KR860001477A - 반도체장치의 제조방법 - Google Patents
반도체장치의 제조방법 Download PDFInfo
- Publication number
- KR860001477A KR860001477A KR1019850004374A KR850004374A KR860001477A KR 860001477 A KR860001477 A KR 860001477A KR 1019850004374 A KR1019850004374 A KR 1019850004374A KR 850004374 A KR850004374 A KR 850004374A KR 860001477 A KR860001477 A KR 860001477A
- Authority
- KR
- South Korea
- Prior art keywords
- manufacturing
- semiconductor device
- wire
- copper
- electrode pad
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title claims description 5
- 238000004519 manufacturing process Methods 0.000 title claims 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 7
- 229910000881 Cu alloy Inorganic materials 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- 238000003466 welding Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/06—Wiring by machine
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
- B23K20/002—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating specially adapted for particular articles or work
- B23K20/004—Wire welding
- B23K20/005—Capillary welding
- B23K20/007—Ball bonding
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- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4821—Flat leads, e.g. lead frames with or without insulating supports
- H01L21/4825—Connection or disconnection of other leads to or from flat leads, e.g. wires, bumps, other flat leads
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- H01R43/00—Apparatus or processes specially adapted for manufacturing, assembling, maintaining, or repairing of line connectors or current collectors or for joining electric conductors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/20—Parameters
- H01L2924/201—Temperature ranges
- H01L2924/20106—Temperature range 200 C=<T<250 C, 473.15 K =<T < 523.15K
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Wire Bonding (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 1 실시예의 설명을 하기 위한 부분 확대도
제2도는 동계통 와이어(5)의 절단접합상태도
제3도는 동계통 와이어(5)의 굴곡상태도
1A…리드 프레임(lead frame)의 도상부 1B…리드부 2…반도체칩 2A…전극패드 2B…접촉막 3…히터 4…모세관 5…동계통와이어 5A…본딩 와이어 6…커버 6a…구멍 7…토우치 8…환원성개스 9…본딩기구 10…로울러
Claims (1)
- 반도체 칩(2)의 전극 패드(2A)와 리드부(1B)를 접속시키는 와이어를 동선이나 동합금금선 등과 같은 동계통와이어(5)를 사용하는 반도체 장치의 제조방법에 있어서, 상기 동계통 와이어(5)의 단부에 용접용보올(5a)을 형성시킨 다음 상기 보올(5a)을 200℃ 이상의 환원성개스(8)로 환원시켜 전극 패드(2A)나 외부 리드부 (1B)에 접속시키는 것을 특징으로 한 반도체 장치의 제조방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15559184A JPS6135545A (ja) | 1984-07-27 | 1984-07-27 | 半導体装置の製造方法 |
JP59-155591 | 1984-07-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR860001477A true KR860001477A (ko) | 1986-02-26 |
KR900005348B1 KR900005348B1 (ko) | 1990-07-27 |
Family
ID=15609376
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019850004374A KR900005348B1 (ko) | 1984-07-27 | 1985-06-20 | 반도체장치의 제조방법 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPS6135545A (ko) |
KR (1) | KR900005348B1 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3129169B2 (ja) * | 1995-11-08 | 2001-01-29 | 富士通株式会社 | 半導体装置及びその製造方法 |
-
1984
- 1984-07-27 JP JP15559184A patent/JPS6135545A/ja active Granted
-
1985
- 1985-06-20 KR KR1019850004374A patent/KR900005348B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JPS6135545A (ja) | 1986-02-20 |
JPH0325019B2 (ko) | 1991-04-04 |
KR900005348B1 (ko) | 1990-07-27 |
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