KR20200042645A - Motion stage capable of aligning flat products in relatively precise locations - Google Patents

Abstract

Disclosed is a motion stage to which an air bearing is applied. To this end, the motion stage of the present invention comprises: a base; a first slider which is slidably arranged in a first direction at the upper portion of the base; a second slider which is slidably arranged in a second direction which is orthogonal to the first direction at the upper portion of the first slider; a third slider which is slidably arranged in the first direction at the upper portion of the second slider; a fourth slider which is slidably arranged in the second direction at the upper portion of the third slider; an upper posture adjustment unit which is arranged at the fourth slider; and a lower posture adjustment unit which is arranged at the second slider. Here, the upper and lower posture adjustment units perform adjustment such that members individually fixed to a first device and a second device which are mounted thereon respectively may form a posture in parallel with each other.

Description

MOTION STAGE CAPABLE OF ALIGNING FLAT PRODUCTS IN RELATIVELY PRECISE LOCATIONS}

The present invention relates to a motion stage, and more particularly, to a motion stage capable of precisely adjusting the posture of equipment mounted to each posture control unit by having upper and lower posture adjustment units orthogonally moving up and down.

When a device formed on a wafer is transferred to a glass panel by using a motion stage, a vacuum chuck for gripping the wafer is mounted on the upper slider and a clamper on which the glass panel is mounted on the lower slider may be installed.

In this case, the distance between the wafer held by the vacuum chuck and the glass panel clamped by the clamper is maintained while maintaining a very narrow gap of several micrometers. At this time, in order to transfer the elements of the wafer to the glass panel, the vacuum chuck is continuously mounted on the upper slider and continuously moved and repeated at a predetermined distance along the X and Y axes.

However, in the motion stage to which the conventional air bearing is applied, fine vibration may occur in the entire motion stage. In addition, if the distance between the wafer and the glass panel is very narrow and the wafer and the glass panel cannot maintain a parallel posture in a work environment in which the vacuum chuck needs to move, the wafer and the glass panel may be damaged due to mutual contact or friction. There is.

The object of the present invention is applied to each posture control unit as air bearings are applied and the upper and lower posture adjustment units are respectively provided on the sliders moving on the X and Y axes and the sliders moving on the X and Y axes stacked thereon. The present invention is to provide a motion stage capable of precisely adjusting each posture of each equipment to be mounted in an absolute horizontal state or parallel to each other.

In order to achieve the above object, the present invention provides a motion stage to which an air bearing is applied, comprising: a base; A first slider slidingly disposed in a first direction on the base; A second slider slidably disposed on the upper portion of the first slider along a second direction perpendicular to the first direction; A third slider slidably disposed along the first direction on an upper portion of the second slider; A fourth slider slidably disposed along the second direction on an upper portion of the third slider; An upper posture adjustment unit disposed on the fourth slider; And a lower posture adjustment unit disposed on the second slider, wherein the upper and lower posture adjustment units adjust members fixed to each of the first and second equipment mounted on each to achieve a parallel posture. It provides a motion stage characterized in that.

The upper posture adjusting unit, the first mounting plate on which the first equipment is mounted, the first to third actuators for adjusting the first mounting plate at various angles, and the rotation angle of the first mounting plate are adjusted Includes; a fourth actuator for, the lower posture adjustment unit, a second mounting plate on which the second equipment is mounted, and the fifth to seventh actuators for adjusting the second mounting plate at various angles, the It may include a; eighth actuator for adjusting the rotation angle of the second mounting plate.

The first to third actuators may be piezo actuators.

Each of the first to third actuators may be fixed to a ring guide on which one side is rotated by the eighth actuator, and the other side may be connected to the first mounting plate through an elastic pin.

The first to third actuators can adjust the posture of the first mounting plate by pushing or pulling the elastic pin in the Z-axis direction.

The elastic pins may be spaced apart from each other at the same angle.

The fourth actuator may include a first power transmission unit rotatably supporting the ring guide clockwise and counterclockwise while moving along an axis orthogonal to each other.

The fifth to seventh actuators can adjust the posture of the second mounting plate by pushing or pulling three points of the second mounting plate in the Z-axis direction through the cam unit, respectively.

The cam unit, the cam member is formed by a linear guide rail is inclined by the actuator; And a cam follower fixed to the second mounting plate and slidably coupled to the guide rail.

The eighth actuator may include a second power transmission unit rotatably connecting the second mounting plate clockwise and counterclockwise while moving along an axis orthogonal to each other.

The second mounting plate is supported by the four corners to be movable by a plurality of auxiliary supports, and each auxiliary support includes a guide block; A pair of movable blocks stacked on the guide block and slidably coupled in directions perpendicular to each other; And a circular bearing rotatably coupled to the movable block located above the pair of movable blocks and connected to the second mounting plate.

1 is a perspective view showing a motion stage according to an embodiment of the present invention.
2 is a side view showing a motion stage according to an embodiment of the present invention.
3 is an exploded perspective view showing an upper posture control unit of a motion stage according to an embodiment of the present invention.
4 is a plan view showing an upper posture control unit of a motion stage according to an embodiment of the present invention.
5 is a bottom view showing the upper posture control unit of the motion stage according to an embodiment of the present invention.
6 and 7 are views showing an upper posture adjustment unit in a state in which a frame is omitted.
8 is an exploded perspective view showing a lower posture control unit of a motion stage according to an embodiment of the present invention.
9 and 10 are exploded perspective views and cross-sectional views respectively showing a coupling structure between the cam structure and the elastic plate shown in FIG. 8.

Hereinafter, various embodiments will be described in more detail with reference to the accompanying drawings. The embodiments described herein can be variously modified. Certain embodiments are depicted in the drawings and may be described in detail in the detailed description. However, the specific embodiments disclosed in the accompanying drawings are only for easy understanding of various embodiments. Therefore, it is to be understood that the technical spirit is not limited by the specific embodiments disclosed in the accompanying drawings, and includes all equivalents or substitutes included in the spirit and technical scope of the invention.

Terms including ordinal numbers such as first and second may be used to describe various components, but these components are not limited by the above-described terms. The above-mentioned terms are used only for the purpose of distinguishing one component from other components.

In this specification, terms such as "comprises" or "have" are intended to indicate that there are features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, and one or more other features. It should be understood that the existence or addition possibilities of fields or numbers, steps, operations, components, parts or combinations thereof are not excluded in advance. When an element is said to be "connected" or "connected" to another component, it is understood that other components may be directly connected to or connected to the other component, but other components may exist in the middle. It should be. On the other hand, when a component is said to be "directly connected" or "directly connected" to another component, it should be understood that no other component exists in the middle.

On the other hand, "module" or "unit" for a component used in the present specification performs at least one function or operation. And, the "module" or "unit" may perform a function or operation by hardware, software, or a combination of hardware and software.

In addition, in describing the present invention, when it is determined that detailed descriptions of related known functions or configurations may unnecessarily obscure the subject matter of the present invention, detailed descriptions thereof are abbreviated or omitted.

1 and 2 are a perspective view and a side view showing a motion stage according to an embodiment of the present invention.

1 and 2, the motion stage 10 according to an embodiment of the present invention includes an upper posture adjusting unit 100 in which the first equipment can be mounted, and a lower posture in which the second equipment can be mounted. It may include a control unit 200. The motion stage 10 according to an embodiment of the present invention may linearly move the upper posture adjusting unit 100 along the X and Y axes, and linearly move the lower posture adjusting unit 200 along the X and Y axes. I can do it.

The motion stage 10 according to an embodiment of the present invention includes a base 20, a lower linear moving portion disposed above the base 20, an upper linear moving portion disposed above the lower linear moving portion, an upper and The first and second posture adjustment units 100 and 200 respectively disposed on the lower linear moving part may be included.

The lower linear moving part includes a pair of first X-axis guide rails 31 parallel to the upper surface of the base 20 and a first slider slidably coupled to the pair of first X-axis guide rails 31 ( 33), a pair of first Y-axis guide rails 41 disposed on the upper surface of the first slider 33 and orthogonal to the first X-axis guide rail 31, and a pair of first Y-axis guide rails ( 41) may include a second slider 43 slidably coupled to.

The upper linear moving part is slidably coupled to a pair of second X-axis guide rails 51 arranged parallel to the upper surface of the second slider 43 and a pair of second X-axis guide rails 51. The slider 53 and the pair of second Y-axis guide rails 61 disposed on the upper surface of the third slider 53 and orthogonal to the second X-axis guide rail 51 and the pair of second Y-axis guides It may include a fourth slider (63) slidably coupled to the rail (61).

In this case, each slider is slidably coupled to each guide rail by an air bearing. Here, the air bearing corresponds to a known technology formed between the slider and the guide rail by injecting air at a predetermined pressure between the slider and the guide rail, and it is possible to minimize the frictional force between the slider and the guide rail (nearly converge to zero). have.

Referring to FIG. 2, the first posture control unit 100 and the bottom posture adjustment unit 200 may be provided with first equipment 1 and second equipment 3, respectively, on opposite sides. As shown in FIG. 2, the upper posture adjustment unit 100 and the upper posture adjustment unit 100 are secured so that space for installing the first and second equipments 1 and 3 is secured between the upper posture adjustment unit 100 and the lower posture adjustment unit 200 The lower posture adjustment unit 200 is disposed at regular intervals.

The first and second equipments 1 and 3 mounted on the upper and lower posture adjusting units 100 and 200 are not limited to any one type of equipment, and various equipment may be applied according to a task to be performed.

For example, when the motion stage 10 according to an embodiment of the present invention is used to transfer a device formed on a wafer to a glass panel, the first equipment 1 mounted on the upper posture control unit 100 May be a vacuum chuck for gripping the wafer 5, and the second equipment 3 mounted on the lower posture adjusting unit 200 may be a clamper on which the glass panel 7 is mounted. As such, products (wafers, glass panels) fixed by the respective equipments 1 and 3 may be formed in a flat shape.

In this case, the present invention, in order to solve the above-described conventional problems, the wafer 5 and the glass panel 7 are disposed parallel to each other in an absolute horizontal posture (ie, one reference plane (top surface of the base)) during the transfer operation. Posture) is essential. In the motion stage 10 according to an embodiment of the present invention, the upper posture adjusting unit 100 in which the first equipment 1 is mounted and the lower posture adjusting unit 200 in which the second equipment 3 is mounted are arbitrary. It can be configured to adjust the posture inclined in the direction and angle of the.

The upper and lower posture control units 100 and 200 adjust the Euler angle of the first and second equipments 1 and 3, respectively, and rotate in theta (θ) direction (direction that rotates based on the Z-axis direction). By adjusting the angle, the posture of structures (wafers, glass panels) fixed to the first and second equipment can be adjusted to an absolute horizontal posture.

Hereinafter, the upper posture adjusting unit 100 and the lower posture adjusting unit 200 will be sequentially described with reference to FIGS. 2 to 10.

First, the structure and operation of the upper posture control unit 100 will be described with reference to FIGS. 3 to 7.

3 to 5 is an exploded perspective view, a top view and a bottom view showing an upper posture control unit of a motion stage according to an embodiment of the present invention, and FIGS. 6 and 7 show an upper posture adjustment unit without a frame These are drawings.

The upper posture adjustment unit 100 may be coupled to the fourth slider 63, which is formed on a pair of both sides, as shown in FIG. 1. Accordingly, the upper posture adjustment unit 100 may be disposed between the fourth sliders 63 instead of being positioned above the fourth sliders 63 so that the overall height of the motion stage 10 can be lowered. In comparison, it can be manufactured compactly.

The upper posture adjustment unit 100 is for adjusting the frame 111, the first mounting plate 130 on which the first equipment (refer to FIG. 2) is mounted, and the first mounting plate 130 at various angles. The first to third actuators 150, 160, and 170 may include a fourth actuator 180 for adjusting the rotation angle of the first mounting plate 130.

Here, the fact that the first mounting plate 130 is adjusted at various angles means that the first mounting plate 130 is adjusted to be inclined at various angles so as to be disposed parallel to each other while maintaining the same distance with respect to the second mounting plate 230. Can mean In addition, various angles can be implemented by adjusting the Euler angle, which is a 3-axis rotation angle.

Referring to FIG. 3, the frame 111 is formed in a substantially rectangular shape, and the first to fourth actuators 150, 160, 170, and 180 may be disposed inside. The first and second upper covers 113a and 113b may be disposed on the frame 111 to protect the first to fourth actuators 150, 160, 170, and 180 disposed inside.

The first upper cover 113a may be fastened to the frame 111, and the second upper cover 113b may be fastened to the circular fixing portion 112 inside the frame 111.

A circular support portion 114 having a smaller diameter than the circular fixing portion is fixedly disposed inside the circular fixing portion 112, and a ring guide 115 having a smaller diameter than the circular supporting portion is rotatably disposed inside the circular supporting portion 114. Can be.

Referring to FIG. 4, the first to third actuators 150, 160 and 170 are disposed at a constant angle along the inner circumferential surface of the ring guide 115. In this case, the elastic pins 158, 168, and 178 connected to the first to third actuators 150, 160, 170, respectively, may be arranged at the same angle α. In this embodiment, the three elastic pins (158,168,178) are described as being arranged at the same angle with each other, but it is not necessarily the same angle, and the three elastic pins (158,168,178) have rotation centers of the ring guides (115). It is sufficient if the teeth are arranged to be located inside the imaginary triangle.

The three elastic pins 158, 168 and 178 can be adjusted to incline the first mounting plate 116 at various angles as they move along the Z-axis direction according to the operation of the connected first to third actuators 150, 160 and 170, respectively. That is, when the three elastic pins 158, 168 and 178 move along the Z-axis direction, the Euler angle of the first mounting plate 116 can be adjusted.

The fourth actuator 180 may be disposed adjacent to the outside of the circular fixing part 112. The fourth actuator 180 may rotate the ring guide 115 clockwise and counterclockwise about the Z axis as it is connected to the ring guide 115 through the first power transmission unit 181.

Referring to FIG. 5, the first mounting plate 116 connected to the three elastic pins 158, 168, and 178 may be located inside the ring guide 115.

The first mounting plate 116 is a ring guide 115 when the posture is adjusted to have various inclination angles by the first to third actuators 150, 160 and 170, as the outside is disposed at a predetermined distance from the inner circumferential surface of the ring guide 115 ).

The structures of the first to fourth actuators 150, 160, 170, and 180 will be described with reference to FIGS. 6 and 7.

The first to third actuators 150, 160, and 170 may be made of a piezo actuator. In this embodiment, since the first to third actuators 150, 160, and 170 are all made of the same structure, the configuration of the first actuator 150 will be described below.

Referring to FIG. 6, the first actuator 150 is fixed to the first support bracket 153 on which one side 152a is mounted in an approximately horizontal direction on the inner circumferential surface of the ring guide 115, and the other side 152b is an elastic pin. 158 is coupled to the second support bracket 153 is mounted.

The first actuator 150 operates such that the other side 152b is inclined at a predetermined angle in an upward or downward direction based on one side 152a and may move the elastic pin 158 in the Z-axis direction.

The second support bracket 153 is a connecting member that interconnects the first actuator 150 and the elastic pin 158. The elastic pin 158 may have one end fixed to the second support bracket 153 and the other end fixed to the first mounting plate 116.

When the posture of the first mounting plate 116 is adjusted in the elastic pin 158, when one side of the first mounting plate 116 on which the elastic pin 158 is disposed moves upward, the first actuator 150 It is preferably made of an elastic material that can be bent to minimize the load transmitted to.

As described above, the first to third actuators 150, 160, and 170 are respectively connected to the elastic pins 158, 168, 178, so that the posture of the first mounting plate 116 can be adjusted at various inclination angles.

6 and 7, the fourth actuator 180 may rotate the ring guide 115 clockwise or counterclockwise through the first power transmission unit 181. The angle at which the ring guide 115 rotates may be, for example, about ± 1 °. The fourth actuator 180 is D.C. It can be a geared motor.

The first power transmission unit 181 is connected to the rotating shaft of the fourth actuator 180 by a ball screw method, the first movable block 183a capable of linear reciprocating motion, and the second movable slidably connected to the first movable block A block 183b and a first connector 185a coupled to the second movable block 183b and moved together with the second movable block may be included.

In addition, the first power transmission unit 181 is a third movable block 185b slidably connected to the first connector, a circular bearing 186 rotatably disposed at the bottom of the third movable block, and a circular bearing on one side. It is connected to the other side of the ring guide 115 may include a second connector 187 connected to.

The second movable block 183b connected to one side of the first connector 185a and the third movable block 185b connected to the other side of the first connector 185a may be slid in an orthogonal direction.

The first power transmission unit 181 may rotate the ring guide 115 clockwise or counterclockwise using the power of the fourth actuator 180 when the fourth actuator 180 is operated.

According to this structure, the upper posture adjusting unit 100 may operate the first to fourth actuators 150, 160, 170, and 180 to adjust the first mounting plate 116 to a desired posture.

Hereinafter, the configuration and operation of the lower posture adjustment unit 200 will be described with reference to the drawings.

8 is an exploded perspective view showing a lower posture adjustment unit of a motion stage according to an embodiment of the present invention, and FIGS. 9 and 10 are exploded perspective views and cross-sectional views respectively showing a coupling structure between the cam structure and the elastic plate shown in FIG. .

Referring to FIG. 8, the lower posture adjusting unit 200 may be disposed on the upper surface of the second slider 43 to correspond to the upper posture adjusting unit 100. The height of the lower posture adjustment unit 200 is preferably manufactured in consideration of having a predetermined distance from the bottom surface of the upper posture adjustment unit 100 so that various equipment can be mounted on the first and second mounting plates 116 and 216. Do.

The lower posture adjustment unit 200 includes a base 210 disposed on an upper surface of the second slider 43, a second mounting plate 216, and fifth to eighth actuators 250, 260, 270, 280 installed on the base, and a first It may include to the fourth auxiliary support (291,292,293,294).

The second mounting plate 216 may be disposed above the support plate 213 elastically connected to the base 210 by a plurality of elastic pieces 214.

The second mounting plate 216 is coupled to the ring guide 215 whose central portion is rotated clockwise and counterclockwise, and the four corner sides are connected by first to fourth auxiliary supports 291, 292, 293 and 294, respectively.

The ring guide 215 may be rotatably coupled to the outer circumference of the rotation guide 212 connected to the central portion of the support plate 216. Accordingly, the ring guide 215 may be indirectly connected to the support plate 216 through the rotation guide 212.

In addition, the second mounting plate 216 is a ring guide (when the power generated from the eighth actuator 280 is transferred through the second power transmission unit 281 as one side is connected to the second power transmission unit 281 215) can be rotated clockwise or counterclockwise. In this case, the rotation angle of the second mounting plate 216 may be about ± 1 °, similar to the rotation angle of the ring guide 115 of the first mounting plate 116.

The fifth to seventh actuators 250, 260 and 270 are D.C. It may be a geared motor, and the second mounting plate 216 may be inclined at various angles by pushing or pulling the three points of the second mounting plate 216 in the Z-axis direction through the cam unit and the plates 258,268,278, respectively. . That is, the Euler angle of the second mounting plate 216 can be adjusted so that one side of the three elastic plates 258, 268, 278 bends along the Z-axis direction to change the second mounting plate 216 to various inclination angles.

The fifth actuator 250 may be disposed opposite the eighth actuator 280 as it is disposed along one side of the base 210. The sixth and seventh actuators 260 and 270 may be disposed along two different sides of the base 210 facing each other.

The three elastic plates 278 operated by the fifth to seventh actuators 250, 260 and 270 are arranged on each side of the support plate 213 to be adjacent to each actuator. The elastic plate 278 is preferably made of a material having elasticity so that it can be bent by an external force and can be restored to a circular shape.

Since the structures of the cam units connecting the fifth to seventh actuators 250, 260, 270 and each of the elastic plates 258, 268, 278 are the same, hereinafter, only the cam unit and the elastic plate 258 associated with the fifth actuator 250 will be described. .

Referring to FIG. 9, the cam unit disposed between the fifth actuator 250 and the elastic plate 258 is connected to the fourth movable block 251 connected to the rotation shaft 250a of the fifth actuator 250 by a ball screw method. , A lifting block 255 that moves up and down according to the linear movement of the fourth movable block, and a tilt plate 256 disposed on the upper side of the lifting block, and a spacer 257 disposed between the bottom surface of the tilt plate and the elastic plate You can. Here, if the fourth movable block 251 is a cam member, the lifting block 255 may be a cam follower operating in cam contact with the cam member.

The fourth movable block 251 has a guide rail 253 inclined to one side along the moving direction of the movable block 251 on the upper side. The guide rail 253 may be slidably coupled to the lifting block 255.

9 and 10, the tilt plate 256 is fastened to a pair of projections (255a, 255b) of the lifting block 255 by screws (254a, 254b) on both sides, and the center screw (254c) ) Is fastened to one side 258b of the elastic plate 258. Accordingly, when the lifting block 255 is moved up and down, one side 258b of the elastic plate 258 is pushed or pulled up and down in the same direction as the moving direction of the lifting block 255.

The tilt plate 256 is preferably formed of an elastic material so as to absorb the load generated when the elastic plate 258 is bent in conjunction with the lifting operation of the lifting block 255.

Between the pair of protrusions 255a and 255b of the elevating block 255, a space portion 255c that secures space so that the bending operation of the tilt plate 256 does not interfere may be formed.

The elastic plate 258 may have one side 258a connected to the lifting block 255 and the other side 258b connected to each side of the support plate 213 so that one side 258a can be bent up and down.

Through this configuration, as the fifth to seventh actuators 250, 260, and 270 operate, the elastic plate 258, 268, 278 through each cam unit pushes or pulls three points of the second mounting plate 216 so that the second mounting plate The Euler angle of 216 can be adjusted.

Referring to FIG. 8, the eighth actuator 280 may rotate the second mounting plate 216 clockwise and counterclockwise through the second power transmission unit 281.

The second power transmission unit 281 is connected to the fifth movable block 280b connected to the rotating shaft 280a of the eighth actuator 280 by a ball screw method, and the fifth movable block 280b to reciprocate in a linear direction The sixth movable block 282 and the seventh movable block 283 connected to the sixth movable block so as to be slidable in a direction orthogonal to the direction in which the sixth movable block moves, and rotatable to the seventh movable block The connected circular bearing 285 may include a second connector 287 connected to one end of the second mounting plate 216 and one side connected to the circular bearing.

Under such a structure, the second power transmission unit 281 transmits the power of the eighth actuator 280 to the second mounting plate 216 when the eighth actuator 280 is operated to transmit the second mounting plate 216. It can be rotated clockwise and counterclockwise.

Meanwhile, the first to fourth auxiliary supports 291, 292, 293, and 294 support the four corner side of the second mounting plate 216 to prevent sagging of the second mounting plate 216, and at the same time, the second mounting plate 216 The rotating operation can be smooth.

Since the structures of the first to fourth auxiliary supports 291, 292, 293, and 294 are all the same, only the structure of the first auxiliary support 291 will be described below.

The first auxiliary support 291 is a guide block 291a fixed to the upper surface of the base 210, an eighth movable block 291b slidably coupled in a linear direction to the upper portion of the guide block, and an upper portion of the eighth movable block It includes a ninth movable block 291c slidably coupled in a direction orthogonal to the movement direction of the eighth movable block, and a circular bearing 291d rotatably coupled to the ninth movable block and connected to the second mounting plate. You can.

The first auxiliary support portion 291 configured as described above can support the second mounting plate 216 to move smoothly without interference when rotating.

As described above, according to the present invention, air bearings are applied, and the sliders moving in the X and Y axes and the sliders moving in the X and Y axes stacked thereon are provided with upper and lower posture adjustment units 100 and 200, respectively. , It is possible to adjust the posture of each equipment mounted on each posture adjustment unit to an absolute horizontal state, or to be arranged in parallel with each other.

In some cases, the second posture adjustment unit 200 may be of course made of the same configuration as the first posture adjustment unit 100 described above.

In the above, although the preferred embodiment of the present invention has been illustrated and described, the present invention is not limited to the above-described specific embodiment, and is generally limited in the technical field to which the present invention belongs without departing from the gist of the present invention claimed in the claims. Of course, various modifications can be implemented by a person having knowledge of the above, and these modifications should not be individually understood from the technical idea or prospect of the present invention.

100: upper posture adjustment unit
115: ring guide
116: first mounting plate
150,160,170,180: first to fourth actuators
158,168,178: Elastic pin
181: first power transmission unit
200: lower posture adjustment unit
215: ring guide
216: second mounting plate
258,268,278: Elastic plate
250,260,270,280: 5th to 8th actuators
281: second power transmission unit

Claims (11)

In the motion stage with air bearings,
Base;
A first slider slidingly disposed in a first direction on the base;
A second slider slidably disposed on the upper portion of the first slider along a second direction perpendicular to the first direction;
A third slider slidably disposed along the first direction on an upper portion of the second slider;
A fourth slider slidably disposed along the second direction on an upper portion of the third slider;
An upper posture adjustment unit disposed on the fourth slider; And
Includes; a lower posture adjustment unit disposed on the second slider,
The upper and lower posture adjusting units are motion stages characterized in that members fixed to each of the first equipment and the second equipment mounted on each are adjusted to form a parallel posture. According to claim 1,
The upper posture adjustment unit includes a first mounting plate on which the first equipment is mounted, first to third actuators for adjusting the first mounting plate at various angles, and a rotation angle of the first mounting plate It includes a fourth actuator for;
The lower posture adjusting unit includes a second mounting plate on which the second equipment is mounted, a fifth to seventh actuator for adjusting the second mounting plate at various angles, and adjusting a rotation angle of the second mounting plate An eighth actuator for; a motion stage comprising a. According to claim 2,
The first to third actuators are motion stages, characterized in that the piezo actuator. According to claim 3,
Each of the first to third actuators is a motion stage, wherein one side is fixed to a ring guide rotated by the eighth actuator and the other side is connected to the first mounting plate through an elastic pin. According to claim 4,
The first to third actuators are motion stages characterized in that the elastic pins are pushed or pulled in the Z-axis direction. According to claim 4,
Each elastic pin is a motion stage, characterized in that spaced apart from each other at the same angle. According to claim 2,
The fourth actuator is a motion stage comprising a first power transmission unit rotatably supporting the ring guide clockwise and counterclockwise while moving along an axis orthogonal to each other. According to claim 2,
The fifth to seventh actuators push the three points of the second mounting plate in the Z-axis direction through the cam unit, or pull to adjust the posture of the second mounting plate. The method of claim 8,
The cam unit,
A cam member having a linearly inclined guide rail formed by the actuator; And
And a cam follower fixed to the second mounting plate and slidably coupled to the guide rail. According to claim 2,
The eighth actuator includes a second power transmission unit that rotatably connects the second mounting plate clockwise and counterclockwise while moving along an axis orthogonal to each other. According to claim 2,
In the second mounting plate, the four corner sides are movably supported by a plurality of auxiliary supports, respectively.
Each auxiliary support,
Guide block;
A pair of movable blocks stacked on the guide block and slidably coupled in directions perpendicular to each other; And
A motion stage comprising; a rotatable coupling rotatably coupled to the movable block located above the pair of movable blocks and connected to the second mounting plate.

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