KR20200073121A - Heat treatment apparatus - Google Patents

Abstract

The present invention relates to a thermal treatment apparatus capable of making the temperature distribution of each part of a work area where a workpiece is thermally treated more uniform. The thermal treatment apparatus (1) includes: a work area (4) including an upwind part (7) taking gas for thermal treatment and a downwind part (5) discharging the gas for thermal treatment, and having a workpiece (100) placed between the upwind part (7) and the downwind part (5); an inlet (17) suctioning the gas for thermal treatment in the work area (4) through the downwind part (5); and a downwind flowrate control part (6). The downwind flowrate control part (6), in regard to the downwind part (5), is formed to set the flowrate of gas for thermal treatment in a proximal part (27), which is relatively close to the inlet (17), to be smaller than the flowrate of gas for thermal treatment in a distal part (28), which is relatively far from the inlet (17).

Description

Heat treatment device {HEAT TREATMENT APPARATUS}

The present invention relates to a heat treatment device.

A heated cooker for cooking using superheated water vapor is known (for example, see Patent Document 1).

Japanese Patent Publication No. 2016-11776

In addition, in a heat treatment apparatus used in the production of industrial products such as electronic components, there is a case where heat treatment is performed on an object to be treated by supplying high-temperature gas into the heat treatment chamber. In such a heat treatment apparatus, superheated steam may be used as a high-temperature gas. The specific heat of superheated water vapor is about 0.48 (cal/g/°C), and is greater than the specific heat of air about 0.24 (cal/g/°C). For this reason, when superheated water vapor is used as a heat treatment gas for heat treatment of the object to be brought into the heat treatment chamber, large heat energy can be provided to the object.

When a gas having a large specific heat, such as superheated water vapor, is used as a gas for heat treatment, sufficient heat energy can be widely spread throughout the heat treatment chamber. Thereby, each part of a to-be-processed object can be heat-processed uniformly. Even when a gas other than superheated steam is used as the gas for heat treatment, it is important to spread heat energy sufficiently throughout the heat treatment chamber in terms of uniformly heat-treating each part of the object to be treated.

Particularly, in industrial products such as electronic components, in order to more uniformly heat-treat the parts to be treated, it is necessary to make the temperature distribution in the heat-treatment chamber more uniform. However, the invention described in Patent Document 1 is a cooking appliance and does not require a highly uniform temperature distribution required for heat treatment of industrial products.

This invention is made|formed in view of the said situation, and it aims at making the temperature distribution in each part of the work area which heat-processes a to-be-processed object more uniform in a heat processing apparatus.

As described above, the superheated water vapor has a large specific heat. For this reason, it is considered that the temperature distribution of the heat treatment gas in each part of the work area can be equalized by supplying a large amount of superheated water vapor as a heat treatment gas to the work area. However, the inventor of the present application has come to obtain the knowledge that this idea is not necessarily correct by using a computer-based fluid analysis.

More specifically, the inventors of the present application have found that the higher the specific heat of the gas for heat treatment, the higher the temperature (atmosphere temperature) difference in the place where there is a large amount of gas passing through the heat treatment area and in a small area within the work area. This knowledge does not necessarily correspond to human intuition, and was first revealed by performing the fluid analysis.

Moreover, as a heat processing apparatus, a work area may be included, and the work area may have a wind-up portion to which a gas for heat treatment is supplied and a wind-down portion to which a gas for heat treatment is discharged. In this case, when equalizing the distribution of the ambient temperature in the work area, it is common to think about the supply mode of the gas for heat treatment at the wind-up portion of the wind-up portion and the wind-down portion. However, the inventors of the present application, rather than squeezing thoughts on the supplying mode of the heat treatment gas in the wind section, in each part of the work area, squeezing thoughts on the supply mode of the heat treatment gas in the wind section. The idea that it is effective to equalize the ambient temperature of the was obtained. As a result, the present invention was derived.

(1) In order to solve the above problems, the heat treatment apparatus according to any aspect of the present invention includes an air blowing portion through which heated gas for heat treatment flows, and a wind blowing portion through which the gas for heat treatment flows, and the air blowing portion A work area in which the object to be treated is disposed between the wind-fall portion, a suction port for suctioning the gas for heat treatment in the work area through the wind-fall portion, and a proximal position relatively close to the suction port in the wind-fall portion A flow rate adjusting unit is provided to set the flow rate of the heat treatment gas in the unit to be smaller than the flow rate of the heat treatment gas in the distal portion relatively far from the suction port.

According to this structure, the wind-fall flow rate adjustment part sets the flow rate of the heat treatment gas in the proximal part in the wind-fall part to be smaller than the flow rate of the heat treatment gas in the distal part. Thereby, the gas for heat treatment can be made to flow more around the distal portion of the lower part of the wind. In addition, since the wind section is close to the suction port, the heat treatment gas can be smoothly flowed even if the flow rate is reduced. As a result, the temperature of the gas for heat treatment at the proximal portion and the temperature of the gas for heat treatment at the distal portion can be made more equal in the lower wind portion. As a result, the gas for heat treatment can be widely spread over a very wide range in the work area. Thereby, the temperature distribution in each part of the work area which heat-processes a to-be-processed object can be made more uniform.

(2) The heat treatment device may be configured such that the flow rate of the gas for heat treatment passing through the wind portion is substantially equal throughout the wind portion.

According to this structure, the atmosphere temperature of each part in a work area can be made more uniform. In addition, with a simple configuration that makes the flow rate of the gas for heat treatment substantially equal throughout the wind zone, the atmosphere temperature of each part in the work area can be made more uniform. In this way, in the wind section, the flow rate distribution of the gas for heat treatment is not configured to be actively varied.

(3) The heat treatment apparatus includes a supply port for supplying the gas for heat treatment into the work area through the wind section, and a flow rate of the heat treatment gas at a proximal portion relatively close to the supply port in the wind section, In some cases, an air flow rate adjusting unit configured to equalize the flow rate of the gas for heat treatment at a distal portion relatively far from the supply port may be further provided.

According to this configuration, the flow rate of the gas for heat treatment can be made more uniform throughout the wind phase portion by providing the wind flow rate adjustment portion.

(4) The heat treatment gas may contain superheated steam.

According to this configuration, a superheated steam having a high specific heat compared to the specific heat of a gas for heat treatment such as nitrogen, that is, a superheated steam that is likely to cause variations in the ambient temperature in the work area can be used as the gas for heat treatment. Thereby, a to-be-processed object can be processed more efficiently.

(5) The heat treatment device includes: a circulation path for circulating the gas for heat treatment from the lower portion to the wind portion, a heater for heating the gas for heat treatment disposed in the circulation path, and a gas for heat treatment disposed in the circulation path It is further provided with an air flow generating member for generating the air flow in the work area, and may be arranged in the order of the heater and the air flow generating member from the wind down portion to the wind portion.

According to this configuration, the gas for heat treatment heated by the heater can be stirred by the airflow generating member. As a result, the temperature of the heat treatment gas sent to the work area can be made more uniform.

(6) The wind flow rate adjusting unit is arranged to cover the wind lower portion and a base formed with a plurality of through hole portions, and is arranged to cover at least a portion of the plurality of through hole portions, and for adjusting the opening degree of the through hole portion. The opening degree of the through-hole portion in the proximal portion may be smaller than the opening degree of the through-hole portion in the distal portion including a movable portion.

According to this configuration, with a simple configuration in which the opening degree of the through-hole portion in the proximal portion is set to be smaller than the opening degree of the through-hole portion in the distal portion, the flow rate of the heat treatment gas in the wind-fall portion can be easily adjusted.

(7) The heat treatment apparatus may further include a door for putting the object in and out of the work area, and a heat dissipation preventing member mounted on the door and disposed in the work area.

According to this structure, the heat dissipation prevention member is attached to the door as a place where heat in the work area is easily dissipated among the work areas. Thereby, the heat insulation property in a work area can be improved more. As a result, it is possible to more reliably maintain the state in which the atmosphere temperature of each part in the work area is uniform.

ADVANTAGE OF THE INVENTION According to this invention, in a heat processing apparatus, the temperature distribution in each part of the work area which heat-processes a to-be-processed object can be made more uniform.

1 is a schematic plan view showing a configuration of a heat treatment apparatus according to an embodiment of the present invention, and a part thereof is shown in cross section.
FIG. 2 is a cross-sectional view taken along line II-II of FIG. 1 and shows a state in which the heat treatment device is viewed from the front.
FIG. 3 is a cross-sectional view taken along line III-III of FIG. 1, and shows a state in which the heat treatment apparatus is viewed along the main flow direction in the work area.
4 is an enlarged side view showing a part of the wind and drop flow rate adjustment unit.
5 is an enlarged plan view of a part of the wind and drop flow rate adjustment unit.
6 is an enlarged front view showing a part of the wind and drop flow rate adjustment unit.
7 is a cross-sectional view taken along the line VII-VII in FIG. 1, and shows a state in which the heat treatment apparatus is viewed along a direction opposite to the main flow direction in the work area.
8 is an enlarged side view showing a part of the wind flow rate adjusting unit.
9 is a schematic plan view showing a part of the first modification in cross section.
10 is a schematic front view showing a part of the second modification in cross section.
11 is a schematic front view showing a part of the third modification in cross section.

EMBODIMENT OF THE INVENTION Hereinafter, the form for implementing this invention is demonstrated, referring drawings.

1 is a schematic plan view showing a configuration of a heat treatment apparatus 1 according to an embodiment of the present invention, and a part thereof is shown in cross section. FIG. 2 is a sectional view taken along line II-II in FIG. 1, and shows a state in which the heat treatment apparatus 1 is viewed from the front. 3 is a cross-sectional view taken along line III-III of FIG. 1, and shows the state in which the heat treatment apparatus 1 is seen along the main flow direction F1 in the work area 4.

1 to 3, the heat treatment device 1 is a device for performing heat treatment on the object to be treated 100. The object to be treated 100 is, for example, an electronic component. In the heat treatment apparatus 1, only one to-be-processed object 100 may be heat-processed at a time, and a plurality of to-be-processed objects 100 may be heat-treated collectively while placed in a holder or the like. The gas for heat treatment used in the heat treatment apparatus 1 is superheated steam in this embodiment. The specific heat of superheated water vapor is about 0.48 (cal/g/°C), and is greater than the specific heat of air about 0.24 (cal/g/°C). For this reason, when superheated steam is used as a heat treatment gas for heat treatment of the object 100 brought into the heat treatment chamber, large heat energy can be provided to the object. In addition, the gas for heat treatment may contain some gas other than superheated steam, and may not contain superheated steam. In addition, the heat treatment apparatus 1 has a particularly suitable configuration in the case of using superheated water vapor as a heat treatment gas.

The heat treatment apparatus 1 includes: a housing 2, a door 3 disposed in front of the housing 2, a work area 4 formed in the housing 2, and a lower portion of the work area 4 ( The wind-fall flow rate adjustment part 6 provided in 5), the wind-flow rate flow rate adjustment part 8 provided in the wind-fall part 7 of the work area 4, and the wind-fall part 5 and the wind-fall part 7 installed in the housing 2 ), and a heater 10 and a fan (airflow generating member) 11 provided in the circulation path 9.

The housing 2 is formed in a hollow box shape, and has a shape in which the front side is opened to the front of the housing 2. In this embodiment, the housing 2 is formed in a cubic shape, and the front wall 2b and the rear wall 2c as four side walls extending upward from the bottom wall 2a and the bottom wall 2a. , Upstream side wall 2d, and downstream side wall 2e, and rectangular ceiling walls 2f arranged on top of the four side walls 2b to 2e.

A work area 4 and a circulation path 9 are formed in a space partitioned by the bottom wall 2a, the side walls 2b to 2e, and the ceiling wall 2f of the housing 2. A rectangular opening 12 is formed in the front wall 2b of the housing 2. The door 3 is attached to the opening 12. In the housing 2, a heat insulating material (not shown) is disposed on the outer circumference of the housing 3 except where the door 3 is disposed, and heat radiation from the inside of the housing 2 to the outside is suppressed.

In addition, hereinafter, when the housing 2 is viewed in a plan view, the opening 12 side is referred to as the front side, the rear side wall 2c side is referred to as the rear side, and the upstream side wall 2d side is referred to as the right side, and the downstream side wall side. The (2e) side is referred to as the left side.

The door 3 is provided for putting the object 100 into the work area 4 in the housing 2 through the opening 12. The door 3 is supported by an opening/closing mechanism (not shown), and opens and closes the opening 12. The door 3 is arranged to cover the front surface of the opening 12 when in a closed state. On the other hand, by opening the opening 12, the space in the housing 2 is exposed to the outside of the housing 2. Thereby, the to-be-processed object 100 can be put in and out with respect to the work area 4 of the housing 2.

The inner surface of the door 3 is formed in a rectangular shape extending in a direction perpendicular to the horizontal direction. A heat radiation preventing member 13 is attached to the door 3.

The heat dissipation preventing member 13 is provided to suppress heat dissipation between the door 3 and the opening 12. When the door 3 is closed, the heat dissipation preventing member 13 is located at the front end of the work area 4. The heat dissipation preventing member 13 is formed in a substantially flat shape, and is formed in a shape in which both right and left ends are curved toward the rear, and is fixed to the door 3 by using a plurality of pin-shaped fixing members 14 have. The heat radiation preventing member 13 extends from the vicinity of the bottom wall 2a to the vicinity of the ceiling wall 2f.

The work area 4 is an area for arranging the object to be processed 100. The heat treatment apparatus 1 heat-treats the object 100 in the work area 4. In the present embodiment, the work area 4 includes a housing 2, a partition wall 15 disposed in a space in the housing 2, a wind-fall flow rate adjustment section 6 and a wind shape arranged in a space in the housing 2 It is formed by the flow rate adjusting unit 8.

Specifically, the partition wall 15 is disposed at a position that is a predetermined distance from the door 3 to the rear side of the space in the housing 2. The partition 15 is formed in a rectangular flat plate shape orthogonal to the front-rear direction Y1, and extends along the left-right direction X1 (main flow direction F1 in the work area 4). The partition wall 15 is fixed to both the bottom wall 2a and the ceiling wall 2f. In the present embodiment, in the left-right direction X1, the region where the partition wall 15 is disposed extends over a wider range than the region where the opening 12 is provided. In other words, the right end portion 15a of the partition wall 15 is disposed at a position that has passed from the right end portion of the opening 12 to the right. Further, the left end portion 15b of the partition wall 15 is disposed at a position that has passed from the left end portion of the opening 12 to the left.

With the above-described configuration, the work area 4 includes a door 3, a front side wall 2b, a bottom wall 2a, a partition wall 15, a ceiling wall 2f, and a wind bottom part 5 ), the wind-fall flow rate adjustment part 6, the wind-like part 7, and the wind-phase flow rate adjustment part 8 are formed. Then, these doors 3, the front side wall 2b, the bottom wall 2a, the partition wall 15, the ceiling wall 2f, the wind down section 5, and the wind down flow rate adjustment section 6 , The space enclosed by the wind portion 7 and the wind flow rate adjusting portion 8 is a space in the work area 4 among the spaces in the housing 2. In the present embodiment, the space in the work area 4 is a rectangular parallelepiped space. In the work area 4, the left direction as the direction along one of the left and right directions X1 is the main flow direction F1 of the gas for heat treatment. An introduction pipe (not shown) for superheated water vapor is arranged on the wind-down side portion of the work area 4 in the main flow direction F1. Superheated water vapor is introduced into the work area 4 through this introduction pipe.

In addition, the main flow direction F1 refers to the direction in which the superheated steam as a gas for heat treatment circulates in the space in the housing 2, for example, this vortex when the superheated steam is locally swirled. It means that the flow direction of is not included.

The space in the work area 4 forms a cuboid-shaped space. The work area 4 has a wind-up portion 7 through which heated gas for heat treatment flows, and a wind-down portion 5 through which heat-treating gas flows out, and is provided between the wind-up portion 7 and the wind-down portion 5. The object to be treated 100 is disposed.

The wind-like part 7 is arrange|positioned at the right end part of the opening part 12. The wind-like portion 7 is formed in a rectangular shape when viewed in the left-right direction X1. The wind flow rate adjusting part 8 is arrange|positioned at this wind-shaped part 7.

The wind lower part 5 is arrange|positioned at the left end part of the opening part 12. The wind lower part 5 is formed in a rectangular shape when viewed in the left-right direction X1. In this embodiment, when viewed in the left-right direction X1, the projection area of the wind-like portion 7 and the projection area of the wind-fall portion 5 are set to be the same. The wind-fall flow rate adjustment part 6 is arrange|positioned at the wind-fall part 5. In order to continuously supply the gas for heat treatment to the work area 4 having the above-described configuration, a circulation path 9 is provided.

The circulation path 9 is provided to circulate the gas for heat treatment in the housing 2 by conveying the gas for heat treatment from the wind lower portion 5 to the wind portion 7. In this embodiment, the circulation path 9 is disposed in the housing 2. Moreover, in this embodiment, the above-mentioned introduction pipe (not shown) for supplying superheated water vapor into the housing 2, and the discharge pipe (not shown) for discharging the superheated water vapor from within the housing 2, It is installed in the circulation path (9).

The circulation path 9 includes the wind flow rate adjusting section 6, the left portion of the opening 12 of the front side wall 2b, the downstream side wall 2e, the rear side wall 2c, the partition wall 15, and the upstream It is formed by the side wall 2d, the wind flow rate adjustment part 8, the right part of the opening 12 among the front wall 2b, the bottom wall 2a, and the ceiling wall 2f. The circulation path 9 has a wind chamber 16, a suction port 17, a transfer path 18, a supply port 19, and a wind chamber 20.

The wind-fall chamber 16 is arrange|positioned as the box-shaped part to which the gas for heat processing is sent immediately downstream of the wind-fall flow rate adjustment part 6 in the main flow direction F1. The wind chamber 16 forms a rectangular space extending elongatedly in the front-rear direction Y1 when viewed from a plane. Moreover, the height position of the space in the wind chamber 16 is matched with the height position of the space in the work area 4. The wind-fall chamber 16 is formed using the wind-fall flow rate adjustment part 6, the left part of the opening part 12 of the front side wall 2b, and the downstream side wall 2e, when viewed from a plane.

The wind chamber 16 is formed so that the gas for heat treatment flows toward the rear wall 2c. The gas for heat treatment that has passed through the wind-fall chamber 16 passes through the suction port 17 toward the rear of the wind-fall chamber 16 and enters the transport path 18.

The suction port 17 is provided at the rear end of the wind-fall chamber 16, and forms an inlet portion of the transport path 18 in the main flow direction F1. The suction port 17 sucks the gas for heat treatment in the work area 4 through the wind down portion 5 and the wind down chamber 16. The intake port 17 includes a left end portion 15b of the partition wall 15, a portion of the downstream side wall 2e facing left and right with the left end portion 15b, a bottom wall 2a, and a ceiling wall 2f. It is formed by using, and as seen in the front-rear direction Y1, it forms an elongated rectangular-shaped space in the vertical direction Z1. In the left-right direction X1, the width of the suction port 17 is set smaller than the width of the wind-fall chamber 16.

The transfer path 18 is configured to suck the gas for heat treatment through the suction port 17, and provide heat energy and kinetic energy to the sucked heat treatment gas to send the heat treatment gas to the supply port 19.

In the present embodiment, the transport path 18 is disposed behind the work area 4, and in the front-rear direction Y1, in the order of the work area 4, the partition wall 15, and the transport path 18. Lined up. The transport path 18 forms a space of a substantially rectangular shape extending in a long and thin direction in the horizontal direction X1 when viewed from a plane.

The transfer path 18 includes a partition wall 15, a rear end portion of the downstream side wall 2e, a rear side wall 2c, and a rear end portion of the upstream side wall 2d, the first guide 23 and the second guide. It is formed using (24) and the bottom wall (2a) and the ceiling wall (2f).

In the transport path 18, the main flow direction F1 refers to the left to right side when viewed in a plan view, and is then guided to the first guide 23 to advance into a crank shape. In the transfer path 18, a heater 10 and a fan 11 are arranged. In the main flow direction F1, the heater 10 and the fan 11 are arranged in order from the lower winder 5 to the winder 7.

The heater 10 is arranged adjacent to the suction port 17 and heats the gas for heat treatment flowing through the transport path 18 in the main flow direction F1. As the heater 10, an electrothermal heater which heats by energizing an electric heating wire can be illustrated. In this embodiment, the heater 10 is arranged in a region of approximately half of the transfer path 18 in the main flow direction F1. In this embodiment, the heater 10 has a plurality of tube-shaped heat generating portions 25 extending vertically from the ceiling wall 2f. The gas for heat treatment is heated by the heat generating part 25 of the heater 10, and the space in the transfer path 18 is moved to the right along the main flow direction F1. The gas for heat treatment that has passed through the heater 10 is guided to the first guide 23 and flows to the fan 11.

The 1st guide 23 is arrange|positioned from the bottom wall 2a to the ceiling wall 2f. The first guide 23 includes a first portion 23a and a second portion 23b disposed adjacent to the fan 11. The first portion 23a is formed in an L-shape, for example, when viewed in a plan view, and is disposed between the heater 10 and the fan 11. The second part 23b is formed, for example, in an L-shape when viewed in a plan view, and is located at the position forward from the first part 23a in the main flow direction F1, in front of the right side of the fan 11 Are deployed. The first portion 23a is connected to the rear side wall 2c, and the second portion 23b is connected to the partition wall 15. Between the first part 23a and the second part 23b, a through hole 23c is formed. The through-hole part 23c is a hole part which faces the front-back direction Y1. The first portion 23a and the second portion 23b of the first guide 23 are blocked between the heater 10 and the fan 11 except for the through hole portion 23c. With this configuration, the gas for heat treatment flows backward from the through-hole portion 23c after passing through the heater 10, and then reaches the fan 11. In addition, in the region upstream of the fan 11 in the main flow direction F1, the aforementioned introduction pipe for supplying superheated water vapor and the aforementioned discharge pipe (not shown) for discharging superheated water vapor are provided. Installed.

The fan 11 is a member that generates a stream of gas for heat treatment toward the main flow direction F1 to the work area 4 or the like. As the fan 11, various fans, such as a centrifugal fan and an axial fan, can be illustrated. In this embodiment, the fan 11 is a sirocco fan. The fan 11 is disposed at a position adjacent to the first portion 23a and the second portion 23b of the first guide 23. The fan 11 is mounted on the output shaft of the electric motor 26 mounted on the rear wall 2c, and rotates by driving the electric motor 26. The fan 11 faces the through-hole part 23c in the front-rear direction Y1. The fan 11 imparts centrifugal force to the inhaled heat treatment gas. Thereby, the gas for heat treatment is guided to the bottom wall 2a, the ceiling wall 2f, and the first guide 23 and flows to the downstream side in the main flow direction F1, so that the second guide 24 and the upstream side wall It is guided to the rear end of (2d) and sent to the supply port 19.

The second guide 24 is a plate-shaped member formed in an arc shape when viewed from a plane, and is disposed from the right end of the rear side wall 2c to the rear end of the upstream side wall 2d. The second guide 24 is formed in a curved shape that moves toward the front side as it moves to the right, and faces the fan 11 in the left-right direction X1 (main flow direction F1). The gas for heat treatment discharged from the fan 11 is guided to the second guide 24, thereby smoothly changing the direction from the right direction to the front direction.

The supply port 19 is provided at the rear end portion of the wind chamber 20, and forms an exit portion of the transport path 18 in the main flow direction F1. The supply port 19 supplies gas for heat treatment to the work area 4 through the wind chamber 20 and the wind section 7. The supply port 19 includes a right end portion 15a of the partition wall 15, a portion of the upstream side wall 2d that faces the right end portion 15a from side to side, a bottom wall 2a, and a ceiling wall 2f. ), and an elongated rectangular space is formed in the vertical direction Z1 when viewed in the front-rear direction Y1. In the left-right direction X1, the width of the supply port 19 is set smaller than the width of the wind chamber 20.

The wind chamber 20 is arranged as a box-shaped portion to which the gas for heat treatment is sent immediately upstream of the wind flow control unit 8 in the main flow direction F1. The wind chamber 20 is formed substantially symmetrically with the wind chamber 16. Specifically, the wind chamber 20 forms a rectangular space extending elongately in the front-rear direction Y1 when viewed from a plane. Moreover, the height position of the space in the wind chamber 20 is aligned with the height position of the space in the work area 4. The wind chamber 20 is formed by using the wind flow rate adjusting unit 8 in plan view, the right portion of the opening 12 of the front wall 2b, and the upstream side wall 2d.

The wind chamber 20 is formed so that the gas for heat treatment flows toward the wind flow controller 8. The gas for heat treatment introduced from the supply port 19 to the wind chamber 20 is, for a short time in the wind chamber 20, so that the density of the gas for heat treatment in the front-rear direction Y1 is matched. . The gas for heat treatment is then passed to the space in the work area 4 after passing through the wind flow rate adjusting unit 8. The gas for heat treatment, after heating the object 100 in the work area 4, passes through the wind flow rate adjusting part 6, flows into the wind flow chamber 16, and is heated again by the heater 10, while housing (2) The space inside is circulated.

Next, the wind-fall flow rate adjustment part 6 is demonstrated.

4 is an enlarged side view of a part of the wind-fall flow rate adjustment section 6. 5 is an enlarged plan view of a part of the wind and drop flow rate adjustment section 6. 6 is an enlarged front view showing a part of the wind-fall flow rate adjustment section 6. 3 to 6, the wind-fall flow rate adjustment section 6 is a plane viewed from the wind-fall section 5 perpendicular to the left-right direction X1 (as seen in the left-right direction X1 as shown in FIG. 3). It is provided in order to adjust the flow rate of each part in the lower part 5 of the area 4. In this embodiment, the wind-fall flow rate adjustment part 6 adjusts the flow rate of the superheated water vapor flowing from the work area 4 to the wind-fall chamber 16 in the wind-fall part 5.

In the present embodiment, the wind-fall flow rate adjustment unit 6 measures the flow rate of the heat treatment gas flowing from the work area 4 to the wind-fall chamber 16 in each area divided into plural (three) in the front-rear direction Y1. It is configured to be adjustable. In addition, in this embodiment, the wind-fall flow rate adjustment part 6 is used for the heat treatment gas flowing from the work area 4 to the wind-fall chamber 16 in each area divided into a plurality (six) in the vertical direction Z1. The flow rate is adjustable. In the present embodiment, the wind-fall flow rate adjustment section 6 can adjust the flow rate of the gas for heat treatment for each 3×6=18 area of the total of three areas in the front-rear direction Y1 and the six areas in the vertical direction Z1. Do. In addition, in the wind-fall flow rate adjustment part 6, the number of areas in which the flow rate of the gas for heat treatment can be adjusted is not limited to 3 x 6 = 18 areas, and may be 2 or more.

Under the above-described configuration, in the present embodiment, the wind-fall flow rate adjustment unit 6 measures the flow rate of the gas for heat treatment in the proximal portion 27 relatively close to the suction port 17 in the wind-fall portion 5, and the suction port 17 ) Is set to be smaller than the flow rate of the gas for heat treatment in the distal portion 28 that is relatively distant. In addition, in the present embodiment, the proximal portion 27 refers to the region of the rear third of the work area 4 in the front-rear direction Y1, and the distal portion 28 is the front-rear direction ( It refers to the area of 1/3 of the front side of the work area 4 in Y1).

The wind-fall flow rate adjustment part 6 is arrange|positioned over the whole wind-fall part 5, and divides the space in the work area 4 and the space in the wind-fall chamber 16. The wind-fall flow rate adjustment part 6 extends straight in the front-back direction Y1.

The wind-fall flow rate adjustment part 6 includes a pair of front and rear posts 31 and 32, a base 33 attached to these posts 31 and 32, and a plurality of movable parts 34 attached to the base 33. Have

The pair of front and rear pillars 31 and 32 are provided to support the base 33 at both ends in the front-rear direction Y1. The front pillar 31 is formed using a plate-shaped member, and is disposed behind the front wall 2b in the vicinity of the opening 12. The front side pillar 31 is fixed to the front side wall 2b, and extends from the bottom wall 2a to the ceiling wall 2f. The rear post 32 is formed using a plate-shaped member, and is disposed in front of the partition 15 in the vicinity of the left end 15b of the partition 15. The rear post 32 is fixed to the partition wall 15 and extends from the bottom wall 2a to the ceiling wall 2f.

The through-hole part 35 is formed in the front pillar 31 and the rear pillar 32, respectively. The through-hole part 35 is opened to the space in the work area 4 and the space in the wind-fall chamber 16. In each of the pillars 31 and 32, the through-hole portions 35 are arranged at equal pitches in the vertical direction Z1. In the present embodiment, the number of through hole portions 35 in each of the pillars 31 and 32 is provided for each of the first to sixth regions 51 to 56 to be described later. Each through-hole part 35 is formed in a rectangular shape in this embodiment, is smaller than the fixed hole part 33a described later, and has a smaller opening area than the movable hole part 34a. Each through-hole part 35 always passes the heat treatment gas from the work area 4 to the downwind chamber 16. Thereby, even when all the movable parts 34 completely block the fixing hole parts 33a to be described later of the base 33, the gas for heat treatment can be passed from the work area 4 to the wind-fall chamber 16. In addition, by providing through-hole portions 35 at both ends in the front-rear direction Y1, both the proximal portion 27 and the distal portion 28 of the lower portion 5 can pass the minimum heat treatment gas. The temperature difference between the opening 12 and the partition 15 can be made smaller.

In addition, in this embodiment, the form in which each pillar 31 and 32 is formed from one plate-shaped member is demonstrated as an example, but it is not necessary to form this. For example, each of the pillars 31 and 32 may be formed using a hollow rectangular columnar member. Also in this case, a configuration in which the gas for heat treatment in the work area 4 is introduced into the space in the wind-fall chamber 16 is adopted by forming the same through-hole portion as the through-hole portion 35.

The base 33 is a plate-shaped member that covers the lower wind section 5 in cooperation with the posts 31 and 32. The front end portion of the base 33 is fixed to the front post 31. The rear end of the base 33 is fixed to the rear post 32. The base 33 extends from the bottom wall 2a to the ceiling wall 2f. In addition, the base 33 may be attached to the pillars 31 and 32 so that the position of the vertical direction Z1 with respect to the pillars 31 and 32 can be adjusted.

In the present embodiment, as for the base 33, as described above, for each of the 3 areas in the front-rear direction Y1 and the 6 areas in the up-down direction Z1, 3 x 6 = 18 areas, the gas for the heat treatment is The flow rate is adjustable. More specifically, in the present embodiment, in the base 33, the proximal region 48, the intermediate region 49, and the distal region 50 are defined along the front-rear direction Y1. In addition, in the present embodiment, the first to sixth upper and lower regions 51 to 56 are defined in the base 33 along the vertical direction Z1.

The proximal region 48 is a region set in the proximal portion 27. The proximal region 48 is a region about 1/3 of the rear end side of the base 33. The intermediate region 49 is a region set between the proximal portion 27 and the distal portion 28. The distal region 50 is an area set in the distal portion 28. The distal region 50 is a region about 1/3 of the front end side of the base 33.

The first to sixth upper and lower regions 51 to 56 are set at an equal pitch in the vertical direction Z1. The first upper and lower regions 51 are set near the ceiling wall 2f, and the sixth upper and lower regions 56 are set near the bottom wall 2a.

In this way, the proximal region 48, the intermediate region 49, and the distal region 50 as three regions are set in the front-rear direction Y1, and the first as six regions in the vertical direction Z1. -The sixth upper and lower areas 51-56 are set. Thereby, as described above, a unit of 3x6 = 18 is set. And for each of these units, it is possible to set the air volume from the work area 4 to the wind-fall chamber 16.

In the present embodiment, in each unit of the base 33, a fixing hole portion 33a of 2 vertical rows x 4 horizontal columns is formed. Specifically, in each of the proximal region 48, the intermediate region 49, and the distal region 50, the fixing hole portions 33a are formed in four places at equal pitches in the front-rear direction Y1. As a result, in the front-rear direction Y1, fixed hole portions (penetration hole portions) 33a are formed at 3×4=12 places at equal pitch. In addition, in each of the first to sixth upper and lower regions 51 to 56, fixing hole portions 33a are formed at two locations at equal pitches in the vertical direction Z1. As a result, in the up-down direction Z1, fixing hole portions 33a are formed at 2×6=12 places at equal pitch. That is, in the present embodiment, the fixing hole portions 33a are formed in a total of 12×12 locations in 12 places in the front-rear direction Y1 and 12 locations in the vertical direction Z1.

Each fixing hole portion 33a is a round hole in this embodiment. The fixed hole portion 33a is aligned with the corresponding through hole portion 35 of the struts 31 and 32 in height. On the side surface of the work area 4 side of the base 33 having the above-described configuration, a movable portion 34 is provided for each unit.

The movable part 34 is an opening degree adjustment member which is arrange|positioned so that it can cover at least one part of the some fixed hole part 33a, and adjusts the opening degree of the corresponding fixed hole part 33a. Since the movable part 34 is provided for each unit as described above, it is provided in a total of 18 places in three places in the front-rear direction Y1 and six places in the vertical direction Z1. Each movable part 34 is formed in the shape of a rectangular flat plate, and the movable parts 34 are arranged at equal pitches in the vertical direction Z1.

A plurality of movable hole parts 34a are formed in each movable part 34. The movable hole portion 34a is formed in the same shape and size as the fixed hole portion 33a, and is a round hole in this embodiment. The number of movable hole portions 34a in each movable portion 34 is set to be less than the number of fixed hole portions 33a in the unit. Specifically, two movable hole portions 34a of each movable portion 34 are formed in the vertical direction Z1 and three in the front-rear direction Y1. That is, in each movable part 34, 2x3=6 movable hole parts 34a are formed. On the other hand, each movable portion 34 is formed in a length capable of overlapping the four fixing hole portions 33a in the front-rear direction Y1. Moreover, in each movable part 34, the space|interval between movable hole parts 34a adjacent to each other in the front-back direction Y1 is set to more than the diameter of the fixed hole part 33a. Thereby, the movable part 34 can block all of the eight fixing hole parts 33a in the unit in which the movable part 34 is provided.

Each movable part 34 is slidably supported by the base 33 in the front-rear direction Y1. That is, the movable part 34 is supported by the base 33 so that the opening degree of each fixing hole part 33a in the unit in which the movable part 34 is provided is adjustable. Specifically, a connecting pin 36 is fixed to each movable part 34. Two connecting pins 36 are provided in each movable part 34, for example, and are arrange|positioned in the position which avoided the movable hole part 34a in the up-down direction Z1. Each connecting pin 36 is formed in the base 33 and is passed through an elongated long hole 33b in the front-rear direction Y1, and a side surface of the wind chamber 16 side of the base 33 It is fixed to the fall prevention member (not shown) installed in the.

In addition, instead of the above-described configuration, a long hole may be provided in the movable part 34, and the connection pin 36 may be fixed to the base 33.

With the above-described configuration, each movable portion 34, when the corresponding fixing hole portion 33a is opened as a whole, for example, as illustrated in the drawing in the distal region 50, the movable hole portion 34a The edge portion of the fixing hole portion 33a corresponding to the edge portion is disposed so as to completely overlap. At this time, if the connecting pin 36 of the movable part 34 is located at the front end of the corresponding long hole 33b, it is easy to adjust the position of the movable part 34 by an operator. In the drawing, as an example, a state in which all the movable parts 34 of the first to sixth upper and lower areas 51 to 56 in the distal area 50 have their corresponding fixing hole parts 33a opened to the full position is shown. have.

In addition, each movable part 34 is not shown when the corresponding fixed hole part 33a is completely closed, but a fixed hole corresponding to a position in the movable part 34 where the movable hole part 34a is not formed It is arranged to completely block the portion 33a. At this time, if the connecting pin 36 of the movable part 34 is located at the rear end of the corresponding long hole 33b, it is possible to easily adjust the position of the movable part 34 by an operator.

Moreover, each movable part 34 is movable among the movable parts 34, as illustrated in the drawings in the intermediate region 49 and the proximal region 48, for example, when only the corresponding fixing hole portion 33a is partially opened. The portion where the hole portion 34a is not formed and the portion of the fixing hole portion 33a corresponding to it are disposed so as to overlap. In the drawing, as an example, a state in which all the movable portions 34 of the first to sixth upper and lower regions 51 to 56 in the intermediate region 49 are arranged to have a predetermined first opening degree. In addition, it shows a state in which all the movable parts 34 of the first to sixth upper and lower areas 51 to 56 in the distal area 50 are arranged to have a predetermined second opening degree. The first opening degree is, for example, 90% opening degree, and the second opening degree is, for example, about 1/3 opening degree (about 33% opening degree, about 2/3 closed).

As described above, in the present embodiment, the opening degree of the fixing hole portion 33a in the proximal portion 27 relatively close to the suction hole 17 is a fixing hole in the distal portion 28 relatively distant from the suction hole 17. It is set smaller than the opening degree of the part 33a. Further, in the present embodiment, the opening degree of the fixing hole portion 33a in the distal region 50>the opening degree of the fixing hole portion 33a in the middle region 49>fixing in the proximal region 48 The opening portion 33a is also opened. That is, as it moves from the distal side to the proximal side (rear side), the opening degree of the fixing hole portion 33a is gradually reduced.

In addition, in the present embodiment, the setting of the opening degree of the fixing hole portion 33a, that is, the positioning of the movable portion 34 is manually performed by an operator. For this reason, the movable part 34 is provided in the space in the work area 4 which is the largest space in the housing 2. Thereby, the position adjustment operation of the movable part 34 by a worker can be performed easily.

Next, the wind flow rate adjusting part 8 is demonstrated.

When the opening degree of each part is the same as the wind-fall flow-rate adjustment part 6, the wind-fall flow-rate adjustment part 8 has a structure which is left-right symmetry (symmetry in the main flow direction F1). It will be described below in more detail.

7 is a cross-sectional view taken along line VII-VII in FIG. 1, and shows a state in which the heat treatment apparatus 1 is viewed along a direction opposite to the main flow direction F1 in the work area 4. 8 is an enlarged side view showing a part of the wind flow rate adjusting unit 8. 1 and 5 to 8, the wind flow rate adjusting section 8 is a plane perpendicular to the left and right directions X1 in the wind section 7 (left and right directions X1 as shown in FIG. 7 ). It is provided in order to adjust the flow rate of each part in the wind-up part 7 of the work area 4 seen from. In the present embodiment, the wind flow rate adjusting unit 8 adjusts the flow rate of superheated water vapor from the wind chamber 20 to the work area 4 in the wind portion 7.

In the present embodiment, the wind flow rate adjusting unit 8 is a work area from the wind flow rate adjusting unit 8 for each area divided into plural (three) in the front-rear direction Y1 in the same manner as the wind-down flow rate adjusting unit 6. The flow rate of the heat treatment gas flowing in (4) is adjustable. In addition, in this embodiment, the wind flow rate adjustment part 8 is the same as the wind flow rate adjustment part 6, for each area divided into a plurality (six) in the vertical direction Z1, from the wind flow rate adjustment part 8 The flow rate of the heat treatment gas flowing in the work area 4 is configured to be adjustable. Therefore, in the present embodiment, even in the wind flow rate adjusting section 8, the total flow rate of the gas for heat treatment is 3×6=18 for each of the three areas in the front-rear direction Y1 and the six areas in the vertical direction Z1. Is adjustable. In addition, in the wind flow rate adjusting part 8, the number of areas which can adjust the flow rate of the gas for heat processing is not limited to 3x6=18 area, and only 2 or more may be sufficient.

Under the above-described configuration, in the present embodiment, the flow rate of the heat treatment gas passing through the wind-up portion 7 is configured to be substantially equal throughout the wind-up portion 7. The term "substantially uniform" means that the difference in air volume can be regarded as equal within a few percent. Specifically, the wind flow rate adjusting section 8 is relatively relative to the flow rate of the gas for heat treatment in the proximal portion 27 relatively close to the supply port 19 in the wind portion 7 and the supply port 19. The flow rate of the heat treatment gas in the distal distal portion 28 is set to be equal.

The wind-like flow rate adjustment part 8 is arrange|positioned over the whole of the wind-like part 7, and divides the space in the wind-like chamber 20 and the space in the work area 4. The wind flow rate adjusting part 8 extends straight in the front-back direction Y1.

The wind flow rate adjusting unit 8 includes a pair of front and rear support columns 41 and 42, a base 43 attached to these posts 41 and 42, and a plurality of movable parts 44 attached to the base 43. Have

A pair of front-rear posts 41 and 42 is provided to support both ends of the base 43 in the front-rear direction Y1. The posts 41 and 42 are formed symmetrically with the posts 31 and 32. The front side post 41 is fixed to the front side wall 2b. The rear post 42 is fixed to the partition 15.

The through-hole part 45 is formed in the front post 41 and the rear post 42, respectively. The through-hole part 45 is opened to the space in the work area 4 and the space in the wind chamber 20. Each through hole portion 45 is configured to be arranged and shaped symmetrically with the corresponding through hole portion 35. In this embodiment, each through-hole part 45 always passes the gas for heat treatment through the wind chamber 20 to the work area 4. Thereby, even when all the movable parts 44 completely block the fixing hole part 43a mentioned later of the base 43, the gas for heat treatment can be made to pass from the wind chamber 20 to the work area 4. Further, by providing through-holes 45 at both ends in the front-rear direction Y1, both the proximal portion 27 and the distal portion 28 of the wind-like portion 7 can pass the minimum heat treatment gas. The temperature difference between the opening 12 and the partition 15 can be made smaller.

The base 43 is a plate-like member that covers the lower part 5 in cooperation with the posts 41 and 42. The base 43 is arrange|positioned symmetrically with the base 33. The front end portion of the base 43 is fixed to the front post 41. The rear end of the base 43 is fixed to the rear post 42. In addition, the base 43 may be attached to the pillars 41 and 42 so that the position of the vertical direction Z1 with respect to the pillars 41 and 42 can be adjusted.

In the present embodiment, as for the base 43, as described above, in the same manner as the base 33, the total of three areas in the front-rear direction Y1 x six areas in the vertical direction Z1 is 3x6= The flow rate of the heat treatment gas can be adjusted for each 18 area. More specifically, in the present embodiment, in the base 43, similarly to the base 33, along the front-rear direction Y1, the proximal region 48, the intermediate region 49, and the distal region ( 50) is prescribed. In addition, in the present embodiment, the first to sixth upper and lower regions 51 to 56 are defined along the vertical direction Z1 in the same manner as the base 33 in the base 43.

In this way, a unit of 3×6=18 in total is set of three areas in the front-rear direction Y1 and six areas in the vertical direction Z1. In addition, for each of these units, it is possible to set the amount of air flowing from the wind chamber 20 to the work area 4.

In this embodiment, in each unit of the base 43, a fixing hole portion 43a of 2 vertical rows x 4 horizontal columns is formed. In addition, since the fixing hole part 43a in the base 43 is symmetrical with the fixing hole part 33a in the base 33, detailed description is abbreviate|omitted.

On the side surface of the work area 4 side of the base 43 having the above-described configuration, a movable portion 44 is provided for each unit.

The movable part 44 is an opening degree adjustment member which is arrange|positioned so that it can cover at least one part of the some fixed hole part 43a, and adjusts the opening degree of the corresponding fixed hole part 43a. Since the movable part 44 is provided for each unit as described above, it is provided in a total of 18 places in three places in the front-rear direction Y1 and six places in the vertical direction Z1. The movable part 44 is formed in a shape symmetrical to the movable part 34. Specifically, each movable section 44 is formed in a rectangular flat plate shape, and the movable sections 44 are arranged at equal pitches in the vertical direction Z1.

A plurality of movable hole parts 44a are formed in each movable part 44. The configuration and layout of the movable hole portion 44a in the movable portion 44 are the same as the configuration and layout of the movable hole portion 34a in the movable portion 34. Thereby, the movable part 44 can block the whole of the 8 fixing hole parts 43a in the unit in which the said movable part 44 is provided.

Each movable part 44 is slidably supported by the base 43 in the front-rear direction Y1. That is, the movable part 44 is supported by the base 43 so that the opening degree of each fixing hole part 43a in the unit in which the said movable part 44 is provided is adjustable. Specifically, the connecting pin 46 is fixed to each movable part 44. Two connecting pins 46 are provided in each movable part 44, for example, and are arrange|positioned in the position which avoided the movable hole part 44a in the up-down direction Z1. Each connecting pin 46 is formed in the base 43, is passed through the elongated long hole 43b in the front-rear direction Y1, and is prevented from falling out on the side of the wind chamber 20 side of the base 43 It is fixed to a member (not shown).

With the above-described configuration, each movable portion 44, when the corresponding fixing hole portion 43a is completely opened, for example, as illustrated in the drawing in the distal region 50, the movable hole portion 44a The edge portion of the fixing hole portion 43a corresponding to the edge portion is disposed so as to completely overlap. In the drawing, as an example, all the movable parts 44 of the first to sixth upper and lower areas 51 to 56 in the distal area 50 and the intermediate area 49 all open the corresponding fixing hole parts 43a. It shows a state.

In addition, each movable part 44 is not shown when the corresponding fixed hole part 43a is completely closed, but a fixed hole corresponding to a position in the movable part 44 where the movable hole part 44a is not formed It is arranged to completely block the portion 43a.

In addition, when each movable part 44 partially opens the corresponding fixing hole part 43a, for example, as illustrated in the drawing in the proximal region 48, the movable hole part 44a of the movable part 44 is A portion of the fixing hole portion 43a corresponding to the portion not formed is disposed so as to overlap. In the drawing, as an example, a state in which all the movable parts 44 of the first to sixth upper and lower regions 51 to 56 in the proximal region 48 are arranged to have a predetermined opening degree, and the intermediate region ( 49) and all the fixing hole portions 43a of the first to sixth upper and lower regions 51 to 56 in the distal region 50 are arranged so as to be fully opened. The predetermined opening degree is, for example, 90% open. In this way, the flow rate of the heat treatment gas from the fixing hole portion 33a in the proximal region 48 close to the supply port 19 is not excessive. As a result, the flow rate of the heat treatment gas from the fixing hole portion 43a in each portion in the front-rear direction Y1 is substantially equal.

In addition, in the present embodiment, the setting of the opening degree of the fixing hole portion 43a, that is, the positioning of the movable portion 44 is performed manually by an operator, similar to the positioning of the movable portion 34. For this reason, the movable part 44 is provided in the space in the work area 4 which is the largest space in the housing 2. Thereby, the position adjustment operation of the movable part 44 by an operator can be performed easily.

Moreover, the opening degree of each fixed hole part 33a of the wind flow rate adjustment part 6, and the opening degree of each fixed hole part 43a of the wind flow rate adjustment part 8 have a more uniform temperature distribution in the work area 4 It should just be adjusted so that it may be canceled, and the opening degree of the above-described example is not limited to the setting.

In this embodiment, superheated steam is used as the gas for heat treatment. In this case, compared to the case where nitrogen is used as the gas for heat treatment, the temperature distribution of the atmosphere in the work area 4 is less likely to be uniform. This is because the temperature difference of each part in the work area 4 when the superheated water vapor does not spread evenly and widely in the work area 4 because the specific heat of the superheated water vapor is large. And, the inventors of the present application have studied hard and found that, in the vicinity of the door 3 in the work area 4, and in the vicinity of the lower part 5, the temperature of the superheated water vapor tends to be particularly low. did. In addition, since the superheated water vapor has a large specific heat, at first glance, it can be considered that it is easy to heat the inside of the work area 4 with a uniform temperature distribution. However, in practice, as described above, the inventors of the present invention have obtained research results that bias of the temperature distribution occurs. And, as a result of further study, superheated steam is likely to pass through the region 57 around the door surrounded by a circle (see FIG. 1), particularly in the vicinity of the distal region 50 of the lower part 5. As a result, the idea that the passage area of the superheated water vapor in the proximal region 48 of the windfall section 5 is made smaller by the windfall flow rate adjustment section 6 has been obtained.

As described above, according to the heat treatment apparatus 1, the wind-fall flow rate adjustment unit 6 is configured to measure the flow rate of the gas for heat treatment in the proximal portion 27 in the wind-down portion 5 and the distal portion 28. Set smaller than the flow rate of the heat treatment gas. Thereby, the gas for heat treatment can be made to flow more around the distal portion 28 of the lower part 5. In addition, because the wind-up portion 7 is close to the suction port 17, even if the flow rate is reduced, the gas for heat treatment can be made to flow smoothly. As a result, the temperature of the gas for heat treatment in the proximal portion 27 and the temperature of the gas for heat treatment in the distal portion 28 in the lower portion 5 can be made more even. As a result, the gas for heat treatment can be widely spread over a very wide range in the work area 4. Thereby, the temperature distribution in each part of the work area 4 which heat-processes the to-be-processed object 100 can be made more uniform.

Further, according to the heat treatment device 1, the flow rate of the heat treatment gas passing through the wind portion 7 is configured to be substantially equal throughout the wind portion. More specifically, in the present embodiment, the flow rate of the heat treatment gas in the proximal portion 27 and the flow rate of the heat treatment gas in the distal portion 28 are equalized in the wind-like portion 7, The wind flow rate adjustment part 8 is provided. According to this structure, the atmosphere temperature of each part in the work area 4 can be made more uniform. In addition, with a simple configuration in which the flow rate of the gas for heat treatment is substantially equal throughout the wind-like portion 7, the atmosphere temperature of each portion in the work area 4 can be made more uniform. As described above, in the wind-like section 7, the flow rate distribution of the gas for heat treatment is not configured to be actively varied.

In addition, in the heat treatment apparatus 1, the gas for heat treatment contains superheated water vapor. According to this configuration, the superheated steam having a high specific heat compared to the specific heat of the gas for heat treatment such as nitrogen, that is, the superheated steam that is likely to cause variations in the ambient temperature in the work area 4 can be used as the gas for heat treatment. Thus, the object to be treated 100 can be processed more efficiently.

Moreover, according to the heat treatment apparatus 1, in the circulation path 9, the heater 10 and the fan 11 are arranged in order in order from the lower part 5 to the upper part 7. According to this configuration, the heat treatment gas heated by the heater 10 can be stirred by the fan 11. As a result, the temperature of the heat treatment gas sent to the work area 4 can be made more uniform.

Moreover, according to the heat treatment apparatus 1, in the wind-fall flow rate adjustment part 6, the opening degree of the fixing hole part 33a in the proximal part 27 is shown in the fixed hole part 33a in the distal part 28. With a simple configuration that is set smaller than the opening degree, the flow rate of the heat treatment gas in the wind-fall portion 5 can be easily adjusted.

Moreover, according to the heat treatment apparatus 1, the heat radiation prevention member 13 is attached to the door 3, and is arrange|positioned at the work area 4. According to this structure, the heat radiation prevention member is attached to the door 3 as a place where heat in the work area 4 is easily dissipated among the work areas 4. Thereby, the heat insulation property in the work area 4 can be improved more. As a result, the state in which the atmosphere temperature of each part in the work area 4 is equal can be maintained more reliably.

The embodiments of the present invention have been described above, but the present invention is not limited to the above-described embodiments. The present invention can be variously modified as long as it is described in the claims. In addition, hereinafter, a configuration different from the above-described embodiment will be mainly described, and the same reference numerals will be assigned to the same configuration to omit the detailed description.

(1) In the above-described embodiment, the configuration in which the circulation path 9 is formed in the housing 2 has been described as an example, but this configuration may not be necessary. For example, with reference to FIG. 9 which is a schematic plan view showing a part of the first modification in cross section, the circulation path 9A may be arranged outside the housing 2. In this case, in the embodiment shown in Figs. 1 to 8, the partition wall 15 in the housing 2 is omitted, and the wind flow rate adjusting section 6 and the wind flow rate adjusting section 8 are provided with the rear side wall 2c. ). And the suction port 17 is formed in the center part in the front-back direction of the downstream side wall 2e, for example. This suction port 17 is connected to a transport path 18A provided outside the housing 2.

The transport path 18A is, for example, a first conduit 61 formed in a U-shape when viewed in a plan view and having an intake port 17, and a heater 10 and a fan connected to the first conduit 61 (11) The receiving room (63) for receiving, for example, a U-shaped when viewed in plan view, and is connected to the receiving room (63) and the second conduit (62) formed with a supply port (19) Have The supply port 19 is formed in, for example, a central portion in the front-rear direction of the upstream side wall 2d.

With this first modification, it is easy to design the housing 2 and the transport path 18A separately, and the degree of freedom in designing the heat treatment device 1 can be further increased.

(2) In the above-described embodiment and the first modification, the form in which the heater 10 and the fan 11 are arranged behind the work area 4 has been described as an example. However, it is not necessary to have this form. For example, with reference to FIG. 10, which is a schematic front view showing a part of the second modification in cross section, the circulation path 9B may be disposed on the upper part in the housing 2. In this case, in the embodiment shown in Figs. 1 to 8, the partition wall 15 in the housing 2 is omitted, and the wind flow rate adjusting section 6 and the wind flow rate adjusting section 8 are provided with the rear side wall 2c. ). Then, a partition wall 15B is formed between the wind-fall flow rate adjustment part 6 and the wind-phase flow rate adjustment part 8 and the ceiling wall 2f. The intake port 17 is formed at, for example, the upper end of the wind chamber 16. The transport path 18B is formed between the ceiling wall 2f and the partition wall 15B. The supply port 19 is formed at, for example, the upper end of the wind chamber 20.

In this second modification, the overall length of the heat treatment device 1 in the front-rear direction Y1 can be shortened.

(3) In the second modified example described above, the configuration in which the circulation path 9B is formed in the housing 2 is described as an example, but this configuration may not be necessary. For example, referring to FIG. 11, which is a schematic front view showing a part of the third modification in cross section, the circulation path 9C may be disposed above the housing 2 outside the housing 2. In this case, in the second modification, the partition wall 15B in the housing 2 is omitted, and the wind-fall flow rate adjustment section 6 and the wind-flow rate adjustment section 8 extend to the ceiling wall 2f. And the suction port 17 is formed in the center part in the up-down direction of the downstream side wall 2e, for example. The suction port 17 is connected to a transport path 18C provided outside the housing 2.

The transport path 18C is, for example, a first conduit 61 formed in a U-shape and a suction port 17 when viewed from the front, and a heater 10 and a fan connected to the first conduit 61 (11) The receiving room 63 for accommodating the second conduit 62 formed with, for example, a U-shape when viewed from the front and connected to the receiving room 63 and the supply port 19 is formed. Have The supply port 19 is formed in, for example, a central portion in the vertical direction of the upstream side wall 2d.

With this third modification, it is easy to design the housing 2 and the transfer path 18C separately, and the degree of freedom in designing the heat treatment device 1 can be further increased.

Industrial availability

The present invention can be widely applied as a heat treatment device.

1 Heat treatment device
3 doors
4 work area
5 the lower part
6 Wind flow adjustment unit
7 Wind
8 Wind flow adjustment unit
9, 9A, 9B, 9C circuit
10 heater
11 Fan (without air flow generation)
13 Heat dissipation prevention member
17 Intake
19 Supply port
27 proximal
28 distal
33 base
33a fixing hole (through hole)
34 Moving parts
100 object to be treated

Claims (7)

A work area in which a heated part in which a gas for heat treatment flows in and a wind down part in which the gas for heat treatment flows flow out, and an object to be processed is disposed between the wind part and the wind part Wow,
And a suction port for sucking the gas for the heat treatment in the work area through the lower portion,
The flow rate of the heat treatment gas in the proximal portion relatively close to the suction port in the wind-fall portion, and the flow rate of the heat treatment gas in a distal portion relatively distant from the suction port. And a wind-fall flow rate adjustment unit configured to be set smaller. The method according to claim 1,
The heat treatment apparatus, characterized in that the flow rate of the heat treatment gas passing through the wind portion is configured to be substantially equal throughout the wind portion. The method according to claim 2,
And a supply port for supplying the gas for the heat treatment into the work area through the wind portion,
In the wind section, a wind flow rate adjustment section configured to equalize the flow rate of the heat treatment gas at a proximal portion relatively close to the supply port and the heat treatment gas flow at a distal portion relatively distant from the supply port. A heat treatment device further comprising a. The method according to claim 1,
The heat treatment device, characterized in that the heat treatment gas contains superheated water vapor. The method according to claim 1,
A circulation path for circulating the gas for heat treatment from the wind bottom portion to the wind portion,
A heater arranged in the circulation path and heating the gas for heat treatment,
It is disposed in the circulation path and further comprises an air flow generating member for generating the air flow of the heat treatment gas in the work area,
The heat treatment apparatus, characterized in that arranged in the order of the heater, the air flow generating member from the wind down portion toward the wind portion. The method according to claim 1,
The wind flow rate adjusting unit includes a base disposed to cover the wind lower portion and formed with a plurality of through hole portions, and a movable portion configured to cover at least a portion of the plurality of through hole portions and to adjust the opening degree of the through hole portion. And
The opening degree of the through-hole portion in the proximal portion is smaller than the opening degree of the through-hole portion in the distal portion. The method according to any one of claims 1 to 6,
A door for putting in and out the object to be processed in the work area;
The heat treatment apparatus further comprises a heat radiation prevention member mounted on the door and disposed in the work area.

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