Device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960004843U KR970054696U (en) 1996-03-14 1996-03-14 Semiconductor Wafer Transfer Device

Publications (1)

Publication Number Publication Date
KR970054696U true KR970054696U (en) 1997-10-13

Family

ID=60843997

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960004843U KR970054696U (en) 1996-03-14 1996-03-14 Semiconductor Wafer Transfer Device

Country Status (1)

Country Link
KR (1) KR970054696U (en)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application