DK664989A - Mikrodrivapparat - Google Patents
Mikrodrivapparat Download PDFInfo
- Publication number
- DK664989A DK664989A DK664989A DK664989A DK664989A DK 664989 A DK664989 A DK 664989A DK 664989 A DK664989 A DK 664989A DK 664989 A DK664989 A DK 664989A DK 664989 A DK664989 A DK 664989A
- Authority
- DK
- Denmark
- Prior art keywords
- microdriver
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/025—Inertial sliding motors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
- B23Q5/50—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding step-by-step
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J7/00—Micromanipulators
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/003—Alignment of optical elements
- G02B7/005—Motorised alignment
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
- H02N2/101—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Robotics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Manipulator (AREA)
- Micromachines (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63333739A JPH0643040B2 (ja) | 1988-12-28 | 1988-12-28 | 関節装置 |
JP1087287A JPH0773830B2 (ja) | 1989-04-06 | 1989-04-06 | マイクロマニピュレータ |
Publications (2)
Publication Number | Publication Date |
---|---|
DK664989D0 DK664989D0 (da) | 1989-12-22 |
DK664989A true DK664989A (da) | 1990-06-29 |
Family
ID=26428574
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DK664989A DK664989A (da) | 1988-12-28 | 1989-12-22 | Mikrodrivapparat |
Country Status (12)
Country | Link |
---|---|
US (1) | US5229679A (ko) |
KR (1) | KR970010616B1 (ko) |
AU (1) | AU624660B2 (ko) |
CA (1) | CA2005028C (ko) |
DE (1) | DE3933296C2 (ko) |
DK (1) | DK664989A (ko) |
FR (1) | FR2640903B1 (ko) |
GB (1) | GB2227603B (ko) |
IT (2) | IT1236229B (ko) |
NZ (1) | NZ231672A (ko) |
RU (1) | RU1823806C (ko) |
SE (1) | SE509017C2 (ko) |
Families Citing this family (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0648975B2 (ja) * | 1989-10-02 | 1994-06-29 | 俊郎 樋口 | 微小インジェクション装置及びそのインジェクション制御方法 |
US5839306A (en) * | 1993-05-12 | 1998-11-24 | Nunuparov; Martyn Sergeevich | Electronic lock "chiplock" |
US6521187B1 (en) | 1996-05-31 | 2003-02-18 | Packard Instrument Company | Dispensing liquid drops onto porous brittle substrates |
US6537817B1 (en) | 1993-05-31 | 2003-03-25 | Packard Instrument Company | Piezoelectric-drop-on-demand technology |
US6203759B1 (en) | 1996-05-31 | 2001-03-20 | Packard Instrument Company | Microvolume liquid handling system |
US5710657A (en) * | 1994-02-23 | 1998-01-20 | Aura Systems, Inc. | Monomorph thin film actuated mirror array |
US5629577A (en) * | 1994-07-15 | 1997-05-13 | Micro Medical Devices | Miniature linear motion actuator |
DE19501711C1 (de) * | 1995-01-20 | 1996-04-25 | Fraunhofer Ges Forschung | Präzisionsjustiereinrichtung insbesondere für die Mikrooptik und Mikromechanik und Verfahren zur Präzisionsjustierung |
US5668432A (en) * | 1995-03-24 | 1997-09-16 | Nippondenso Co., Ltd. | Articulation device |
DE19542452A1 (de) * | 1995-11-14 | 1996-08-08 | Wilhelm Koenig | Translations - Rotations - Modul mit Multi-Piezo-Antrieb |
US5808435A (en) * | 1996-05-28 | 1998-09-15 | Kmy Instruments | Micropositioning device for disk head testing system |
US6083762A (en) * | 1996-05-31 | 2000-07-04 | Packard Instruments Company | Microvolume liquid handling system |
DE19644550C1 (de) * | 1996-10-26 | 1998-06-10 | Artur Dr Zrenner | Piezoelektrischer oder elektrostriktiver Trägheitsantrieb zum Verschieben oder Positionieren von insbesondere schweren Objekten |
DE19806127B4 (de) * | 1998-02-14 | 2005-06-30 | Artur Dr. Zrenner | Verfahren zur elektrischen Ansteuerung von piezoelektrischen oder elektrostriktiven Aktuatoren in Antrieben für eine schrittweise Bewegung |
US7304486B2 (en) * | 1998-07-08 | 2007-12-04 | Capres A/S | Nano-drive for high resolution positioning and for positioning of a multi-point probe |
DE19847995A1 (de) * | 1998-10-17 | 2000-04-20 | Zeiss Carl Jena Gmbh | Anordnung zum Positionieren eines Objektes |
DE19847996A1 (de) * | 1998-10-17 | 2000-04-20 | Zeiss Carl Jena Gmbh | Anordnung zum Positionieren eines Objektes |
US6084371A (en) * | 1999-02-19 | 2000-07-04 | Lockheed Martin Energy Research Corporation | Apparatus and methods for a human de-amplifier system |
US6251658B1 (en) * | 1999-06-18 | 2001-06-26 | Burleigh Instruments, Inc | Inertial impact drill for cytological applications |
DE19932032C2 (de) * | 1999-07-09 | 2003-07-24 | Eppendorf Ag | Vorrichtung zur Mikro-Dissektion von Gewebe |
US6661575B1 (en) | 2000-10-31 | 2003-12-09 | Sergey A. Yakovenko | Methods and apparata for micromanipulation of micro-and nanoparticles |
SE520097C2 (sv) * | 2000-12-05 | 2003-05-27 | Nanofactory Instruments Ab | Mikropositioneringsanordning |
US6848328B2 (en) * | 2001-03-09 | 2005-02-01 | Klocke Nanotechnik | Positioning unit and positioning apparatus with at least two positioning units |
US7141914B2 (en) * | 2001-12-07 | 2006-11-28 | Chip-Man Technologies Oy | Micromanipulator including piezoelectric benders |
US7334443B2 (en) * | 2002-02-22 | 2008-02-26 | Master Lock Company Llc | Radio frequency electronic lock |
US6924653B2 (en) * | 2002-08-26 | 2005-08-02 | Micron Technology, Inc. | Selectively configurable microelectronic probes |
CN1292877C (zh) * | 2004-11-15 | 2007-01-03 | 北京工业大学 | 一种实现微切剖作业的微操作器装置 |
DE102005026708B4 (de) * | 2005-06-09 | 2007-05-03 | Attocube Systems Ag | Positionierer mit Festkörpergelenk |
JP4652906B2 (ja) * | 2005-06-30 | 2011-03-16 | 富士夫 宮脇 | 振動型マイクロインジェクション装置 |
US20070176514A1 (en) * | 2006-01-27 | 2007-08-02 | Taiwan Advanced Materials Technologies Corp. | Electromechanical actuator structure |
US8059346B2 (en) | 2007-03-19 | 2011-11-15 | New Scale Technologies | Linear drive systems and methods thereof |
US9138892B2 (en) | 2009-11-06 | 2015-09-22 | Sensapex Oy | Compact micromanipulator |
EP2338972B1 (en) * | 2009-12-23 | 2018-05-16 | Eppendorf Ag | Apparatus and method for generating a tool motion |
CN104362890B (zh) * | 2014-12-01 | 2017-01-18 | 苏州大学 | 一种实现双向运动的惯性粘滑式跨尺度精密运动平台 |
DE102018129620B3 (de) * | 2018-11-23 | 2020-03-12 | Micromotion Gmbh | Mikropositioniersystem |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3779400A (en) * | 1972-02-14 | 1973-12-18 | Univ Iowa State Res Found Inc | Micromanipulator system |
US3813022A (en) * | 1972-06-19 | 1974-05-28 | Automated Equipment Corp | Wire bonder apparatus |
US3808488A (en) * | 1972-07-14 | 1974-04-30 | Dynamics Corp Massa Div | Means for making precision microadjustments in the position of a movable element |
AT351834B (de) * | 1973-04-06 | 1979-08-10 | Lkb Produkter Ab | Vorrichtung fuer die lageaenderung eines werkstueckes |
US3835338A (en) * | 1973-08-23 | 1974-09-10 | A Martin | Electrically controlled ultra-micromanipulator |
DE7924781U1 (de) * | 1979-08-31 | 1979-11-22 | Borchers, Ernst, 8022 Gruenwald | Stufen-mikromanipulator |
DE3210466A1 (de) * | 1982-03-22 | 1983-09-29 | Peter Dipl.-Kfm. Dr. 6230 Frankfurt Gschaider | Verfahren und vorrichtung zur durchfuehrung von handhabungsprozessen |
US4484854A (en) * | 1982-08-16 | 1984-11-27 | Anorad Corporation | Robotic height sensor in laterally compliant probe |
JPS60148389A (ja) * | 1984-01-11 | 1985-08-05 | Matsushita Electric Works Ltd | 圧電体を用いる駆動装置 |
DE3516324A1 (de) * | 1985-05-07 | 1986-11-13 | Vdo Adolf Schindling Ag, 6000 Frankfurt | Linearmotor |
JPS62160778A (ja) * | 1986-01-10 | 1987-07-16 | Fuji Electric Co Ltd | 圧電アクチユエ−タの組立方法 |
JPS62217878A (ja) * | 1986-03-18 | 1987-09-25 | Sanritsu Kikaku Kk | 圧電アクチユエ−タ |
JPS63299785A (ja) * | 1987-05-29 | 1988-12-07 | Res Dev Corp Of Japan | 圧電・電歪素子を用いた衝撃力による微小移動装置 |
-
1989
- 1989-10-05 DE DE3933296A patent/DE3933296C2/de not_active Expired - Fee Related
- 1989-10-10 KR KR1019890014502A patent/KR970010616B1/ko not_active IP Right Cessation
- 1989-12-07 NZ NZ231672A patent/NZ231672A/en unknown
- 1989-12-07 AU AU46030/89A patent/AU624660B2/en not_active Ceased
- 1989-12-08 CA CA002005028A patent/CA2005028C/en not_active Expired - Lifetime
- 1989-12-19 SE SE8904266A patent/SE509017C2/sv not_active IP Right Cessation
- 1989-12-20 GB GB8928754A patent/GB2227603B/en not_active Expired - Fee Related
- 1989-12-20 FR FR8916903A patent/FR2640903B1/fr not_active Expired - Fee Related
- 1989-12-22 IT IT00959089A patent/IT1236229B/it active IP Right Grant
- 1989-12-22 RU SU894742752A patent/RU1823806C/ru active
- 1989-12-22 DK DK664989A patent/DK664989A/da not_active Application Discontinuation
- 1989-12-22 IT IT9590A patent/IT8909590A0/it unknown
-
1991
- 1991-05-03 US US07/697,499 patent/US5229679A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
FR2640903B1 (ko) | 1996-05-03 |
KR970010616B1 (ko) | 1997-06-28 |
AU624660B2 (en) | 1992-06-18 |
SE8904266L (sv) | 1990-06-29 |
DK664989D0 (da) | 1989-12-22 |
KR900009222A (ko) | 1990-07-02 |
AU4603089A (en) | 1990-07-05 |
IT8909590A0 (it) | 1989-12-22 |
IT1236229B (it) | 1993-01-25 |
GB8928754D0 (en) | 1990-02-28 |
CA2005028A1 (en) | 1990-06-28 |
GB2227603B (en) | 1993-01-27 |
FR2640903A1 (ko) | 1990-06-29 |
SE8904266D0 (sv) | 1989-12-19 |
GB2227603A (en) | 1990-08-01 |
DE3933296C2 (de) | 1994-06-01 |
RU1823806C (ru) | 1993-06-23 |
CA2005028C (en) | 1994-07-12 |
US5229679A (en) | 1993-07-20 |
SE509017C2 (sv) | 1998-11-23 |
DE3933296A1 (de) | 1990-07-05 |
NZ231672A (en) | 1992-04-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
AHS | Application shelved for other reasons than non-payment |