KR930015109A - Manufacturing method of multilayer capacitor for high integration - Google Patents
Manufacturing method of multilayer capacitor for high integration Download PDFInfo
- Publication number
- KR930015109A KR930015109A KR1019910023904A KR910023904A KR930015109A KR 930015109 A KR930015109 A KR 930015109A KR 1019910023904 A KR1019910023904 A KR 1019910023904A KR 910023904 A KR910023904 A KR 910023904A KR 930015109 A KR930015109 A KR 930015109A
- Authority
- KR
- South Korea
- Prior art keywords
- multilayer capacitor
- high integration
- manufacturing
- followed
- deposition
- Prior art date
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- Semiconductor Integrated Circuits (AREA)
Abstract
본 발명은 MMIC의 고집적화를 위한 적층형 커패시터는 GaAs 기판상에 RIE 기법으로 트렌치를 형성한후 1차 금속을 스파터링 증착하고 이어서 유전층을 PRCVD 기법으로 증착하고 이어서 2차 금속을 증착하여 제조한다.In the present invention, a multilayer capacitor for high integration of a MMIC is fabricated by forming a trench on a GaAs substrate by RIE, followed by spatter deposition of a primary metal, followed by deposition of a dielectric layer by PRCVD, followed by deposition of a secondary metal.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제4도의 (A)-(C)는 본 발명의 적층형 커패시터의 제조방법 설명도.(A)-(C) of FIG. 4 is a figure explaining the manufacturing method of the multilayer capacitor of this invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019910023904A KR930015109A (en) | 1991-12-23 | 1991-12-23 | Manufacturing method of multilayer capacitor for high integration |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019910023904A KR930015109A (en) | 1991-12-23 | 1991-12-23 | Manufacturing method of multilayer capacitor for high integration |
Publications (1)
Publication Number | Publication Date |
---|---|
KR930015109A true KR930015109A (en) | 1993-07-23 |
Family
ID=67356813
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019910023904A KR930015109A (en) | 1991-12-23 | 1991-12-23 | Manufacturing method of multilayer capacitor for high integration |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR930015109A (en) |
-
1991
- 1991-12-23 KR KR1019910023904A patent/KR930015109A/en not_active Application Discontinuation
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E601 | Decision to refuse application |