KR20220161310A - 증착 마스크, 증착 마스크의 제조 방법, 및, 표시 장치의 제조 방법 - Google Patents
증착 마스크, 증착 마스크의 제조 방법, 및, 표시 장치의 제조 방법 Download PDFInfo
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- KR20220161310A KR20220161310A KR1020227033224A KR20227033224A KR20220161310A KR 20220161310 A KR20220161310 A KR 20220161310A KR 1020227033224 A KR1020227033224 A KR 1020227033224A KR 20227033224 A KR20227033224 A KR 20227033224A KR 20220161310 A KR20220161310 A KR 20220161310A
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Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/1201—Manufacture or treatment
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- H01L51/0011—
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physical Vapour Deposition (AREA)
- Electroluminescent Light Sources (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020065160 | 2020-03-31 | ||
| JPJP-P-2020-065160 | 2020-03-31 | ||
| JPJP-P-2021-022158 | 2021-02-15 | ||
| JP2021022158A JP2021161535A (ja) | 2020-03-31 | 2021-02-15 | 蒸着マスク、蒸着マスクの製造方法、および、表示装置の製造方法 |
| PCT/JP2021/013916 WO2021201124A1 (ja) | 2020-03-31 | 2021-03-31 | 蒸着マスク、蒸着マスクの製造方法、および、表示装置の製造方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20220161310A true KR20220161310A (ko) | 2022-12-06 |
Family
ID=77928553
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020227033224A KR20220161310A (ko) | 2020-03-31 | 2021-03-31 | 증착 마스크, 증착 마스크의 제조 방법, 및, 표시 장치의 제조 방법 |
Country Status (4)
| Country | Link |
|---|---|
| KR (1) | KR20220161310A (zh) |
| CN (1) | CN115398027A (zh) |
| TW (1) | TW202140820A (zh) |
| WO (1) | WO2021201124A1 (zh) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019054462A1 (ja) | 2017-09-15 | 2019-03-21 | 凸版印刷株式会社 | 蒸着マスクの製造方法、表示装置の製造方法、および、蒸着マスク |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4396251B2 (ja) * | 2003-12-09 | 2010-01-13 | 凸版印刷株式会社 | 有機ｅｌ用蒸着マスクの製造方法 |
| KR20070082317A (ko) * | 2006-02-16 | 2007-08-21 | 삼성전자주식회사 | 마스크 및 그 제조 방법 |
| KR100741138B1 (ko) * | 2006-09-05 | 2007-07-19 | 삼성에스디아이 주식회사 | 박막 증착용 마스크 프레임 조립체 및 이를 이용한 유기발광 표시장치의 제조방법 |
| TWM508803U (zh) * | 2013-11-20 | 2015-09-11 | Applied Materials Inc | 用於製造有機發光二極體（ｏｌｅｄ）的陶瓷遮罩組件 |
| CN108034923B (zh) * | 2018-01-24 | 2020-06-05 | 武汉华星光电半导体显示技术有限公司 | 掩模组件、掩模框架以及掩模支撑架 |
-
2021
- 2021-03-29 TW TW110111314A patent/TW202140820A/zh unknown
- 2021-03-31 KR KR1020227033224A patent/KR20220161310A/ko unknown
- 2021-03-31 CN CN202180024875.3A patent/CN115398027A/zh active Pending
- 2021-03-31 WO PCT/JP2021/013916 patent/WO2021201124A1/ja active Application Filing
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019054462A1 (ja) | 2017-09-15 | 2019-03-21 | 凸版印刷株式会社 | 蒸着マスクの製造方法、表示装置の製造方法、および、蒸着マスク |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2021201124A1 (ja) | 2021-10-07 |
| TW202140820A (zh) | 2021-11-01 |
| CN115398027A (zh) | 2022-11-25 |
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