KR900009222A - 미소 구동장치 - Google Patents

미소 구동장치 Download PDF

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Publication number
KR900009222A
KR900009222A KR1019890014502A KR890014502A KR900009222A KR 900009222 A KR900009222 A KR 900009222A KR 1019890014502 A KR1019890014502 A KR 1019890014502A KR 890014502 A KR890014502 A KR 890014502A KR 900009222 A KR900009222 A KR 900009222A
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KR
South Korea
Prior art keywords
micro
support
arm
manifold
manipulation
Prior art date
Application number
KR1019890014502A
Other languages
English (en)
Other versions
KR970010616B1 (ko
Inventor
도시로오 히꾸찌
겐이찌 구도
아쓰시 미마쓰
Original Assignee
고스가 우사지
푸리마 하무 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP63333739A external-priority patent/JPH0643040B2/ja
Priority claimed from JP1087287A external-priority patent/JPH0773830B2/ja
Application filed by 고스가 우사지, 푸리마 하무 가부시끼가이샤 filed Critical 고스가 우사지
Publication of KR900009222A publication Critical patent/KR900009222A/ko
Application granted granted Critical
Publication of KR970010616B1 publication Critical patent/KR970010616B1/ko

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025—Inertial sliding motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22—Feeding members carrying tools or work
    • B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
    • B23Q5/50—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding step-by-step
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J7/00—Micromanipulators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G02B7/005—Motorised alignment
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/101—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Robotics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manipulator (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Micromachines (AREA)

Abstract

내용 없음.

Description

미소 구동장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제5도는 본 발명의 제1실시예를 나타내는 마이클로 매니플레이터(Micromanipulator)의 사시도이다.
제6도는 본 발명의 제2실시예를 나타내는 마이크로 매니플레이터의 평면도이다.
제7도는 제6도의 A-A선 단면도이다.

Claims (10)

  1. (a)고정된 지지체와, (b)상기 지지체와 마찰면을 통하여 이동 가능하게 지지된 이동체와, (c)상기의 이동체에 고정된 매니풀레이션(manipulation)용 미소(micro)기구와, (d)상기한 이동체에 붙여진, 충격력을 이용하는 미소 구동력 발생체를 포함하는 마이크로매니플레이터(micromanipulator).
  2. 제1항에 있어서, 미소 구동력발생체를 지지체내에 내장시켜 이루어지는 마이클로매니플레이터.
  3. 제1항에 있어서, 개구형의 지지체를 사용하여, 이동체를 지지시켜 이루어지는 마이클로 매니플레이터.
  4. (a)매니플레이션 목적물과 매니플레이션용 미소 기구와의 위치 결정장치의 작업 선단부에 붙여진 지지체와 (b)상기 지지체와 마찰면을 통하여 이동 가능하게 지지된 이동체와, (c)상기의 이동체에 고정된 매니플레이션용 미소기구와, (d)상기한 이동체에 붙여진, 충격력을 이용하는 미소구동력 발생체를 포함하는 마이클로 매니플레이터.
  5. 제4항에 있어서, 매니플레이션 목적물과 매니플레이션용 미소 기구와의 위치 결정 장치에, 충격력을 이용하는 미소 구동력 발생체를 붙여서 이루어지는 마이크로 매니플레이터.
  6. (a)지지체와, (b)상기 지지체의 마찰면에 의하여 자유방향으로의 경사가 가능하도록 한 지점에서 지지된 암과, (c)상기의 암에 붙여진 충격력을 이용하는 이소 구동력 발생체와, (d)상기한 암의 동작으로 운동하는 매니플레이션용 미소 기구를 포함하는 마이크로 매니플레이터.
  7. (a)지지체와, (b)상기 지지체의 마찰면에 의하여 자유방향으로의 경사가 가능하도록 한 지점에서 지지된 암과, (c)상기의 암에 붙여진 충격력을 이용하는 미소 구동력 발생제로 이루어지는 마이크로 매니플레이터의 관절장치.
  8. 제7항에 있어서, 미소 구동력 발생체의 구동방향을 암의 중심축에 대하여 편심키고, 또한, 상기한 미소 구동력발생체를 2개이상 붙여서 이루어지는 마이크로 매니플레이터의 관절장치.
  9. 제7항에 있어서, 암을 그 중심축을 중심으로 하여 회전이 자유자재하게 지지하고, 비틀림 각도의 제어가 자유자재하게 구성시켜 이루어지는 마이크로 매니플레이터의 관절장치.
  10. (a)지지체의 마찰면에 의하여 자유방향으로의 경사가 가능하도록 한 지점에서 지지된 암과, (b)상기의 암에 붙여진 충격력을 이용하는 미소 구동력 발생체로 이루어지는 마이크로 매니플레이터의 관절장치와, (c)상징의 관절장치를 복수개 연달아 설치하여 다관절 구조로 하여 이루어지는 마이크로 매니플레이터.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019890014502A 1988-12-28 1989-10-10 미소 조작용 마이크로 매니퓰레이터 KR970010616B1 (ko)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP63333739A JPH0643040B2 (ja) 1988-12-28 1988-12-28 関節装置
JP63-333739 1988-12-28
JP88-333739 1988-12-28
JP89-087287 1989-04-06
JP1-087287 1989-04-06
JP1087287A JPH0773830B2 (ja) 1989-04-06 1989-04-06 マイクロマニピュレータ

Publications (2)

Publication Number Publication Date
KR900009222A true KR900009222A (ko) 1990-07-02
KR970010616B1 KR970010616B1 (ko) 1997-06-28

Family

ID=26428574

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019890014502A KR970010616B1 (ko) 1988-12-28 1989-10-10 미소 조작용 마이크로 매니퓰레이터

Country Status (12)

Country Link
US (1) US5229679A (ko)
KR (1) KR970010616B1 (ko)
AU (1) AU624660B2 (ko)
CA (1) CA2005028C (ko)
DE (1) DE3933296C2 (ko)
DK (1) DK664989A (ko)
FR (1) FR2640903B1 (ko)
GB (1) GB2227603B (ko)
IT (2) IT1236229B (ko)
NZ (1) NZ231672A (ko)
RU (1) RU1823806C (ko)
SE (1) SE509017C2 (ko)

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Also Published As

Publication number Publication date
FR2640903A1 (ko) 1990-06-29
DE3933296A1 (de) 1990-07-05
GB8928754D0 (en) 1990-02-28
CA2005028C (en) 1994-07-12
FR2640903B1 (ko) 1996-05-03
US5229679A (en) 1993-07-20
SE8904266L (sv) 1990-06-29
DK664989D0 (da) 1989-12-22
KR970010616B1 (ko) 1997-06-28
SE509017C2 (sv) 1998-11-23
SE8904266D0 (sv) 1989-12-19
AU4603089A (en) 1990-07-05
DK664989A (da) 1990-06-29
IT8909590A0 (it) 1989-12-22
AU624660B2 (en) 1992-06-18
CA2005028A1 (en) 1990-06-28
IT1236229B (it) 1993-01-25
RU1823806C (ru) 1993-06-23
GB2227603A (en) 1990-08-01
DE3933296C2 (de) 1994-06-01
GB2227603B (en) 1993-01-27
NZ231672A (en) 1992-04-28

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