KR20230059894A - 증착 소스 및 표시 장치의 제조 장치 - Google Patents
증착 소스 및 표시 장치의 제조 장치 Download PDFInfo
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- KR20230059894A KR20230059894A KR1020210143037A KR20210143037A KR20230059894A KR 20230059894 A KR20230059894 A KR 20230059894A KR 1020210143037 A KR1020210143037 A KR 1020210143037A KR 20210143037 A KR20210143037 A KR 20210143037A KR 20230059894 A KR20230059894 A KR 20230059894A
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Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electroluminescent Light Sources (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020210143037A KR20230059894A (ko) | 2021-10-25 | 2021-10-25 | 증착 소스 및 표시 장치의 제조 장치 |
| CN202221808768.8U CN218291085U (zh) | 2021-10-25 | 2022-07-13 | 沉积源及显示装置的制造装置 |
| CN202210825069.2A CN116024531A (zh) | 2021-10-25 | 2022-07-13 | 沉积源及显示装置的制造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020210143037A KR20230059894A (ko) | 2021-10-25 | 2021-10-25 | 증착 소스 및 표시 장치의 제조 장치 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20230059894A true KR20230059894A (ko) | 2023-05-04 |
Family
ID=84789168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020210143037A KR20230059894A (ko) | 2021-10-25 | 2021-10-25 | 증착 소스 및 표시 장치의 제조 장치 |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR20230059894A (zh) |
| CN (2) | CN218291085U (zh) |
-
2021
- 2021-10-25 KR KR1020210143037A patent/KR20230059894A/ko active Search and Examination
-
2022
- 2022-07-13 CN CN202221808768.8U patent/CN218291085U/zh active Active
- 2022-07-13 CN CN202210825069.2A patent/CN116024531A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CN116024531A (zh) | 2023-04-28 |
| CN218291085U (zh) | 2023-01-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination |