CN208683945U - Positioning device - Google Patents
Positioning device Download PDFInfo
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- CN208683945U CN208683945U CN201821032344.0U CN201821032344U CN208683945U CN 208683945 U CN208683945 U CN 208683945U CN 201821032344 U CN201821032344 U CN 201821032344U CN 208683945 U CN208683945 U CN 208683945U
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- 238000010586 diagram Methods 0.000 description 7
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- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 6
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- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
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- 238000005334 plasma enhanced chemical vapour deposition Methods 0.000 description 1
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The application provides a kind of positioning device, including rack and corner positioning component；Corner positioning component includes rack-mounted upright body, and the first positioning region and the second positioning region of upright body side is arranged in；In three apex angles that upright body, the first positioning region and the second positioning region are formed, the corner angle of support plate to be positioned is equal to using upright body as the corner angle on vertex.Using positioning device position support plate when, when the first positioning region recline support plate the first side wall and push support plate rotation to a certain degree after, the second positioning region recline support plate close to the first side wall second sidewall；The first positioning region and the second positioning region are matched for clamping tightly support plate at this time, realize the accurate positioning of support plate on the rack.
Description
Technical field
This application involves semiconductor processing equipment technical fields, and in particular to a kind of carrier for realizing bearing wafer is accurately fixed
The positioning device of position.
Background technique
The semiconductor chips such as photovoltaic chip have used PECVD (Plasma Enhanced Chemical Vapour
Deposition, plasma reinforced chemical vapour deposition) technique processed.In previous process, for the non-defective unit for guaranteeing product
Rate, chip needs to be processed are accurately positioned in the finishing stove of PECVD device；To improve production efficiency, photovoltaic chip is processed
When equal semiconductor chips, after multiple chips to be processed are placed on support plate with planar array, then it are loaded to finishing stove and are criticized
Processing.
For the production efficiency for improving production line, PECVD device all has chip upload device；Chip upload device includes crystalline substance
Piece loads machine and positioning device；Specifically, chip to be processed is placed on support plate by the chip load pinpoint form of machine
Afterwards, support plate is transferred to positioning device again and is accurately positioned, so that support plate is integrally transported to PECVD by subsequent capture apparatus
Finishing stove in, and position precision of each chip to be processed in finishing stove is made to reach scheduled tolerance.
In the prior art, support plate is transferred to positioning device in a manner of the conveying of support wheel, then is determined in positioning device
Position mechanism is adjusted positioning；Current positioning mechanism is the air cylinder group that positioning device side is arranged in, comprising: it is left to be located at support plate
The air cylinder group on right side (relative to carrier plate transmission direction) and before and after the support plate side air cylinder group.In carrier plate transmission to positioning device
After going up and standing, the air cylinder group by being located at the air cylinder group of support plate left and right sides and positioned at side before and after support plate pushes support plate, to carry out
Part translation or deflection；Because pushing support plate to realize that positioning, the promotion of four air cylinder groups are dynamic using the air cylinder group of four direction
There may be time intervals for work, can have an impact to the positioning in preceding actuating cylinder group in the air cylinder group of rear movement.
Utility model content
The application provides a kind of positioning device, to solve at least partly technical problem referred in background technique.
The application provides a kind of positioning device, including rack and corner positioning component；
The corner positioning component includes the upright body being mounted on the rack, and is arranged in the upright body side
The first positioning region and the second positioning region；
In three apex angles that the upright body, first positioning region and second positioning region are formed, with described upright
Part is that the corner angle on vertex is equal to the corner angle of support plate to be positioned.
Optionally, the corner positioning component further includes the bracket connecting with the upright body；
First positioning region and second positioning region setting are on the bracket.
Optionally, the bracket includes corner part, first support arm and second support arm；
The first support arm and the second support arm are fixedly connected with the corner part respectively；
First positioning region is mounted in the first support arm；Second positioning region is mounted on the second support arm
On.
Optionally, first positioning region is the first roller relative to first support arm rotation setting；First roller
The rotation axis of wheel is vertically arranged；
Second positioning region is the second roller relative to second support arm rotation setting；The rotation of second roller
Axis is vertically arranged.
Optionally, the quantity at least two of the corner positioning component；
The upright body is vertical shaft；The bracket is around the relatively described gantry rotation of the vertical shaft.
Optionally, the corner positioning component further includes the elastic buffer for limiting the relatively described gantry rotation of the bracket
Part.
Optionally, the corner positioning component further includes the spacer pin for limiting the holder pivots extreme position.
Optionally, the positioning device further includes the position adjusting mechanism for adjusting corner positioning component position；
The position adjusting mechanism is mounted on the rack；
The vertical shaft of each corner positioning component is installed on the position adjusting mechanism, to pass through institute's rheme
Adjustment mechanism is set to be mounted on the rack.
Optionally, the position adjusting mechanism includes guide rail, sliding block and driving mechanism；
The guide rail is fixedly mounted in the rack；
The sliding block and the guide rail are engaged by clamping；
The driving mechanism drives the sliding block to move along the guide rail；
The vertical shaft installation is on the slide block.
Optionally, the driving mechanism includes rotor plate, flexible actuator and guiding push rod；
The rotor plate is mounted on the rack by centralized positioning axis, the relatively described gantry rotation；
One end of the flexible actuator and the rack are hinged, and the other end and the rotor plate are hinged；
One end of the guiding push rod and the sliding block are hinged, and the other end and the rotor plate are hinged；
The articulated position of the flexible actuator and the guiding push rod and the rotor plate is fixed both with respect to the center
Position eccentric shaft it is arranged.
Optionally, the position adjusting mechanism includes two sliding blocks and two guiding push rods；
Two guiding push rods are hinged with two sliding blocks respectively；
Two sliding blocks are in long strip；
The quantity of the corner positioning component is two；The vertical shaft of two corner positioning components is separately mounted to
The diagonal end of two sliding blocks.
Optionally, the quantity of the corner positioning component is two；
The position adjusting mechanism includes a sliding block；And the sliding block is in long strip；
The vertical shaft of two corner positioning components is separately fixed at the both ends of the sliding block.
Optionally, the quantity of the corner positioning component is two；
The positioning device further includes support plate conveying mechanism；The support plate conveying mechanism is mounted on the rack；
The vertical shaft in two corner positioning components is installed in the rack, and is respectively positioned on far from described
The side of support plate conveying mechanism entrance
When positioning support plate using positioning device provided by the present application, because of upright body, the first positioning region and the second positioning region
In three apex angles formed, the corner angle of support plate to be positioned is equal to using upright body as the corner angle on vertex, when corner positions
The first positioning region in component recline support plate the first side wall and after pushing support plate rotation to a certain degree, the second positioning region reclines load
Second sidewall of the plate close to the first side wall；The first positioning region and the second positioning region are matched for clamping tightly support plate at this time, realize support plate and exist
Accurate positioning in rack.
Detailed description of the invention
Fig. 1 is the top view for the positioning device that embodiment provides；
Fig. 2 is the enlarged diagram of a-quadrant in Fig. 1；
Fig. 3 is the axis side schematic diagram for the positioning device that embodiment provides；
Fig. 4 is the enlarged diagram of the B area in Fig. 3；
Fig. 5 is the top view of part-structure in the positioning device of embodiment offer；
Fig. 6 is the bottom view of part-structure in the positioning device of embodiment offer；
Wherein: 01- support plate, 02- chip, 11- rack, the corner 12- positioning component, 121- pedestal, 120- bracket, 122-
One support arm, 123- second support arm, 124- corner part, the first roller of 125-, the second roller of 126-, 127- spring, 128- spacer pin,
129- vertical shaft, 13- position adjusting mechanism, 131- fixing piece, 132- guide rail, 133- sliding block, 134- rotor plate, 135- cylinder,
136- is oriented to push rod, 14- support axis, 141- support wheel.
Specific embodiment
The application is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched
The specific embodiment stated is used only for explaining relevant utility model, rather than the restriction to the utility model.It further needs exist for illustrating
, part relevant to related utility model is illustrated only for ease of description, in attached drawing.
Fig. 1 is the top view for the positioning device that embodiment provides, and Fig. 2 is the enlarged diagram of a-quadrant in Fig. 1, and Fig. 3 is real
The axis side schematic diagram of the positioning device of example offer is applied, Fig. 4 is the enlarged diagram of the B area in Fig. 3.For the ease of understanding hereinafter
The function of positioning device in the application, first does brief introduction, then just to the function of positioning device in the embodiment of the present application below
Specific improvements are described in detail in the application.
Positioning device provided by the embodiments of the present application is for positioning the support plate 01 of bearing wafer 02, so that subsequent grab
Take device that support plate 01 is placed in the finishing stove of PECVD with scheduled path.
As shown in figures 1 and 3, positioning device provided by the embodiments of the present application includes rack 11 and support plate conveying mechanism.Its
In, support plate conveying mechanism includes that the transmission mechanism that more support axis 14 disposed in parallel, driving support axis 14 rotate and setting exist
Support wheel 141 on each support axis 14；After chip 02 is placed on support plate 01 with the array manner of diagram, support plate 01 by
Support wheel 141 on each support axis 14 is held, and is driven and be transferred on the upside of positioning device by each support wheel 141.
Continuing with referring to Fig. 1 and Fig. 3, positioning device provided by the embodiments of the present application further includes four corner positioning components
12；Four corner positioning components 12 respectively against support plate 01 four apex angles, mobile support plate 01 and realize the accurate of support plate 01
Positioning.
Fig. 2 and Fig. 4 are referred to, the corner positioning component 12 in the embodiment of the present application includes pedestal 121, bracket 120, first
Roller 125 and the second roller 126.
Pedestal 121 is mounted in rack 11, at least when corner positioning component 12 withstands support plate 01 with respect to the position of rack 11
Set fixation.The surface of bracket 120 is provided with axis hole in pedestal 121, and axis hole is vertically arranged.
Bracket 120 includes first support arm 122, second support arm 123 and corner part 124；Corner part 124 is arranged in first support arm
122 and second support arm 123 tail end, be fixedly connected with first support arm 112 and second support arm 123.It is set at corner part 124
Vertical shaft 129 is set, the shaft hole matching on vertical shaft 129 and pedestal 121 rotate bracket 120 can with opposite base 121.According to above
It is found that because of the vertical setting of axis hole, bracket 120 is upper only in horizontal direction to be rotated for statement.
Continuing with referring to fig. 2 and Fig. 4, in the embodiment of the present application, the first roller 125 is arranged in first support arm 122, and
It can be rotated relative to first support arm 122；Second roller 126 is arranged in second support arm 123, can be 123 turns with respect to second support arm
It is dynamic；In addition, the axle center of first support arm 122 and second support arm 123 is vertically arranged.
Because of the axle center of the first roller 125, the axle center of the second roller 126 and the vertical setting of vertical shaft above-mentioned 129, institute
Also vertically it is arranged with the axle center of first support arm 122 and the plane where vertical shaft 129, the axle center of second support arm 123 and vertical shaft 129
The plane at place is also vertically arranged；In addition the angle of both of the aforesaid plane is equal to the apex angle angle of support plate 01 to be positioned.
Hereinafter, the course of work in conjunction with aforementioned corner positioning component 12 introduces the realization positioning of support plate 01 of corner positioning component 12
Principle.
In practical application, when corner positioning component 12 is mobile relative to support plate 01, one of roller is (with the second roller
For 126) first contact support plate 01 side wall；At this point, the second roller 126 applies active force to 01 side wall of support plate, meanwhile, support plate
01 side wall also applies opposition to the second roller 126；Because the axle center of the second roller 126 is relative to vertical shaft 129 above-mentioned
Eccentric setting keeps bracket 120 square clockwise along arrow direction shown in Fig. 2 so opposition acts on bracket 120
To rotation；
It is put down as where 125 axle center of the first roller and 129 place plane of vertical shaft and 126 axle center of the second roller and vertical shaft 129
The angle in face is equal to the apex angle angle of support plate 01 to be positioned, and with the rotation of bracket 120, the first roller 125 is also pressed against support plate
On 01 side wall；The first roller 125 and the second roller 126 clamp support plate 01 simultaneously at this time, and bracket 120 is no longer able to turn.
Using four corner positioning components 12, if the bracket 120 in four corner positioning components 12 is same
When clamp support plate 01, while in four corner positioning components pedestal 121 position it is fixed with respect to rack 11, then support plate 01 relative to
The position of rack 11 is fixed.Positioned using the position that support plate 01 can be realized in aforementioned four corner positioning components 12.
It is, utilizing four corner positioning components using four corner positioning components 12 provided by the embodiments of the present application
Roller in 12 can realize the positioning of support plate 01 against the side of support plate 01 simultaneously；Because can using corner positioning component 12
To realize support plate 01 in the positioning of two dimensions of horizontal plane simultaneously, so without as in the prior art using air cylinder group in level
The successive promotion in two, face dimension direction improves the accuracy of the positioning of support plate 01.
In the embodiment of the present application, to generate biggish cunning when the side wall of corner positioning component 12 and support plate 01 being avoided to contact
Kinetic force of friction, corner positioning component 12 uses can be relative to the first roller 125 that first support arm 122 rotates as the first positioning
Portion is used as the second positioning region using the second roller 126 that can be rotated relative to second support arm 123.
In the other embodiment of the application, the first roller 125 above-mentioned and the second roller 126 can also be cancelled,
And the first positioning region and the second positioning region above-mentioned are set in first support arm 122 and second support arm 123；Specific: first is fixed
The side of first support arm 122 is arranged in position portion, and the side of second support arm 123 is arranged in the second positioning region.
However, it should be noted that in three apex angles that vertical shaft 129, the first positioning region and the second positioning region are formed, with vertical shaft
129 are equal to the corner angle of support plate 01 to be positioned for the corner angle on vertex.It will be arranged with vertical shaft 129 for the corner angle on vertex
It is to recline position support plate 01, make support plate 01 mobile one for a positioning region wherein for the corner angle of support plate 01 to be positioned
After determining degree, another positioning region, which also reclines, positions support plate 01, to realize the positioning of support plate 01 using two positioning regions.
In the embodiment of the present application, bracket 120 above-mentioned includes corner part 124, first support arm 122 and second support arm 123；
In concrete application, aforementioned three components can be integrally provided, and can also be assembled and be set together.In addition, the one of the application
In a little embodiments, bracket 120 above-mentioned can also be changed to other kinds of bracket, such as be changed to and be made of two vertical plates
Perpendicular type bracket.
In view of conventional use of support plate 01 is rectangular slab (the case where not considering thickness, the big face of support plate 01 are rectangle),
The apex angle of support plate 01 is 90 °, and the embodiment of the present application is by 125 axis of the first roller and 129 place plane of vertical shaft and the second roller 126
The angle of 129 place plane of axis and vertical shaft is set as 90 °.In other embodiments, if support plate to be positioned is non-rectangle
Sketch plate, be changed to corresponding corner angle to the being adapted to property of angle of both of the aforesaid plane.
Continuing with referring to fig. 2 and Fig. 4, in positioning device provided by the embodiments of the present application, corner positioning component 12 further includes
Spring 127.One end of spring 127 is fixedly connected with the raised pin on pedestal 121, the second support arm 123 of the other end and bracket 120
Connection；Spring 127 is a tension spring.
In conjunction with aforementioned corner positioning component 12 application method it is found that pushing branch when support plate 01 is against the second roller 126
When frame 120 rotates, spring 127 generates elastic-restoring force therewith elastic stretching occurs.This elastic-restoring force can make the second roller
Wheel 126 is sticked on always on the side wall of support plate 01, and avoid makes bracket 120 be detached from support plate 01 because of the impact of support plate 01 rotates,
And the first roller 125 impact another side wall of support plate 01 is avoided to cause chip 02 relative to the movement of support plate 01.
In conjunction with tension spring effect it is found that the pressure spring connecting with first support arm 122 also can be set into spring 127；But consider
The convenience used to tension spring, spring 127 preferably uses tension spring in concrete application.Certainly, in other embodiments, spring 127
Other resilient snubbers can also be changed to.
Please further referring to fig. 2, in the embodiment of the present application, corner positioning component 12 further includes spacer pin 128；Spacer pin
128 are arranged on pedestal 121, to limit rotation amplitude of the bracket relative to pedestal 121.The attached drawing from Fig. 2 is it is found that the application is real
It applies in example, spacer pin 128 is used to prevent bracket 120 from (it is counterclockwise to limit bracket 120 in the inordinate rotation for being in reverse to arrow direction
The extreme position of rotation).
Incorporation engineering experience, in the embodiment of the present application, spring 127 and spacer pin 128 can match use, play more
Good effect；Specifically, when the second roller 126 does not recline 01 side wall of support plate, under the action of spring 127, bracket 120
First support arm 122 can stick on spacer pin 128.At this point, spring 127 can be in certain tensional state, keep certain
Pulling force.
In addition, setting spring 127 can also clamp more conveniently support plate 01 when using multiple corner positioning components 12,
This point does specific explanations again hereinafter.
As shown in Fig. 1, Fig. 3 and Fig. 5, the positioning device provided in the embodiment of the present application uses four corner positioning components
12, four corner positioning components 12 respectively correspond four apex angles of support plate 01.In this case it is to be considered support plate conveying mechanism
When dragging support plate 01 enters positioning device, corner positioning component 12 cannot be interfered with support plate 01.In order to solve this problem,
It further include the position tune for keeping each corner positioning component 12 mobile relative to rack 11 in positioning device provided by the embodiments of the present application
Complete machine structure 13.
Refer to Fig. 5 and Fig. 6, in the embodiment of the present application, position adjusting mechanism 13 includes fixing piece 131, guide rail 132, two
A sliding block 133 and driving mechanism.Fixing piece 131 is fixedly mounted in rack 11, as other component in position adjusting mechanism 13
Reference for installation.Guide rail 132 is arranged on fixing piece 131；Sliding block 133 and guide rail 132 are engaged by clamping；Driving mechanism can drive
133 opposite rail 132 of sliding block does linear slide.
The pedestal 121 of aforementioned corner positioning component 12 is fixedly mounted on sliding block 133, can with the movement of sliding block 133 and
It is mobile.In this way, can use position adjusting mechanism 13 when inputting support plate 01 into positioning device and drive corner positioning component 12
It is mobile, avoid interference with the operation of support plate 01；And when support plate 01 is transferred to positioning device completely, position adjusting mechanism 13 drive again by
Corner positioning component 12 is moved to position location.
In the embodiment of the present application, the quantity of sliding block 133 is two, and two sliding blocks 133 are strip, in two sliding blocks
133 both ends are respectively provided with a corner positioning component 12, that is, in the positioning device in the embodiment of the present application there are four settings
Corner positioning component 12.
It should be noted that in the embodiment of the present application, it is for the ease of by guide rail that fixing piece 131, which is arranged, in position adjusting mechanism 13
132 and driving mechanism be mounted in rack 11；In the other embodiments of the application, position adjusting mechanism 13 can also be not provided with
Fixing piece 131, guide rail 132 therein and driving mechanism are mounted directly on the rack.
As shown in fig. 6, driving mechanism includes rotor plate 134, cylinder 135 and two guiding push rods in the embodiment of the present application
136.Rotor plate 134 is mounted on fixing piece 131 by centralized positioning axis, and can be rotated with opposed fixed member 131；Cylinder 135
One end and rotor plate 134 be articulated and connected, the other end and rotor plate 134 are articulated and connected；One end difference of two guiding push rods 136
It is articulated and connected with corresponding sliding block 133, the other end and rotor plate 134 are articulated and connected；In addition, cylinder 135 and guiding push rod 136 with
The hinged position of rotor plate 134 is arranged both with respect to centralized positioning eccentric shaft.
It is stated in conjunction with attached drawing 6 according to leading portion it is found that in positioning device in the embodiment of the present application, it is flexible when cylinder 135
When bar stretches out cylinder 135, rotor plate 134 is rotated around centralized positioning axis；Rotor plate 134 pushes guiding push rod 136 to be displaced outwardly, and makes
It is mobile to prolong guide rail 132 for hinged sliding block 133 with guiding push rod 136；The connection of binding site adjustment mechanism 13 and other component is closed
System is it is found that the distance between the corner positioning component 12 being now placed on two sliding blocks 133 increases；Cooperate this movement, support plate 01 can
To enter positioning device；It is opposite, when 135 telescopic rod of cylinder bounces back, corner positioning component 12 on two sliding blocks 133 away from
From reduction, it can be used for clamping positioning support plate 01 at this time.
Certainly, in the application other embodiments, if the position of replacement cylinder 135, such as the setting of cylinder 135 is being turned
The position that current mounting position is corresponded in 134 other side of movable plate, then when cylinder 135 is completed to act accordingly, other component is moved
Make corresponding opposite.
In the embodiment of the present application, realize that the mobile power source of various components is cylinder 135, cylinder 135 passes through stretching motion
Mode drive other all parts act；In fact, cylinder 135 is a flexible actuator.In other embodiments, cylinder
135 can also be changed to other flexible actuators, such as can use screw mechanism.
In the embodiment of the present application, the stretching motion of cylinder 135 is transferred to cunning by rotating bar plate 134 and guiding push rod 136
Block 133 keeps 133 opposite rail 132 of sliding block mobile；In other embodiments, driving mechanism can not also use aforementioned structure, and
It is directly mobile using the flexible actuator driving sliding block 133 such as cylinder.
Further, in the other embodiments of the application, it is fixed corner can also to be directly driven using flexible actuator
Hyte part 12 is mobile, no longer the components such as setting guide rail 132, sliding block 133.
In the embodiment of the present application, corner positioning component 12 includes pedestal 121, to be fixedly mounted on by pedestal 121
On position adjusting mechanism 13.It should be noted that setting pedestal 121 and is convenient for modularly assemble corner positioning component 12
Corner positioning component 12 is fixed on the sliding block 133 of position adjusting mechanism 13；It, can also be in the other embodiments of the application
It is not provided with pedestal 121 above-mentioned, and other components in corner positioning component 12 are directly installed on rack 11 or sliding block 133
On.
In addition, note that in the other embodiments of the application, if setting pedestal 121, vertical shaft 129 can also be fixed
On pedestal 121, and vertical axis hole is set on bracket 120.
Previously mentioned various positions adjustment mechanism moves in the horizontal direction corner positioning component 12, then avoids
The movement of the interference support plate 01 of position location components 12.In some embodiments of the present application, position adjusting mechanism can also be set
It is set to the mechanism for moving up and down a corner positioning component.
Another advantage that spring 127 is arranged in the corner positioning component 12 being just mentioned above herein is explained again.Referring to Figure 1
And Fig. 3, when being not exposed to support plate 01, because of the pulling force effect of spring 127, each first roller 125 is far from support plate 01
Side, the distance of two adjacent first rollers 125 is greater than the corresponding dimension of support plate 01 on vertical direction shown in Fig. 1 at this time
(being herein the width of support plate 01), in conjunction with corner positioning component 12 in figure move mode it is found that two of corner positioning device
When first roller 125 is moved to 01 side wall of support plate corresponding side, the second roller 126 just reclines other side walls of support plate 01；?
It is exactly that can also clamp support plate 01 in reasonable position setting spring 127 convenient for multiple corner positioning components 12.
Already previously mentioned, the positioning device in the embodiment of the present application is provided with four corner positioning components 12；In conjunction with preceding
State structure it is found that clamping 01 size of support plate determine in the case where because the center of rotor plate 134 with respect to rack 11 consolidate
It is fixed, so the position after four clamping support plates 01 of corner positioning components 12 relative to rack 11 is also just fixed, support plate may be implemented
01 precise positioning.
In view of the positioning principle of corner positioning component 12, in the other embodiments of the application, also can be set one,
Two or three corner positioning components 12.
The case where one corner positioning component is set
It is vertical in corner positioning component 12 in the case where a corner positioning component 12 is arranged in the application other embodiments
Axis 129 should be fixed in rack 11, and bracket 120 should be fixedly connected with vertical shaft 129.
In view of corner positioning component 12 needs to meet support plate 01 in the positioning in two dimension directions, a side is only being set
In the case where angle positioning component 12, corner positioning component 12 should be placed on rack 11 far from support plate conveying mechanism entrance side one
Side, and it is generally located at the middle position of rack 11.
In addition, support plate 01 should be placed on support plate conveying mechanism in a manner of being obliquely installed, i.e., the one of support plate 01 pushes up
Angle is introduced on support plate conveying mechanism；After being delivered in rack 11 by support plate conveying mechanism, an apex angle of support plate should
Face corner positioning component 12.
It is contemplated that first positioning region above-mentioned and second is determined only with a corner positioning component 02
Position portion can also be not arranged on bracket 120, but be directly anchored in rack 11；Also with regard to the first positioning region and the second positioning region
It can be arranged independently of vertical shaft 129；At this time, it is only necessary to three tops for forming vertical shaft 129, the first positioning region and the second positioning region
In angle, the corner angle with vertical shaft 129 for vertex is equal to the corner angle that support plate 01 is directed at corner positioning component 12.
In addition, vertical shaft 129 above-mentioned can also be changed to other only with a corner positioning component 02
Upright body.
The case where two corner positioning components are set
In the case where two corner positioning components 12 are arranged, two corner positioning components 12 be can be set in 01 phase of support plate
At the adjacent corresponding position of two apex angles, also it can be set at the opposite corresponding position of two apex angles of support plate 01.
If two settings of corner positioning component 12, with respect at the corresponding position of apex angle, are carried in support plate 01 in order to avoid interfering
The position adjustment machine adjusted close to 12 position of corner positioning component of support plate conveying mechanism entrance side should be at least arranged in plate 01
Structure.
It is arranged in embodiment of the support plate 01 with respect to apex angle corresponding position in two corner positioning components 12, positioning device can
Using position adjusting mechanism 12 above；As it was noted above, position adjusting mechanism may include that two sliding blocks 133 and two lead
To push rod 136, two sliding blocks 133 are strip.In this embodiment, two corner positioning components 12 are separately fixed at two
The diagonal end of sliding block 133.
In the embodiment at the position that two adjacent apex angles of corresponding support plate 01 are arranged in two corner positioning components 12,
Positioning device only can also be using position adjusting mechanism 12 above；Wherein sliding block 133 is also strip；But position adjusts machine
Structure 12 only needs to be arranged a sliding block 133 and a guiding push rod 136；Two corner positioning components 12 are separately fixed at sliding block
133 both ends.
In the embodiment at the position that two adjacent apex angles of corresponding support plate 01 are arranged in two corner positioning components 12,
Two corner positioning components 12 may be also secured in rack 11；It should be noted that in this case, two corner positioning
Component 12 should be fixed on the side in rack 11 far from support plate conveying mechanism entrance, avoid interference with the normal input of support plate 01；
Also, the distance between two corner positioning components 12 should be with the size matching of the corresponding dimension of support plate 01.
The case where three corner positioning components are set
In the case where three corner positioning components 12 are arranged, for the normal input for avoiding interference with support plate, three corners are fixed
There are several types of situations for the mounting means of hyte part 12.
(1) each corner positioning component 12 is respectively mounted on position adjusting mechanism above-mentioned, is adjusted using position adjusting mechanism
The position of each corner positioning component.
(2) the corner positioning component 12 far from support plate conveying mechanism arrival end is fixed in rack 11, is conveyed close to support plate
The corner positioning component 12 of mechanism arrival end is mounted on position adjusting mechanism, and it is fixed to adjust corresponding corner using position adjusting mechanism
The position of hyte part 12.
Above description is only the preferred embodiment of the application and the explanation to institute's application technology principle.Those skilled in the art
Member is it should be appreciated that utility model range involved in the application, however it is not limited to made of the specific combination of above-mentioned technical characteristic
Technical solution, at the same should also cover do not depart from above-mentioned utility model design in the case where, by above-mentioned technical characteristic or its be equal
Feature carries out any combination and other technical solutions for being formed.Such as features described above with it is disclosed herein but be not limited to have
The technical characteristic of similar functions is replaced mutually and the technical solution that is formed.
Claims (13)
1. a kind of positioning device, it is characterised in that: including rack and corner positioning component；
The corner positioning component includes the upright body being mounted on the rack, and is arranged in the of the upright body side
One positioning region and the second positioning region；
In three apex angles that the upright body, first positioning region and second positioning region are formed, it is with the upright body
The corner angle on vertex is equal to the corner angle of support plate to be positioned.
2. positioning device according to claim 1, it is characterised in that:
The corner positioning component further includes the bracket connecting with the upright body；
First positioning region and second positioning region setting are on the bracket.
3. positioning device according to claim 2, it is characterised in that:
The bracket includes corner part, first support arm and second support arm；
The first support arm and the second support arm are fixedly connected with the corner part respectively；
First positioning region is mounted in the first support arm；Second positioning region is mounted in the second support arm.
4. positioning device according to claim 3, it is characterised in that:
First positioning region is the first roller relative to first support arm rotation setting；The rotation axis of first roller is perpendicular
Directly it is arranged；
Second positioning region is the second roller relative to second support arm rotation setting；The rotation axis of second roller is perpendicular
Directly it is arranged.
5. according to the described in any item positioning devices of claim 2-4, it is characterised in that:
The quantity at least two of the corner positioning component；
The upright body is vertical shaft；The bracket is around the relatively described gantry rotation of the vertical shaft.
6. positioning device according to claim 5, it is characterised in that:
The corner positioning component further includes the resilient snubber for limiting the relatively described gantry rotation of the bracket.
7. positioning device according to claim 5, it is characterised in that:
The corner positioning component further includes the spacer pin for limiting the holder pivots extreme position.
8. positioning device according to claim 5, it is characterised in that:
The positioning device further includes the position adjusting mechanism for adjusting corner positioning component position；
The position adjusting mechanism is mounted on the rack；
The vertical shaft of each corner positioning component is installed on the position adjusting mechanism, to pass through the position tune
Complete machine structure is mounted on the rack.
9. positioning device according to claim 8, it is characterised in that:
The position adjusting mechanism includes guide rail, sliding block and driving mechanism；
The guide rail is fixedly mounted in the rack；
The sliding block and the guide rail are engaged by clamping；
The driving mechanism drives the sliding block to move along the guide rail；
The vertical shaft installation is on the slide block.
10. positioning device according to claim 9, it is characterised in that:
The driving mechanism includes rotor plate, flexible actuator and guiding push rod；
The rotor plate is mounted on the rack by centralized positioning axis, the relatively described gantry rotation；
One end of the flexible actuator and the rack are hinged, and the other end and the rotor plate are hinged；
One end of the guiding push rod and the sliding block are hinged, and the other end and the rotor plate are hinged；
The articulated position of the flexible actuator and the guiding push rod and the rotor plate is both with respect to the centralized positioning axis
Prejudicially it is arranged.
11. positioning device according to claim 10, it is characterised in that:
The position adjusting mechanism includes two sliding blocks and two guiding push rods；
Two guiding push rods are hinged with two sliding blocks respectively；
Two sliding blocks are in long strip；
The quantity of the corner positioning component is two；The vertical shaft of two corner positioning components is separately mounted to two
The diagonal end of the sliding block.
12. positioning device according to claim 10, it is characterised in that:
The quantity of the corner positioning component is two；
The position adjusting mechanism includes a sliding block；And the sliding block is in long strip；
The vertical shaft of two corner positioning components is separately fixed at the both ends of the sliding block.
13. positioning device according to claim 5, it is characterised in that:
The quantity of the corner positioning component is two；
The positioning device further includes support plate conveying mechanism；The support plate conveying mechanism is mounted on the rack；
The vertical shaft in two corner positioning components is installed in the rack, and is respectively positioned on far from the support plate
The side of conveying mechanism entrance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821032344.0U CN208683945U (en) | 2018-07-02 | 2018-07-02 | Positioning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821032344.0U CN208683945U (en) | 2018-07-02 | 2018-07-02 | Positioning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208683945U true CN208683945U (en) | 2019-04-02 |
Family
ID=65879626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821032344.0U Expired - Fee Related CN208683945U (en) | 2018-07-02 | 2018-07-02 | Positioning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208683945U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108861595A (en) * | 2018-07-02 | 2018-11-23 | 君泰创新（北京）科技有限公司 | Positioning device |
-
2018
- 2018-07-02 CN CN201821032344.0U patent/CN208683945U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108861595A (en) * | 2018-07-02 | 2018-11-23 | 君泰创新（北京）科技有限公司 | Positioning device |
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Effective date of registration: 20210105 Address after: 101102 102-lq307, 1-3 / F, building 26, 17 huanke Middle Road, Jinqiao Science and technology industrial base, Tongzhou Park, Zhongguancun Science and Technology Park, Tongzhou District, Beijing Patentee after: Deyun Chuangxin (Beijing) Technology Co.,Ltd. Address before: 100176 10th floor, building 2, yard 9, Ronghua South Road, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee before: BEIJING JUNTAI INNOVATION TECHNOLOGY Co.,Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee |