KR960025400U - Wafer transfer arm detection device - Google Patents

Wafer transfer arm detection device

Info

Publication number
KR960025400U
KR960025400U KR2019940036957U KR19940036957U KR960025400U KR 960025400 U KR960025400 U KR 960025400U KR 2019940036957 U KR2019940036957 U KR 2019940036957U KR 19940036957 U KR19940036957 U KR 19940036957U KR 960025400 U KR960025400 U KR 960025400U
Authority
KR
South Korea
Prior art keywords
detection device
transfer arm
wafer transfer
arm detection
wafer
Prior art date
Application number
KR2019940036957U
Other languages
Korean (ko)
Other versions
KR0119297Y1 (en
Inventor
정길종
김광성
진기현
Original Assignee
현대전자산업주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업주식회사 filed Critical 현대전자산업주식회사
Priority to KR2019940036957U priority Critical patent/KR0119297Y1/en
Publication of KR960025400U publication Critical patent/KR960025400U/en
Application granted granted Critical
Publication of KR0119297Y1 publication Critical patent/KR0119297Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019940036957U 1994-12-28 1994-12-28 Sensing apparatus of wafer sending apparatus KR0119297Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940036957U KR0119297Y1 (en) 1994-12-28 1994-12-28 Sensing apparatus of wafer sending apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940036957U KR0119297Y1 (en) 1994-12-28 1994-12-28 Sensing apparatus of wafer sending apparatus

Publications (2)

Publication Number Publication Date
KR960025400U true KR960025400U (en) 1996-07-22
KR0119297Y1 KR0119297Y1 (en) 1998-08-01

Family

ID=19403653

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940036957U KR0119297Y1 (en) 1994-12-28 1994-12-28 Sensing apparatus of wafer sending apparatus

Country Status (1)

Country Link
KR (1) KR0119297Y1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100653684B1 (en) * 2000-11-02 2006-12-04 삼성전자주식회사 chemical vapor deposition equipment for use of semiconductor

Also Published As

Publication number Publication date
KR0119297Y1 (en) 1998-08-01

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20090223

Year of fee payment: 12

EXPY Expiration of term