KR950002235U - 웨이퍼 냉각 겸용 웨이퍼 이송장치 - Google Patents

웨이퍼 냉각 겸용 웨이퍼 이송장치

Info

Publication number
KR950002235U
KR950002235U KR2019930010309U KR930010309U KR950002235U KR 950002235 U KR950002235 U KR 950002235U KR 2019930010309 U KR2019930010309 U KR 2019930010309U KR 930010309 U KR930010309 U KR 930010309U KR 950002235 U KR950002235 U KR 950002235U
Authority
KR
South Korea
Prior art keywords
wafer
transfer device
cooling
wafer transfer
wafer cooling
Prior art date
Application number
KR2019930010309U
Other languages
English (en)
Other versions
KR970002149Y1 (ko
Inventor
오세정
박종철
Original Assignee
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자산업 주식회사 filed Critical 현대전자산업 주식회사
Priority to KR2019930010309U priority Critical patent/KR970002149Y1/ko
Publication of KR950002235U publication Critical patent/KR950002235U/ko
Application granted granted Critical
Publication of KR970002149Y1 publication Critical patent/KR970002149Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR2019930010309U 1993-06-12 1993-06-12 웨이퍼 냉각 겸용 웨이퍼 이송장치 KR970002149Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930010309U KR970002149Y1 (ko) 1993-06-12 1993-06-12 웨이퍼 냉각 겸용 웨이퍼 이송장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930010309U KR970002149Y1 (ko) 1993-06-12 1993-06-12 웨이퍼 냉각 겸용 웨이퍼 이송장치

Publications (2)

Publication Number Publication Date
KR950002235U true KR950002235U (ko) 1995-01-04
KR970002149Y1 KR970002149Y1 (ko) 1997-03-19

Family

ID=19356986

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930010309U KR970002149Y1 (ko) 1993-06-12 1993-06-12 웨이퍼 냉각 겸용 웨이퍼 이송장치

Country Status (1)

Country Link
KR (1) KR970002149Y1 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010066297A (ko) * 1999-12-31 2001-07-11 황인길 반도체 웨이퍼 냉각/이송 시스템의 웨이퍼 표면 온도 검출장치

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010066297A (ko) * 1999-12-31 2001-07-11 황인길 반도체 웨이퍼 냉각/이송 시스템의 웨이퍼 표면 온도 검출장치

Also Published As

Publication number Publication date
KR970002149Y1 (ko) 1997-03-19

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Payment date: 20080222

Year of fee payment: 12

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