TW202022969A - Heat treatment device for making temperature distribution more even in each part of working area of processed object under heat treatment - Google Patents

Abstract

The present invention provides a heat treatment device, which may make the temperature distribution more even in each part of the working area of the processed object under heat treatment. The heat treatment device 1 of the present invention comprises: a working area 4a including an upwind portion 7 into which the heat treatment gas flows, and a downwind portion 5 from which the heat treatment gas flows out, wherein a processed object 100 is disposed between the upwind portion 7 and the downwind portion 5; a suction port 17 for sucking the heat treatment gas in the working area 4 through the downwind portion 5; and, a downwind flow volume adjusting portion 6. The downwind flow volume adjusting portion 6 is constructed for setting the flow volume of the heat treatment gas in a proximal portion 27 in the downwind portion 5 that is relatively close to the suction port 17 to be smaller than the flow volume of the heat treatment gas in a distal portion 28 relatively further from the suction port 17.

Description

Heat treatment device

The present invention relates to a heat treatment device.

A heating cooker that uses superheated steam for cooking is conventionally known (for example, refer to Patent Document 1).

[Prior Technical Literature] 〔Patent Literature〕

Patent Document 1: Japanese Patent Laid-Open No. 2016-11776

In addition, in heat treatment apparatuses used in the manufacture of industrial products such as electronic parts, there are cases in which high-temperature gas is supplied into the heat treatment chamber to heat treatment objects to be processed. In such a heat treatment device, superheated steam may be used as a high-temperature gas. The specific heat of superheated steam is about 0.48 (cal/g/°C), which is larger than the specific heat of air about 0.24 (cal/g/°C). Therefore, when superheated steam is used as a heat treatment gas for heat treatment of the object to be processed carried into the heat treatment chamber, a large amount of heat energy can be applied to the object.

In the case of using a gas with a large specific heat such as superheated steam as the gas for heat treatment, sufficient heat energy can be spread to the entire area of the heat treatment chamber. With this, All parts of the object can be heat treated uniformly. When a gas other than superheated steam is used as the gas for heat treatment, although sufficient heat energy can be applied to the entire area in the heat treatment chamber, it is important to uniformly heat treat each part of the object.

Especially in industrial products such as electronic parts, in order to more uniformly heat treat each part of the object to be treated, it is necessary to make the temperature distribution in the heat treatment chamber more uniform. However, the invention described in Patent Document 1 is an appliance for cooking, which does not require a highly uniform temperature distribution like the heat treatment of industrial products.

The present invention is in view of the above situation, and its object is to make the temperature distribution in each part of the work area where the object is heat-treated in a heat treatment device more uniform.

As described above, the specific heat of superheated steam is relatively large. Therefore, it is considered that as long as a large amount of superheated steam is supplied to the work area as the heat treatment gas, the temperature distribution of the heat treatment gas in each part of the work area can be made uniform. However, the inventors of the present invention have obtained the knowledge that this idea is not necessarily correct based on fluid analysis using a computer.

More specifically, the inventors found that the higher the specific heat of the heat-treatment gas, the greater the temperature (ambient gas temperature) difference in the work zone between the part where the heat-treatment gas passes by more and the less part. . Such insights are not necessarily consistent with human intuition, and the above-mentioned fluid analysis makes this fact clear for the first time.

In addition, the heat treatment apparatus includes a work area, and the work area may have an upwind part for supplying heat treatment gas and a downwind part for discharging heat treatment gas. In this case, when the temperature distribution of the ambient gas in the working area becomes uniform, it is generally In the wind part and the downwind part, the heat treatment gas supply form of the upwind part is worked hard. However, the inventors of the present invention have obtained the following idea: instead of working on the supply mode of the heat treatment gas in the downwind section, compared with the supply mode of the heat treatment gas in the upwind section, the work area is The point where the ambient gas temperature is uniform is more effective. As a result, the present invention has been completed.

(1) In order to solve the above-mentioned problems, a heat treatment apparatus of one aspect of the present invention includes a work area including an upwind part into which heated heat treatment gas flows and a downwind part into which the heat treatment gas flows out, and The object to be treated is arranged between the upwind part and the downwind part; a suction port that sucks the heat treatment gas in the working area through the downwind part; and a downwind flow rate adjustment part configured to The flow rate of the heat treatment gas in the proximal portion relatively close to the suction port in the downwind portion is set to be smaller than the flow rate of the heat treatment gas in the remote portion relatively far from the suction port.

According to this configuration, the downwind flow rate adjusting unit sets the flow rate of the heat treatment gas in the near portion of the downwind portion to be smaller than the flow rate of the heat treatment gas in the remote portion. Thereby, more gas for heat treatment can flow around the remote part of the downwind part. In addition, the upwind portion is close to the suction port, so even if the flow rate is reduced, the heat treatment gas can flow smoothly. As a result, in the downwind part, the temperature of the heat treatment gas in the near part and the heat treatment gas in the far part can be made more equal. As a result, the gas for heat treatment can be uniformly spread over a very large area in the work area. Thereby, the temperature distribution in each part of the work area where the processed object is heat-treated can be made more uniform.

(2) The structure of the heat treatment apparatus may include a case where the flow rate of the heat treatment gas passing through the upwind portion is substantially uniform throughout the entire area of the upwind portion.

According to this structure, the temperature of the ambient gas in each part of the working area can be made more uniform. Furthermore, by making the flow rate of the heat treatment gas substantially uniform in the entire area of the upwind portion, the temperature of the ambient gas in each part of the working area can be made more uniform. As described above, the upwind portion is not configured to actively make the flow distribution of the heat treatment gas different.

(3) The heat treatment device described above has the following cases: it is further provided with: a supply port that supplies the heat treatment gas to the work area through the upwind portion; and an upwind flow rate adjustment portion configured to make the above The flow rate of the heat treatment gas in the proximal portion relatively close to the supply port in the upwind portion and the flow rate of the heat treatment gas in the remote portion relatively far from the supply port are equal.

According to this configuration, by providing the upwind flow rate adjusting section, the flow rate of the heat treatment gas can be more uniform in the entire area of the upwind section.

(4) The gas for heat treatment described above may contain superheated steam.

According to this configuration, it is possible to use superheated steam whose specific heat is higher than that of a heat treatment gas such as nitrogen, that is, superheated steam that tends to deviate from the ambient gas temperature in the work area, as the heat treatment gas. Thereby, the to-be-processed object can be processed more efficiently.

(5) The heat treatment device has the following cases: it is further provided with: a circulation path that circulates the heat treatment gas from the downwind portion to the upwind portion; and a heater, which is arranged in the circulation path, In heating the gas for the heat treatment; and a gas flow generating member arranged in the circulation path for generating the gas flow of the gas for the heat treatment in the working area; heating according to the above from the downwind part to the upwind part The air flow generator and the air flow generating member are arranged in this order.

According to this configuration, the gas for heat treatment heated by the heater can be stirred by the airflow generating member. As a result, the temperature of the heat treatment gas sent to the work area can be made more uniform.

(6) The above-mentioned downwind flow rate adjustment part has the following cases: it includes: a base which is arranged to cover the above-mentioned downwind part and is formed with a plurality of through-hole parts; and a movable part which is arranged to be movable Covers at least a part of the plurality of through hole portions, and is used to adjust the opening of the through hole; the opening of the through hole in the proximal portion is smaller than the opening of the through hole in the distal portion degree.

According to this structure, it is possible to easily adjust the flow rate of the heat treatment gas in the leeward portion by setting the opening degree of the through hole portion in the proximal portion to be smaller than the opening degree of the through hole portion in the distal portion. .

(7) The heat treatment device has the following cases: it is further equipped with: a door for allowing the object to be processed in and out of the work area; and a heat dissipation preventing member, which is installed on the door and is arranged at The above working area.

According to this structure, the heat dissipation preventing member is installed on the door which is a part in the work area where the heat in the work area is easily radiated. In this way, the heat insulation in the work area can be further improved. As a result, the ambient gas temperature in each part of the working area can be maintained in a more uniform state.

According to the present invention, in the heat treatment device, the temperature distribution in each part of the work area where the object to be treated is heat treated can be made more uniform.

1‧‧‧Heat treatment device

2‧‧‧Shell

2a‧‧‧Bottom wall

2b‧‧‧Front wall

2c‧‧‧Back wall

2d‧‧‧Upstream side wall

2e‧‧‧Downstream side wall

2f‧‧‧Top wall

3‧‧‧door

4‧‧‧Working area

5‧‧‧Downwind

6‧‧‧Downwind flow adjustment unit

7‧‧‧Upwind

8‧‧‧Upwind flow adjustment department

9, 9A, 9B, 9C‧‧‧Circular path

10‧‧‧Heater

11‧‧‧Fan (air generating component)

12‧‧‧Opening

13‧‧‧Heat dissipation prevention member

14‧‧‧Fixed member

15‧‧‧Next door

15a‧‧‧right end

15b‧‧‧left end

15B‧‧‧Next door

16‧‧‧Leave Chamber

17‧‧‧Suction port

18, 18A, 18B, 18C‧‧‧Feeding path

19‧‧‧Supply Port

20‧‧‧Upwind Chamber

23‧‧‧First guide

23a‧‧‧Part 1

23b‧‧‧Part 2

23c‧‧‧Through the hole

24‧‧‧Second guide

25‧‧‧The heating part

26‧‧‧Electric Motor

27‧‧‧Proximal Department

28‧‧‧Remote Department

31‧‧‧Pillars (front pillars)

32‧‧‧pillar (rear pillar)

33‧‧‧Base

33a‧‧‧Fixed hole (through hole)

33b‧‧‧Elongated hole

34‧‧‧movable part

34a‧‧‧movable hole

35‧‧‧Through hole

36‧‧‧Connecting pin

41‧‧‧pillar (front pillar)

42‧‧‧pillar (rear pillar)

43‧‧‧Base

43a‧‧‧Fixed hole

43b‧‧‧Long hole

44‧‧‧movable part

44a‧‧‧movable hole

45‧‧‧Through hole

46‧‧‧Connecting pin

48‧‧‧Proximal area

49‧‧‧Intermediate area

50‧‧‧Distant area

51‧‧‧The first up and down area

52‧‧‧Second upper and lower area

53‧‧‧3rd upper and lower area

54‧‧‧4th up and down area

55‧‧‧5th upper and lower area

56‧‧‧6th upper and lower area

Area near Gate 57‧‧‧

61‧‧‧The first pipeline

62‧‧‧Second line

63‧‧‧Storage room

100‧‧‧Processed objects

F1‧‧‧Main flow direction

X1‧‧‧Left and right direction

Y1‧‧‧Front and back direction

Z1‧‧‧Up and down direction

Fig. 1 is a schematic plan view showing the structure of the heat treatment device of the embodiment of the present invention Figure, showing part of it in section.

Fig. 2 is a cross-sectional view taken along line II-II of Fig. 1, showing the state of the heat treatment device viewed from the front.

Fig. 3 is a sectional view taken along the line III-III of Fig. 1, showing the state of the heat treatment device viewed along the main flow direction in the working area.

Fig. 4 is a side view showing an enlarged part of the downwind flow rate adjusting part.

Fig. 5 is a plan view showing an enlarged part of a leeward flow adjusting part.

Fig. 6 is a front view showing an enlarged part of a leeward flow adjustment part.

Fig. 7 is a cross-sectional view taken along line VII-VII of Fig. 1, showing the state of the heat treatment device viewed in the direction opposite to the main flow direction in the working area.

Fig. 8 is an enlarged side view showing a part of the upwind flow adjustment part.

Fig. 9 is a schematic plan view showing a part of the first modification in cross section.

Fig. 10 is a schematic front view showing a part of the second modification in cross section.

Fig. 11 is a schematic front view showing a part of the third modification in cross section.

Hereinafter, a mode for implementing the present invention will be described with reference to the drawings.

Fig. 1 is a schematic plan view showing the configuration of a heat treatment apparatus 1 according to an embodiment of the present invention, and a part of it is shown in cross section. Fig. 2 is a cross-sectional view taken along the line II-II of Fig. 1, showing the state of the heat treatment device 1 viewed from the front. 3 is a cross-sectional view taken along the line III-III of FIG. 1, showing the state of the heat treatment device 1 viewed along the main flow direction F1 in the working area 4.

1 to 3, the heat treatment apparatus 1 is an apparatus for performing heat treatment on the object 100 to be processed. The object to be processed 100 is, for example, an electronic component. In the heat treatment apparatus 1, only one to-be-processed object 100 may be heat-treated at a time, or a plurality of to-be-processed objects 100 may be heat-treated together in a state of being placed on a holder or the like. In this implementation In the form, the gas for heat treatment used in the heat treatment apparatus 1 is superheated steam. The specific heat of superheated steam is about 0.48 (cal/g/°C), which is larger than the specific heat of air about 0.24 (cal/g/°C). Therefore, when superheated steam is used as the heat treatment gas for heat treatment of the object 100 carried into the heat treatment chamber, a large amount of heat energy can be applied to the object. In addition, the gas for heat treatment may partially contain gas other than superheated steam, or may not contain superheated steam. In addition, the heat treatment apparatus 1 has a configuration particularly suitable for use in the case of using superheated steam as a gas for heat treatment.

The heat treatment device 1 has: a housing 2; a door 3, which is arranged in front of the housing 2, a working area 4, which is formed in the housing 2; a downwind flow adjustment part 6, which is arranged in the working area 4 Downwind part 5; Upwind flow adjustment part 8, which is arranged in the upwind part 7 of the working area 4; Circulation path 9, which is arranged in the housing 2 and connects the downwind part 5 and the upwind part 7; In addition, the heater 10 and the fan (air flow generating member) 11 are provided in the circulation path 9.

The housing 2 is formed in a hollow box shape, and has a shape whose front side is open toward the front of the housing 2. In this embodiment, the housing 2 is formed in a cubic shape and has a bottom wall 2a, a front side wall 2b as four side walls extending upward from the bottom wall 2a, a rear side wall 2c, an upstream side wall 2d, and a downstream side wall 2e, and A rectangular top wall 2f arranged at the upper end of the four side walls 2b~2e.

A working area 4 and a circulation path 9 are formed in a space defined by the bottom wall 2a, the side walls 2b to 2e, and the top wall 2f of the housing 2. A rectangular opening 12 is formed in the front side wall 2b of the housing 2. The door 3 is attached to the opening 12. In the housing 2, except for the part where the door 3 is arranged, a heat insulating material or the like not shown is arranged around the housing 2 to suppress heat dissipation from the inside of the housing 2 to the outside.

In addition, below, the side of the opening 12 when the housing 2 is viewed in plan is referred to as The front side and the rear side wall 2c side are called the rear side, the upstream side wall 2d side is called the right side, and the downstream side wall 2e side is called the left side.

The door 3 is set to allow the processed object 100 to enter and exit the work area 4 in the housing 2 through the opening 12. The door 3 is supported by an opening and closing mechanism not shown, and opens and closes the opening 12. The door 3 is arranged to cover the entire surface of the opening 12 in the closed state. On the other hand, the space in the housing 2 is exposed to the outside of the housing 2 when the opening 12 is opened. Thereby, the processed object 100 can be moved in and out of the working area 4 of the housing 2.

The inner side surface of the door 3 is formed in a rectangle extending in a direction perpendicular to the horizontal direction. A heat dissipation preventing member 13 is attached to the door 3.

The heat dissipation preventing member 13 is provided to suppress heat dissipation between the door 3 and the opening 12. When the door 3 is closed, the heat dissipation preventing member 13 is located at the front end of the working area 4. The heat dissipation preventing member 13 is formed in a substantially flat plate shape, and the left and right end portions are formed in a shape bent toward the rear, and are fixed to the door 3 using a plurality of pin-shaped fixing members 14. The heat dissipation preventing member 13 extends from the vicinity of the bottom wall 2a to the vicinity of the top wall 2f.

The working area 4 is an area for arranging the object 100 to be processed. The heat treatment device 1 performs heat treatment on the to-be-processed object 100 in the work area 4. In the present embodiment, the working area 4 is adjusted by the housing 2, the partition wall 15 arranged in the space inside the housing 2, and the downwind flow adjustment part 6 and the upwind flow adjustment arranged in the space inside the housing 2. Section 8 formed.

Specifically, the partition wall 15 is arranged at a position advancing a predetermined distance from the door 3 to the rear side of the space in the housing 2. The partition wall 15 is formed in a rectangular flat plate shape perpendicular to the front-rear direction Y1, and extends along the left-right direction X1 (the main flow direction F1 in the working area 4). The partition wall 15 is fixed to both the bottom wall 2a and the top wall 2f. In this embodiment, the area where the partition wall 15 is arranged in the left-right direction X1 is more extensive than the area where the opening 12 is provided. Large range. In other words, the right end 15a of the partition wall 15 is arranged at a position that has advanced to the right from the right end of the opening 12. In addition, the left end portion 15b of the partition wall 15 is arranged at a portion that has advanced to the left from the left end portion of the opening portion 12.

According to the above-mentioned structure, the working area 4 has the door 3, the front side wall 2b, the bottom wall 2a, the partition wall 15, the top wall 2f, the downwind part 5, the downwind flow adjustment part 6, the upwind part 7, and the upwind flow adjustment part. 8 formed. And, surrounded by the doors 3, the front wall 2b, the bottom wall 2a, the partition wall 15, the top wall 2f, the downwind section 5, the downwind flow rate adjustment section 6, the upwind section 7, and the upwind flow rate adjustment section 8. The space becomes the space in the working area 4 in the space in the housing 2. In this embodiment, the space in the work area 4 is a rectangular parallelepiped-shaped space. In the work area 4, the left direction, which is a direction along one side of the left-right direction X1, becomes the main flow direction F1 of the gas for heat treatment. An introduction pipe (not shown) for superheated steam is arranged in the part on the wind side below the working zone 4 in the main flow direction F1. The superheated steam is introduced into the working area 4 through the introduction pipe.

In addition, the main flow direction F1 refers to the flow direction of the superheated steam as a heat treatment gas circulating in the space in the housing 2, and means, for example, not including the flow direction of the vortex when the superheated steam locally generates a vortex.

The space in the working area 4 forms a rectangular parallelepiped space. The working area 4 has: an upwind part 7 into which heated heat treatment gas flows; and a downwind part 5 into which heat treatment gas flows out; and the object to be treated 100 is arranged between the upwind part 7 and the downwind part 5 .

The upwind part 7 is arranged at the right end of the opening 12. The upwind portion 7 is formed in a rectangular shape when viewed from the left-right direction X1. The upwind flow rate adjustment unit 8 is arranged in the upwind portion 7.

The downwind part 5 is arranged at the left end of the opening 12. The leeward portion 5 is formed in a rectangular shape when viewed from the left-right direction X1. In this embodiment, it is set to When viewed toward X1, the projected area of the upwind portion 7 is the same as the projected area of the downwind portion 5. A leeward flow rate adjustment section 6 is arranged in the leeward section 5. A circulation path 9 is provided for continuously supplying the heat treatment gas to the work zone 4 having the above-mentioned configuration.

The circulation path 9 is provided for conveying the heat-treatment gas from the downwind part 5 to the upper wind part 7 and thereby circulates the heat-treatment gas in the housing 2. In this embodiment, the circulation path 9 is arranged in the housing 2. In addition, in this embodiment, the circulation path 9 is provided with the above-mentioned introduction pipe (not shown) for supplying superheated steam into the housing 2 and a means for discharging the superheated steam from the housing 2. Discharge pipe (not shown).

The circulation path 9 passes through the downwind flow adjustment part 6, the left part of the opening 12 in the front side wall 2b, the downstream side wall 2e, the rear side wall 2c, the partition wall 15, the upstream side wall 2d, the upwind flow adjustment part 8, and the front side wall 2b. The right side portion of the opening 12, the bottom wall 2a and the top wall 2f are formed. The circulation path 9 has a downwind chamber 16, a suction port 17, a feed path 18, a supply port 19, and an upwind chamber 20.

The leeward chamber 16 is arranged as a box-shaped portion from which the heat treatment gas is sent directly downstream of the leeward flow rate adjusting portion 6 in the main flow direction F1. The leeward chamber 16 is formed in a rectangular space elongated in the front-rear direction Y1 in a plan view. In addition, the height position of the space in the downwind chamber 16 is aligned with the height position of the space in the working area 4. The leeward chamber 16 is formed by using the leeward flow adjustment part 6, the left side part of the opening part 12 in the front side wall 2b, and the downstream side wall 2e in a plan view.

The downwind chamber 16 is formed so that the gas for heat treatment flows toward the rear wall 2c. The heat treatment gas that has passed through the leeward chamber 16 is directed to the rear of the leeward chamber 16, passes through the suction port 17, and enters the feed path 18.

The suction port 17 is provided at the rear end of the leeward chamber 16 to form the inlet portion of the feed path 18 in the main flow direction F1. The suction port 17 passes through the leeward 5 and the leeward The chamber 16 sucks the gas for heat treatment in the working area 4. The suction port 17 is formed by the left end 15b of the partition wall 15, the part of the downstream side wall 2e that faces the left end 15b in the left and right directions, the bottom wall 2a and the top wall 2f, and is formed in the vertical direction Z1 when viewed in the front-rear direction Y1 A slender rectangular space. In the left-right direction X1, the width of the suction port 17 is set to be smaller than the width of the downwind chamber 16.

The feed path 18 is configured to suck in the heat treatment gas through the suction port 17, apply heat and kinetic energy to the sucked heat treatment gas, and send the heat treatment gas to the supply port 19.

In this embodiment, the feed path 18 is arranged behind the work area 4, and is arranged in the order of the work area 4, the partition wall 15, and the feed path 18 in the front-rear direction Y1. The feed path 18 is formed in a substantially rectangular space extending slenderly in the left-right direction X1 in a plan view.

The feed path 18 is formed using the partition wall 15, the rear end of the downstream side wall 2e, the rear side wall 2c, the rear end of the upstream side wall 2d, the first guide 23 and the second guide 24, the bottom wall 2a, and the top wall 2f.

In the feed path 18, the main flow direction F1 is guided by the first guide 23 from left to right in a plan view, and advances in a crank shape. A heater 10 and a fan 11 are arranged in the feed path 18. In the main flow direction F1, the heater 10 and the fan 11 are arranged in this order from the leeward portion 5 to the upward wind portion 7.

The heater 10 is arranged adjacent to the suction port 17 and heats the gas for heat treatment flowing in the main flow direction F1 in the feed path 18. As the heater 10, an electric heater that heats by energizing an electric heating wire can be exemplified. In the present embodiment, the heater 10 is arranged in a substantially half area of the feed path 18 in the main flow direction F1. In this embodiment, the heater 10 has a plurality of vertically extending from the top wall 2f Tubular heating part 25. The gas for heat treatment is heated by the heat generating portion 25 of the heater 10, and advances rightward in the main flow direction F1 in the space in the feed path 18. The heat-treatment gas that has passed through the heater 10 is guided by the first guide 23 and flows toward the fan 11.

The first guide 23 is arranged from the bottom wall 2a toward the top wall 2f. The first guide 23 includes a first part 23a and a second part 23b arranged adjacent to the fan 11. The first portion 23 a is formed in, for example, an L shape in a plan view, and is arranged between the heater 10 and the fan 11. The second portion 23b is formed in, for example, an L-shape in a plan view, and is arranged at a position after advancing from the first portion 23a in the main flow direction F1, on the front right of the fan 11. The first portion 23a is connected to the rear side wall 2c, and the second portion 23b is connected to the partition wall 15. A through hole 23c is formed between the first portion 23a and the second portion 23b. The passage hole 23c is a hole facing the front-rear direction Y1. Except for the passage hole 23c, the space between the heater 10 and the fan 11 is blocked by the first portion 23a and the second portion 23b of the first guide 23. According to this configuration, after passing through the heater 10, the heat-treatment gas flows backward through the passage hole 23 c, and then reaches the fan 11. In addition, in the area on the upstream side of the fan 11 in the main flow direction F1, the aforementioned introduction pipe for supplying superheated steam and the aforementioned discharge pipe (not shown) for discharging superheated steam are provided.

The fan 11 is a member that generates a gas flow of the heat treatment gas in the main flow direction F1 in the work area 4 and the like. As the fan 11, various fans such as a centrifugal fan and an axial fan can be exemplified. In this embodiment, the fan 11 is a Sirocco fan. The fan 11 is arranged at a location adjacent to the first portion 23 a and the second portion 23 b of the first guide 23. The fan 11 is installed on the output shaft of an electric motor 26, and is driven by the electric motor 26 to rotate, and the electric motor 26 is installed on the rear side wall 2c. The fan 11 faces the passage hole 23c in the front-rear direction Y1. The fan 11 applies centrifugal force to the sucked heat-treatment gas. Thereby, the gas for heat treatment is guided by the bottom wall 2a, the top wall 2 and the first The element 23 is guided to flow toward the downstream side of the main flow direction F1, and is guided by the second guide 24 and the rear end of the upstream side wall 2d to be sent to the supply port 19.

The second guide 24 is a plate-shaped member formed in an arc shape in a plan view, and is arranged from the right end of the rear side wall 2c toward the rear end of the upstream side wall 2d. The second guide 24 is formed in a curved shape that advances to the front side as it advances to the right, and faces the fan 11 in the left-right direction X1 (main flow direction F1). The heat-treatment gas discharged from the fan 11 is guided by the second guide 24, thereby smoothly changing the direction from the right to the front.

The supply port 19 is provided at the rear end of the upwind chamber 20 to form an outlet portion of the feed path 18 in the main flow direction F1. The supply port 19 supplies the gas for heat treatment into the work area 4 through the upwind chamber 20 and the upwind portion 7. The supply port 19 is formed by the right end portion 15a of the partition wall 15, the portion of the upstream side wall 2d facing the right end portion 15a in the left and right directions, the bottom wall 2a and the top wall 2f, and is formed in the vertical direction Z1 when viewed in the front-rear direction Y1 A slender rectangular space. In the left-right direction X1, the width of the supply port 19 is set to be smaller than the width of the upwind chamber 20.

The upwind chamber 20 is arranged as a box-shaped portion from which the heat treatment gas is sent directly upstream of the upwind flow rate adjustment unit 8 in the main flow direction F1. The upwind chamber 20 is formed to be approximately bilaterally symmetrical to the downwind chamber 16. Specifically, the upwind chamber 20 is formed in a rectangular space extending slenderly in the front-rear direction Y1 in a plan view. In addition, the height position of the space in the upwind chamber 20 is aligned with the height position of the space in the working area 4. When viewed in plan, the upwind chamber 20 is formed using the upwind flow rate adjusting portion 8, the right side portion of the opening 12 in the front side wall 2b, and the upstream side wall 2d.

The upwind chamber 20 is formed such that the gas for heat treatment flows toward the upwind flow rate adjustment unit 8. The heat treatment gas introduced into the upwind chamber 20 from the supply port 19 is temporarily placed in the upwind chamber so that the density of the heat treatment gas in the front and rear direction Y1 is consistent Stay in 20 for a short time. Then, the gas for heat treatment passes through the upwind flow rate adjustment part 8 and is sent to the space in the work area 4. After the heat treatment gas heats the processed object 100 in the work area 4, it flows into the leeward chamber 16 through the leeward flow adjusting unit 6, is heated by the heater 10 again, and circulates in the space in the housing 2.

Next, the downwind flow rate adjustment unit 6 will be described.

FIG. 4 is a side view in which a part of the downwind flow rate adjustment unit 6 is enlarged and displayed. FIG. 5 is a plan view showing an enlarged part of the downwind flow rate adjustment unit 6. FIG. 6 is a front view in which a part of the downwind flow rate adjustment unit 6 is enlarged and displayed. 3 to 6, the downwind flow adjustment part 6 is set to adjust the plane perpendicular to the left and right direction X1 in the downwind part 5 (as shown in FIG. 3, the working area 4 viewed from the left and right direction X1) The flow rate of each part in the downwind part 5). In the present embodiment, the downwind flow rate adjusting unit 6 adjusts the flow rate of the superheated steam flowing from the work area 4 to the downwind chamber 16 in the downwind portion 5.

In this embodiment, the downwind flow rate adjusting unit 6 is configured to be divided into a plurality of (3) areas in the front-rear direction Y1, and can adjust the heat treatment gas flowing from the working area 4 to the downwind chamber 16 flow. In addition, in this embodiment, the downwind flow rate adjusting unit 6 is configured to be divided into a plurality of (6) areas in the vertical direction Z1, and can adjust the heat treatment flow from the work area 4 to the downwind chamber 16 The flow of gas. In the present embodiment, the downwind flow rate adjusting unit 6 can adjust the flow rate of the heat treatment gas for each area of 3×6=18 in total of 3 areas in the front-rear direction Y1×6 areas in the vertical direction Z1. In addition, in the downwind flow rate adjustment unit 6, the number of regions where the flow rate of the heat treatment gas can be adjusted is not limited to 3×6=18 regions, as long as there are 2 or more regions.

According to the above configuration, in the present embodiment, the downwind flow rate adjusting unit 6 sets the flow rate of the heat treatment gas in the proximal portion 27 relatively close to the suction port 17 in the downwind portion 5 to be smaller than that of the gas which is relatively far away from the suction port. For heat treatment in the distal part 28 of the mouth 17 The flow of gas. In addition, in this embodiment, the proximal portion 27 refers to the area 1/3 behind the working area 4 in the front-rear direction Y1. In this embodiment, the distal portion 28 refers to the working area in the front-rear direction Y1. The area of 1/3 on the side before zone 4.

The leeward flow rate adjustment unit 6 is configured to cover the entire area of the leeward section 5, and divide the space in the working area 4 and the space in the leeward chamber 16. The downwind flow rate adjusting portion 6 extends straight in the front-rear direction Y1.

The downwind flow rate adjustment unit 6 has a pair of front and rear pillars 31 and 32; a base 33 attached to the pillars 31 and 32; and a plurality of movable parts 34 attached to the base 33.

The pair of front and rear pillars 31 and 32 are provided for supporting the base 33 at both ends in the front and rear direction Y1. The front pillar 31 is formed using a plate-shaped member, and is arranged behind the front side wall 2b in the vicinity of the opening 12. The front pillar 31 is fixed to the front side wall 2b and extends from the bottom wall 2a to the top wall 2f. The rear pillar 32 is formed using a plate-shaped member, and is arranged in front of the partition wall 15 near the left end portion 15 b of the partition wall 15. The rear pillar 32 is fixed to the partition wall 15 and extends from the bottom wall 2a to the top wall 2f.

Through holes 35 are formed in the front pillar 31 and the rear pillar 32, respectively. The through hole 35 is open to the space in the working area 4 and the space in the downwind chamber 16. In each of the pillars 31 and 32, the through holes 35 are arranged at equal intervals in the vertical direction Z1. In the present embodiment, in each of the pillars 31 and 32, the number of through-holes 35 is two in each of the first to sixth regions 51 to 56 described later. In this embodiment, each through-hole portion 35 is formed in a rectangular shape, and has an opening area smaller than the fixed hole portion 33a described later and smaller than the movable hole portion 34a. Each through hole 35 always allows the heat treatment gas to pass from the work area 4 to the downwind chamber 16. Thereby, even when all the movable portions 34 completely block the fixing hole portion 33a of the base 33, which will be described later, the heat treatment gas can be passed from the work area 4 to the downwind chamber. 16. In addition, by providing through holes 35 at both ends in the front-rear direction Y1, the minimum heat treatment gas can pass through both the proximal portion 27 and the distal portion 28 of the downwind portion 5. The temperature difference between the opening 12 and the partition wall 15 is reduced.

In addition, in the present embodiment, the form in which each of the pillars 31 and 32 are formed by a single plate-shaped member has been described as an example, but this may not be the case. For example, the pillars 31 and 32 can also be formed by hollow square columnar members. In this case, a configuration is also adopted in which the heat treatment gas in the work area 4 is introduced into the space in the leeward chamber 16 by forming the through hole portion same as the through hole portion 35.

The base 33 is a plate-shaped member that cooperates with the pillars 31 and 32 to cover the leeward portion 5. The front end of the base 33 is fixed to the front pillar 31. The rear end of the base 33 is fixed to the rear pillar 32. The base 33 extends from the bottom wall 2a to the top wall 2f. In addition, the base 33 may be attached to the pillars 31 and 32 whose positions in the vertical direction Z1 can be adjusted relative to the pillars 31 and 32.

In the present embodiment, regarding the susceptor 33, as described above, the flow rate of the heat treatment gas can be adjusted for each area of 3×6=18 in total of 3 areas in the front-rear direction Y1×6 areas in the vertical direction Z1. More specifically, in the present embodiment, in the base 33, a proximal area 48, an intermediate area 49, and a distal area 50 are defined along the front-rear direction Y1. In addition, in the present embodiment, in the base 33, first to sixth vertical regions 51 to 56 are defined along the vertical direction Z1.

The proximal area 48 is set in the area of the proximal portion 27. The proximal area 48 is an area about 1/3 of the rear end side of the base 33. The intermediate area 49 is set in the area between the proximal portion 27 and the distal portion 28. The distal region 50 is set in the region of the distal portion 28. The distal area 50 is an area about 1/3 of the front end side of the base 33.

The first to sixth vertical areas 51 to 56 are set at equal intervals in the vertical direction Z1. The first vertical area 51 is set near the top wall 2f, and the sixth vertical area 56 is Set near the bottom wall 2a.

In this way, three areas are set in the front-rear direction Y1 as a near area 48, an intermediate area 49, and a far area 50, and in the vertical direction Z1, the first to sixth upper and lower areas 51 are set as six areas. ~56. Thus, as described above, 3×6=18 units are set. Moreover, the air volume from the working area 4 to the downwind chamber 16 can be set in each of these units.

In the present embodiment, in each unit of the base 33, fixing holes 33a of 2 vertical rows×4 horizontal columns are formed. Specifically, in the proximal region 48, the intermediate region 49, and the distal region 50, fixing holes 33a are formed at four locations at equal intervals in the front-rear direction Y1. As a result, in the front-rear direction Y1, the fixing hole portions (through-hole portions) 33a are formed at 3×4=12 positions at equal intervals. In addition, in the first to sixth upper and lower regions 51 to 56 respectively, fixing holes 33a are formed at two locations at equal intervals in the vertical direction Z1. As a result, in the vertical direction Z1, the fixing holes 33a are formed at 2×6=12 positions at equal intervals. In other words, in the present embodiment, the fixing holes 33a are formed at 12 locations in the front-rear direction Y1 and 12 locations in the vertical direction Z1, for a total of 12×12 locations.

In this embodiment, each fixing hole 33a is a round hole. The height position of the fixing hole 33 a is aligned with the through hole 35 corresponding to the pillars 31 and 32. A movable portion 34 is provided for each unit on the side surface of the base 33 having the above-mentioned configuration on the side of the work area 4.

The movable portion 34 is an opening adjustment member that is configured to cover at least a part of the plurality of fixed hole portions 33a and adjust the opening degree of the corresponding fixed hole portion 33a. The movable portion 34 is provided for each unit as described above, and is provided at 18 locations in total of 3 locations in the front-rear direction Y1×6 locations in the vertical direction Z1. Each movable portion 34 is formed in a rectangular flat plate shape, and the movable portions 34 are arranged at equal intervals in the vertical direction Z1.

A plurality of movable hole portions 34 a are formed in each movable portion 34. Movable hole 34a is formed into the same shape and size as the fixing hole 33a, and is a round hole in this embodiment. The number of movable hole portions 34a in each movable portion 34 is set to be smaller than the number of fixed hole portions 33a in the unit. Specifically, the movable hole portion 34a of each movable portion 34 is formed at two locations in the vertical direction Z1 and three locations in the front-rear direction Y1. That is, in each movable portion 34, 2×3=6 movable hole portions 34a are formed. On the other hand, each movable portion 34 is formed in the front-rear direction Y1 to have a length that can overlap with the four fixed hole portions 33a. In addition, in each movable portion 34, the interval between the movable hole portions 34a adjacent in the front-rear direction Y1 is set to be greater than the diameter of the fixed hole portion 33a. Thereby, the movable portion 34 can block all the eight fixing hole portions 33a in the unit provided with the movable portion 34.

Each movable portion 34 is slidably supported on the base 33 in the front-rear direction Y1. That is, the movable part 34 is supported on the base 33 so that the opening degree of each fixing hole part 33a in the unit provided with the movable part 34 may be adjusted. Specifically, a connecting pin 36 is fixed to each movable portion 34. For example, two coupling pins 36 are provided in each movable portion 34, and are arranged at a portion avoiding the movable hole portion 34a in the vertical direction Z1. Each coupling pin 36 passes through an elongated hole 33b formed on the base 33 and elongated in the front-rear direction Y1, and is fixed to the anti-dropping member (not shown) provided on the side surface of the leeward chamber 16 in the base 33 Show) on.

In addition, instead of the above-mentioned configuration, the movable portion 34 may be provided with a long hole portion, and the connecting pin 36 may be fixed to the base 33.

According to the above configuration, each movable portion 34 is arranged so that when the corresponding fixed hole portion 33a is fully opened, for example, as illustrated in the figure in the remote area 50, the edge of the movable hole portion 34a corresponds to The edges of the fixing hole 33a completely overlap. At this time, if the connecting pin 36 of the movable portion 34 is positioned at the front end of the corresponding long hole portion 33b, the position of the movable portion 34 can be easily adjusted by the operator. In the figure, as an example, it is shown that all of the first to sixth upper and lower areas 51 to 56 in the remote area 50 can be The fixing hole portion 33a corresponding to the moving portion 34 is in a fully opened state.

In addition, each movable portion 34 is arranged such that when the corresponding fixed hole portion 33a is set to be fully closed, although not shown, the portion of the movable portion 34 where the movable hole portion 34a is not formed will be the corresponding fixed hole. The part 33a is completely blocked. At this time, if the connecting pin 36 of the movable portion 34 is located at the rear end of the corresponding long hole portion 33b, the position of the movable portion 34 can be easily adjusted by the operator.

In addition, each movable portion 34 is arranged so that when only a part of the corresponding fixed hole portion 33a is opened, for example, as shown in the figure in the intermediate area 49 and the proximal area 48, no movable hole is formed in the movable portion 34 The portion of the portion 34a overlaps with a portion of the corresponding fixing hole portion 33a. In the figure, as an example, it is shown that the movable portion 34 arranged so that all the first to sixth upper and lower areas 51 to 56 in the intermediate area 49 are in a predetermined first opening degree. In addition, it is displayed that the movable portion 34 arranged so that all the first to sixth upper and lower areas 51 to 56 in the far bit area 50 are in a predetermined second opening state. The first degree of opening is, for example, an opening degree of several 90 percent, and the second degree of opening is, for example, about 1/3 of the opening degree (about 33% of the opening degree, about 2/3 of the closed state).

As described above, in this embodiment, the opening degree of the fixing hole portion 33a in the proximal portion 27 relatively close to the suction port 17 is set to be smaller than that of the fixing hole portion 33a in the distal portion 28 relatively far away from the suction port 17. The opening degree of the hole 33a. In addition, in this embodiment, it is assumed that the opening degree of the fixing hole 33a in the distal region 50>the opening degree of the fixing hole 33a in the intermediate region 49>the opening degree of the fixing hole 33a in the proximal region 48 . That is, from the distal side to the proximal side (rear side), the opening degree of the fixing hole 33a is gradually reduced.

In addition, in the present embodiment, the setting of the opening degree of the fixed hole portion 33a, that is, the position setting of the movable portion 34, can be performed manually by the operator. Therefore, the movable portion 34 is arranged in the largest space in the housing 2 that is the space in the working area 4. With this, you can easily enter The position adjustment operation of the movable portion 34 performed by the operator is performed.

Next, the upwind flow rate adjustment unit 8 will be described.

The upwind flow rate adjustment unit 8 is configured to be bilaterally symmetrical (symmetrical in the main flow direction F1) when the opening degree of each part is the same as that of the downwind flow rate adjustment unit 6. This will be described in more detail below.

FIG. 7 is a cross-sectional view taken along the line VII-VII of FIG. 1, showing the state of the heat treatment device viewed in a direction opposite to the main flow direction in the working area 4. FIG. 8 is a side view in which a part of the upwind flow rate adjustment unit 8 is enlarged and displayed. 1 and 5 to 8, the upwind flow adjustment unit 8 is set to adjust the upwind portion 7 perpendicular to the left and right direction X1 (as shown in Figure 7, the work viewed from the left and right direction X1 The flow rate of each part in the wind part 7) above zone 4. In the present embodiment, the upwind flow rate adjustment unit 8 adjusts the flow rate of superheated steam from the upwind chamber 20 to the working area 4 in the upwind portion 7.

In this embodiment, similar to the downwind flow rate adjustment unit 6, the upwind flow rate adjustment unit 8 is configured to be divided into a plurality of (3) areas in the front-rear direction Y1, and can adjust the upwind flow rate adjustment The flow rate of the heat treatment gas flowing from the part 8 to the working area 4. In addition, in the present embodiment, similar to the downwind flow rate adjustment unit 6, the upwind flow rate adjustment unit 8 is configured to be divided into a plurality of (6) areas in the vertical direction Z1, and can adjust the upwind The flow rate adjuster 8 is the flow rate of the heat-treatment gas flowing into the work area 4. Therefore, in the present embodiment, in the upwind flow rate adjustment unit 8, the heat treatment may be adjusted for each of 3 areas in the front-rear direction Y1 × 6 areas in the vertical direction Z1, 3×6=18 areas. Use gas flow. In addition, in the upwind flow rate adjustment unit 8, the number of regions where the flow rate of the heat-treatment gas can be adjusted is not limited to 3×6=18 regions, as long as there are 2 or more regions.

According to the above-mentioned structure, in this embodiment, The flow rate of the heat treatment gas in the portion 7 becomes substantially uniform in the entire area of the upwind portion 7. "Substantially uniform" means that the difference in air volume is within a few percent, which can be regarded as uniform. Specifically, the upwind flow rate adjustment unit 8 adjusts the flow rate of the heat treatment gas in the proximal portion 27 relatively close to the supply port 19 in the upwind portion 7 and the far portion 28 relatively far from the supply port 19 The flow rate of the heat treatment gas is set in a uniform manner.

The upwind flow adjustment part 8 is configured to cover the entire area of the upwind part 7 and divide the space in the upwind chamber 20 and the space in the working area 4. The upwind flow adjustment portion 8 extends straight in the front-rear direction Y1.

The upwind flow rate adjusting unit 8 has a pair of front and rear pillars 41 and 42; a base 43 attached to the pillars 41 and 42; and a plurality of movable parts 44 attached to the base 43.

The pair of front and rear pillars 41, 42 are provided to support the base 43 at both ends in the front-rear direction Y1. The pillars 41 and 42 are formed to be bilaterally symmetrical to the pillars 31 and 32. The front pillar 41 is fixed to the front side wall 2b. The rear pillar 42 is fixed to the partition wall 15.

The front pillar 41 and the rear pillar 42 are respectively formed with through holes 45. The through hole 45 is open to the space in the working area 4 and the space in the upwind chamber 20. Each through-hole portion 45 is configured to have a bilaterally symmetrical arrangement and shape with the corresponding through-hole portion 35. In this embodiment, each through hole 45 always allows the heat treatment gas to pass from the upwind chamber 20 to the work area 4. Thereby, even when all the movable parts 44 completely block the fixing hole part 43a of the base 43, which will be described later, the gas for heat treatment can be allowed to flow from the upwind chamber 20 to the work area 4. In addition, by providing through holes 45 at both ends in the front-rear direction Y1, the minimum heat treatment gas can pass through both the proximal portion 27 and the distal portion 28 of the upwind portion 7 The temperature difference between the opening 12 and the partition wall 15 is further reduced.

The base 43 is a plate-shaped structure that cooperates with the pillars 41 and 42 to cover the leeward portion 5 Pieces. The base 43 is configured to be bilaterally symmetrical with the base 33. The front end of the base 43 is fixed to the front pillar 41. The rear end of the base 43 is fixed to the rear pillar 42. In addition, the base 43 may be attached to the pillars 41 and 42 whose positions in the vertical direction Z1 can be adjusted relative to the pillars 41 and 42.

In this embodiment, the base 43, as described above, is the same as the base 33. Each area of 3×6=18 in total of 3 areas in the front-rear direction Y1×6 areas in the vertical direction Z1 can be adjusted. The flow rate of the gas used for heat treatment. More specifically, in the present embodiment, in the base 43, similarly to the base 33, a proximal area 48, an intermediate area 49, and a distal area 50 are defined along the front-rear direction Y1. In addition, in the present embodiment, in the base 43, like the base 33, first to sixth vertical regions 51 to 56 are defined along the vertical direction Z1.

As described above, a total of 3×6=18 units of 3 areas in the front-rear direction Y1 and 6 areas in the vertical direction Z1 are set. Moreover, the air volume from the upwind chamber 20 to the working area 4 can be set on each of these units.

In this embodiment, each unit of the base 43 is formed with fixing hole portions 43a of 2 vertical rows×4 horizontal columns. In addition, the fixing hole portion 43a in the base 43 and the fixing hole portion 33a in the base 33 are bilaterally symmetrical, and therefore, detailed description is omitted.

A movable portion 44 is provided for each unit on the side surface of the base 43 having the above-mentioned configuration on the side of the working area 4.

The movable portion 44 is an opening adjustment member that is configured to cover at least a part of the plurality of fixed hole portions 43a and adjust the opening degree of the corresponding fixed hole portion 43a. The movable portion 44 is provided in each unit as described above, and is provided in 18 locations in total of 3 locations in the front-rear direction Y1×6 locations in the vertical direction Z1. The movable portion 44 is formed in a shape that is bilaterally symmetrical to the movable portion 34. Specifically, each movable portion 44 is formed in a rectangular flat plate shape, and the movable portions 44 are arranged at equal intervals in the vertical direction Z1.

A plurality of movable hole portions 44 a are formed in each movable portion 44. The configuration and layout of the movable hole portion 44 a in the movable portion 44 are the same as the structure and layout of the movable hole portion 34 a in the movable portion 34. Thereby, the movable portion 44 can block all the eight fixing hole portions 43a in the unit where the movable portion 44 is provided.

Each movable portion 44 is slidably supported on the base 43 in the front-rear direction Y1. That is, the movable portion 44 is supported on the base 43 such that the opening degree of each fixing hole portion 43a in the unit provided with the movable portion 44 can be adjusted. Specifically, a connecting pin 46 is fixed to each movable portion 44. For example, two connecting pins 46 are provided in each movable portion 44, and are arranged at a portion avoiding the movable hole portion 44a in the vertical direction Z1. Each coupling pin 46 passes through an elongated hole 43b formed on the base 43 and elongated in the front-rear direction Y1, and is fixed to the anti-dropping member (not shown) provided on the side surface of the upwind chamber 20 in the base 43 Show) on.

According to the above configuration, each movable portion 44 is arranged so that when the corresponding fixed hole portion 43a is fully opened, for example, in the remote area 50, as illustrated in the figure, the edge of the movable hole portion 44a corresponds to The edges of the fixing hole 43a completely overlap. In the figure, as an example, it is shown that the fixed hole portions 43a corresponding to all the movable portions 44 of the first to sixth upper and lower areas 51 to 56 in the distal area 50 and the intermediate area 49 are all opened.

In addition, although not shown, each movable portion 44 is arranged such that when the corresponding fixed hole portion 43a is fully closed, the portion of the movable portion 44 where the movable hole portion 44a is not formed will be the corresponding fixed hole portion. 43a is completely blocked.

In addition, each movable portion 44 is arranged such that when only a part of the corresponding fixed hole portion 43a is opened, for example, as shown in the figure in the proximal region 48, the movable portion 44 is not formed with the movable hole portion 44a. Part of the corresponding fixing hole 43a is heavy Stacked. In the figure, as an example, the display is arranged so that all the movable parts 44 of the first to sixth upper and lower areas 51 to 56 in the near bit area 48 have a predetermined opening degree, and the display is arranged as a middle area 49 And all the fixing hole portions 43a of the first to sixth upper and lower areas 51 to 56 in the distal area 50 are in a fully opened state. The above-mentioned predetermined opening degree is, for example, an opening degree of several 90 percent. Thereby, the flow rate of the heat treatment gas from the fixed hole portion 33a in the proximal region 48 close to the supply port 19 does not become too large. As a result, the flow rate of the heat treatment gas from the fixed hole portion 43a in each portion in the front-rear direction Y1 becomes substantially uniform.

In addition, in this embodiment, similar to the position setting of the movable portion 34, the setting of the opening degree of the fixed hole portion 43a, that is, the position setting of the movable portion 44, is manually performed by the operator. Therefore, the movable portion 44 is disposed in the largest space in the housing 2, that is, the space in the working area 4. Thereby, the position adjustment operation of the movable portion 44 by the operator can be easily performed.

In addition, the opening degree of each fixed hole portion 33a of the downwind flow rate adjusting portion 6 and the opening degree of each fixed hole portion 43a of the upwind flow rate adjusting portion 8 are adjusted to make the temperature distribution in the working area 4 more uniform. However, it is not limited to the opening degree setting exemplified above.

In this embodiment, superheated steam is used as the gas for heat treatment. In this case, compared to the case where nitrogen is used as the heat treatment gas, the temperature distribution of the ambient gas in the working area 4 is difficult to be uniform. This is, because the specific heat of the superheated steam is relatively large, the temperature difference between the parts in the working zone 4 when the superheated steam is not uniformly distributed in the working zone 4 becomes larger. Furthermore, as a result of intensive research conducted by the present inventors, it has been found that the temperature of the superheated steam in the vicinity of the door 3 and the leeward portion 5 in the work area 4 tends to be lowered. In addition, the specific heat of the superheated steam is large, and therefore, at first glance, it is considered that it is easy to heat the inside of the working area 4 to a uniform temperature distribution. But it is, in fact, as mentioned above, The inventor of the present invention has found the result of research that a deviation in temperature distribution occurs. Moreover, as described above, as a result of further in-depth research, the following idea is obtained: The leeward flow adjustment unit 6 reduces the passage area of the superheated steam in the proximal area 48 of the leeward 5, so that the superheated steam can easily pass through. The vicinity of the remote area 50 of the wind portion 5 is particularly a door vicinity area 57 surrounded by a circle (refer to FIG. 1).

As described above, according to the heat treatment apparatus 1, the leeward flow rate adjusting unit 6 in the leeward portion 5 sets the flow rate of the heat treatment gas in the proximal portion 27 to be smaller than the flow rate of the heat treatment gas in the distal portion 28. Thereby, more gas for heat treatment can flow around the distal portion 28 of the downwind portion 5. In addition, since the upwind portion 7 is close to the suction port 17, even if the flow rate is reduced, the heat treatment gas can flow smoothly. As a result, in the downwind portion 5, the temperature of the heat treatment gas in the near portion 27 and the temperature of the heat treatment gas in the far portion 28 can be made more uniform. As a result, the gas for heat treatment can be uniformly spread to a very wide range in the work area 4. Thereby, the temperature distribution in each part of the work area 4 where the object 100 is heat-treated can be made more uniform.

In addition, according to the heat treatment device 1, the flow rate of the heat treatment gas passing through the upwind portion 7 is substantially uniform in the entire area of the upwind portion 7. More specifically, in the present embodiment, an upwind flow rate adjustment unit 8 is provided in the upwind portion 7 to set the flow rate of the heat treatment gas in the proximal portion 27 and the flow rate of the heat treatment gas in the distal portion 28 For uniform. According to this structure, the temperature of the ambient gas in each part in the work area 4 can be made more uniform. In addition, by making the flow rate of the heat treatment gas substantially uniform in the entire area of the upwind portion 7, the ambient gas temperature of each part in the working area 4 is made more uniform. In this way, the upwind portion 7 does not have a configuration that actively makes the flow rate distribution of the heat treatment gas different.

In addition, in the heat treatment device 1, the heat treatment gas contains superheated water vapor gas. According to this configuration, superheated steam whose specific heat is higher than that of heat treatment gas such as nitrogen, that is, superheated steam that tends to deviate from the ambient gas temperature in the work area 4, can be used as the heat treatment gas. Thereby, the to-be-processed object 100 can be processed more efficiently.

In addition, according to the heat treatment device 1, in the circulation path 9, the heater 10 and the fan 11 are arranged in this order from the downwind part 5 to the upwind part 7. According to this structure, the gas for heat treatment heated by the heater 10 can be stirred by the fan 11. As a result, the temperature of the heat-treatment gas sent to the work area 4 can be made more uniform.

In addition, according to the heat treatment device 1, in the downwind flow rate adjustment portion 6, a simple structure in which the opening degree of the fixing hole portion 33a in the proximal portion 27 is set smaller than the opening degree of the fixing hole portion 33a in the distal portion 28 can be utilized. The flow rate of the heat treatment gas in the downwind part 5 can be easily adjusted.

In addition, according to the heat treatment device 1, the heat dissipation preventing member 13 is installed on the door 3 and is arranged in the work area 4. According to this configuration, a heat dissipation preventing member is installed on the door 3 in the work area 4 which is a part where the heat in the work area 4 is easily radiated. Thereby, the heat insulation in the work area 4 can be further improved. As a result, it is possible to more reliably maintain a uniform state of the ambient gas temperature of each part in the work area 4.

The embodiments of the present invention have been described above, but the present invention is not limited to the above-mentioned embodiments. The present invention can be variously modified within the scope described in the scope of the patent application. In addition, the following mainly describes the configuration that is different from the above-mentioned embodiment, and the same configuration is denoted by the same reference numeral in the drawing, and detailed description thereof is omitted.

(1) In the above-mentioned embodiment, the configuration in which the circulation path 9 is formed in the housing 2 is described as an example, but it may not be as described above. For example, you can also refer to a schematic plan view showing a part of the first modification in cross section, that is, FIG. 9A is arranged outside the housing 2. In this case, the partition wall 15 in the housing 2 in the embodiment shown in FIGS. 1 to 8 is omitted, and the downwind flow rate adjustment portion 6 and the upwind flow rate adjustment portion 8 are extended to the rear side wall 2c. In addition, the suction port 17 is formed, for example, in the central portion in the front and rear direction of the downstream side wall 2e. The suction port 17 is connected to a feed path 18A provided outside the housing 2.

The feed path 18A has: a first pipe 61 formed, for example, in a U-shape in a plan view, and a suction port 17 is formed; and a storage chamber 63 connected to the first pipe 61 and containing The heater 10 and the fan 11; and the second duct 62 are formed in a U-shape in a plan view, for example, and are connected to the storage chamber 63, and the supply port 19 is formed. The supply port 19 is formed, for example, in the central part of the upstream side wall 2d in the front and rear direction.

According to this first modification, the housing 2 and the feed path 18A can be easily designed individually, and the degree of freedom in the design of the heat treatment device 1 can be further increased.

(2) In the above-mentioned embodiment and the first modification, the description has been given by taking the form in which the heater 10 and the fan 11 are arranged behind the work area 4 as an example. But it can also be different from the above. For example, referring to FIG. 10 which is a schematic front view showing a part of the second modification in cross section, the circulation path 9B may be arranged in the upper part of the casing 2. In this case, the partition wall 15 in the housing 2 in the embodiment shown in FIGS. 1 to 8 is omitted, and the downwind flow rate adjustment portion 6 and the upwind flow rate adjustment portion 8 are extended to the rear side wall 2c. Furthermore, a partition wall 15B is formed between the downwind flow rate adjustment part 6 and the upwind flow rate adjustment part 8 and the ceiling wall 2f. The suction port 17 is formed, for example, at the upper end of the leeward chamber 16. The feed path 18B is formed between the top wall 2f and the partition wall 15B. The supply port 19 is formed at the upper end of the windward chamber 20, for example.

According to this second modification, the entire length of the heat treatment device 1 in the front-rear direction Y1 can be further shortened.

(3) In the second modified example described above, the configuration in which the circulation path 9B is formed in the casing 2 has been described as an example, but it may not be as described above. For example, referring to a schematic front view showing a part of the third modification in cross section, that is, FIG. 11, the circulation path 9C is arranged above the casing 2 outside the casing 2. In this case, the partition wall 15B in the housing 2 in the second modification example is omitted, and the downwind flow rate adjustment portion 6 and the upwind flow rate adjustment portion 8 are extended to the top wall 2f. In addition, the suction port 17 is formed, for example, in the central part of the downstream side wall 2e in the up-down direction. The suction port 17 is connected to a feed path 18C provided outside the housing 2.

The feed path 18C has: a first pipe 61 formed, for example, in a U-shape when viewed from the front, and a suction port 17 is formed; and a storage chamber 63 that is connected to the first pipe 61 and accommodates There are a heater 10 and a fan 11; and a second duct 62, which is formed into a U-shape when viewed from the front, for example, is connected to the storage chamber 63, and has a supply port 19 formed thereon. The supply port 19 is formed, for example, in the upper-lower center part of the upstream side wall 2d.

According to this third modification, the housing 2 and the feed path 18C can be easily designed individually, and the degree of freedom in design of the heat treatment device 1 can be further increased.

(Industry availability)

The present invention can be widely used as a heat treatment device.

1‧‧‧Heat treatment device

2‧‧‧Shell

2a‧‧‧Bottom wall

2b‧‧‧Front wall

2c‧‧‧Back wall

2d‧‧‧Upstream side wall

2e‧‧‧Downstream side wall

3‧‧‧door

4‧‧‧Working area

5‧‧‧Downwind

6‧‧‧Downwind flow adjustment unit

7‧‧‧Upwind

8‧‧‧Upwind flow adjustment department

9‧‧‧Circulation path

10‧‧‧Heater

11‧‧‧Fan (air generating component)

12‧‧‧Opening

13‧‧‧Heat dissipation prevention member

14‧‧‧Fixed member

15‧‧‧Next door

15a‧‧‧right end

15b‧‧‧left end

16‧‧‧Leave Chamber

17‧‧‧Suction port

18‧‧‧Feed Path

19‧‧‧Supply Port

20‧‧‧Upwind Chamber

23‧‧‧First guide

23a‧‧‧Part 1

23b‧‧‧Part 2

23c‧‧‧Through the hole

24‧‧‧Second guide

25‧‧‧The heating part

26‧‧‧Electric Motor

27‧‧‧Proximal Department

28‧‧‧Remote Department

31‧‧‧Pillars (front pillars)

32‧‧‧pillar (rear pillar)

33‧‧‧Base

34‧‧‧movable part

36‧‧‧Connecting pin

41‧‧‧pillar (front pillar)

42‧‧‧pillar (rear pillar)

43‧‧‧Base

44‧‧‧movable part

46‧‧‧Connecting pin

48‧‧‧Proximal area

49‧‧‧Intermediate area

50‧‧‧Distant area

Area near Gate 57‧‧‧

F1‧‧‧Main flow direction

X1‧‧‧Left and right direction

Y1‧‧‧Front and back direction

Claims (7)

A heat treatment device, characterized in that it is provided with: The working area includes an upwind part into which the heated heat treatment gas flows and a downwind part into which the heat treatment gas flows out, and the object to be treated is arranged between the upwind part and the downwind part; A suction port that sucks the heat treatment gas in the working area through the downwind portion; and The downwind flow rate adjustment unit is configured to set the flow rate of the heat treatment gas in the proximal portion relatively close to the suction port in the downwind portion to be smaller than the flow rate of the heat treatment gas in the distal portion relatively far away from the suction port The flow rate of the gas used for heat treatment. The heat treatment device according to claim 1, wherein the flow rate of the heat treatment gas passing through the upwind portion is substantially uniform in the entire area of the upwind portion. For example, the heat treatment device of claim 2, which has: A supply port that supplies the heat treatment gas to the work area through the upwind portion; and An upwind flow rate adjustment unit configured to make the flow rate of the heat treatment gas in a proximal portion relatively close to the supply port in the upwind portion and the heat treatment gas in a remote portion relatively far from the supply port The gas flow rate is equal. The heat treatment device of claim 1, wherein the gas for heat treatment includes superheated steam. For example, the heat treatment device of claim 1, which is further equipped with: A circulation path that circulates the heat treatment gas from the downwind portion to the upwind portion; A heater arranged in the circulation path for heating the gas for heat treatment; and An air flow generating member, which is arranged in the circulation path, for generating the air flow of the heat treatment gas in the working area; The heater and the air flow generating member are arranged in this order from the downwind portion to the upwind portion. Such as the heat treatment device of claim 1, in which, The downwind flow rate adjusting part includes: a base configured to cover the downwind part and formed with a plurality of through hole portions; and a movable part configured to cover at least one of the plurality of through hole parts One part, and used to adjust the opening of the above-mentioned through hole; The opening degree of the through hole portion in the proximal portion is smaller than the opening degree of the through hole portion in the distal portion. Such as the heat treatment device of any one of claims 1 to 6, which is further equipped with: Doors, which are used to allow the above-mentioned objects to be processed in and out of the above-mentioned working area; and The heat dissipation preventing member is installed on the door and arranged in the working area.

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