KR900009222A - 미소 구동장치 - Google Patents

미소 구동장치 Download PDF

Info

Publication number
KR900009222A
KR900009222A KR1019890014502A KR890014502A KR900009222A KR 900009222 A KR900009222 A KR 900009222A KR 1019890014502 A KR1019890014502 A KR 1019890014502A KR 890014502 A KR890014502 A KR 890014502A KR 900009222 A KR900009222 A KR 900009222A
Authority
KR
South Korea
Prior art keywords
micro
support
arm
manifold
manipulation
Prior art date
Application number
KR1019890014502A
Other languages
English (en)
Other versions
KR970010616B1 (ko
Inventor
도시로오 히꾸찌
겐이찌 구도
아쓰시 미마쓰
Original Assignee
고스가 우사지
푸리마 하무 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP63333739A external-priority patent/JPH0643040B2/ja
Priority claimed from JP1087287A external-priority patent/JPH0773830B2/ja
Application filed by 고스가 우사지, 푸리마 하무 가부시끼가이샤 filed Critical 고스가 우사지
Publication of KR900009222A publication Critical patent/KR900009222A/ko
Application granted granted Critical
Publication of KR970010616B1 publication Critical patent/KR970010616B1/ko

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025Inertial sliding motors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22Feeding members carrying tools or work
    • B23Q5/34Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • B23Q5/50Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding step-by-step
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J7/00Micromanipulators
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003Alignment of optical elements
    • G02B7/005Motorised alignment
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/101Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Robotics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manipulator (AREA)
  • Micromachines (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

내용 없음.

Description

미소 구동장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제5도는 본 발명의 제1실시예를 나타내는 마이클로 매니플레이터(Micromanipulator)의 사시도이다.
제6도는 본 발명의 제2실시예를 나타내는 마이크로 매니플레이터의 평면도이다.
제7도는 제6도의 A-A선 단면도이다.

Claims (10)

  1. (a)고정된 지지체와, (b)상기 지지체와 마찰면을 통하여 이동 가능하게 지지된 이동체와, (c)상기의 이동체에 고정된 매니풀레이션(manipulation)용 미소(micro)기구와, (d)상기한 이동체에 붙여진, 충격력을 이용하는 미소 구동력 발생체를 포함하는 마이크로매니플레이터(micromanipulator).
  2. 제1항에 있어서, 미소 구동력발생체를 지지체내에 내장시켜 이루어지는 마이클로매니플레이터.
  3. 제1항에 있어서, 개구형의 지지체를 사용하여, 이동체를 지지시켜 이루어지는 마이클로 매니플레이터.
  4. (a)매니플레이션 목적물과 매니플레이션용 미소 기구와의 위치 결정장치의 작업 선단부에 붙여진 지지체와 (b)상기 지지체와 마찰면을 통하여 이동 가능하게 지지된 이동체와, (c)상기의 이동체에 고정된 매니플레이션용 미소기구와, (d)상기한 이동체에 붙여진, 충격력을 이용하는 미소구동력 발생체를 포함하는 마이클로 매니플레이터.
  5. 제4항에 있어서, 매니플레이션 목적물과 매니플레이션용 미소 기구와의 위치 결정 장치에, 충격력을 이용하는 미소 구동력 발생체를 붙여서 이루어지는 마이크로 매니플레이터.
  6. (a)지지체와, (b)상기 지지체의 마찰면에 의하여 자유방향으로의 경사가 가능하도록 한 지점에서 지지된 암과, (c)상기의 암에 붙여진 충격력을 이용하는 이소 구동력 발생체와, (d)상기한 암의 동작으로 운동하는 매니플레이션용 미소 기구를 포함하는 마이크로 매니플레이터.
  7. (a)지지체와, (b)상기 지지체의 마찰면에 의하여 자유방향으로의 경사가 가능하도록 한 지점에서 지지된 암과, (c)상기의 암에 붙여진 충격력을 이용하는 미소 구동력 발생제로 이루어지는 마이크로 매니플레이터의 관절장치.
  8. 제7항에 있어서, 미소 구동력 발생체의 구동방향을 암의 중심축에 대하여 편심키고, 또한, 상기한 미소 구동력발생체를 2개이상 붙여서 이루어지는 마이크로 매니플레이터의 관절장치.
  9. 제7항에 있어서, 암을 그 중심축을 중심으로 하여 회전이 자유자재하게 지지하고, 비틀림 각도의 제어가 자유자재하게 구성시켜 이루어지는 마이크로 매니플레이터의 관절장치.
  10. (a)지지체의 마찰면에 의하여 자유방향으로의 경사가 가능하도록 한 지점에서 지지된 암과, (b)상기의 암에 붙여진 충격력을 이용하는 미소 구동력 발생체로 이루어지는 마이크로 매니플레이터의 관절장치와, (c)상징의 관절장치를 복수개 연달아 설치하여 다관절 구조로 하여 이루어지는 마이크로 매니플레이터.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019890014502A 1988-12-28 1989-10-10 미소 조작용 마이크로 매니퓰레이터 KR970010616B1 (ko)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP63-333739 1988-12-28
JP63333739A JPH0643040B2 (ja) 1988-12-28 1988-12-28 関節装置
JP88-333739 1988-12-28
JP1087287A JPH0773830B2 (ja) 1989-04-06 1989-04-06 マイクロマニピュレータ
JP1-087287 1989-04-06
JP89-087287 1989-04-06

Publications (2)

Publication Number Publication Date
KR900009222A true KR900009222A (ko) 1990-07-02
KR970010616B1 KR970010616B1 (ko) 1997-06-28

Family

ID=26428574

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019890014502A KR970010616B1 (ko) 1988-12-28 1989-10-10 미소 조작용 마이크로 매니퓰레이터

Country Status (12)

Country Link
US (1) US5229679A (ko)
KR (1) KR970010616B1 (ko)
AU (1) AU624660B2 (ko)
CA (1) CA2005028C (ko)
DE (1) DE3933296C2 (ko)
DK (1) DK664989A (ko)
FR (1) FR2640903B1 (ko)
GB (1) GB2227603B (ko)
IT (2) IT1236229B (ko)
NZ (1) NZ231672A (ko)
RU (1) RU1823806C (ko)
SE (1) SE509017C2 (ko)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0648975B2 (ja) * 1989-10-02 1994-06-29 俊郎 樋口 微小インジェクション装置及びそのインジェクション制御方法
US5839306A (en) * 1993-05-12 1998-11-24 Nunuparov; Martyn Sergeevich Electronic lock "chiplock"
US6521187B1 (en) 1996-05-31 2003-02-18 Packard Instrument Company Dispensing liquid drops onto porous brittle substrates
US6203759B1 (en) 1996-05-31 2001-03-20 Packard Instrument Company Microvolume liquid handling system
US6537817B1 (en) 1993-05-31 2003-03-25 Packard Instrument Company Piezoelectric-drop-on-demand technology
US5710657A (en) * 1994-02-23 1998-01-20 Aura Systems, Inc. Monomorph thin film actuated mirror array
US5629577A (en) * 1994-07-15 1997-05-13 Micro Medical Devices Miniature linear motion actuator
DE19501711C1 (de) * 1995-01-20 1996-04-25 Fraunhofer Ges Forschung Präzisionsjustiereinrichtung insbesondere für die Mikrooptik und Mikromechanik und Verfahren zur Präzisionsjustierung
US5668432A (en) * 1995-03-24 1997-09-16 Nippondenso Co., Ltd. Articulation device
DE19542452A1 (de) * 1995-11-14 1996-08-08 Wilhelm Koenig Translations - Rotations - Modul mit Multi-Piezo-Antrieb
US5808435A (en) * 1996-05-28 1998-09-15 Kmy Instruments Micropositioning device for disk head testing system
US6083762A (en) * 1996-05-31 2000-07-04 Packard Instruments Company Microvolume liquid handling system
DE19644550C1 (de) * 1996-10-26 1998-06-10 Artur Dr Zrenner Piezoelektrischer oder elektrostriktiver Trägheitsantrieb zum Verschieben oder Positionieren von insbesondere schweren Objekten
DE19806127B4 (de) * 1998-02-14 2005-06-30 Artur Dr. Zrenner Verfahren zur elektrischen Ansteuerung von piezoelektrischen oder elektrostriktiven Aktuatoren in Antrieben für eine schrittweise Bewegung
US7304486B2 (en) * 1998-07-08 2007-12-04 Capres A/S Nano-drive for high resolution positioning and for positioning of a multi-point probe
DE19847995A1 (de) * 1998-10-17 2000-04-20 Zeiss Carl Jena Gmbh Anordnung zum Positionieren eines Objektes
DE19847996A1 (de) * 1998-10-17 2000-04-20 Zeiss Carl Jena Gmbh Anordnung zum Positionieren eines Objektes
US6084371A (en) * 1999-02-19 2000-07-04 Lockheed Martin Energy Research Corporation Apparatus and methods for a human de-amplifier system
US6251658B1 (en) 1999-06-18 2001-06-26 Burleigh Instruments, Inc Inertial impact drill for cytological applications
DE19932032C2 (de) * 1999-07-09 2003-07-24 Eppendorf Ag Vorrichtung zur Mikro-Dissektion von Gewebe
US6661575B1 (en) 2000-10-31 2003-12-09 Sergey A. Yakovenko Methods and apparata for micromanipulation of micro-and nanoparticles
SE520097C2 (sv) * 2000-12-05 2003-05-27 Nanofactory Instruments Ab Mikropositioneringsanordning
US6848328B2 (en) * 2001-03-09 2005-02-01 Klocke Nanotechnik Positioning unit and positioning apparatus with at least two positioning units
DE60229980D1 (de) * 2001-12-07 2009-01-02 Chip Man Technology Oy Mikromanipulator mit piezoelektrischen biegevorrichtungen
US7334443B2 (en) * 2002-02-22 2008-02-26 Master Lock Company Llc Radio frequency electronic lock
US6924653B2 (en) * 2002-08-26 2005-08-02 Micron Technology, Inc. Selectively configurable microelectronic probes
CN1292877C (zh) * 2004-11-15 2007-01-03 北京工业大学 一种实现微切剖作业的微操作器装置
DE102005026708B4 (de) * 2005-06-09 2007-05-03 Attocube Systems Ag Positionierer mit Festkörpergelenk
JP4652906B2 (ja) * 2005-06-30 2011-03-16 富士夫 宮脇 振動型マイクロインジェクション装置
US20070176514A1 (en) * 2006-01-27 2007-08-02 Taiwan Advanced Materials Technologies Corp. Electromechanical actuator structure
US8059346B2 (en) 2007-03-19 2011-11-15 New Scale Technologies Linear drive systems and methods thereof
EP2496388B1 (en) 2009-11-06 2022-01-05 Sensapex Oy Compact micromanipulator
EP2338972B1 (en) 2009-12-23 2018-05-16 Eppendorf Ag Apparatus and method for generating a tool motion
CN104362890B (zh) * 2014-12-01 2017-01-18 苏州大学 一种实现双向运动的惯性粘滑式跨尺度精密运动平台
DE102018129620B3 (de) * 2018-11-23 2020-03-12 Micromotion Gmbh Mikropositioniersystem

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3779400A (en) * 1972-02-14 1973-12-18 Univ Iowa State Res Found Inc Micromanipulator system
US3813022A (en) * 1972-06-19 1974-05-28 Automated Equipment Corp Wire bonder apparatus
US3808488A (en) * 1972-07-14 1974-04-30 Dynamics Corp Massa Div Means for making precision microadjustments in the position of a movable element
AT351834B (de) * 1973-04-06 1979-08-10 Lkb Produkter Ab Vorrichtung fuer die lageaenderung eines werkstueckes
US3835338A (en) * 1973-08-23 1974-09-10 A Martin Electrically controlled ultra-micromanipulator
DE7924781U1 (de) * 1979-08-31 1979-11-22 Borchers, Ernst, 8022 Gruenwald Stufen-mikromanipulator
DE3210466A1 (de) * 1982-03-22 1983-09-29 Peter Dipl.-Kfm. Dr. 6230 Frankfurt Gschaider Verfahren und vorrichtung zur durchfuehrung von handhabungsprozessen
US4484854A (en) * 1982-08-16 1984-11-27 Anorad Corporation Robotic height sensor in laterally compliant probe
JPS60148389A (ja) * 1984-01-11 1985-08-05 Matsushita Electric Works Ltd 圧電体を用いる駆動装置
DE3516324A1 (de) * 1985-05-07 1986-11-13 Vdo Adolf Schindling Ag, 6000 Frankfurt Linearmotor
JPS62160778A (ja) * 1986-01-10 1987-07-16 Fuji Electric Co Ltd 圧電アクチユエ−タの組立方法
JPS62217878A (ja) * 1986-03-18 1987-09-25 Sanritsu Kikaku Kk 圧電アクチユエ−タ
JPS63299785A (ja) * 1987-05-29 1988-12-07 Res Dev Corp Of Japan 圧電・電歪素子を用いた衝撃力による微小移動装置

Also Published As

Publication number Publication date
RU1823806C (ru) 1993-06-23
DK664989D0 (da) 1989-12-22
AU4603089A (en) 1990-07-05
FR2640903A1 (ko) 1990-06-29
DK664989A (da) 1990-06-29
GB8928754D0 (en) 1990-02-28
DE3933296C2 (de) 1994-06-01
GB2227603A (en) 1990-08-01
CA2005028C (en) 1994-07-12
IT1236229B (it) 1993-01-25
GB2227603B (en) 1993-01-27
SE509017C2 (sv) 1998-11-23
FR2640903B1 (ko) 1996-05-03
AU624660B2 (en) 1992-06-18
DE3933296A1 (de) 1990-07-05
IT8909590A0 (it) 1989-12-22
US5229679A (en) 1993-07-20
SE8904266L (sv) 1990-06-29
KR970010616B1 (ko) 1997-06-28
CA2005028A1 (en) 1990-06-28
NZ231672A (en) 1992-04-28
SE8904266D0 (sv) 1989-12-19

Similar Documents

Publication Publication Date Title
KR900009222A (ko) 미소 구동장치
KR100451412B1 (ko) 다지 로봇 핸드
US11148300B2 (en) Robotic gripping device
KR970706940A (ko) 전기기계 위치결정기(electromechanical positioning unit)
ATE28030T1 (de) Einrichtung zum erteilen einer kontinuierlichen passiven bewegung an menschlichen gelenken.
DE3669278D1 (de) Roboter.
KR960033650A (ko) 다축 구동 장치
EP0347846A3 (en) Actuator
JPH1190867A (ja) マイクロマニピュレータ
WO1998019347A3 (de) Piezoelektrischer oder elektrostriktiver trägheitsantrieb zum verschieben oder positionieren von insbesondere schweren objekten
KR850007037A (ko) 폐쇄루프 카운터 바란스(counter balance)를 가진 매니퓨레이터(manipulator)
KR890011632A (ko) 진동 발생장치
ATE67745T1 (de) Positioniereinheit fuer den greifkopf eines palettierers oder dgl. positioniervorrichtung.
KR900700974A (ko) 디스플레이의 이동표지마크를 제어하는 장치
KR840000340A (ko) 공업용 로보트
SU1713065A1 (ru) Устройство дл прецизионного перемещени изделий
SU580810A3 (ru) Инструмент дл механической раздачи труб
IT8909590A1 (it) Dispositivo di microcomando
SU1450950A1 (ru) Зажимное приспособление
SU1572802A1 (ru) Манипул тор
KR940016685A (ko) 힌지/힌지바를 이용한 3축 운동의 단판 (monolithi) 정밀 구동장치.
ES2000096A4 (es) Dispositivo para fabricar piezas moldeadas prensadas o similares
TOYAMA et al. Development of an actuator for a robotic manipulator with ultrasonic motor (1st report Development of a stator)
RU2172239C2 (ru) Пьезоэлектрический манипулятор
SU867645A1 (ru) Микроманипул тор

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
G160 Decision to publish patent application
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
FPAY Annual fee payment

Payment date: 20110414

Year of fee payment: 15

EXPY Expiration of term