KR20200105741A - 이송기 - Google Patents

이송기 Download PDF

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Publication number
KR20200105741A
KR20200105741A KR1020190164343A KR20190164343A KR20200105741A KR 20200105741 A KR20200105741 A KR 20200105741A KR 1020190164343 A KR1020190164343 A KR 1020190164343A KR 20190164343 A KR20190164343 A KR 20190164343A KR 20200105741 A KR20200105741 A KR 20200105741A
Authority
KR
South Korea
Prior art keywords
cage
pinion
rack
main body
cassette
Prior art date
Application number
KR1020190164343A
Other languages
English (en)
Korean (ko)
Inventor
케이스케 시로이시
Original Assignee
가부시키가이샤 다이후쿠
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 다이후쿠 filed Critical 가부시키가이샤 다이후쿠
Publication of KR20200105741A publication Critical patent/KR20200105741A/ko

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
    • B66F7/00—Lifting frames, e.g. for lifting vehicles; Platform lifts
    • B66F7/10—Lifting frames, e.g. for lifting vehicles; Platform lifts with platforms supported directly by jacks
    • B66F7/12—Lifting frames, e.g. for lifting vehicles; Platform lifts with platforms supported directly by jacks by mechanical jacks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
    • B66F3/00—Devices, e.g. jacks, adapted for uninterrupted lifting of loads
    • B66F3/02—Devices, e.g. jacks, adapted for uninterrupted lifting of loads with racks actuated by pinions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
    • B66F3/00—Devices, e.g. jacks, adapted for uninterrupted lifting of loads
    • B66F3/46—Combinations of several jacks with means for interrelating lifting or lowering movements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
    • B66F7/00—Lifting frames, e.g. for lifting vehicles; Platform lifts
    • B66F7/02—Lifting frames, e.g. for lifting vehicles; Platform lifts with platforms suspended from ropes, cables, or chains or screws and movable along pillars
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
    • B66F7/00—Lifting frames, e.g. for lifting vehicles; Platform lifts
    • B66F7/28—Constructional details, e.g. end stops, pivoting supporting members, sliding runners adjustable to load dimensions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Structural Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Geology (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Disintegrating Or Milling (AREA)
  • Die Bonding (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Types And Forms Of Lifts (AREA)
KR1020190164343A 2019-03-01 2019-12-11 이송기 KR20200105741A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2019-037098 2019-03-01
JP2019037098A JP7205304B2 (ja) 2019-03-01 2019-03-01 移載機

Publications (1)

Publication Number Publication Date
KR20200105741A true KR20200105741A (ko) 2020-09-09

Family

ID=72265294

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020190164343A KR20200105741A (ko) 2019-03-01 2019-12-11 이송기

Country Status (4)

Country Link
JP (1) JP7205304B2 (zh)
KR (1) KR20200105741A (zh)
CN (1) CN111634854B (zh)
TW (1) TWI820264B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220070832A (ko) * 2020-11-23 2022-05-31 주식회사 알티자동화 클린 스토커 시스템

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2836369B2 (ja) * 1992-05-11 1998-12-14 株式会社大林組 ビル建築用仮設梁組装置の屋根構造
JP2005311287A (ja) * 2004-03-26 2005-11-04 Shinko Electric Co Ltd 基板搬入出装置
JP4240079B2 (ja) * 2006-07-20 2009-03-18 株式会社安川電機 防塵機構を備えた基板搬送装置
JP5006409B2 (ja) * 2007-12-05 2012-08-22 平田機工株式会社 基板搬送装置及び基板搬送装置の制御方法
JP5311889B2 (ja) 2008-06-11 2013-10-09 三菱電機株式会社 通信システム、移動通信装置、ホームエージェントおよび通信方法
JP2011006244A (ja) * 2009-06-29 2011-01-13 Muratec Automation Co Ltd 搬送台車
ITAR20130018A1 (it) * 2013-04-18 2014-10-19 Raffaela Vasapollo Piattaforma mobile ad azionamento elettrico-meccanico per hangar interrato per elicotteri con sistema automatizzato di chiusura elettro-meccanica del piano di copertura
JP6607175B2 (ja) * 2016-12-07 2019-11-20 株式会社ダイフク 移載機
CN207192168U (zh) * 2017-07-11 2018-04-06 无锡爱尔华精机有限公司 一种真空室用新型片架移载机构
CN110745442B (zh) * 2019-11-07 2022-11-29 上海速锐信息技术有限公司 用于立体仓库的同步竖直提升系统

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220070832A (ko) * 2020-11-23 2022-05-31 주식회사 알티자동화 클린 스토커 시스템

Also Published As

Publication number Publication date
CN111634854A (zh) 2020-09-08
JP7205304B2 (ja) 2023-01-17
TW202033426A (zh) 2020-09-16
TWI820264B (zh) 2023-11-01
JP2020141083A (ja) 2020-09-03
CN111634854B (zh) 2023-08-15

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