JPH01289672A - 個々に位置ぎめされた研磨粒をもつ研磨シート - Google Patents

個々に位置ぎめされた研磨粒をもつ研磨シート

Info

Publication number
JPH01289672A
JPH01289672A JP1045008A JP4500889A JPH01289672A JP H01289672 A JPH01289672 A JP H01289672A JP 1045008 A JP1045008 A JP 1045008A JP 4500889 A JP4500889 A JP 4500889A JP H01289672 A JPH01289672 A JP H01289672A
Authority
JP
Japan
Prior art keywords
grains
abrasive
binder layer
binder
abrasive sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1045008A
Other languages
English (en)
Japanese (ja)
Inventor
Debitsudo Karuhoun Kuraido
クライド　デビッド　カルホウン
George D Foss
ジョージ　デルマン　フォス
Maurice J Fleming
モーリス　ジョン　フレミング
Wesley J Bruxvoort
ウェスリィ　ジェイ　ブルックスボールト
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Co
Original Assignee
Minnesota Mining and Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Minnesota Mining and Manufacturing Co filed Critical Minnesota Mining and Manufacturing Co
Publication of JPH01289672A publication Critical patent/JPH01289672A/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
JP1045008A 1988-02-26 1989-02-23 個々に位置ぎめされた研磨粒をもつ研磨シート Pending JPH01289672A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16077688A 1988-02-26 1988-02-26
US160776 1988-02-26

Publications (1)

Publication Number Publication Date
JPH01289672A true JPH01289672A (ja) 1989-11-21

Family

ID=22578393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1045008A Pending JPH01289672A (ja) 1988-02-26 1989-02-23 個々に位置ぎめされた研磨粒をもつ研磨シート

Country Status (7)

Country Link
EP (1) EP0331344B1 (de)
JP (1) JPH01289672A (de)
KR (1) KR890012753A (de)
AT (1) ATE94796T1 (de)
CA (1) CA1298980C (de)
DE (1) DE68909273T2 (de)
MX (1) MX170478B (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01274966A (ja) * 1988-04-28 1989-11-02 Tokyo Jiki Insatsu Kk 研磨具
JP2003071730A (ja) * 2001-09-03 2003-03-12 Cci Corp 研磨シート
JP2004524173A (ja) * 2001-02-21 2004-08-12 スリーエム イノベイティブ プロパティズ カンパニー 最適に配向された研磨粒子を有する研磨物品、およびその製造方法
JP2009164185A (ja) * 2007-12-28 2009-07-23 Shin Etsu Polymer Co Ltd 被粘着物離脱用ローラ及び被粘着物離脱装置
CN109890568A (zh) * 2016-10-25 2019-06-14 3M创新有限公司 包括取向磨料颗粒的粘结磨料制品及其制备方法

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5107626A (en) * 1991-02-06 1992-04-28 Minnesota Mining And Manufacturing Company Method of providing a patterned surface on a substrate
TW367551B (en) * 1993-06-17 1999-08-21 Freescale Semiconductor Inc Polishing pad and a process for polishing
US5441598A (en) * 1993-12-16 1995-08-15 Motorola, Inc. Polishing pad for chemical-mechanical polishing of a semiconductor substrate
US9238207B2 (en) 1997-04-04 2016-01-19 Chien-Min Sung Brazed diamond tools and methods for making the same
US6679243B2 (en) 1997-04-04 2004-01-20 Chien-Min Sung Brazed diamond tools and methods for making
US9199357B2 (en) 1997-04-04 2015-12-01 Chien-Min Sung Brazed diamond tools and methods for making the same
US9868100B2 (en) 1997-04-04 2018-01-16 Chien-Min Sung Brazed diamond tools and methods for making the same
US9221154B2 (en) 1997-04-04 2015-12-29 Chien-Min Sung Diamond tools and methods for making the same
US9463552B2 (en) 1997-04-04 2016-10-11 Chien-Min Sung Superbrasvie tools containing uniformly leveled superabrasive particles and associated methods
US7323049B2 (en) 1997-04-04 2008-01-29 Chien-Min Sung High pressure superabrasive particle synthesis
US7124753B2 (en) 1997-04-04 2006-10-24 Chien-Min Sung Brazed diamond tools and methods for making the same
US9409280B2 (en) 1997-04-04 2016-08-09 Chien-Min Sung Brazed diamond tools and methods for making the same
US7201645B2 (en) 1999-11-22 2007-04-10 Chien-Min Sung Contoured CMP pad dresser and associated methods
US8678878B2 (en) 2009-09-29 2014-03-25 Chien-Min Sung System for evaluating and/or improving performance of a CMP pad dresser
US8622787B2 (en) 2006-11-16 2014-01-07 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
US8398466B2 (en) 2006-11-16 2013-03-19 Chien-Min Sung CMP pad conditioners with mosaic abrasive segments and associated methods
US9138862B2 (en) 2011-05-23 2015-09-22 Chien-Min Sung CMP pad dresser having leveled tips and associated methods
US8393934B2 (en) 2006-11-16 2013-03-12 Chien-Min Sung CMP pad dressers with hybridized abrasive surface and related methods
US9724802B2 (en) 2005-05-16 2017-08-08 Chien-Min Sung CMP pad dressers having leveled tips and associated methods
US8252263B2 (en) 2008-04-14 2012-08-28 Chien-Min Sung Device and method for growing diamond in a liquid phase
KR101604505B1 (ko) 2008-07-03 2016-03-17 쓰리엠 이노베이티브 프로퍼티즈 컴파니 고정 연마 입자 및 그로부터 제조된 물품
CN103221180A (zh) 2010-09-21 2013-07-24 铼钻科技股份有限公司 具有基本平坦颗粒尖端的超研磨工具及其相关方法
CN103329253B (zh) 2011-05-23 2016-03-30 宋健民 具有平坦化尖端的化学机械研磨垫修整器
US20220258203A1 (en) * 2019-07-17 2022-08-18 3M Innovative Properties Company Coating method and system to create patterned coating layers
CN115383636A (zh) * 2022-09-13 2022-11-25 四川省三台县固锐实业有限责任公司 一种超精涂附磨具植砂装置、植砂方法及超精涂附磨具

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60186377A (ja) * 1984-03-05 1985-09-21 Tamotsu Idota 研摩布紙の構造

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2914571A (en) * 1970-05-25 1972-11-23 Rodi Birkeland Improved abrasive product and method for preparing thesame
EP0004454A3 (de) * 1978-03-23 1979-10-31 Robert Michael Barron Beschichtete Schleifwerkzeuge
DE2918103C2 (de) * 1979-05-04 1985-12-05 Sia Schweizer Schmirgel- & Schleifindustrie Ag, Frauenfeld Verfahren zum Auftragen eines Grundbindemittels und Vorrichtung zur Durchführung desselben
DE2951067A1 (de) * 1979-12-19 1981-08-20 Norddeutsche Schleifmittel-Industrie Christiansen & Co, GmbH & Co, 2000 Hamburg Schleifwerkzeug, in welchem keramikgebundene schleifkornkonglomerate durch ein organisches bindemittel miteinander bzw. mit einer unterlage verbunden sind

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60186377A (ja) * 1984-03-05 1985-09-21 Tamotsu Idota 研摩布紙の構造

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01274966A (ja) * 1988-04-28 1989-11-02 Tokyo Jiki Insatsu Kk 研磨具
JP2004524173A (ja) * 2001-02-21 2004-08-12 スリーエム イノベイティブ プロパティズ カンパニー 最適に配向された研磨粒子を有する研磨物品、およびその製造方法
JP2003071730A (ja) * 2001-09-03 2003-03-12 Cci Corp 研磨シート
JP2009164185A (ja) * 2007-12-28 2009-07-23 Shin Etsu Polymer Co Ltd 被粘着物離脱用ローラ及び被粘着物離脱装置
CN109890568A (zh) * 2016-10-25 2019-06-14 3M创新有限公司 包括取向磨料颗粒的粘结磨料制品及其制备方法

Also Published As

Publication number Publication date
EP0331344A2 (de) 1989-09-06
DE68909273D1 (de) 1993-10-28
ATE94796T1 (de) 1993-10-15
EP0331344B1 (de) 1993-09-22
MX170478B (es) 1993-08-25
CA1298980C (en) 1992-04-21
KR890012753A (ko) 1989-09-19
EP0331344A3 (de) 1991-08-07
DE68909273T2 (de) 1994-03-24

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