TW201902605A - 多軸工具、其控制方法和相關配置 - Google Patents

多軸工具、其控制方法和相關配置 Download PDF

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Publication number
TW201902605A
TW201902605A TW107115277A TW107115277A TW201902605A TW 201902605 A TW201902605 A TW 201902605A TW 107115277 A TW107115277 A TW 107115277A TW 107115277 A TW107115277 A TW 107115277A TW 201902605 A TW201902605 A TW 201902605A
Authority
TW
Taiwan
Prior art keywords
axis
actuator
frequency
workpiece
axis actuator
Prior art date
Application number
TW107115277A
Other languages
English (en)
Chinese (zh)
Inventor
廣 陸
布萊恩 強漢森
馬克 寇摩斯基
可偉 盧
李光宇
Original Assignee
美商伊雷克托科學工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商伊雷克托科學工業股份有限公司 filed Critical 美商伊雷克托科學工業股份有限公司
Publication of TW201902605A publication Critical patent/TW201902605A/zh

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0643Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/0869Devices involving movement of the laser head in at least one axial direction
    • B23K26/0876Devices involving movement of the laser head in at least one axial direction in at least two axial directions
    • B23K26/0884Devices involving movement of the laser head in at least one axial direction in at least two axial directions in at least in three axial directions, e.g. manipulators, robots
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/127Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an enclosure
    • B23K26/128Laser beam path enclosures
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • B23K26/706Protective screens

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Numerical Control (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Valve Device For Special Equipments (AREA)
TW107115277A 2017-05-05 2018-05-04 多軸工具、其控制方法和相關配置 TW201902605A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201762502311P 2017-05-05 2017-05-05
US62/502,311 2017-05-05
US201762511072P 2017-05-25 2017-05-25
US62/511,072 2017-05-25

Publications (1)

Publication Number Publication Date
TW201902605A true TW201902605A (zh) 2019-01-16

Family

ID=64016684

Family Applications (2)

Application Number Title Priority Date Filing Date
TW107115277A TW201902605A (zh) 2017-05-05 2018-05-04 多軸工具、其控制方法和相關配置
TW111134786A TW202300267A (zh) 2017-05-05 2018-05-04 多軸工具機、其控制方法和相關配置

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW111134786A TW202300267A (zh) 2017-05-05 2018-05-04 多軸工具機、其控制方法和相關配置

Country Status (8)

Country Link
US (2) US20210276125A1 (enExample)
EP (1) EP3618997A4 (enExample)
JP (2) JP2020519446A (enExample)
KR (2) KR20220116355A (enExample)
CN (1) CN110573292A (enExample)
SG (1) SG11201909363WA (enExample)
TW (2) TW201902605A (enExample)
WO (1) WO2018204241A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI718945B (zh) * 2020-05-12 2021-02-11 國立彰化師範大學 主動式恆定施力感測控制系統
TWI738601B (zh) * 2020-07-28 2021-09-01 盟立自動化股份有限公司 工具的移動路徑的生成方法
US12028642B2 (en) 2022-10-25 2024-07-02 Industrial Technology Research Institute Target tracking system and target tracking method using the same
US12023565B2 (en) 2021-08-26 2024-07-02 Industrial Technology Research Institute Projection system and projection calibration method using the same

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US12145216B2 (en) * 2017-05-15 2024-11-19 The Trustees Of The University Of Pennsylvania Systems and methods for laser cleaving diamonds
WO2020081500A1 (en) * 2018-10-16 2020-04-23 Electro Scientific Industries, Inc. Frame and exterior shrouding for laser processing system
JP7181790B2 (ja) * 2018-12-28 2022-12-01 株式会社キーエンス レーザ加工装置
JP6898366B2 (ja) * 2019-01-22 2021-07-07 ファナック株式会社 ロボット装置及び熱変位量推定装置
US12103110B2 (en) * 2019-03-22 2024-10-01 Via Mechanics, Ltd. Laser processing apparatus and laser processing method
RU194549U1 (ru) * 2019-06-04 2019-12-13 Илья Андреевич Богданов Многофункциональный станок с числовым программным управлением
CN110883486B (zh) * 2019-12-24 2025-07-18 东莞市科泰汽车检夹具有限公司 一种用于工件焊接的定位装置
US20230211437A1 (en) * 2020-07-15 2023-07-06 Fanuc Corporation Laser machining system
KR102570759B1 (ko) * 2022-06-30 2023-08-25 최병찬 레이저 절삭 가공장치 및 이의 가공방법

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JP2833489B2 (ja) * 1993-09-27 1998-12-09 三菱電機株式会社 レーザ加工機
CN2216443Y (zh) * 1994-07-18 1996-01-03 王佛性 激光加工机的变焦距光学聚焦系统
JPH09122944A (ja) * 1995-10-26 1997-05-13 Amada Co Ltd レーザ加工機
US6528762B2 (en) 2001-02-12 2003-03-04 W. A. Whitney Co. Laser beam position control apparatus for a CNC laser equipped machine tool
US6706999B1 (en) * 2003-02-24 2004-03-16 Electro Scientific Industries, Inc. Laser beam tertiary positioner apparatus and method
DE202004021725U1 (de) 2004-06-05 2010-07-15 Trumpf Werkzeugmaschinen Gmbh + Co. Kg Laserbearbeitungsmaschine mit Strahldiagnosevorrichtung zur Bestimmung wenigstens eines Strahlkenndatums eines Laserstrahls an einer Laserbearbeitungsmaschine
JP5266647B2 (ja) * 2006-03-23 2013-08-21 日産自動車株式会社 レーザ溶接装置およびその調整方法
JP5201975B2 (ja) * 2007-12-14 2013-06-05 株式会社キーエンス レーザ加工装置、レーザ加工方法
US8392002B2 (en) 2010-10-14 2013-03-05 Delta Tau Data Systems, Inc. Hybrid machine control incorporating fast-tool servos
CN103212854B (zh) * 2012-01-19 2016-04-27 昆山思拓机器有限公司 激光切割加工方法
JP5994168B2 (ja) * 2012-03-26 2016-09-21 邦男 荒井 X、y独立駆動方式のレーザー加工装置
CN102773612B (zh) * 2012-06-07 2015-06-10 江阴德力激光设备有限公司 一种振镜式紫外激光切割晶圆芯片装置及其方法
US9718146B2 (en) * 2013-06-03 2017-08-01 Mitsubishi Electric Research Laboratories, Inc. System and method for calibrating laser processing machines
CN203719627U (zh) * 2014-01-20 2014-07-16 东莞市亿辉光电科技有限公司 全自动大平面三维影像测量仪
JP6847865B2 (ja) * 2015-06-22 2021-03-24 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド 多軸工作機械及びこれを制御する方法
CN106392330B (zh) * 2016-06-13 2017-12-05 济南新天科技有限公司 大幅面分割拼接激光打标机

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI718945B (zh) * 2020-05-12 2021-02-11 國立彰化師範大學 主動式恆定施力感測控制系統
TWI738601B (zh) * 2020-07-28 2021-09-01 盟立自動化股份有限公司 工具的移動路徑的生成方法
US11415959B2 (en) 2020-07-28 2022-08-16 Mirle Automation Corporation Method for generating movement path of tool
US12023565B2 (en) 2021-08-26 2024-07-02 Industrial Technology Research Institute Projection system and projection calibration method using the same
US12028642B2 (en) 2022-10-25 2024-07-02 Industrial Technology Research Institute Target tracking system and target tracking method using the same

Also Published As

Publication number Publication date
EP3618997A1 (en) 2020-03-11
KR20220116355A (ko) 2022-08-22
KR20190138876A (ko) 2019-12-16
EP3618997A4 (en) 2021-06-02
KR102490377B1 (ko) 2023-01-19
US20220410315A1 (en) 2022-12-29
JP2022169542A (ja) 2022-11-09
JP2020519446A (ja) 2020-07-02
WO2018204241A1 (en) 2018-11-08
CN110573292A (zh) 2019-12-13
TW202300267A (zh) 2023-01-01
US20210276125A1 (en) 2021-09-09
SG11201909363WA (en) 2019-11-28

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