KR950007329U - 웨이퍼 코팅장비의 웨이퍼 후면 세척장치 - Google Patents
웨이퍼 코팅장비의 웨이퍼 후면 세척장치Info
- Publication number
- KR950007329U KR950007329U KR2019930016569U KR930016569U KR950007329U KR 950007329 U KR950007329 U KR 950007329U KR 2019930016569 U KR2019930016569 U KR 2019930016569U KR 930016569 U KR930016569 U KR 930016569U KR 950007329 U KR950007329 U KR 950007329U
- Authority
- KR
- South Korea
- Prior art keywords
- wafer
- cleaning device
- coating equipment
- back cleaning
- wafer back
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930016569U KR200148602Y1 (ko) | 1993-08-25 | 1993-08-25 | 웨이퍼 코팅장비의 웨이퍼 후면 세척장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930016569U KR200148602Y1 (ko) | 1993-08-25 | 1993-08-25 | 웨이퍼 코팅장비의 웨이퍼 후면 세척장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR950007329U true KR950007329U (ko) | 1995-03-21 |
KR200148602Y1 KR200148602Y1 (ko) | 1999-06-15 |
Family
ID=19361933
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019930016569U KR200148602Y1 (ko) | 1993-08-25 | 1993-08-25 | 웨이퍼 코팅장비의 웨이퍼 후면 세척장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR200148602Y1 (ko) |
-
1993
- 1993-08-25 KR KR2019930016569U patent/KR200148602Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR200148602Y1 (ko) | 1999-06-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20050221 Year of fee payment: 7 |
|
LAPS | Lapse due to unpaid annual fee |