KR940002511B1 - 산화주석 박막 가스 센서 소자 - Google Patents

산화주석 박막 가스 센서 소자 Download PDF

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Publication number
KR940002511B1
KR940002511B1 KR1019860700721A KR860700721A KR940002511B1 KR 940002511 B1 KR940002511 B1 KR 940002511B1 KR 1019860700721 A KR1019860700721 A KR 1019860700721A KR 860700721 A KR860700721 A KR 860700721A KR 940002511 B1 KR940002511 B1 KR 940002511B1
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KR
South Korea
Prior art keywords
plane
gas sensor
tin oxide
thin film
half width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1019860700721A
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English (en)
Korean (ko)
Other versions
KR880700261A (ko
Inventor
다께시 마쓰모또
오사무 오까다
유우지 나까무라
Original Assignee
오오사까 가스 가부시끼가이샤
오오니시 마시후미
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Publication date
Application filed by 오오사까 가스 가부시끼가이샤, 오오니시 마시후미 filed Critical 오오사까 가스 가부시끼가이샤
Publication of KR880700261A publication Critical patent/KR880700261A/ko
Application granted granted Critical
Publication of KR940002511B1 publication Critical patent/KR940002511B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
KR1019860700721A 1985-02-20 1986-02-19 산화주석 박막 가스 센서 소자 Expired - Fee Related KR940002511B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP32228/1985 1985-02-20
JP60032228A JPS61191954A (ja) 1985-02-20 1985-02-20 スズ酸化物薄膜ガスセンサ素子
PCT/JP1986/000077 WO1986004989A1 (fr) 1985-02-20 1986-02-19 Element capteur de gaz compose d'un film d'oxide d'etain

Publications (2)

Publication Number Publication Date
KR880700261A KR880700261A (ko) 1988-02-22
KR940002511B1 true KR940002511B1 (ko) 1994-03-25

Family

ID=12353109

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019860700721A Expired - Fee Related KR940002511B1 (ko) 1985-02-20 1986-02-19 산화주석 박막 가스 센서 소자

Country Status (4)

Country Link
JP (1) JPS61191954A (enExample)
KR (1) KR940002511B1 (enExample)
GB (2) GB2182448B (enExample)
WO (1) WO1986004989A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0643978B2 (ja) * 1986-06-27 1994-06-08 大阪瓦斯株式会社 ガスセンサ及びその製造方法
GB9512929D0 (en) * 1995-06-24 1995-08-30 Sun Electric Uk Ltd Multi-gas sensor systems for automatic emissions measurement
US6134944A (en) * 1999-04-29 2000-10-24 The Regents Of The University Of California System and method for preconcentrating, identifying, and quantifying chemical and biological substances
JP5350593B2 (ja) 2007-01-15 2013-11-27 キャタピラー エス エー アール エル パネルの製造方法
DE102013218840A1 (de) 2013-09-19 2015-03-19 Robert Bosch Gmbh Mikroheizplattenvorrichtung und Sensor mit einer Mikroheizplattenvorrichtung
CN104568002B (zh) * 2014-12-26 2017-05-03 昆山工研院新型平板显示技术中心有限公司 环境检测装置
CN107315034B (zh) 2016-04-26 2021-06-08 新唐科技日本株式会社 气体检测装置以及氢检测方法
CN107315033B (zh) 2016-04-26 2021-08-06 新唐科技日本株式会社 气体检测装置以及氢检测方法
CN106092200A (zh) * 2016-07-08 2016-11-09 南京信息工程大学 一种环境检测装置
WO2018123674A1 (ja) 2016-12-28 2018-07-05 パナソニックＩｐマネジメント株式会社 気体検出装置、気体センサシステム、燃料電池自動車、及び水素検出方法
US11541737B2 (en) 2016-12-28 2023-01-03 Nuvoton Technology Corporation Japan Gas detection device, gas detection system, fuel cell vehicle, and gas detection method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5424094A (en) * 1977-07-26 1979-02-23 Fuji Electric Co Ltd Production of gas detecting element
JPS5811844A (ja) * 1981-07-15 1983-01-22 Matsushita Electric Ind Co Ltd Ｎｏ↓２ガス検知器及び検知方法
JPS5983046A (ja) * 1982-11-02 1984-05-14 Hitachi Ltd ガスセンサおよびその製造方法
JPS5990040A (ja) * 1982-11-15 1984-05-24 Matsushita Electric Ind Co Ltd 一酸化炭素ガス検知器

Also Published As

Publication number Publication date
GB2182448B (en) 1989-01-11
JPS61191954A (ja) 1986-08-26
WO1986004989A1 (fr) 1986-08-28
GB8624904D0 (en) 1986-11-19
JPH053895B2 (enExample) 1993-01-18
GB2182448A (en) 1987-05-13
KR880700261A (ko) 1988-02-22
GB8625006D0 (en) 1986-11-19

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