KR950002235U - 웨이퍼 냉각 겸용 웨이퍼 이송장치 - Google Patents
웨이퍼 냉각 겸용 웨이퍼 이송장치Info
- Publication number
- KR950002235U KR950002235U KR2019930010309U KR930010309U KR950002235U KR 950002235 U KR950002235 U KR 950002235U KR 2019930010309 U KR2019930010309 U KR 2019930010309U KR 930010309 U KR930010309 U KR 930010309U KR 950002235 U KR950002235 U KR 950002235U
- Authority
- KR
- South Korea
- Prior art keywords
- wafer
- transfer device
- cooling
- wafer transfer
- wafer cooling
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930010309U KR970002149Y1 (ko) | 1993-06-12 | 1993-06-12 | 웨이퍼 냉각 겸용 웨이퍼 이송장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019930010309U KR970002149Y1 (ko) | 1993-06-12 | 1993-06-12 | 웨이퍼 냉각 겸용 웨이퍼 이송장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR950002235U true KR950002235U (ko) | 1995-01-04 |
KR970002149Y1 KR970002149Y1 (ko) | 1997-03-19 |
Family
ID=19356986
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019930010309U KR970002149Y1 (ko) | 1993-06-12 | 1993-06-12 | 웨이퍼 냉각 겸용 웨이퍼 이송장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970002149Y1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010066297A (ko) * | 1999-12-31 | 2001-07-11 | 황인길 | 반도체 웨이퍼 냉각/이송 시스템의 웨이퍼 표면 온도 검출장치 |
-
1993
- 1993-06-12 KR KR2019930010309U patent/KR970002149Y1/ko not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20010066297A (ko) * | 1999-12-31 | 2001-07-11 | 황인길 | 반도체 웨이퍼 냉각/이송 시스템의 웨이퍼 표면 온도 검출장치 |
Also Published As
Publication number | Publication date |
---|---|
KR970002149Y1 (ko) | 1997-03-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20080222 Year of fee payment: 12 |
|
EXPY | Expiration of term |