KR970054697U - Arm for Wafer Transfer - Google Patents

Arm for Wafer Transfer

Info

Publication number
KR970054697U
KR970054697U KR2019960005019U KR19960005019U KR970054697U KR 970054697 U KR970054697 U KR 970054697U KR 2019960005019 U KR2019960005019 U KR 2019960005019U KR 19960005019 U KR19960005019 U KR 19960005019U KR 970054697 U KR970054697 U KR 970054697U
Authority
KR
South Korea
Prior art keywords
arm
wafer transfer
wafer
transfer
Prior art date
Application number
KR2019960005019U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960005019U priority Critical patent/KR970054697U/en
Publication of KR970054697U publication Critical patent/KR970054697U/en

Links

KR2019960005019U 1996-03-16 1996-03-16 Arm for Wafer Transfer KR970054697U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960005019U KR970054697U (en) 1996-03-16 1996-03-16 Arm for Wafer Transfer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960005019U KR970054697U (en) 1996-03-16 1996-03-16 Arm for Wafer Transfer

Publications (1)

Publication Number Publication Date
KR970054697U true KR970054697U (en) 1997-10-13

Family

ID=60933083

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960005019U KR970054697U (en) 1996-03-16 1996-03-16 Arm for Wafer Transfer

Country Status (1)

Country Link
KR (1) KR970054697U (en)

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination