KR20220116355A - 다중 축 공작 기계, 이를 제어하는 방법들 및 관련 배치들 - Google Patents

다중 축 공작 기계, 이를 제어하는 방법들 및 관련 배치들 Download PDF

Info

Publication number
KR20220116355A
KR20220116355A KR1020227027557A KR20227027557A KR20220116355A KR 20220116355 A KR20220116355 A KR 20220116355A KR 1020227027557 A KR1020227027557 A KR 1020227027557A KR 20227027557 A KR20227027557 A KR 20227027557A KR 20220116355 A KR20220116355 A KR 20220116355A
Authority
KR
South Korea
Prior art keywords
axis
actuator
workpiece
tool
actuators
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020227027557A
Other languages
English (en)
Korean (ko)
Inventor
구앙 루
브라이언 요한센
마크 코스모우스키
호 웨이 로
광규 리
Original Assignee
일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 filed Critical 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드
Publication of KR20220116355A publication Critical patent/KR20220116355A/ko
Ceased legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0869—Devices involving movement of the laser head in at least one axial direction
    • B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
    • B23K26/0884—Devices involving movement of the laser head in at least one axial direction in at least two axial directions in at least in three axial directions, e.g. manipulators, robots
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • B23K26/128—Laser beam path enclosures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B23K26/706—Protective screens

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Numerical Control (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Valve Device For Special Equipments (AREA)
KR1020227027557A 2017-05-05 2018-04-30 다중 축 공작 기계, 이를 제어하는 방법들 및 관련 배치들 Ceased KR20220116355A (ko)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US201762502311P 2017-05-05 2017-05-05
US62/502,311 2017-05-05
US201762511072P 2017-05-25 2017-05-25
US62/511,072 2017-05-25
KR1020197034734A KR102490377B1 (ko) 2017-05-05 2018-04-30 다중 축 공작 기계, 이를 제어하는 방법들 및 관련 배치들
PCT/US2018/030152 WO2018204241A1 (en) 2017-05-05 2018-04-30 Multi-axis machine tool, methods of controlling the same and related arrangements

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020197034734A Division KR102490377B1 (ko) 2017-05-05 2018-04-30 다중 축 공작 기계, 이를 제어하는 방법들 및 관련 배치들

Publications (1)

Publication Number Publication Date
KR20220116355A true KR20220116355A (ko) 2022-08-22

Family

ID=64016684

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020227027557A Ceased KR20220116355A (ko) 2017-05-05 2018-04-30 다중 축 공작 기계, 이를 제어하는 방법들 및 관련 배치들
KR1020197034734A Active KR102490377B1 (ko) 2017-05-05 2018-04-30 다중 축 공작 기계, 이를 제어하는 방법들 및 관련 배치들

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020197034734A Active KR102490377B1 (ko) 2017-05-05 2018-04-30 다중 축 공작 기계, 이를 제어하는 방법들 및 관련 배치들

Country Status (8)

Country Link
US (2) US20210276125A1 (enExample)
EP (1) EP3618997A4 (enExample)
JP (2) JP2020519446A (enExample)
KR (2) KR20220116355A (enExample)
CN (1) CN110573292A (enExample)
SG (1) SG11201909363WA (enExample)
TW (2) TW201902605A (enExample)
WO (1) WO2018204241A1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12145216B2 (en) * 2017-05-15 2024-11-19 The Trustees Of The University Of Pennsylvania Systems and methods for laser cleaving diamonds
WO2020081500A1 (en) * 2018-10-16 2020-04-23 Electro Scientific Industries, Inc. Frame and exterior shrouding for laser processing system
JP7181790B2 (ja) * 2018-12-28 2022-12-01 株式会社キーエンス レーザ加工装置
JP6898366B2 (ja) * 2019-01-22 2021-07-07 ファナック株式会社 ロボット装置及び熱変位量推定装置
US12103110B2 (en) * 2019-03-22 2024-10-01 Via Mechanics, Ltd. Laser processing apparatus and laser processing method
RU194549U1 (ru) * 2019-06-04 2019-12-13 Илья Андреевич Богданов Многофункциональный станок с числовым программным управлением
CN110883486B (zh) * 2019-12-24 2025-07-18 东莞市科泰汽车检夹具有限公司 一种用于工件焊接的定位装置
TWI718945B (zh) * 2020-05-12 2021-02-11 國立彰化師範大學 主動式恆定施力感測控制系統
US20230211437A1 (en) * 2020-07-15 2023-07-06 Fanuc Corporation Laser machining system
TWI738601B (zh) 2020-07-28 2021-09-01 盟立自動化股份有限公司 工具的移動路徑的生成方法
TWI769915B (zh) 2021-08-26 2022-07-01 財團法人工業技術研究院 投射系統及應用其之投射校準方法
KR102570759B1 (ko) * 2022-06-30 2023-08-25 최병찬 레이저 절삭 가공장치 및 이의 가공방법
TWI843251B (zh) 2022-10-25 2024-05-21 財團法人工業技術研究院 目標追蹤系統及應用其之目標追蹤方法

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2833489B2 (ja) * 1993-09-27 1998-12-09 三菱電機株式会社 レーザ加工機
CN2216443Y (zh) * 1994-07-18 1996-01-03 王佛性 激光加工机的变焦距光学聚焦系统
JPH09122944A (ja) * 1995-10-26 1997-05-13 Amada Co Ltd レーザ加工機
US6528762B2 (en) 2001-02-12 2003-03-04 W. A. Whitney Co. Laser beam position control apparatus for a CNC laser equipped machine tool
US6706999B1 (en) * 2003-02-24 2004-03-16 Electro Scientific Industries, Inc. Laser beam tertiary positioner apparatus and method
DE202004021725U1 (de) 2004-06-05 2010-07-15 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Laserbearbeitungsmaschine mit Strahldiagnosevorrichtung zur Bestimmung wenigstens eines Strahlkenndatums eines Laserstrahls an einer Laserbearbeitungsmaschine
JP5266647B2 (ja) * 2006-03-23 2013-08-21 日産自動車株式会社 レーザ溶接装置およびその調整方法
JP5201975B2 (ja) * 2007-12-14 2013-06-05 株式会社キーエンス レーザ加工装置、レーザ加工方法
US8392002B2 (en) 2010-10-14 2013-03-05 Delta Tau Data Systems, Inc. Hybrid machine control incorporating fast-tool servos
CN103212854B (zh) * 2012-01-19 2016-04-27 昆山思拓机器有限公司 激光切割加工方法
JP5994168B2 (ja) * 2012-03-26 2016-09-21 邦男 荒井 Ｘ、ｙ独立駆動方式のレーザー加工装置
CN102773612B (zh) * 2012-06-07 2015-06-10 江阴德力激光设备有限公司 一种振镜式紫外激光切割晶圆芯片装置及其方法
US9718146B2 (en) * 2013-06-03 2017-08-01 Mitsubishi Electric Research Laboratories, Inc. System and method for calibrating laser processing machines
CN203719627U (zh) * 2014-01-20 2014-07-16 东莞市亿辉光电科技有限公司 全自动大平面三维影像测量仪
JP6847865B2 (ja) * 2015-06-22 2021-03-24 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド 多軸工作機械及びこれを制御する方法
CN106392330B (zh) * 2016-06-13 2017-12-05 济南新天科技有限公司 大幅面分割拼接激光打标机

Also Published As

Publication number Publication date
EP3618997A1 (en) 2020-03-11
KR20190138876A (ko) 2019-12-16
EP3618997A4 (en) 2021-06-02
KR102490377B1 (ko) 2023-01-19
US20220410315A1 (en) 2022-12-29
TW201902605A (zh) 2019-01-16
JP2022169542A (ja) 2022-11-09
JP2020519446A (ja) 2020-07-02
WO2018204241A1 (en) 2018-11-08
CN110573292A (zh) 2019-12-13
TW202300267A (zh) 2023-01-01
US20210276125A1 (en) 2021-09-09
SG11201909363WA (en) 2019-11-28

Similar Documents

Publication Publication Date Title
KR102490377B1 (ko) 다중 축 공작 기계, 이를 제어하는 방법들 및 관련 배치들
JP7717128B2 (ja) 多軸工作機械
CA2924823C (en) Laser processing systems capable of dithering
CN102642082B (zh) 具有可切换激光系统的激光加工设备和激光加工方法
US10337335B2 (en) Method for manufacturing a metallic or ceramic component by selective laser melting additive manufacturing
JP2020519446A5 (enExample)
Sepold et al. 7 Laser systems for materials processing: 2 Production engineering

Legal Events

Date Code Title Description
A107 Divisional application of patent
A201 Request for examination
PA0104 Divisional application for international application

Comment text: Divisional Application for International Patent

Patent event code: PA01041R01D

Patent event date: 20220809

Application number text: 1020197034734

Filing date: 20191125

PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20220809

Comment text: Request for Examination of Application

PG1501 Laying open of application
E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20230403

Patent event code: PE09021S01D

E601 Decision to refuse application
PE0601 Decision on rejection of patent

Patent event date: 20230717

Comment text: Decision to Refuse Application

Patent event code: PE06012S01D

Patent event date: 20230403

Comment text: Notification of reason for refusal

Patent event code: PE06011S01I