KR950012589U - 플라즈마 보조 화학 기상 증착 장치 - Google Patents

플라즈마 보조 화학 기상 증착 장치

Info

Publication number
KR950012589U
KR950012589U KR2019930021440U KR930021440U KR950012589U KR 950012589 U KR950012589 U KR 950012589U KR 2019930021440 U KR2019930021440 U KR 2019930021440U KR 930021440 U KR930021440 U KR 930021440U KR 950012589 U KR950012589 U KR 950012589U
Authority
KR
South Korea
Prior art keywords
vapor deposition
chemical vapor
deposition apparatus
plasma assisted
assisted chemical
Prior art date
Application number
KR2019930021440U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019930021440U priority Critical patent/KR950012589U/ko
Publication of KR950012589U publication Critical patent/KR950012589U/ko

Links

KR2019930021440U 1993-10-18 1993-10-18 플라즈마 보조 화학 기상 증착 장치 KR950012589U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930021440U KR950012589U (ko) 1993-10-18 1993-10-18 플라즈마 보조 화학 기상 증착 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930021440U KR950012589U (ko) 1993-10-18 1993-10-18 플라즈마 보조 화학 기상 증착 장치

Publications (1)

Publication Number Publication Date
KR950012589U true KR950012589U (ko) 1995-05-17

Family

ID=60670552

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930021440U KR950012589U (ko) 1993-10-18 1993-10-18 플라즈마 보조 화학 기상 증착 장치

Country Status (1)

Country Link
KR (1) KR950012589U (ko)

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Legal Events

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WITN Withdrawal due to no request for examination