KR970051762U - Wafer Transfer Device - Google Patents

Wafer Transfer Device

Info

Publication number
KR970051762U
KR970051762U KR2019960002835U KR19960002835U KR970051762U KR 970051762 U KR970051762 U KR 970051762U KR 2019960002835 U KR2019960002835 U KR 2019960002835U KR 19960002835 U KR19960002835 U KR 19960002835U KR 970051762 U KR970051762 U KR 970051762U
Authority
KR
South Korea
Prior art keywords
transfer device
wafer transfer
wafer
transfer
Prior art date
Application number
KR2019960002835U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960002835U priority Critical patent/KR970051762U/en
Publication of KR970051762U publication Critical patent/KR970051762U/en

Links

KR2019960002835U 1996-02-24 1996-02-24 Wafer Transfer Device KR970051762U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960002835U KR970051762U (en) 1996-02-24 1996-02-24 Wafer Transfer Device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960002835U KR970051762U (en) 1996-02-24 1996-02-24 Wafer Transfer Device

Publications (1)

Publication Number Publication Date
KR970051762U true KR970051762U (en) 1997-09-08

Family

ID=60844840

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960002835U KR970051762U (en) 1996-02-24 1996-02-24 Wafer Transfer Device

Country Status (1)

Country Link
KR (1) KR970051762U (en)

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination