KR20210027079A - 형상계측장치, 기준기, 및 검출기의 교정방법 - Google Patents

형상계측장치, 기준기, 및 검출기의 교정방법 Download PDF

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Publication number
KR20210027079A
KR20210027079A KR1020200094165A KR20200094165A KR20210027079A KR 20210027079 A KR20210027079 A KR 20210027079A KR 1020200094165 A KR1020200094165 A KR 1020200094165A KR 20200094165 A KR20200094165 A KR 20200094165A KR 20210027079 A KR20210027079 A KR 20210027079A
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KR
South Korea
Prior art keywords
detector
displacement
calibration
control device
work
Prior art date
Application number
KR1020200094165A
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English (en)
Korean (ko)
Inventor
나 가오
코오이치 이치하라
Original Assignee
스미도모쥬기가이고교 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 스미도모쥬기가이고교 가부시키가이샤 filed Critical 스미도모쥬기가이고교 가부시키가이샤
Publication of KR20210027079A publication Critical patent/KR20210027079A/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/245—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using a plurality of fixed, simultaneously operating transducers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042—Calibration or calibration artifacts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/22—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes
    • G01B21/24—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes for testing alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02061—Reduction or prevention of effects of tilts or misalignment

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
KR1020200094165A 2019-08-30 2020-07-29 형상계측장치, 기준기, 및 검출기의 교정방법 KR20210027079A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019158610A JP7296279B2 (ja) 2019-08-30 2019-08-30 形状計測装置、及び検出器の校正方法
JPJP-P-2019-158610 2019-08-30

Publications (1)

Publication Number Publication Date
KR20210027079A true KR20210027079A (ko) 2021-03-10

Family

ID=74733491

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020200094165A KR20210027079A (ko) 2019-08-30 2020-07-29 형상계측장치, 기준기, 및 검출기의 교정방법

Country Status (4)

Country Link
JP (1) JP7296279B2 (zh)
KR (1) KR20210027079A (zh)
CN (1) CN112444229B (zh)
TW (1) TWI777205B (zh)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016166873A (ja) 2015-03-04 2016-09-15 住友重機械工業株式会社 形状計測装置、加工装置及び形状計測装置の校正方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3905771B2 (ja) * 2001-03-02 2007-04-18 株式会社ミツトヨ 測定機の校正方法及び装置
JP2006029983A (ja) * 2004-07-16 2006-02-02 Yokogawa Electric Corp 変位測定装置
DE102004054876B3 (de) * 2004-11-12 2006-07-27 Sirona Dental Systems Gmbh Vermessungseinrichtung zur 3D-Vermessung von Zahnmodellen, Verschiebeplatte und Verfahren dazu
JP2007046946A (ja) * 2005-08-08 2007-02-22 Toshiba Mach Co Ltd 基板の両面形状測定装置及び基板の両面形状測定方法
JP2007187499A (ja) * 2006-01-12 2007-07-26 Nikon Corp 測長装置
JP2009128014A (ja) * 2007-11-19 2009-06-11 Sanyo Electric Co Ltd ビーム照射装置
JP5100613B2 (ja) * 2008-10-29 2012-12-19 住友重機械工業株式会社 真直度測定方法及び真直度測定装置
JP5494446B2 (ja) * 2010-12-02 2014-05-14 株式会社ニコン 平面度測定装置
JP2017219333A (ja) * 2016-06-03 2017-12-14 オリンパス株式会社 形状測定装置および形状測定方法
CN110023712A (zh) * 2017-02-28 2019-07-16 松下知识产权经营株式会社 位移计测装置以及位移计测方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016166873A (ja) 2015-03-04 2016-09-15 住友重機械工業株式会社 形状計測装置、加工装置及び形状計測装置の校正方法

Also Published As

Publication number Publication date
JP7296279B2 (ja) 2023-06-22
TWI777205B (zh) 2022-09-11
CN112444229B (zh) 2022-06-24
JP2021038940A (ja) 2021-03-11
TW202118580A (zh) 2021-05-16
CN112444229A (zh) 2021-03-05

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