KR20250125342A - 반도체 제조 장치용의 튜브 - Google Patents

반도체 제조 장치용의 튜브

Info

Publication number
KR20250125342A
KR20250125342A KR1020257018332A KR20257018332A KR20250125342A KR 20250125342 A KR20250125342 A KR 20250125342A KR 1020257018332 A KR1020257018332 A KR 1020257018332A KR 20257018332 A KR20257018332 A KR 20257018332A KR 20250125342 A KR20250125342 A KR 20250125342A
Authority
KR
South Korea
Prior art keywords
fluorinated polymer
tube
less
polymerization
semiconductor manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020257018332A
Other languages
English (en)
Korean (ko)
Inventor
유토 나카가와
신지 와다
사다오 가네토쿠
류타 야나가와
Original Assignee
에이지씨 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에이지씨 가부시키가이샤 filed Critical 에이지씨 가부시키가이샤
Publication of KR20250125342A publication Critical patent/KR20250125342A/ko
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L11/00—Hoses, i.e. flexible pipes
    • F16L11/04—Hoses, i.e. flexible pipes made of rubber or flexible plastics
    • F16L11/06—Hoses, i.e. flexible pipes made of rubber or flexible plastics with homogeneous wall
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F14/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
    • C08F14/18—Monomers containing fluorine
    • C08F14/26—Tetrafluoroethene
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F214/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
    • C08F214/18—Monomers containing fluorine
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F214/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
    • C08F214/18—Monomers containing fluorine
    • C08F214/26—Tetrafluoroethene
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F214/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
    • C08F214/18—Monomers containing fluorine
    • C08F214/26—Tetrafluoroethene
    • C08F214/262—Tetrafluoroethene with fluorinated vinyl ethers
    • H01L21/67017—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
KR1020257018332A 2022-12-28 2023-12-27 반도체 제조 장치용의 튜브 Pending KR20250125342A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022212110 2022-12-28
JPJP-P-2022-212110 2022-12-28
PCT/JP2023/046905 WO2024143463A1 (ja) 2022-12-28 2023-12-27 半導体製造装置用のチューブ

Publications (1)

Publication Number Publication Date
KR20250125342A true KR20250125342A (ko) 2025-08-21

Family

ID=91717823

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020257018332A Pending KR20250125342A (ko) 2022-12-28 2023-12-27 반도체 제조 장치용의 튜브

Country Status (5)

Country Link
US (1) US20250253164A1 (https=)
JP (1) JPWO2024143463A1 (https=)
KR (1) KR20250125342A (https=)
CN (1) CN120500597A (https=)
WO (1) WO2024143463A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026048678A1 (ja) * 2024-08-26 2026-03-05 Ａｇｃ株式会社 共重合体の製造方法、成形体の製造方法
WO2026048681A1 (ja) * 2024-08-26 2026-03-05 Ａｇｃ株式会社 固体組成物、固体組成物の製造方法及び成形体

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019003265A1 (ja) 2017-06-26 2019-01-03 三井・デュポンフロロケミカル株式会社 フッ素樹脂成形体

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3424270B2 (ja) * 1993-07-30 2003-07-07 旭硝子株式会社 エチレン／テトラフルオロエチレン系共重合体
US6645590B1 (en) * 1998-06-28 2003-11-11 E. I. Du Pont De Nemours And Company Articles of functional fluoropolymer
JP2005178297A (ja) * 2003-12-22 2005-07-07 Daikin Ind Ltd 含フッ素成形体及び半導体製造装置
JPWO2014112592A1 (ja) * 2013-01-18 2017-01-19 旭硝子株式会社 エチレン−テトラフルオロエチレン共重合体乾燥物、ペレットおよび成形物の製造方法
JPWO2016006644A1 (ja) * 2014-07-09 2017-04-27 旭硝子株式会社 含フッ素共重合体および積層体
CN104151754B (zh) * 2014-08-15 2016-05-25 上海三爱富新材料股份有限公司 高流动性乙烯-四氟乙烯共聚物组合物及其制备方法
CN105082495B (zh) * 2015-07-07 2019-07-05 上海交通大学 一种氟树脂复合物的制造方法，氟树脂复合物及其制品成形
EP3375796B1 (en) * 2015-11-13 2020-07-15 AGC Inc. Copolymer and composition containing same
CN109219506B (zh) * 2016-05-31 2021-06-04 Ａｇｃ株式会社 氟树脂的制造方法
EP3760649B1 (en) * 2018-03-01 2024-01-24 Daikin Industries, Ltd. Method for manufacturing fluoropolymer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019003265A1 (ja) 2017-06-26 2019-01-03 三井・デュポンフロロケミカル株式会社 フッ素樹脂成形体

Also Published As

Publication number Publication date
CN120500597A (zh) 2025-08-15
JPWO2024143463A1 (https=) 2024-07-04
US20250253164A1 (en) 2025-08-07
WO2024143463A1 (ja) 2024-07-04

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Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

Q12 Application published

Free format text: ST27 STATUS EVENT CODE: A-1-1-Q10-Q12-NAP-PG1501 (AS PROVIDED BY THE NATIONAL OFFICE)

P22-X000 Classification modified

St.27 status event code: A-2-2-P10-P22-nap-X000