CN120500597A - 半导体制造装置用管 - Google Patents

半导体制造装置用管

Info

Publication number
CN120500597A
CN120500597A CN202380088591.XA CN202380088591A CN120500597A CN 120500597 A CN120500597 A CN 120500597A CN 202380088591 A CN202380088591 A CN 202380088591A CN 120500597 A CN120500597 A CN 120500597A
Authority
CN
China
Prior art keywords
fluoropolymer
tube
polymerization
less
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380088591.XA
Other languages
English (en)
Chinese (zh)
Inventor
中川雄登
和田真治
兼德定雄
梁川隆太
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of CN120500597A publication Critical patent/CN120500597A/zh
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L11/00—Hoses, i.e. flexible pipes
    • F16L11/04—Hoses, i.e. flexible pipes made of rubber or flexible plastics
    • F16L11/06—Hoses, i.e. flexible pipes made of rubber or flexible plastics with homogeneous wall
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F14/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
    • C08F14/18—Monomers containing fluorine
    • C08F14/26—Tetrafluoroethene
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F214/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
    • C08F214/18—Monomers containing fluorine
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F214/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
    • C08F214/18—Monomers containing fluorine
    • C08F214/26—Tetrafluoroethene
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F214/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
    • C08F214/18—Monomers containing fluorine
    • C08F214/26—Tetrafluoroethene
    • C08F214/262—Tetrafluoroethene with fluorinated vinyl ethers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
CN202380088591.XA 2022-12-28 2023-12-27 半导体制造装置用管 Pending CN120500597A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022212110 2022-12-28
JP2022-212110 2022-12-28
PCT/JP2023/046905 WO2024143463A1 (ja) 2022-12-28 2023-12-27 半導体製造装置用のチューブ

Publications (1)

Publication Number Publication Date
CN120500597A true CN120500597A (zh) 2025-08-15

Family

ID=91717823

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380088591.XA Pending CN120500597A (zh) 2022-12-28 2023-12-27 半导体制造装置用管

Country Status (5)

Country Link
US (1) US20250253164A1 (https=)
JP (1) JPWO2024143463A1 (https=)
KR (1) KR20250125342A (https=)
CN (1) CN120500597A (https=)
WO (1) WO2024143463A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026048678A1 (ja) * 2024-08-26 2026-03-05 Ａｇｃ株式会社 共重合体の製造方法、成形体の製造方法
WO2026048681A1 (ja) * 2024-08-26 2026-03-05 Ａｇｃ株式会社 固体組成物、固体組成物の製造方法及び成形体

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3424270B2 (ja) * 1993-07-30 2003-07-07 旭硝子株式会社 エチレン／テトラフルオロエチレン系共重合体
US6645590B1 (en) * 1998-06-28 2003-11-11 E. I. Du Pont De Nemours And Company Articles of functional fluoropolymer
JP2005178297A (ja) * 2003-12-22 2005-07-07 Daikin Ind Ltd 含フッ素成形体及び半導体製造装置
JPWO2014112592A1 (ja) * 2013-01-18 2017-01-19 旭硝子株式会社 エチレン−テトラフルオロエチレン共重合体乾燥物、ペレットおよび成形物の製造方法
JPWO2016006644A1 (ja) * 2014-07-09 2017-04-27 旭硝子株式会社 含フッ素共重合体および積層体
CN104151754B (zh) * 2014-08-15 2016-05-25 上海三爱富新材料股份有限公司 高流动性乙烯-四氟乙烯共聚物组合物及其制备方法
CN105082495B (zh) * 2015-07-07 2019-07-05 上海交通大学 一种氟树脂复合物的制造方法，氟树脂复合物及其制品成形
EP3375796B1 (en) * 2015-11-13 2020-07-15 AGC Inc. Copolymer and composition containing same
CN109219506B (zh) * 2016-05-31 2021-06-04 Ａｇｃ株式会社 氟树脂的制造方法
US11865758B2 (en) 2017-06-26 2024-01-09 Chemours-Mitsui Fluoroproducts Co. Ltd. Fluororesin molded article
EP3760649B1 (en) * 2018-03-01 2024-01-24 Daikin Industries, Ltd. Method for manufacturing fluoropolymer

Also Published As

Publication number Publication date
KR20250125342A (ko) 2025-08-21
JPWO2024143463A1 (https=) 2024-07-04
US20250253164A1 (en) 2025-08-07
WO2024143463A1 (ja) 2024-07-04

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