JP2020519446A - 多軸加工ツール、これを制御する方法及び関連する構成 - Google Patents

多軸加工ツール、これを制御する方法及び関連する構成 Download PDF

Info

Publication number
JP2020519446A
JP2020519446A JP2019560726A JP2019560726A JP2020519446A JP 2020519446 A JP2020519446 A JP 2020519446A JP 2019560726 A JP2019560726 A JP 2019560726A JP 2019560726 A JP2019560726 A JP 2019560726A JP 2020519446 A JP2020519446 A JP 2020519446A
Authority
JP
Japan
Prior art keywords
axis
actuator
tool
workpiece
axis actuator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2019560726A
Other languages
English (en)
Japanese (ja)
Other versions
JP2020519446A5 (enExample
Inventor
ルー，グアン
ヨハンセン，ブライアン
コスモフスキ，マーク
ロー，ホー，ウェイ
リー，グゥアンギュー
Original Assignee
エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド
エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド, エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド filed Critical エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド
Publication of JP2020519446A publication Critical patent/JP2020519446A/ja
Publication of JP2020519446A5 publication Critical patent/JP2020519446A5/ja
Priority to JP2022121116A priority Critical patent/JP2022169542A/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0869—Devices involving movement of the laser head in at least one axial direction
    • B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
    • B23K26/0884—Devices involving movement of the laser head in at least one axial direction in at least two axial directions in at least in three axial directions, e.g. manipulators, robots
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • B23K26/128—Laser beam path enclosures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment
    • B23K26/706—Protective screens

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Numerical Control (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Valve Device For Special Equipments (AREA)
JP2019560726A 2017-05-05 2018-04-30 多軸加工ツール、これを制御する方法及び関連する構成 Pending JP2020519446A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2022121116A JP2022169542A (ja) 2017-05-05 2022-07-29 多軸加工ツール、これを制御する方法及び関連する構成

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201762502311P 2017-05-05 2017-05-05
US62/502,311 2017-05-05
US201762511072P 2017-05-25 2017-05-25
US62/511,072 2017-05-25
PCT/US2018/030152 WO2018204241A1 (en) 2017-05-05 2018-04-30 Multi-axis machine tool, methods of controlling the same and related arrangements

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2022121116A Division JP2022169542A (ja) 2017-05-05 2022-07-29 多軸加工ツール、これを制御する方法及び関連する構成

Publications (2)

Publication Number Publication Date
JP2020519446A true JP2020519446A (ja) 2020-07-02
JP2020519446A5 JP2020519446A5 (enExample) 2021-05-27

Family

ID=64016684

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2019560726A Pending JP2020519446A (ja) 2017-05-05 2018-04-30 多軸加工ツール、これを制御する方法及び関連する構成
JP2022121116A Pending JP2022169542A (ja) 2017-05-05 2022-07-29 多軸加工ツール、これを制御する方法及び関連する構成

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2022121116A Pending JP2022169542A (ja) 2017-05-05 2022-07-29 多軸加工ツール、これを制御する方法及び関連する構成

Country Status (8)

Country Link
US (2) US20210276125A1 (enExample)
EP (1) EP3618997A4 (enExample)
JP (2) JP2020519446A (enExample)
KR (2) KR20220116355A (enExample)
CN (1) CN110573292A (enExample)
SG (1) SG11201909363WA (enExample)
TW (2) TW201902605A (enExample)
WO (1) WO2018204241A1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12145216B2 (en) * 2017-05-15 2024-11-19 The Trustees Of The University Of Pennsylvania Systems and methods for laser cleaving diamonds
WO2020081500A1 (en) * 2018-10-16 2020-04-23 Electro Scientific Industries, Inc. Frame and exterior shrouding for laser processing system
JP7181790B2 (ja) * 2018-12-28 2022-12-01 株式会社キーエンス レーザ加工装置
JP6898366B2 (ja) * 2019-01-22 2021-07-07 ファナック株式会社 ロボット装置及び熱変位量推定装置
US12103110B2 (en) * 2019-03-22 2024-10-01 Via Mechanics, Ltd. Laser processing apparatus and laser processing method
RU194549U1 (ru) * 2019-06-04 2019-12-13 Илья Андреевич Богданов Многофункциональный станок с числовым программным управлением
CN110883486B (zh) * 2019-12-24 2025-07-18 东莞市科泰汽车检夹具有限公司 一种用于工件焊接的定位装置
TWI718945B (zh) * 2020-05-12 2021-02-11 國立彰化師範大學 主動式恆定施力感測控制系統
US20230211437A1 (en) * 2020-07-15 2023-07-06 Fanuc Corporation Laser machining system
TWI738601B (zh) 2020-07-28 2021-09-01 盟立自動化股份有限公司 工具的移動路徑的生成方法
TWI769915B (zh) 2021-08-26 2022-07-01 財團法人工業技術研究院 投射系統及應用其之投射校準方法
KR102570759B1 (ko) * 2022-06-30 2023-08-25 최병찬 레이저 절삭 가공장치 및 이의 가공방법
TWI843251B (zh) 2022-10-25 2024-05-21 財團法人工業技術研究院 目標追蹤系統及應用其之目標追蹤方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07148592A (ja) * 1993-09-27 1995-06-13 Mitsubishi Electric Corp レーザ加工機
JPH09122944A (ja) * 1995-10-26 1997-05-13 Amada Co Ltd レーザ加工機
JP2013198934A (ja) * 2012-03-26 2013-10-03 Kunio Arai Ｘ、ｙ独立駆動方式のレーザー加工装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2216443Y (zh) * 1994-07-18 1996-01-03 王佛性 激光加工机的变焦距光学聚焦系统
US6528762B2 (en) 2001-02-12 2003-03-04 W. A. Whitney Co. Laser beam position control apparatus for a CNC laser equipped machine tool
US6706999B1 (en) * 2003-02-24 2004-03-16 Electro Scientific Industries, Inc. Laser beam tertiary positioner apparatus and method
DE202004021725U1 (de) 2004-06-05 2010-07-15 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Laserbearbeitungsmaschine mit Strahldiagnosevorrichtung zur Bestimmung wenigstens eines Strahlkenndatums eines Laserstrahls an einer Laserbearbeitungsmaschine
JP5266647B2 (ja) * 2006-03-23 2013-08-21 日産自動車株式会社 レーザ溶接装置およびその調整方法
JP5201975B2 (ja) * 2007-12-14 2013-06-05 株式会社キーエンス レーザ加工装置、レーザ加工方法
US8392002B2 (en) 2010-10-14 2013-03-05 Delta Tau Data Systems, Inc. Hybrid machine control incorporating fast-tool servos
CN103212854B (zh) * 2012-01-19 2016-04-27 昆山思拓机器有限公司 激光切割加工方法
CN102773612B (zh) * 2012-06-07 2015-06-10 江阴德力激光设备有限公司 一种振镜式紫外激光切割晶圆芯片装置及其方法
US9718146B2 (en) * 2013-06-03 2017-08-01 Mitsubishi Electric Research Laboratories, Inc. System and method for calibrating laser processing machines
CN203719627U (zh) * 2014-01-20 2014-07-16 东莞市亿辉光电科技有限公司 全自动大平面三维影像测量仪
JP6847865B2 (ja) * 2015-06-22 2021-03-24 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド 多軸工作機械及びこれを制御する方法
CN106392330B (zh) * 2016-06-13 2017-12-05 济南新天科技有限公司 大幅面分割拼接激光打标机

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07148592A (ja) * 1993-09-27 1995-06-13 Mitsubishi Electric Corp レーザ加工機
JPH09122944A (ja) * 1995-10-26 1997-05-13 Amada Co Ltd レーザ加工機
JP2013198934A (ja) * 2012-03-26 2013-10-03 Kunio Arai Ｘ、ｙ独立駆動方式のレーザー加工装置

Also Published As

Publication number Publication date
EP3618997A1 (en) 2020-03-11
KR20220116355A (ko) 2022-08-22
KR20190138876A (ko) 2019-12-16
EP3618997A4 (en) 2021-06-02
KR102490377B1 (ko) 2023-01-19
US20220410315A1 (en) 2022-12-29
TW201902605A (zh) 2019-01-16
JP2022169542A (ja) 2022-11-09
WO2018204241A1 (en) 2018-11-08
CN110573292A (zh) 2019-12-13
TW202300267A (zh) 2023-01-01
US20210276125A1 (en) 2021-09-09
SG11201909363WA (en) 2019-11-28

Similar Documents

Publication Publication Date Title
KR102490377B1 (ko) 다중 축 공작 기계, 이를 제어하는 방법들 및 관련 배치들
JP7717128B2 (ja) 多軸工作機械
US8916798B2 (en) Laser machining apparatus with switchable laser system and laser machining method
CA2924823C (en) Laser processing systems capable of dithering
CN112091421B (zh) 镭射处理设备、镭射处理工件的方法及相关配置
JP2020519446A5 (enExample)
CN109014615A (zh) 一种短脉宽激光切割装置及其切割方法
Sepold et al. 7 Laser systems for materials processing: 2 Production engineering

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210415

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20210415

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20220224

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220301

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20220525

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20221004