KR20200049425A - 조명 장치 및 검사 장치 - Google Patents

조명 장치 및 검사 장치 Download PDF

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Publication number
KR20200049425A
KR20200049425A KR1020180163949A KR20180163949A KR20200049425A KR 20200049425 A KR20200049425 A KR 20200049425A KR 1020180163949 A KR1020180163949 A KR 1020180163949A KR 20180163949 A KR20180163949 A KR 20180163949A KR 20200049425 A KR20200049425 A KR 20200049425A
Authority
KR
South Korea
Prior art keywords
light
illumination light
aperture
ring
illumination
Prior art date
Application number
KR1020180163949A
Other languages
English (en)
Korean (ko)
Inventor
야스히로 히다카
마사토 카지나미
타카유키 사사오카
Original Assignee
삼성전자주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 삼성전자주식회사 filed Critical 삼성전자주식회사
Priority to US16/547,492 priority Critical patent/US11314073B2/en
Publication of KR20200049425A publication Critical patent/KR20200049425A/ko

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
    • F21S2/00—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction
    • F21S2/005—Systems of lighting devices, not provided for in main groups F21S4/00 - F21S10/00 or F21S19/00, e.g. of modular construction of modular construction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V5/00—Refractors for light sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21W—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO USES OR APPLICATIONS OF LIGHTING DEVICES OR SYSTEMS
    • F21W2131/00—Use or application of lighting devices or systems not provided for in codes F21W2102/00-F21W2121/00
    • F21W2131/40—Lighting for industrial, commercial, recreational or military use
    • F21W2131/403—Lighting for industrial, commercial, recreational or military use for machines
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
    • F21Y2115/00—Light-generating elements of semiconductor light sources
    • F21Y2115/30—Semiconductor lasers

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020180163949A 2018-10-29 2018-12-18 조명 장치 및 검사 장치 KR20200049425A (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US16/547,492 US11314073B2 (en) 2018-10-29 2019-08-21 Lighting device and inspection apparatus having the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2018-202969 2018-10-29
JP2018202969A JP7221648B2 (ja) 2018-10-29 2018-10-29 照明装置及び検査装置

Publications (1)

Publication Number Publication Date
KR20200049425A true KR20200049425A (ko) 2020-05-08

Family

ID=70547505

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020180163949A KR20200049425A (ko) 2018-10-29 2018-12-18 조명 장치 및 검사 장치

Country Status (2)

Country Link
JP (1) JP7221648B2 (ja)
KR (1) KR20200049425A (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003156710A (ja) 2001-11-22 2003-05-30 Toshiba Corp レーザ光源装置
JP2010160307A (ja) 2009-01-08 2010-07-22 Seiko Epson Corp 光学素子および画像表示装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58154817A (ja) * 1982-03-10 1983-09-14 Olympus Optical Co Ltd 電子撮像光学装置
US4873653A (en) * 1986-04-09 1989-10-10 Carl-Zeiss-Stiftung Microscope system for providing three-dimensional resolution
JP3250190B2 (ja) * 1997-06-27 2002-01-28 旭精密株式会社 輪帯状ｎｄフィルター
JP2003177102A (ja) * 2001-09-13 2003-06-27 Hitachi Ltd パターン欠陥検査方法およびその装置
JP4021191B2 (ja) * 2001-12-18 2007-12-12 ペンタックス株式会社 輪帯状ｎｄフィルター及びその製造方法
JP2005156516A (ja) * 2003-11-05 2005-06-16 Hitachi Ltd パターン欠陥検査方法及びその装置
US7319229B2 (en) * 2003-12-29 2008-01-15 Kla-Tencor Technologies Corporation Illumination apparatus and methods
JP4837325B2 (ja) * 2005-07-26 2011-12-14 オリンパス株式会社 顕微鏡照明装置
JP4935318B2 (ja) * 2006-11-21 2012-05-23 セイコーエプソン株式会社 光源装置、画像表示装置
DE102007021823A1 (de) * 2007-05-07 2008-11-13 Vistec Semiconductor Systems Gmbh Messsystem mit verbesserter Auflösung für Strukturen auf einem Substrat für die Halbleiterherstellung und Verwendung von Blenden bei einem Messsystem
JP2010224311A (ja) * 2009-03-24 2010-10-07 Panasonic Corp レーザ光源装置
JP2011013597A (ja) * 2009-07-06 2011-01-20 Seiko Epson Corp 液晶表示装置及びプロジェクター
JP5611149B2 (ja) * 2011-08-23 2014-10-22 株式会社日立ハイテクノロジーズ 光学顕微鏡装置及びこれを備えた検査装置
JP6288617B2 (ja) * 2013-12-06 2018-03-07 三星電子株式会社Ｓａｍｓｕｎｇ Ｅｌｅｃｔｒｏｎｉｃｓ Ｃｏ．，Ｌｔｄ． 照明装置、光学検査装置及び光学顕微鏡

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003156710A (ja) 2001-11-22 2003-05-30 Toshiba Corp レーザ光源装置
JP2010160307A (ja) 2009-01-08 2010-07-22 Seiko Epson Corp 光学素子および画像表示装置

Also Published As

Publication number Publication date
JP2020071051A (ja) 2020-05-07
JP7221648B2 (ja) 2023-02-14

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
AMND Amendment
E601 Decision to refuse application
AMND Amendment
X601 Decision of rejection after re-examination