KR20220016072A - 유체 제어 장치 및 전자 기기 - Google Patents

유체 제어 장치 및 전자 기기 Download PDF

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Publication number
KR20220016072A
KR20220016072A KR1020217038320A KR20217038320A KR20220016072A KR 20220016072 A KR20220016072 A KR 20220016072A KR 1020217038320 A KR1020217038320 A KR 1020217038320A KR 20217038320 A KR20217038320 A KR 20217038320A KR 20220016072 A KR20220016072 A KR 20220016072A
Authority
KR
South Korea
Prior art keywords
space
outlet
control device
fluid control
inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020217038320A
Other languages
English (en)
Korean (ko)
Inventor
히로시 스즈키
마사히로 사토
코지 후쿠모토
유야 호리우치
히로노부 아베
히로토 카와구치
카즈히로 혼고
타쿠마 마츠시타
다이스케 미즈타
켄타로 요시다
Original Assignee
소니그룹주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 소니그룹주식회사 filed Critical 소니그룹주식회사
Publication of KR20220016072A publication Critical patent/KR20220016072A/ko
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/028—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like flexible member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/045—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms with in- or outlet valve arranged in the plate-like pumping flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047—Pumps having electric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
KR1020217038320A 2019-06-03 2020-05-19 유체 제어 장치 및 전자 기기 Pending KR20220016072A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019103467 2019-06-03
JPJP-P-2019-103467 2019-06-03
PCT/JP2020/019821 WO2020246232A1 (ja) 2019-06-03 2020-05-19 流体制御装置及び電子機器

Publications (1)

Publication Number Publication Date
KR20220016072A true KR20220016072A (ko) 2022-02-08

Family

ID=73652808

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020217038320A Pending KR20220016072A (ko) 2019-06-03 2020-05-19 유체 제어 장치 및 전자 기기

Country Status (6)

Country Link
US (1) US12135022B2 (https=)
EP (1) EP3978752B1 (https=)
JP (1) JP7444165B2 (https=)
KR (1) KR20220016072A (https=)
CN (1) CN113710896A (https=)
WO (1) WO2020246232A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023183637A (ja) * 2022-06-16 2023-12-28 ローム株式会社 マイクロポンプ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07301182A (ja) 1994-05-02 1995-11-14 Tosoh Corp 圧電ポンプの駆動方法

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59221485A (ja) * 1983-05-31 1984-12-13 Sharp Corp ポンプ
JPS6270677A (ja) * 1985-09-24 1987-04-01 Ckd Controls Ltd ピエゾポンプ
GB2248891A (en) * 1990-10-18 1992-04-22 Westonbridge Int Ltd Membrane micropump
JPH051669A (ja) 1991-06-21 1993-01-08 Seiko Epson Corp マイクロポンプ及びマイクロバルブの製造方法
DE4332720C2 (de) * 1993-09-25 1997-02-13 Karlsruhe Forschzent Mikromembranpumpe
TW274114B (https=) * 1994-05-09 1996-04-11 Ralf Wolbers
JPH10184549A (ja) * 1996-12-26 1998-07-14 Citizen Electron Co Ltd 小型ポンプ
JPH11311184A (ja) * 1998-04-27 1999-11-09 Matsushita Electric Works Ltd 小型ポンプ
JP3784566B2 (ja) 1999-03-17 2006-06-14 日東工器株式会社 小型ポンプ
JP2002227770A (ja) * 2001-02-02 2002-08-14 Matsushita Electric Ind Co Ltd 小型ポンプ
US6629820B2 (en) 2001-06-26 2003-10-07 Micralyne Inc. Microfluidic flow control device
US20070065308A1 (en) * 2003-08-04 2007-03-22 Mitsuru Yamamoto Diaphragm pump and cooling system with the diaphragm pump
US7284966B2 (en) * 2003-10-01 2007-10-23 Agency For Science, Technology & Research Micro-pump
JP2006295147A (ja) * 2005-03-17 2006-10-26 Osaka Industrial Promotion Organization 圧電アクチュエータ及びポンプ
JP4867324B2 (ja) * 2005-12-12 2012-02-01 ソニー株式会社 放熱装置及び電子機器
DE112007000722B4 (de) * 2006-03-29 2013-07-04 Murata Manufacturing Co., Ltd. Mikropumpe
JP5003154B2 (ja) * 2006-12-28 2012-08-15 株式会社村田製作所 圧電ポンプ
CN101568728A (zh) * 2007-10-16 2009-10-28 株式会社村田制作所 压电微型鼓风器
CN101622451B (zh) * 2007-12-03 2011-05-11 株式会社村田制作所 压电泵
RU2011154213A (ru) 2009-06-03 2013-07-20 ДЗЕ ТЕКНОЛОДЖИ ПАРТНЕРШИП ПиЭлСи Гидравлический дисковый насос
JP2009293626A (ja) * 2009-09-18 2009-12-17 Seiko Epson Corp 流体噴射装置
JP2012026385A (ja) * 2010-07-26 2012-02-09 Ricoh Co Ltd 液体搬送装置、液体搬送キット
JP5682513B2 (ja) * 2011-09-06 2015-03-11 株式会社村田製作所 流体制御装置
KR101452050B1 (ko) * 2012-11-12 2014-10-21 삼성전기주식회사 마이크로 펌프
KR20140081570A (ko) * 2012-12-21 2014-07-01 삼성전기주식회사 마이크로 펌프
KR20140118542A (ko) * 2013-03-29 2014-10-08 삼성전기주식회사 마이크로 펌프
CN105822527B (zh) * 2016-03-24 2017-12-05 北京理工大学 利用压电陶瓷驱动的多功能流体分配系统及其驱动方法
KR102542187B1 (ko) * 2016-08-16 2023-06-12 필립모리스 프로덕츠 에스.에이. 에어로졸 발생 장치
JP7021738B2 (ja) 2017-09-28 2022-02-17 日本電産株式会社 ポンプ
JP7524908B2 (ja) * 2019-11-08 2024-07-30 ソニーグループ株式会社 バルブモジュール、流体制御装置及び電子機器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07301182A (ja) 1994-05-02 1995-11-14 Tosoh Corp 圧電ポンプの駆動方法

Also Published As

Publication number Publication date
EP3978752A1 (en) 2022-04-06
JPWO2020246232A1 (https=) 2020-12-10
US12135022B2 (en) 2024-11-05
JP7444165B2 (ja) 2024-03-06
CN113710896A (zh) 2021-11-26
WO2020246232A1 (ja) 2020-12-10
EP3978752B1 (en) 2025-11-26
EP3978752A4 (en) 2023-04-19
US20220260067A1 (en) 2022-08-18

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