KR890010592A - 투명도전막의 제조방법 - Google Patents
투명도전막의 제조방법 Download PDFInfo
- Publication number
- KR890010592A KR890010592A KR870014651A KR870014651A KR890010592A KR 890010592 A KR890010592 A KR 890010592A KR 870014651 A KR870014651 A KR 870014651A KR 870014651 A KR870014651 A KR 870014651A KR 890010592 A KR890010592 A KR 890010592A
- Authority
- KR
- South Korea
- Prior art keywords
- manufacturing
- conductive film
- transparent conductive
- sputtering
- kpa
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Physical Vapour Deposition (AREA)
- Manufacturing Of Electric Cables (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
도면은 본 발명을 실현하기 위한 스퍼터장치의 개략도.
Claims (1)
- 기판유리를 500-600℃에서 5-10분간 열처리하는 제 1공정과, 스퍼터챔버에서 0.4-0.5ＫＷ의 피워레벨로 스퍼터시키는 제 2공정으로 행하여짐을 특징으로 하는 투명도전막의 제조방법.※참고사항: 최초출원 내용에 의하여 공개하는 것임.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019870014651A KR900004863B1 (ko) | 1987-12-21 | 1987-12-21 | 투명도전막의 제조방법 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019870014651A KR900004863B1 (ko) | 1987-12-21 | 1987-12-21 | 투명도전막의 제조방법 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR890010592A true KR890010592A (ko) | 1989-08-09 |
| KR900004863B1 KR900004863B1 (ko) | 1990-07-08 |
Family
ID=19267161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019870014651A KR900004863B1 (ko) | 1987-12-21 | 1987-12-21 | 투명도전막의 제조방법 |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR900004863B1 (ko) |
-
1987
- 1987-12-21 KR KR1019870014651A patent/KR900004863B1/ko not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR900004863B1 (ko) | 1990-07-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| G160 | Decision to publish patent application | ||
| E701 | Decision to grant or registration of patent right | ||
| GRNT | Written decision to grant | ||
| FPAY | Annual fee payment |
Payment date: 20070626 Year of fee payment: 18 |
|
| EXPY | Expiration of term |