KR950021450U - 웨이퍼 이송 장치의 헤드시스템 - Google Patents

웨이퍼 이송 장치의 헤드시스템

Info

Publication number
KR950021450U
KR950021450U KR2019930030455U KR930030455U KR950021450U KR 950021450 U KR950021450 U KR 950021450U KR 2019930030455 U KR2019930030455 U KR 2019930030455U KR 930030455 U KR930030455 U KR 930030455U KR 950021450 U KR950021450 U KR 950021450U
Authority
KR
South Korea
Prior art keywords
transfer device
wafer transfer
head system
device head
wafer
Prior art date
Application number
KR2019930030455U
Other languages
English (en)
Other versions
KR0113529Y1 (ko
Inventor
김용표
김용선
이현석
심우익
Original Assignee
현대전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대전자 주식회사 filed Critical 현대전자 주식회사
Priority to KR2019930030455U priority Critical patent/KR0113529Y1/ko
Publication of KR950021450U publication Critical patent/KR950021450U/ko
Application granted granted Critical
Publication of KR0113529Y1 publication Critical patent/KR0113529Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019930030455U 1993-12-29 1993-12-29 웨이퍼 이송 장치의 헤드시스템 KR0113529Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019930030455U KR0113529Y1 (ko) 1993-12-29 1993-12-29 웨이퍼 이송 장치의 헤드시스템

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019930030455U KR0113529Y1 (ko) 1993-12-29 1993-12-29 웨이퍼 이송 장치의 헤드시스템

Publications (2)

Publication Number Publication Date
KR950021450U true KR950021450U (ko) 1995-07-28
KR0113529Y1 KR0113529Y1 (ko) 1998-04-16

Family

ID=19373463

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019930030455U KR0113529Y1 (ko) 1993-12-29 1993-12-29 웨이퍼 이송 장치의 헤드시스템

Country Status (1)

Country Link
KR (1) KR0113529Y1 (ko)

Also Published As

Publication number Publication date
KR0113529Y1 (ko) 1998-04-16

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