JPWO2024143463A1 - - Google Patents
Info
- Publication number
- JPWO2024143463A1 JPWO2024143463A1 JP2024567927A JP2024567927A JPWO2024143463A1 JP WO2024143463 A1 JPWO2024143463 A1 JP WO2024143463A1 JP 2024567927 A JP2024567927 A JP 2024567927A JP 2024567927 A JP2024567927 A JP 2024567927A JP WO2024143463 A1 JPWO2024143463 A1 JP WO2024143463A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L11/00—Hoses, i.e. flexible pipes
- F16L11/04—Hoses, i.e. flexible pipes made of rubber or flexible plastics
- F16L11/06—Hoses, i.e. flexible pipes made of rubber or flexible plastics with homogeneous wall
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/04—Apparatus for manufacture or treatment
- H10P72/0402—Apparatus for fluid treatment
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F14/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
- C08F14/18—Monomers containing fluorine
- C08F14/26—Tetrafluoroethene
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F214/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
- C08F214/18—Monomers containing fluorine
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F214/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
- C08F214/18—Monomers containing fluorine
- C08F214/26—Tetrafluoroethene
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F214/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a halogen
- C08F214/18—Monomers containing fluorine
- C08F214/26—Tetrafluoroethene
- C08F214/262—Tetrafluoroethene with fluorinated vinyl ethers
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022212110 | 2022-12-28 | ||
| PCT/JP2023/046905 WO2024143463A1 (ja) | 2022-12-28 | 2023-12-27 | 半導体製造装置用のチューブ |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2024143463A1 true JPWO2024143463A1 (https=) | 2024-07-04 |
Family
ID=91717823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024567927A Pending JPWO2024143463A1 (https=) | 2022-12-28 | 2023-12-27 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20250253164A1 (https=) |
| JP (1) | JPWO2024143463A1 (https=) |
| KR (1) | KR20250125342A (https=) |
| CN (1) | CN120500597A (https=) |
| WO (1) | WO2024143463A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2026048678A1 (ja) * | 2024-08-26 | 2026-03-05 | Ａｇｃ株式会社 | 共重合体の製造方法、成形体の製造方法 |
| WO2026048681A1 (ja) * | 2024-08-26 | 2026-03-05 | Ａｇｃ株式会社 | 固体組成物、固体組成物の製造方法及び成形体 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3424270B2 (ja) * | 1993-07-30 | 2003-07-07 | 旭硝子株式会社 | エチレン／テトラフルオロエチレン系共重合体 |
| US6645590B1 (en) * | 1998-06-28 | 2003-11-11 | E. I. Du Pont De Nemours And Company | Articles of functional fluoropolymer |
| JP2005178297A (ja) * | 2003-12-22 | 2005-07-07 | Daikin Ind Ltd | 含フッ素成形体及び半導体製造装置 |
| JPWO2014112592A1 (ja) * | 2013-01-18 | 2017-01-19 | 旭硝子株式会社 | エチレン−テトラフルオロエチレン共重合体乾燥物、ペレットおよび成形物の製造方法 |
| JPWO2016006644A1 (ja) * | 2014-07-09 | 2017-04-27 | 旭硝子株式会社 | 含フッ素共重合体および積層体 |
| CN104151754B (zh) * | 2014-08-15 | 2016-05-25 | 上海三爱富新材料股份有限公司 | 高流动性乙烯-四氟乙烯共聚物组合物及其制备方法 |
| CN105082495B (zh) * | 2015-07-07 | 2019-07-05 | 上海交通大学 | 一种氟树脂复合物的制造方法，氟树脂复合物及其制品成形 |
| EP3375796B1 (en) * | 2015-11-13 | 2020-07-15 | AGC Inc. | Copolymer and composition containing same |
| CN109219506B (zh) * | 2016-05-31 | 2021-06-04 | Ａｇｃ株式会社 | 氟树脂的制造方法 |
| US11865758B2 (en) | 2017-06-26 | 2024-01-09 | Chemours-Mitsui Fluoroproducts Co. Ltd. | Fluororesin molded article |
| EP3760649B1 (en) * | 2018-03-01 | 2024-01-24 | Daikin Industries, Ltd. | Method for manufacturing fluoropolymer |
-
2023
- 2023-12-27 JP JP2024567927A patent/JPWO2024143463A1/ja active Pending
- 2023-12-27 CN CN202380088591.XA patent/CN120500597A/zh active Pending
- 2023-12-27 KR KR1020257018332A patent/KR20250125342A/ko active Pending
- 2023-12-27 WO PCT/JP2023/046905 patent/WO2024143463A1/ja not_active Ceased
-
2025
- 2025-04-25 US US19/189,417 patent/US20250253164A1/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CN120500597A (zh) | 2025-08-15 |
| KR20250125342A (ko) | 2025-08-21 |
| US20250253164A1 (en) | 2025-08-07 |
| WO2024143463A1 (ja) | 2024-07-04 |