KR920013691U - 실리콘 웨이퍼의 급속 세정장치 - Google Patents

실리콘 웨이퍼의 급속 세정장치

Info

Publication number
KR920013691U
KR920013691U KR2019900019472U KR900019472U KR920013691U KR 920013691 U KR920013691 U KR 920013691U KR 2019900019472 U KR2019900019472 U KR 2019900019472U KR 900019472 U KR900019472 U KR 900019472U KR 920013691 U KR920013691 U KR 920013691U
Authority
KR
South Korea
Prior art keywords
cleaning device
silicon wafers
rapid cleaning
rapid
wafers
Prior art date
Application number
KR2019900019472U
Other languages
English (en)
Other versions
KR930003612Y1 (ko
Inventor
백덕기
Original Assignee
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 금성일렉트론 주식회사 filed Critical 금성일렉트론 주식회사
Priority to KR2019900019472U priority Critical patent/KR930003612Y1/ko
Publication of KR920013691U publication Critical patent/KR920013691U/ko
Application granted granted Critical
Publication of KR930003612Y1 publication Critical patent/KR930003612Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR2019900019472U 1990-12-11 1990-12-11 실리콘 웨이퍼의 급속 세정장치 KR930003612Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019900019472U KR930003612Y1 (ko) 1990-12-11 1990-12-11 실리콘 웨이퍼의 급속 세정장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019900019472U KR930003612Y1 (ko) 1990-12-11 1990-12-11 실리콘 웨이퍼의 급속 세정장치

Publications (2)

Publication Number Publication Date
KR920013691U true KR920013691U (ko) 1992-07-27
KR930003612Y1 KR930003612Y1 (ko) 1993-06-19

Family

ID=19306732

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019900019472U KR930003612Y1 (ko) 1990-12-11 1990-12-11 실리콘 웨이퍼의 급속 세정장치

Country Status (1)

Country Link
KR (1) KR930003612Y1 (ko)

Also Published As

Publication number Publication date
KR930003612Y1 (ko) 1993-06-19

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