KR890012753A - 개별 배위된 연마과립을 가지는 연마시이트 - Google Patents
개별 배위된 연마과립을 가지는 연마시이트 Download PDFInfo
- Publication number
- KR890012753A KR890012753A KR1019890002309A KR890002309A KR890012753A KR 890012753 A KR890012753 A KR 890012753A KR 1019890002309 A KR1019890002309 A KR 1019890002309A KR 890002309 A KR890002309 A KR 890002309A KR 890012753 A KR890012753 A KR 890012753A
- Authority
- KR
- South Korea
- Prior art keywords
- granules
- abrasive
- binder layer
- sheet
- binder
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
- B24D11/001—Manufacture of flexible abrasive materials
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16077688A | 1988-02-26 | 1988-02-26 | |
US160776 | 1988-02-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR890012753A true KR890012753A (ko) | 1989-09-19 |
Family
ID=22578393
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019890002309A KR890012753A (ko) | 1988-02-26 | 1989-02-25 | 개별 배위된 연마과립을 가지는 연마시이트 |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP0331344B1 (de) |
JP (1) | JPH01289672A (de) |
KR (1) | KR890012753A (de) |
AT (1) | ATE94796T1 (de) |
CA (1) | CA1298980C (de) |
DE (1) | DE68909273T2 (de) |
MX (1) | MX170478B (de) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01274966A (ja) * | 1988-04-28 | 1989-11-02 | Tokyo Jiki Insatsu Kk | 研磨具 |
US5107626A (en) * | 1991-02-06 | 1992-04-28 | Minnesota Mining And Manufacturing Company | Method of providing a patterned surface on a substrate |
TW367551B (en) * | 1993-06-17 | 1999-08-21 | Freescale Semiconductor Inc | Polishing pad and a process for polishing |
US5441598A (en) * | 1993-12-16 | 1995-08-15 | Motorola, Inc. | Polishing pad for chemical-mechanical polishing of a semiconductor substrate |
US9199357B2 (en) | 1997-04-04 | 2015-12-01 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US7124753B2 (en) | 1997-04-04 | 2006-10-24 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US7323049B2 (en) | 1997-04-04 | 2008-01-29 | Chien-Min Sung | High pressure superabrasive particle synthesis |
US9221154B2 (en) | 1997-04-04 | 2015-12-29 | Chien-Min Sung | Diamond tools and methods for making the same |
US6679243B2 (en) | 1997-04-04 | 2004-01-20 | Chien-Min Sung | Brazed diamond tools and methods for making |
US9868100B2 (en) | 1997-04-04 | 2018-01-16 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US9409280B2 (en) | 1997-04-04 | 2016-08-09 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US9238207B2 (en) | 1997-04-04 | 2016-01-19 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US9463552B2 (en) | 1997-04-04 | 2016-10-11 | Chien-Min Sung | Superbrasvie tools containing uniformly leveled superabrasive particles and associated methods |
US7201645B2 (en) | 1999-11-22 | 2007-04-10 | Chien-Min Sung | Contoured CMP pad dresser and associated methods |
US6669745B2 (en) * | 2001-02-21 | 2003-12-30 | 3M Innovative Properties Company | Abrasive article with optimally oriented abrasive particles and method of making the same |
JP2003071730A (ja) * | 2001-09-03 | 2003-03-12 | Cci Corp | 研磨シート |
US9724802B2 (en) | 2005-05-16 | 2017-08-08 | Chien-Min Sung | CMP pad dressers having leveled tips and associated methods |
US8398466B2 (en) | 2006-11-16 | 2013-03-19 | Chien-Min Sung | CMP pad conditioners with mosaic abrasive segments and associated methods |
US9138862B2 (en) | 2011-05-23 | 2015-09-22 | Chien-Min Sung | CMP pad dresser having leveled tips and associated methods |
US8974270B2 (en) | 2011-05-23 | 2015-03-10 | Chien-Min Sung | CMP pad dresser having leveled tips and associated methods |
US8678878B2 (en) | 2009-09-29 | 2014-03-25 | Chien-Min Sung | System for evaluating and/or improving performance of a CMP pad dresser |
US8393934B2 (en) | 2006-11-16 | 2013-03-12 | Chien-Min Sung | CMP pad dressers with hybridized abrasive surface and related methods |
US8622787B2 (en) | 2006-11-16 | 2014-01-07 | Chien-Min Sung | CMP pad dressers with hybridized abrasive surface and related methods |
JP4925342B2 (ja) * | 2007-12-28 | 2012-04-25 | 信越ポリマー株式会社 | 被粘着物離脱用ローラ及び被粘着物離脱装置 |
US8252263B2 (en) | 2008-04-14 | 2012-08-28 | Chien-Min Sung | Device and method for growing diamond in a liquid phase |
CN102131887B (zh) | 2008-07-03 | 2013-07-31 | 3M创新有限公司 | 固定磨料颗粒和由其制得的制品 |
US8531026B2 (en) | 2010-09-21 | 2013-09-10 | Ritedia Corporation | Diamond particle mololayer heat spreaders and associated methods |
KR102427116B1 (ko) * | 2016-10-25 | 2022-08-01 | 쓰리엠 이노베이티브 프로퍼티즈 캄파니 | 배향된 연마 입자를 포함하는 접합된 연마 용품, 및 그의 제조 방법 |
US20220258203A1 (en) * | 2019-07-17 | 2022-08-18 | 3M Innovative Properties Company | Coating method and system to create patterned coating layers |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU2914571A (en) * | 1970-05-25 | 1972-11-23 | Rodi Birkeland | Improved abrasive product and method for preparing thesame |
EP0004454A3 (de) * | 1978-03-23 | 1979-10-31 | Robert Michael Barron | Beschichtete Schleifwerkzeuge |
DE2918103C2 (de) * | 1979-05-04 | 1985-12-05 | Sia Schweizer Schmirgel- & Schleifindustrie Ag, Frauenfeld | Verfahren zum Auftragen eines Grundbindemittels und Vorrichtung zur Durchführung desselben |
DE2951067A1 (de) * | 1979-12-19 | 1981-08-20 | Norddeutsche Schleifmittel-Industrie Christiansen & Co, GmbH & Co, 2000 Hamburg | Schleifwerkzeug, in welchem keramikgebundene schleifkornkonglomerate durch ein organisches bindemittel miteinander bzw. mit einer unterlage verbunden sind |
JPS60186377A (ja) * | 1984-03-05 | 1985-09-21 | Tamotsu Idota | 研摩布紙の構造 |
-
1989
- 1989-02-20 CA CA000591524A patent/CA1298980C/en not_active Expired - Fee Related
- 1989-02-22 AT AT89301732T patent/ATE94796T1/de not_active IP Right Cessation
- 1989-02-22 EP EP89301732A patent/EP0331344B1/de not_active Expired - Lifetime
- 1989-02-22 DE DE89301732T patent/DE68909273T2/de not_active Expired - Fee Related
- 1989-02-23 JP JP1045008A patent/JPH01289672A/ja active Pending
- 1989-02-24 MX MX015067A patent/MX170478B/es unknown
- 1989-02-25 KR KR1019890002309A patent/KR890012753A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
DE68909273T2 (de) | 1994-03-24 |
EP0331344B1 (de) | 1993-09-22 |
CA1298980C (en) | 1992-04-21 |
ATE94796T1 (de) | 1993-10-15 |
EP0331344A3 (de) | 1991-08-07 |
DE68909273D1 (de) | 1993-10-28 |
EP0331344A2 (de) | 1989-09-06 |
JPH01289672A (ja) | 1989-11-21 |
MX170478B (es) | 1993-08-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |