KR920007032U - 플라즈마 화학기상 증착장치 - Google Patents

플라즈마 화학기상 증착장치

Info

Publication number
KR920007032U
KR920007032U KR2019900013904U KR900013904U KR920007032U KR 920007032 U KR920007032 U KR 920007032U KR 2019900013904 U KR2019900013904 U KR 2019900013904U KR 900013904 U KR900013904 U KR 900013904U KR 920007032 U KR920007032 U KR 920007032U
Authority
KR
South Korea
Prior art keywords
vapor deposition
chemical vapor
plasma chemical
deposition equipment
equipment
Prior art date
Application number
KR2019900013904U
Other languages
English (en)
Other versions
KR930006278Y1 (ko
Inventor
김강원
Original Assignee
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자 주식회사 filed Critical 삼성전자 주식회사
Priority to KR2019900013904U priority Critical patent/KR930006278Y1/ko
Publication of KR920007032U publication Critical patent/KR920007032U/ko
Application granted granted Critical
Publication of KR930006278Y1 publication Critical patent/KR930006278Y1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45559—Diffusion of reactive gas to substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/3244—Gas supply means
    • H01J37/32449—Gas control, e.g. control of the gas flow
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
KR2019900013904U 1990-09-07 1990-09-07 플라즈마 화학기상 증착장치 KR930006278Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019900013904U KR930006278Y1 (ko) 1990-09-07 1990-09-07 플라즈마 화학기상 증착장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019900013904U KR930006278Y1 (ko) 1990-09-07 1990-09-07 플라즈마 화학기상 증착장치

Publications (2)

Publication Number Publication Date
KR920007032U true KR920007032U (ko) 1992-04-22
KR930006278Y1 KR930006278Y1 (ko) 1993-09-17

Family

ID=19303197

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019900013904U KR930006278Y1 (ko) 1990-09-07 1990-09-07 플라즈마 화학기상 증착장치

Country Status (1)

Country Link
KR (1) KR930006278Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100526007B1 (ko) * 2000-12-28 2005-11-08 엘지.필립스 엘시디 주식회사 플라즈마 에칭장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100526007B1 (ko) * 2000-12-28 2005-11-08 엘지.필립스 엘시디 주식회사 플라즈마 에칭장치

Also Published As

Publication number Publication date
KR930006278Y1 (ko) 1993-09-17

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Legal Events

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E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20040809

Year of fee payment: 12

EXPY Expiration of term