KR960006349U - Semiconductor wafer transport device - Google Patents
Semiconductor wafer transport deviceInfo
- Publication number
- KR960006349U KR960006349U KR2019940016817U KR19940016817U KR960006349U KR 960006349 U KR960006349 U KR 960006349U KR 2019940016817 U KR2019940016817 U KR 2019940016817U KR 19940016817 U KR19940016817 U KR 19940016817U KR 960006349 U KR960006349 U KR 960006349U
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor wafer
- transport device
- wafer transport
- semiconductor
- wafer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940016817U KR200194078Y1 (en) | 1994-07-07 | 1994-07-07 | Semiconductor wafer transfer apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940016817U KR200194078Y1 (en) | 1994-07-07 | 1994-07-07 | Semiconductor wafer transfer apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960006349U true KR960006349U (en) | 1996-02-17 |
KR200194078Y1 KR200194078Y1 (en) | 2000-09-01 |
Family
ID=19387869
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940016817U KR200194078Y1 (en) | 1994-07-07 | 1994-07-07 | Semiconductor wafer transfer apparatus |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR200194078Y1 (en) |
-
1994
- 1994-07-07 KR KR2019940016817U patent/KR200194078Y1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR200194078Y1 (en) | 2000-09-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20090526 Year of fee payment: 10 |
|
EXPY | Expiration of term |