KR900006062A - 초음파 와이어 본딩장치 - Google Patents

초음파 와이어 본딩장치 Download PDF

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Publication number
KR900006062A
KR900006062A KR1019890015200A KR890015200A KR900006062A KR 900006062 A KR900006062 A KR 900006062A KR 1019890015200 A KR1019890015200 A KR 1019890015200A KR 890015200 A KR890015200 A KR 890015200A KR 900006062 A KR900006062 A KR 900006062A
Authority
KR
South Korea
Prior art keywords
ultrasonic
wire bonding
transducer
bonding device
ultrasonic wire
Prior art date
Application number
KR1019890015200A
Other languages
English (en)
Other versions
KR920004271B1 (ko
Inventor
노부또 야마사끼
요시미쓰 데라가도
유우지 오오하시
히지리 하야시
Original Assignee
야스구모 다께시
가부시끼가이샤 신가와
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 야스구모 다께시, 가부시끼가이샤 신가와 filed Critical 야스구모 다께시
Publication of KR900006062A publication Critical patent/KR900006062A/ko
Application granted granted Critical
Publication of KR920004271B1 publication Critical patent/KR920004271B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K9/00—Arc welding or cutting
    • B23K9/10—Other electric circuits therefor; Protective circuits; Remote controls
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78—Apparatus for connecting with wire connectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
    • H01L21/607—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation involving the application of mechanical vibrations, e.g. ultrasonic vibrations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01033—Arsenic [As]

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Wire Bonding (AREA)

Abstract

내용 없음

Description

초음파 와이어 본딩장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 일실시예를 도시한 회로도.

Claims (1)

  1. 일단에 투울이 설치된 트랜스듀우서를 초음파 발진회로의 초음파 발진전압에 의해 진동시키는 초음파 와이어 본딩장치에 있어서, 상기 트랜스듀우서와 상기 초음파 발진회로간에 초음파 발진회로의 출력을 제어하는 출력제어회로를 설치하고 상기 트랜스듀우서의 전류치를 판독하고 트랜스듀우서가 가지는 특성의 차이를 보정하도록 상기 출력 제어회로에 초음파 발진출력 데이타를 출력하는 마이크로 컴퓨터를 설치한 것을 특징으로 하는 초음파 와이어 본딩장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019890015200A 1988-10-28 1989-10-23 초음파 와이어 본딩장치 KR920004271B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP88-270842 1988-10-28
JP63-270842 1988-10-28
JP63270842A JPH0777229B2 (ja) 1988-10-28 1988-10-28 超音波ワイヤボンディング装置

Publications (2)

Publication Number Publication Date
KR900006062A true KR900006062A (ko) 1990-05-07
KR920004271B1 KR920004271B1 (ko) 1992-06-01

Family

ID=17491757

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019890015200A KR920004271B1 (ko) 1988-10-28 1989-10-23 초음파 와이어 본딩장치

Country Status (3)

Country Link
US (1) US5046654A (ko)
JP (1) JPH0777229B2 (ko)
KR (1) KR920004271B1 (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5459672A (en) * 1990-07-30 1995-10-17 Hughes Aircraft Company Electrical interconnect integrity measuring method
US5213249A (en) * 1992-05-29 1993-05-25 International Business Machines Corporation Ultrasonic adhesion/dehesion monitoring apparatus with power feedback measuring means
JP3128710B2 (ja) * 1992-08-12 2001-01-29 株式会社新川 ワイヤボンデイング方法
JP2714339B2 (ja) * 1993-01-19 1998-02-16 ローム株式会社 ワイヤボンディング装置
US5357423A (en) * 1993-02-22 1994-10-18 Kulicke And Soffa Investments, Inc. Apparatus and method for automatically adjusting power output of an ultrasonic generator
US5816476A (en) * 1994-08-24 1998-10-06 Verity Instruments Inc. Dual frequency power supply and transducer
US5595330A (en) * 1994-08-24 1997-01-21 Verity Instruments, Inc. Power supply
US5645210A (en) * 1996-02-09 1997-07-08 Kulicke And Soffa Investments, Inc. High speed bonding tool contact detector
DE102007054626A1 (de) * 2007-11-12 2009-05-14 Hesse & Knipps Gmbh Verfahren und Vorrichtung zum Ultraschallbonden
DE102009003312A1 (de) * 2008-10-14 2010-04-15 Hesse & Knipps Gmbh Bondvorrichtung, Ultraschall-Transducer und Bondverfahren
EP3603826B1 (en) * 2018-07-31 2023-05-10 Infineon Technologies AG Method for calibrating an ultrasonic bonding machine

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5836684A (ja) * 1981-08-28 1983-03-03 有限会社大岳製作所 超音波発振法およびマイクロコンピユ−タ−内蔵超音波発振器
JPS60182144A (ja) * 1984-02-29 1985-09-17 Toshiba Corp 超音波ワイヤボンデイング装置の発振出力レベル制御装置
JPH0732174B2 (ja) * 1985-08-01 1995-04-10 株式会社東芝 超音波ワイヤボンディング方法および装置
US4808948A (en) * 1987-09-28 1989-02-28 Kulicke And Soffa Indusries, Inc. Automatic tuning system for ultrasonic generators

Also Published As

Publication number Publication date
JPH0777229B2 (ja) 1995-08-16
JPH02119154A (ja) 1990-05-07
KR920004271B1 (ko) 1992-06-01
US5046654A (en) 1991-09-10

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