KR930016559A - 니켈 합금의 질화방법 - Google Patents

니켈 합금의 질화방법 Download PDF

Info

Publication number
KR930016559A
KR930016559A KR1019920004456A KR920004456A KR930016559A KR 930016559 A KR930016559 A KR 930016559A KR 1019920004456 A KR1019920004456 A KR 1019920004456A KR 920004456 A KR920004456 A KR 920004456A KR 930016559 A KR930016559 A KR 930016559A
Authority
KR
South Korea
Prior art keywords
gas
nickel alloy
nitriding
atmosphere
kept
Prior art date
Application number
KR1019920004456A
Other languages
English (en)
Other versions
KR100247657B1 (ko
Inventor
마사아키 다하라
하루오 센보쿠야
겐조 기타노
다다시 하야시다
데루오 미나토
Original Assignee
원본미기재
다이도산소 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 원본미기재, 다이도산소 가부시키가이샤 filed Critical 원본미기재
Publication of KR930016559A publication Critical patent/KR930016559A/ko
Application granted granted Critical
Publication of KR100247657B1 publication Critical patent/KR100247657B1/ko

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/34Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases more than one element being applied in more than one step
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)

Abstract

본 발명은 니켈합금의 표면에 질화층을 형성해서 표면경도등을 향상시키는 질화방법에 관한 것으로, 불소계 가스 분위기하에서 니켈합금을 가열상태로 유지하고나서 이것을 질화분위기하에 두고 가열상태로 유지해서 니켈 합금의 표면에 질화층을 형성하는 것으로 구성되며 니켈합금의 표면에 깊고 균일한 질화층을 형성하는 것에 의해 니켈합금의 표면경도를 높게 한다.

Description

니켈 합금의 질화방법
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 질화처리에 이용하는 로 구성도, 제2도는 다른 로 구성도, 제3도는 질화처리로 이루어진 니켈합금제판(인코넬 600)의 확대 단면도, 제4도는 질화처리로 이루어진 니켈합금판(인코넬 751)의 확대 단면도이다.

Claims (5)

  1. 불소계 가스 분위기하에 있어서 니켈합금을 가열상태에서 유지해서, 계속해 이것을 질화분위기하에 놓고 가열상태로 유지해서 니켈합금의 표면층을 질화층에 형성하는 것을 특징으로 하는 니켈합금의 질화방법.
  2. 제1항에 있어서, 불소계가스 분위기를 만드는 가스가 (a)NF3,BF3,CF4,HF,SF6,C2F6,WF6CHF3및 SiF4로 구성되는 군으로부터 선택된 적어도 1종류의 불소화합물가스, (b)상기 (a)의 불소화합물 가스를 열분해해서 생성한 F2가스, 및 (c) 미리 만들어진 F2가스의 적어도 1종류와 이것을 희석하는 불활성가스로 구성되는 것을 특징으로 하는 니켈합금의 질화방법.
  3. 제1항에 있어서, 불소계 가스 분위기하에 니켈합금을 가열상태로 유지하고 니켈합금을 350-600℃의 범위내에 가열해서 실시하는 것을 특징으로 하는 니켈합금의 질화방법.
  4. 제1항에 있어서, 질화분위기를 만드는 가스가 NH3에서만 이루어지는 단체가스, NH3와 RX가스와의 혼합가스, 또는 상기 단체 가스, 환합가스의 어느 하나에 불활성 가스를 혼합한 불활성 가스혼합 가스 또는 이 불활성 가스 혼합가스에 H2가스를 혼합한 혼합가스인 것을 특징으로 하는 니켈합금의 질화방법.
  5. 제1항에 있어서, 질화분위기하에 니켈합금을 가열상태로 유지하고 니켈 합금을 500-700℃의 범위내에 가열해서 실시하는 것을 특징으로 하는 니켈합금의 질화방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019920004456A 1992-01-14 1992-03-17 니켈합금의 질화방법 KR100247657B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP4024763A JP2501062B2 (ja) 1992-01-14 1992-01-14 ニッケル合金の窒化方法
JP92-024763 1992-01-14

Publications (2)

Publication Number Publication Date
KR930016559A true KR930016559A (ko) 1993-08-26
KR100247657B1 KR100247657B1 (ko) 2000-04-01

Family

ID=12147193

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019920004456A KR100247657B1 (ko) 1992-01-14 1992-03-17 니켈합금의 질화방법

Country Status (6)

Country Link
EP (1) EP0551702B1 (ko)
JP (1) JP2501062B2 (ko)
KR (1) KR100247657B1 (ko)
CN (1) CN1032264C (ko)
DE (1) DE69225880T2 (ko)
TW (1) TW198070B (ko)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5445683A (en) * 1992-05-13 1995-08-29 Daidousanso Co., Ltd. Nickel alloy products with their surfaces nitrided and hardened
US5447181A (en) * 1993-12-07 1995-09-05 Daido Hoxan Inc. Loom guide bar blade with its surface nitrided for hardening
JP2881111B2 (ja) * 1994-06-17 1999-04-12 大同ほくさん株式会社 鋼の窒化方法
DE4429943C1 (de) * 1994-08-24 1996-02-22 Dornier Gmbh Lindauer Verfahren zur Standzeiterhöhung von Webblattlamellen
SE511082C2 (sv) * 1996-12-20 1999-08-02 Btg Eclepens Sa Beläggningsblad
US6165597A (en) * 1998-08-12 2000-12-26 Swagelok Company Selective case hardening processes at low temperature
US6093303A (en) 1998-08-12 2000-07-25 Swagelok Company Low temperature case hardening processes
US6547888B1 (en) 2000-01-28 2003-04-15 Swagelok Company Modified low temperature case hardening processes
JP4947932B2 (ja) * 2005-07-26 2012-06-06 エア・ウォーターNv株式会社 金属のガス窒化方法
JP4881049B2 (ja) * 2006-04-11 2012-02-22 新日本製鐵株式会社 電気メッキ用コンダクターロール
JP2009197254A (ja) * 2008-02-19 2009-09-03 Osaka Industrial Promotion Organization Ni基2重複相金属間化合物合金の表面処理方法,および,表面処理したNi基2重複相金属間化合物合金
JP2010070844A (ja) * 2009-02-24 2010-04-02 Air Water Inc 熱処理炉の使用方法および熱処理方法ならびに熱処理炉
US8377234B2 (en) 2010-04-26 2013-02-19 King Fahd University Of Petroleum And Minerals Method of nitriding nickel-chromium-based superalloys
CN102330062B (zh) * 2011-10-18 2013-01-02 沈阳大学 一种氮化钛/镍纳米多层薄膜的制备方法
CN102943231B (zh) * 2012-10-30 2015-07-08 江苏大学 铝及铝合金表面三段气体氮化方法
CN103074574A (zh) * 2012-12-14 2013-05-01 四川大学 一种Ni基合金工件低温盐浴氮化工艺
DE102013218303A1 (de) * 2013-09-12 2015-03-12 Bosch Mahle Turbo Systems Gmbh & Co. Kg Abgasturbolader mit Turbine
CN106884134B (zh) * 2015-12-16 2020-07-03 中国科学院上海应用物理研究所 一种镍基合金的表面钝化处理方法
CN105944746B (zh) * 2016-05-18 2018-09-14 中国科学院理化技术研究所 一种碳负载氮化镍催化剂及其制备方法和应用

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3129124A (en) * 1959-12-30 1964-04-14 Gen Electric Process for producing interlaminar insulation for electrical apparatus
DE68918365T2 (de) * 1988-07-20 1995-05-04 Hashimoto Chemical Ind Co Metallischer Werkstoff mit durch Fluorierung passiviertem Film und aus dem metallischen Werkstoff bestehende Anlage.
EP0408168B1 (en) * 1989-07-10 1994-06-08 Daidousanso Co., Ltd. Method of pretreating metallic works and method of nitriding steel

Also Published As

Publication number Publication date
JPH05195193A (ja) 1993-08-03
EP0551702A1 (en) 1993-07-21
EP0551702B1 (en) 1998-06-10
DE69225880D1 (de) 1998-07-16
TW198070B (ko) 1993-01-11
CN1032264C (zh) 1996-07-10
JP2501062B2 (ja) 1996-05-29
DE69225880T2 (de) 1998-12-17
KR100247657B1 (ko) 2000-04-01
CN1074489A (zh) 1993-07-21

Similar Documents

Publication Publication Date Title
KR930016559A (ko) 니켈 합금의 질화방법
KR870007298A (ko) 탄소 박막의 제조방법
DE60228695D1 (de) Verfahren zur herstellung von einer oxydschicht au einer wasserstoff umgebung
HUP0202746A2 (en) Organometal catalyst compositions
KR940006197A (ko) 반도체장치의 콘택부 형성방법
JPS5458636A (en) Ion nitriding method
KR960009043A (ko) 질화 규소의 에칭 방법
EP1367071A4 (en) FLUORINE-CONTAINING COMPOUNDS AND POLYMERS AND METHODS OF PRODUCING THE SAME
JPS6473348A (en) Stripping solution for resist
BR0204223A (pt) Processo de cementação em baixa pressão
Aikawa Hydrodynamic pulsation models of yellow supergiant stars in the post-asymptotic giant branch
WO2002007194A8 (en) Cleaning gas for semiconductor production equipment
JPS6415928A (en) Dry etching method
CA2441276A1 (en) Steel material and method for preparation thereof
KR920010013A (ko) 도금방법
ES2067506T3 (es) Procedimiento para producir clorofluorobencenos.
HUP0104205A2 (hu) Eljárás expandálható polivinilarén részecskék előállítására
JPS546882A (en) Fluorinated hydrocarbon composition
KR910010667A (ko) 접속형성방법
KR970018232A (ko) 반도체소자의 텅스텐막 형성방법
JPS55115965A (en) Glow discharge nitriding method of special purpose steel by extra low nitrogen mixed gas
KR970052828A (ko) Sf_6 개스를 사용한 저유전율 박막 제조방법
KR910013484A (ko) 비반응성 가스를 이용한 실리콘 산화막 형성방법
MY111384A (en) Oxide-coated cathode for crt and manufacturing method thereof.
KR960008516B1 (en) Forming method of bpsg film

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
N231 Notification of change of applicant
GRNT Written decision to grant
G170 Publication of correction
FPAY Annual fee payment

Payment date: 20091210

Year of fee payment: 11

LAPS Lapse due to unpaid annual fee