KR940018940A - 본딩장치 - Google Patents

본딩장치 Download PDF

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Publication number
KR940018940A
KR940018940A KR1019930029608A KR930029608A KR940018940A KR 940018940 A KR940018940 A KR 940018940A KR 1019930029608 A KR1019930029608 A KR 1019930029608A KR 930029608 A KR930029608 A KR 930029608A KR 940018940 A KR940018940 A KR 940018940A
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KR
South Korea
Prior art keywords
vibration generating
generating source
horn
ultrasonic horn
ultrasonic
Prior art date
Application number
KR1019930029608A
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English (en)
Other versions
KR970010769B1 (ko
Inventor
노부토 야마자키
료이찌 교마스
Original Assignee
아라이 가즈오
가부시키가이샤 신가와
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Publication of KR940018940A publication Critical patent/KR940018940A/ko
Application granted granted Critical
Publication of KR970010769B1 publication Critical patent/KR970010769B1/ko

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78—Apparatus for connecting with wire connectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/10—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating making use of vibrations, e.g. ultrasonic welding
    • B23K20/106—Features related to sonotrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/7825—Means for applying energy, e.g. heating means
    • H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78301—Capillary
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/852—Applying energy for connecting
    • H01L2224/85201—Compression bonding
    • H01L2224/85205—Ultrasonic bonding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01004—Beryllium [Be]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01005—Boron [B]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01006—Carbon [C]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01033—Arsenic [As]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01082—Lead [Pb]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
    • H01L2924/1901—Structure
    • H01L2924/1904—Component type
    • H01L2924/19043—Component type being a resistor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/3011—Impedance

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Wire Bonding (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)

Abstract

본딩 안정성의 향상을 도모한다.
초음파 혼(20)은 이 초음파 혼(20)을 본드아암(30)에 부착하기 위한 혼 지지부 양쪽에 각각 진동발생원(26,27)을 가지며, 진동발생원(26,27)을 가지며, 진동발생원(26,27)을 각각 별도의 출력으로 제어하는 총음파 발진장치(40)를 설치하였다.

Description

본딩장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명이 되는 본딩장치이 초음파 혼부분 및 초음파 발진장치의 1실시예를 도시하는 주요부 단면도, 제2도는 본 발명이 되는 본딩장치의 초음파 혼부분 및 초음파 발진장치의 다른 실시예를 도시하는 주요부 단면도, 제3도는 본 발명이 되는 본딩장치의 초음파 혼부분의 1실시예를 도시하는 주요부 단면도, 제4도는 제3도의 정면도.

Claims (2)

  1. 한쪽 끝에 부착된 본딩툴과 전왜소자 또는 자왜소자등의 진동발생원을 구비하는 초음파 혼을 본드아암에 부착한 본딩장치에 있어서, 상기 초음파 혼은 이 초음파 혼을 상기 본드아암에 부착하기 위한 혼 지지부 양쪽에 각각 진동발생원을 가지며, 상기 진동발생원을 각각 별도의 출력으로 제어하는 초음파 발진장치를 설치한 것을 특징으로 하는 본딩장치.
  2. 한쪽 끝에 부착된 본딩툴과 전왜소자 또는 자왜소자등의 진동발생원을 구비하는 초음파 혼을 본드아암에 부착한 본딩장체 있어서, 상기 초음파 혼을 이 초음파 혼은 상기 본드아암에 부착하기 위한 혼 지지부 양쪽에 각각 진동발생원을 가지며, 상기 본딩툴측의 진동발생원의 전류 또는 전압의 변동을 검출하여 상기 양쪽의 진동 발생원을 제어하는 초음파 발진장치를 설치한 것을 특징으로 하는 본딩장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019930029608A 1993-01-18 1993-12-24 본딩장치 KR970010769B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP05023324A JP3128716B2 (ja) 1993-01-18 1993-01-18 ボンデイング装置
JP93-023324 1993-01-18

Publications (2)

Publication Number Publication Date
KR940018940A true KR940018940A (ko) 1994-08-19
KR970010769B1 KR970010769B1 (ko) 1997-06-30

Family

ID=12107413

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930029608A KR970010769B1 (ko) 1993-01-18 1993-12-24 본딩장치

Country Status (3)

Country Link
US (1) US5411195A (ko)
JP (1) JP3128716B2 (ko)
KR (1) KR970010769B1 (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3215084B2 (ja) * 1998-04-28 2001-10-02 株式会社アルテクス 超音波振動接合用共振器
DE10190130D2 (de) * 2000-01-21 2002-12-19 Hesse & Knipps Gmbh Halteeinrichtung für Ultraschall-Transducer
US6634539B2 (en) 2001-09-21 2003-10-21 3M Innovative Properties Company Adjustable-gap rotary ultrasonic horn mounting apparatus and method for mounting
US7243894B2 (en) 2002-02-15 2007-07-17 3M Innovative Properties Company Mount for vibratory elements
JP3727616B2 (ja) * 2002-07-11 2005-12-14 株式会社新川 ワイヤボンディング装置
JP4314306B1 (ja) * 2008-02-07 2009-08-12 株式会社新川 超音波振動子
US20100163601A1 (en) * 2008-12-31 2010-07-01 General Electric Company Friction weld vibration quality monitoring system

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3794236A (en) * 1973-05-07 1974-02-26 Raytheon Co Monitoring and control means for evaluating the performance of vibratory-type devices
GB1506164A (en) * 1974-07-09 1978-04-05 Mullard Ltd Ultrasonic bonding apparatus
JP2665080B2 (ja) * 1991-08-02 1997-10-22 山形日本電気株式会社 半導体製造装置

Also Published As

Publication number Publication date
US5411195A (en) 1995-05-02
JPH06216203A (ja) 1994-08-05
JP3128716B2 (ja) 2001-01-29
KR970010769B1 (ko) 1997-06-30

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