KR20220072819A - Controlling method for electric current path using electric field and electric device - Google Patents

Abstract

According to an embodiment of the present invention, a plurality of first electrodes extending in a first direction and arranged to be spaced apart from each other in a second direction perpendicular to the first direction; a plurality of second electrodes extending in the second direction to intersect the plurality of first electrodes and spaced apart from each other in the first direction; active layers disposed between the plurality of first electrodes and the plurality of second electrodes in overlapping regions of the plurality of first electrodes and the second electrodes to form a lattice pattern on a plane; and an insulating portion positioned between the active layers on the plane, wherein the active layers include a spontaneously polarizable material, and each of the active layers is formed by a voltage applied to a corresponding first electrode and a second electrode. Disclosed is an electronic device in which a variable channel through which current can flow is selectively formed.

Description

Current path control method and electronic device using an electric field

Embodiments of the present invention relate to a method for controlling a current path using an electric field and an electronic device.

With the development of technology and increased interest in people's convenience in life, attempts to develop various electronic products are being actively pursued.

In addition, these electronic products are becoming smaller and more integrated, and the places where they are used are increasing widely.

Such electronic products include various electrical components, for example, CPUs, memories, and other various electrical components. These electronic devices may include various types of electrical circuits.

For example, electrical devices are used in products in various fields, such as home sensor devices for IoT, bio-electronic devices for ergonomics, as well as computers and smart phones.

With the recent speed of technological development and the rapid improvement of the living standards of users, the use and application fields of these electrical devices are rapidly increasing, and the demand thereof is also increasing accordingly.

According to this trend, there is a limit to realizing and controlling an electric circuit that is easily and quickly applied to various electric devices that are commonly used.

Embodiments of the present invention provide a current path control method and electronic device that can be easily applied to various uses.

According to an embodiment of the present invention, a plurality of first electrodes extending in a first direction and arranged to be spaced apart from each other in a second direction perpendicular to the first direction; a plurality of second electrodes extending in the second direction to intersect the plurality of first electrodes and spaced apart from each other in the first direction; active layers disposed between the plurality of first electrodes and the plurality of second electrodes in overlapping regions of the plurality of first electrodes and the second electrodes to form a lattice pattern on a plane; and an insulating portion positioned between the active layers on the plane, wherein the active layers include a spontaneously polarizable material, and each of the active layers is formed by a voltage applied to a corresponding first electrode and a second electrode. Disclosed is an electronic device in which a variable channel through which current can flow is selectively formed.

In the present embodiment, each of the plurality of first electrodes includes a first protrusion that protrudes toward the second electrode and extends in the first direction, and each of the plurality of second electrodes includes the second electrode. a second protrusion protruding toward the first electrode and extending in the second direction, wherein each of the active layers includes a first area overlapping the first protrusion and the second protrusion and a periphery of the first area A second region may be included, and a thickness of the first region may be smaller than a thickness of the second region.

In this embodiment, the second region has a first polarization, and the first region is selectively different from the first polarization or the first polarization by applying a voltage to the corresponding first electrode and the second electrode. It may have a second polarization.

In the present embodiment, when the first region has the second polarization, the variable channel may be formed at a boundary between the first region and the second region in a vertical direction.

In this embodiment, the insulating portion may be in contact with side surfaces of the active layers.

In this embodiment, voltages may be independently applied to the plurality of first electrodes and the plurality of second electrodes.

In another embodiment of the present invention, a plurality of first electrodes extending in a first direction and arranged to be spaced apart from each other in a second direction perpendicular to the first direction, extending in the second direction, the plurality of first electrodes a plurality of second electrodes intersecting electrodes and spaced apart from each other in the first direction, between the plurality of first electrodes and the plurality of second electrodes, the plurality of first electrodes and the second electrode In the electronic device comprising: active layers disposed in overlapping regions of the lattice patterns to form a lattice pattern on a plane; and an insulating part positioned between the active layers on the plane, the plurality of first electrodes and the plurality of second electrodes generating a first electric field in at least one of the overlapping regions; changing the polarization direction of a portion of the active layer in at least one of the overlapping regions by the first electric field, so that the active layer is partitioned into a first region and a second region having different polarizations; and forming a variable channel through which a current can flow at a boundary between the first region and the second region.

In this embodiment, each of the plurality of first electrodes includes a first protrusion protruding toward the plurality of second electrodes, and each of the plurality of second electrodes faces the plurality of first electrodes. and a second protrusion protruding so as to be formed, wherein the first region is a region overlapping the first protrusion and the second protrusion in a vertical direction, and the variable channel is formed at a boundary between the first region and the second region. It may be formed in a vertical direction.

In this embodiment, the thickness of the first region may be smaller than the thickness of the second region.

In this embodiment, the insulating portion may be in contact with side surfaces of the active layers.

In this embodiment, the method further includes generating a second electric field in at least one of the overlapping regions through the plurality of first electrodes and the plurality of second electrodes, and by the second electric field The variable channel may disappear.

Other aspects, features and advantages other than those described above will become apparent from the following drawings, claims, and detailed description of the invention.

The current path control method and electronic device according to the present invention can be easily applied to various uses.

1 is a plan view schematically illustrating an example of an electronic device according to an embodiment of the present invention.
FIG. 2 is a cross-sectional view schematically illustrating an example of a cross-section II′ of FIG. 1 .
3 and 4 are cross-sectional views schematically illustrating an example of part A of FIG. 2 .
FIG. 5 is a plan view schematically illustrating an intersection area of one first electrode and one second electrode in FIG. 1 .
6 is a cross-sectional view schematically illustrating an example of a cross-section II-II' of FIG. 1 .

Since the present invention can apply various transformations and can have various embodiments, specific embodiments are illustrated in the drawings and described in detail in the detailed description. Effects and features of the present invention, and a method for achieving them will become apparent with reference to the embodiments described below in detail in conjunction with the drawings. However, the present invention is not limited to the embodiments disclosed below and may be implemented in various forms.

In the following embodiments, terms such as first, second, etc. are used for the purpose of distinguishing one component from another, not in a limiting sense.

In the following examples, the singular expression includes the plural expression unless the context clearly dictates otherwise.

In the following embodiments, terms such as include or have means that the features or components described in the specification are present, and the possibility that one or more other features or components will be added is not excluded in advance.

In the following embodiments, when it is said that a part such as a film, region, or component is on or on another part, not only when it is directly on the other part, but also another film, region, component, etc. is interposed therebetween. Including cases where there is

In the drawings, the size of the components may be exaggerated or reduced for convenience of description. For example, since the size and thickness of each component shown in the drawings are arbitrarily indicated for convenience of description, the present invention is not necessarily limited to the illustrated bar.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, and the same or corresponding components are given the same reference numerals when described with reference to the drawings.

1 is a plan view schematically illustrating an example of an electronic device according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view schematically illustrating an example of a cross-section II′ of FIG. 1 .

1 and 2 , the electronic device 100 according to an embodiment of the present invention extends in a first direction (X) and is spaced apart from each other in a second direction (Y) perpendicular to the first direction (X). a plurality of first electrodes 110 arranged in the first direction, extending in the second direction Y, intersecting the plurality of first electrodes 110, and a plurality of second electrodes arranged spaced apart from each other in the first direction X The electrode 120 , the active layers 130 disposed in overlapping regions A of the plurality of first electrodes 110 and the plurality of second electrodes 120 , and an insulating portion positioned between the active layers 130 . (134).

ZnO) 등과 같은 금속 산화물을 포함할 수 있다.The plurality of first electrodes 110 and the plurality of second electrodes 120 are formed of a metal material such as platinum, gold, aluminum, silver or copper, a conductive polymer such as PEDOT:PSS or polyaniline, indium oxide ( eg In ₂ O ₃ ), tin oxide (eg SnO ₂ ), zinc oxide (eg ZnO), indium tin oxide alloy (eg In ₂ O ₃ *?*SnO ₂ ) or indium zinc oxide alloy (eg ZnO) Yes In ₂ O ₃

ZnO) and the like.

Each of the plurality of first electrodes 110 may include a first protrusion 112 protruding in a direction toward the active layer 130 . The first protrusion 112 may extend along the first direction X in the same manner as the corresponding first electrode 110 . For example, the length of the first protrusion 112 may be the same as the length of the corresponding first electrode 110 , and the first protrusion 112 may be integrally formed with the corresponding first electrode 110 . .

Each of the plurality of second electrodes 120 may include a second protrusion 122 protruding in a direction toward the active layer 130 . The second protrusion 122 may extend in the second direction Y in the same manner as the corresponding second electrode 120 . For example, the length of the second protrusion 122 may be the same as the length of the corresponding second electrode 120 , and the second protrusion 122 may be integrally formed with the corresponding second electrode 120 . .

The active layers 130 are formed between the plurality of first electrodes 110 and the plurality of second electrodes 120 , and overlapping regions A of the plurality of first electrodes 110 and the second electrodes 120 are formed. can be placed in Accordingly, the active layers 130 may form a lattice pattern on a plane.

The active layers 130 may include a spontaneously polarizable material. For example, the active layer 130 may include an insulating material and a ferroelectric material. That is, the active layer 130 includes a material having a spontaneous electric polarization (electric dipole) that can be reversed in the presence of an electric field, and can control the direction of polarization according to the application of the electric field, and the polarization even when the applied electric field is removed state can be maintained.

For example, the active layer 130 may include a perovskite-based material, for example, BaTiO ₃ , SrTiO _{3 ,} BiFe3, PbTiO3, PbZrO3, SrBi2Ta2O9.

As another example, the active layer 130 has an ABX ₃ structure, where A is an alkyl group of CnH2 _n+1 , and at least one material selected from inorganic materials such as Cs and Ru capable of forming a perovskite solar cell structure. B may include at least one material selected from the group consisting of Pb, Sn, Ti, Nb, Zr, and Ce, and X may include a halogen material. As a specific example, the active layer 130 is CH ₃ NH ₃ PbI ₃ , CH ₃ NH ₃ PbI _x Cl _3-x , MAPbI _{3 ,} CH ₃ NH ₃ PbI _x Br _3-x , CH ₃ NH ₃ PbClxBr _3-x , HC (NH ₂ ) ₂ PbI ₃ , HC(NH ₂ ) ₂ PbI _x Cl _3-x , HC(NH ₂ ) ₂ PbI _x Br _3-x , HC(NH ₂ ) ₂ PbCl _x Br _3-x , (CH ₃ NH ₃ )(HC(NH ₂ ) ₂ ) _1-y PbI ₃ , (CH ₃ NH ₃ )(HC(NH ₂ ) ₂ ) _1-y PbI _x Cl _3-x , (CH ₃ NH ₃ )(HC( NH ₂ ) ₂ ) _1-y PbI _x Br _3-x , or (CH ₃ NH ₃ )(HC(NH ₂ ) ₂ ) _1-y PbCl _x Br _3-x (0≤x, y≤1) can do.

Each of the active layers 130 may have a polarization direction partially changed by an electric field formed by a voltage applied to the corresponding first electrode 110 and the second electrode 120 , and as a result, current flows By forming a variable channel (C in FIG. 4 ) as a passage, the first electrode 110 and the second electrode 120 may be electrically connected. This will be described later in detail with reference to FIGS. 3 and 4 .

Meanwhile, in order to miniaturize the electronic device 100 , the distance between the first electrodes 110 and the distance between the second electrodes 120 inevitably decreases. As a result, since the gap between the adjacent active layers 130 is reduced, the other adjacent active layers 130 may be affected by the electric field applied to any one active layer 130 . In particular, when the active layers 130 are formed to have the same area as the first electrode 110 or the second electrode 120 , a variable channel (C in FIG. 4 ) is formed at an undesired location to form the electronic device 100 . may decrease the reliability of To prevent this, an insulating part 134 may be positioned between the active layers 130 .

The insulating part 134 may be positioned between the active layers 130 on a plan view and may come into contact with side surfaces of the active layers 130 . For example, when the active layers 130 form a grid pattern, the insulating portion 134 may have a mesh shape. As another example, the insulating part 134 may form the same pattern as the first electrodes 110 or the same pattern as the second electrodes 120 together with the active layers 130 .

Since the insulating portion 134 can limit the region of the active layer 130 to the overlapping region A of the first electrode 110 and the second electrode 120 , the variable channel (C in FIG. 4 ) is formed. It can be prevented from being formed outside the overlapping area (A). Accordingly, even when the size of the electronic device 100 is reduced, it is possible to prevent the decrease in the operational reliability of the electronic device 100 . For example, the insulating portion 134 is SiO, SiO ₂ , SiO ₃ N ₄ , PbBr, HfO ₂ , TaO ₅ , WO ₃ , ZrO ₂ and the like may be included.

3 and 4 are cross-sectional views schematically illustrating an example of part A of FIG. 2 , and FIG. 5 is a plan view schematically illustrating an intersection area of one first electrode and one second electrode in FIG. 1 .

3 to 5 describe the overlapping region A of one first electrode 110 and one second electrode 120, which is a plurality of first electrodes 110 and a plurality of second electrodes The same applies to all overlapping regions (A) of (120).

First, as shown in FIGS. 3 and 5 , the active layer 130 has a first protrusion 112 and a second protrusion in the overlapping region A of the first electrode 110 and the second electrode 120 . A first area A1 overlapping 122 in the vertical direction Z and a second area A2 around the first area A1 are included. Accordingly, the thickness of the active layer 130 in the first area A1 is smaller than the thickness of the active layer 130 in the second area A2 . For example, the second area A2 may surround the first area A1 .

Meanwhile, as described above, the direction of polarization of the active layer 130 may be changed according to the application of the electric field, and the polarization state may be maintained even when the applied electric field is removed. More specifically, when a first voltage greater than a coercive voltage at which the charge of the hysteresis loop of the active layer 130 becomes zero between the first electrode 110 and the second electrode 120 is applied, the active layer 130 ) may change the polarization direction, and in this case, the magnitude of the electric field capable of changing the polarization direction of the domain of the active layer 130 increases as the thickness of the active layer 130 increases.

That is, the magnitude of the electric field capable of changing the polarization direction of the second region A2 is greater than the magnitude of the electric field capable of changing the polarization direction of the first region A1, which is thinner than the second region A2, as a result. , even if the polarization direction of the first area A1 is changed by the first voltage applied between one first electrode 110 and one second electrode 120 , the active layer 130 in the second area A2 is ) may not change the direction of polarization.

Accordingly, the polarization direction may be selectively changed by an applied electric field only in the first region A1, whereby one first electrode 110 and one second electrode 120 are electrically connected or insulated can have status.

For example, as shown in FIG. 3 , in a state where both the first area A1 and the second area A2 have the same polarization in the first direction, the insulating property of the active layer 130 causes the first electrode 110 ) and the second electrode 120 may not flow current.

However, as shown in FIG. 4 , when the polarization direction of the first region A1 is changed, the unit lattice structure of the active layer 130 at the boundary between the first region A1 and the second region A2 is localized. is changed to , electrical polarization different from that of the first region A1 and the second region A2 is generated, whereby free electrons are accumulated at the boundary between the first region A1 and the second region A2, so that the current By forming the flowable variable channel C, the first electrode 110 and the second electrode 120 may be electrically connected.

The variable channel C as described above is formed at the boundary between the first area A1 and the second area A2 , wherein the first area A1 overlaps the first protrusion 112 and the second protrusion 122 . Since it is determined by the area, the position at which the variable channel C is formed may also be adjusted by the overlapping area of the first protrusion 112 and the second protrusion 122 .

Meanwhile, when a second voltage for returning the polarization direction of the first region A1 is applied to the first electrode 110 and the second electrode 120 , the first region A1 will have the polarization in the first direction again. can Accordingly, the difference in polarization between the first area A1 and the second area A2 is eliminated, and the variable channel C between the first area A1 and the second area A2 disappears. Such a state is the same as the state shown in FIG. 3 . That is, since the first electrode 110 and the second electrode 120 are insulated by the active layer 130 , even when a voltage is applied between the first electrode 110 and the second electrode 120 , the first electrode No current flows between 110 and the second electrode 120 .

Meanwhile, voltages may be independently applied to the plurality of first electrodes 110 and the plurality of second electrodes 120 . Therefore, it is possible to control the flow of current in each of the overlapping regions A of the plurality of first electrodes 110 and the plurality of second electrodes 120 , and through the control of the flow of current, the electronic device 100 ) can be used for various purposes. In addition, since the thickness of the first area A1 is formed to be thinner than that of the second area A2 , the magnitude of the voltage applied to change the polarization direction of the first area A1 may be reduced, and the first area A1 may have a smaller thickness. ), the change in the polarization direction may be made faster, so that the speed of the electronic device 100 may be improved.

Hereinafter, the operation of the electronic device 100 will be described in more detail with reference to FIGS. 3 and 4 . Also, an example in which the electronic device 100 is used as a non-volatile memory will be described.

First, as shown in FIG. 3 , the active layer 130 may have a polarization in the first direction. For example, both the first area A1 and the second area A2 may have the same polarization in the first direction. In this state, when a first voltage greater than a coercive voltage is applied to the first electrode 110 and the second electrode 120 , as shown in FIG. 4 , the first electrode 110 and the second electrode 120 The polarization direction of the first area A1 may be changed by the first electric field generated between the two electrodes 120 , and the active layer 130 may be divided into a first area A1 and a second area A2 .

As such, after the polarization direction of the first region A1 is changed, even if no voltage is applied to the first electrode 110 and the second electrode 120 , the polarization direction of the first region A1 is not changed again. This state can be understood as an input of the logical value '1'.

When the polarization direction of the first area A1 is changed, the variable channel C is formed at the boundary between the first area A1 and the second area A2 , and thus the first electrode 110 and the second electrode 120 . If a read voltage is applied between them, a current easily flows, whereby the logic value '1' can be read. In this case, in order to prevent the polarization state of the first region A1 from being affected by the read voltage, the read voltage may be less than the coercive voltage of the active layer 130 .

On the other hand, when a second voltage is applied to the first electrode 110 and the second electrode 120 in order to return the polarization direction of the first region A1 , a gap between the first electrode 110 and the second electrode 120 is Due to the generated second electric field, the first region A1 may have the polarization in the first direction again. The second voltage may be greater than a coercive voltage of the active layer 130 and may have a polarity opposite to that of the first voltage. As a result, the polarization directions of the first region A1 and the second region A2 are the same, and the variable channel C is extinguished.

When the polarization directions of the first area A1 and the second area A2 are the same, the variable channel C between the first area A1 and the second area A2 disappears, and accordingly, the first electrode Even when a voltage is applied between 110 and the second electrode 120 , no current flows between the first electrode 110 and the second electrode 120 , thereby reading a logic value of '0'. .

That is, when the electronic device 100 according to the present invention is used as a memory, voltage is applied to one first electrode 110 and one second electrode 120 in one first area A1. Logic values '1' and '0' can be read by selectively changing the polarization state and measuring the current flowing in the variable channel (C) that is created or destroyed accordingly. Recording and reproducing speed may be improved, and readability of data may be improved because the magnitude of the current flowing when the logical values '1' and '0' are read is different.

Meanwhile, power may be independently applied to the plurality of first electrodes 110 and the plurality of second electrodes 120 , and accordingly, a variable channel C is selectively generated in the plurality of active layers 130 . may be lost or lost, the amount of processing data of the electronic device 100 may increase.

In addition, according to the present invention, the variable channel C generated according to the application of the electric field may be formed only in a predetermined region. Therefore, the variable channel C is formed only at a limited location without causing an increase or expansion of the domain region in which the polarization state is changed in proportion to the application time of the electric field. The advantage is that you don't have to. In addition, since the insulating part 134 is positioned between the plurality of active layers 130 constituting the lattice pattern, it is possible to prevent the variable channel C from being formed outside the overlapping region A, and thus the electronic device 100 . Even if the size of is reduced, it is possible to prevent a decrease in the operational reliability of the electronic device 100 .

In addition, in a state in which the first electrode 110 and the second electrode 120 are stacked, the variable channel C is formed in the vertical direction with the shortest distance connecting the first electrode 110 and the second electrode 120 . As a result, since the size of the electronic device 100 is reduced, integration is possible, and the electronic device 100 can be driven at a very high speed.

Meanwhile, the electronic device 100 according to the present invention may constitute a circuit unit that generates and transmits various signals, and may also be used as a switching device. For example, it is possible to control ON/OFF of the current flow by the generation and disappearance of the variable channel (C). In addition, since the electronic device 100 according to the present invention can be applied with a simple structure to a portion requiring control of an electrical signal, it can be applied to various fields such as a variable circuit, a CPU, and a biochip.

6 is a cross-sectional view schematically illustrating an example of a section II-II' of FIG. 1 . Hereinafter, it will be described with reference to FIGS. 1 and 6 together, and the same content as described above will not be repeatedly described, but only differences will be described.

1 and 6 , the electronic device 100 has a plurality of first electrodes extending in a first direction (X) and spaced apart from each other in a second direction (Y) perpendicular to the first direction (X). (110), a plurality of second electrodes 120 extending in the second direction (Y), intersecting the plurality of first electrodes 110 and spaced apart from each other in the first direction (X), arranged in the second direction It may include a plurality of third electrodes 140 that extend in (Y), intersect the plurality of first electrodes 110 and are arranged to be spaced apart from each other in the first direction (X).

That is, the second electrodes 120 and the third electrodes 140 may be disposed in parallel with each other on opposite sides with the first electrodes 110 interposed therebetween. For example, the second electrodes 120 and the third electrodes 140 may be positioned to overlap in the vertical direction (Z). As another example, the second electrodes 120 and the third electrodes 140 may be alternately positioned in the vertical direction (Z).

Active layers 130 may be respectively disposed in overlapping regions of the first electrodes 110 and the second electrodes 120 and in overlapping regions of the first electrodes 110 and the third electrodes 140 . More specifically, the active layers 130 are disposed between the first electrodes 110 and the second electrodes 120 and between the first electrodes 110 and the second electrodes 140 to form a lattice pattern. can In addition, insulating portions 134 may be respectively disposed between the active layers 130 disposed on both sides of the first electrode 110 . The insulating portion 134 may contact side surfaces of the active layers 130 .

Each of the first electrodes 110 may include a pair of first protrusions 112 and 114 protruding in opposite directions, and each of the second electrodes 120 faces the first electrodes 110 . Each of the third electrodes 140 may include a third protrusion 142 protruding in a direction toward the first electrodes 110 .

Voltages may be independently applied to the first electrodes 110 , the second electrodes 120 , and the third electrodes 140 . Accordingly, in each of the active layers 130 positioned between the first electrodes 110 and the second electrodes 120 and between the first electrodes 110 and the third electrodes 140 , a variable channel is generated or destroyed. As a result, the amount of processing data of the electronic device 100 may further increase.

As described above, the present invention has been described with reference to one embodiment shown in the drawings, but it will be understood that various modifications and variations of the embodiments are possible therefrom by those of ordinary skill in the art. Accordingly, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

Claims (1)

a plurality of first electrodes extending in a first direction and arranged to be spaced apart from each other in a second direction intersecting the first direction;
a plurality of second electrodes extending in the second direction to intersect the plurality of first electrodes and spaced apart from each other; and
an active layer disposed between the plurality of first electrodes and the plurality of second electrodes to overlap the plurality of first electrodes and the second electrodes;
The active layer comprises a spontaneously polarizable material,
A variable channel through which a current flows through control of an applied voltage applied to the first electrode and the second electrode is formed in the active layer;
In the variable channel, extinction and generation are selectively performed through the control of the first electrode or the second electrode,
electronic device.

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