KR940006471U - 기상 증착 장치 - Google Patents

기상 증착 장치

Info

Publication number
KR940006471U
KR940006471U KR2019920016082U KR920016082U KR940006471U KR 940006471 U KR940006471 U KR 940006471U KR 2019920016082 U KR2019920016082 U KR 2019920016082U KR 920016082 U KR920016082 U KR 920016082U KR 940006471 U KR940006471 U KR 940006471U
Authority
KR
South Korea
Prior art keywords
vapor deposition
deposition equipment
equipment
vapor
deposition
Prior art date
Application number
KR2019920016082U
Other languages
English (en)
Other versions
KR950004149Y1 (ko
Inventor
서일웅
김태환
송정동
정기정
Original Assignee
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업 주식회사 filed Critical 현대전자산업 주식회사
Priority to KR92016082U priority Critical patent/KR950004149Y1/ko
Publication of KR940006471U publication Critical patent/KR940006471U/ko
Application granted granted Critical
Publication of KR950004149Y1 publication Critical patent/KR950004149Y1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
KR92016082U 1992-08-26 1992-08-26 기상 증착 장치 KR950004149Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR92016082U KR950004149Y1 (ko) 1992-08-26 1992-08-26 기상 증착 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR92016082U KR950004149Y1 (ko) 1992-08-26 1992-08-26 기상 증착 장치

Publications (2)

Publication Number Publication Date
KR940006471U true KR940006471U (ko) 1994-03-25
KR950004149Y1 KR950004149Y1 (ko) 1995-05-22

Family

ID=19339049

Family Applications (1)

Application Number Title Priority Date Filing Date
KR92016082U KR950004149Y1 (ko) 1992-08-26 1992-08-26 기상 증착 장치

Country Status (1)

Country Link
KR (1) KR950004149Y1 (ko)

Also Published As

Publication number Publication date
KR950004149Y1 (ko) 1995-05-22

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Payment date: 20060502

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