KR20240047381A - 광 투과성 적층체의 검사 방법 및 검사 장치 - Google Patents

광 투과성 적층체의 검사 방법 및 검사 장치 Download PDF

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Publication number
KR20240047381A
KR20240047381A KR1020247005419A KR20247005419A KR20240047381A KR 20240047381 A KR20240047381 A KR 20240047381A KR 1020247005419 A KR1020247005419 A KR 1020247005419A KR 20247005419 A KR20247005419 A KR 20247005419A KR 20240047381 A KR20240047381 A KR 20240047381A
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KR
South Korea
Prior art keywords
light
laminate
transmissive
transmitting
lower grip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247005419A
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English (en)
Korean (ko)
Inventor
코지 시젠
유우지 야마시타
Original Assignee
닛토덴코 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 닛토덴코 가부시키가이샤 filed Critical 닛토덴코 가부시키가이샤
Publication of KR20240047381A publication Critical patent/KR20240047381A/ko
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8861—Determining coordinates of flaws

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
KR1020247005419A 2021-08-25 2022-06-23 광 투과성 적층체의 검사 방법 및 검사 장치 Pending KR20240047381A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021136809A JP7596234B2 (ja) 2021-08-25 2021-08-25 光透過性積層体の検査方法および検査装置
JPJP-P-2021-136809 2021-08-25
PCT/JP2022/025044 WO2023026660A1 (ja) 2021-08-25 2022-06-23 光透過性積層体の検査方法および検査装置

Publications (1)

Publication Number Publication Date
KR20240047381A true KR20240047381A (ko) 2024-04-12

Family

ID=85322709

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247005419A Pending KR20240047381A (ko) 2021-08-25 2022-06-23 광 투과성 적층체의 검사 방법 및 검사 장치

Country Status (5)

Country Link
JP (2) JP7596234B2 (https=)
KR (1) KR20240047381A (https=)
CN (1) CN117836612A (https=)
TW (1) TW202309512A (https=)
WO (1) WO2023026660A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119375253A (zh) * 2024-12-30 2025-01-28 华翌智能装备(杭州)有限公司 一种基于aoi视觉检查的电路板自动检测装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005062165A (ja) 2003-07-28 2005-03-10 Nitto Denko Corp シート状製品の検査方法、検査システム、シート状製品、及び、画像表示装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06174650A (ja) * 1992-12-01 1994-06-24 Sony Corp 表示パネル外観検査装置
NL1006378C2 (nl) * 1997-06-23 1998-12-24 Tno Werkwijze en inrichting voor het inspecteren van een voorwerp met betrekking tot verstoringen.
JP2001264259A (ja) * 2000-03-16 2001-09-26 Konica Corp シート検査装置
JP4670090B2 (ja) * 2000-08-11 2011-04-13 味の素株式会社 可撓性プラスチック容器の異物検査装置及びその異物検査方法
JP4560916B2 (ja) * 2000-08-11 2010-10-13 味の素株式会社 可撓性プラスチック容器の異物検査装置
JP2004077261A (ja) * 2002-08-16 2004-03-11 Horiba Ltd 液晶パネルの異物検査装置および異物検査方法
JP2005134573A (ja) * 2003-10-29 2005-05-26 Seiko Epson Corp 検査方法および検査装置
KR100789659B1 (ko) * 2005-03-31 2007-12-31 에버테크노 주식회사 편광필름 검사장치 및 방법
JP2007163315A (ja) * 2005-12-14 2007-06-28 Tokuyama Corp 透明材料中の欠陥の形状及び位置の計測方法
JP2012002676A (ja) * 2010-06-17 2012-01-05 Toshiba Corp マスク欠陥検査装置およびマスク欠陥検査方法
JP2014119255A (ja) * 2012-12-13 2014-06-30 Mitsubishi Electric Corp 光学フィルムの検査装置および光学フィルムの検査方法
US9816940B2 (en) * 2015-01-21 2017-11-14 Kla-Tencor Corporation Wafer inspection with focus volumetric method
WO2019039331A1 (ja) * 2017-08-24 2019-02-28 日本電気硝子株式会社 板ガラスの製造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005062165A (ja) 2003-07-28 2005-03-10 Nitto Denko Corp シート状製品の検査方法、検査システム、シート状製品、及び、画像表示装置

Also Published As

Publication number Publication date
WO2023026660A1 (ja) 2023-03-02
TW202309512A (zh) 2023-03-01
CN117836612A (zh) 2024-04-05
JP2025019281A (ja) 2025-02-06
JP2023031371A (ja) 2023-03-09
JP7596234B2 (ja) 2024-12-09

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PA0105 International application

Patent event date: 20240216

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20250610

Comment text: Request for Examination of Application