KR20200000253A - Device handler - Google Patents

Abstract

The present invention relates to an element sorting apparatus and, more specifically, to an element sorting apparatus for automatically sorting elements such as semiconductor chips according to classification criteria. According to the present invention, the element sorting apparatus comprises: a loading unit (100) on which a tray (30) loaded with the elements (10) to be inspected is loaded; a DC test unit (170) receiving the elements (10) to be inspected from the loading unit (100) and performing a DC test; an X-Y table (410) moving, in an X-Y direction, a burn-in board (20) on which the element (10) to be inspected, which is tested as a good product in the DC test unit (170), is loaded in a vacant place where the elements (10) to be sorted are drawn out; an unloading unit (300) in which the element (10) to be sorted, which is drawn out from the burn-in board (20), is loaded on the tray (30) corresponding to the classification criteria according to the preset classification criteria; and a first buffer tray unit (610) which is provided so that the tray (30) can be moved to a loading position on an upper side of the DC test unit (170) and an avoiding position spaced horizontally from the loading position, and on which the elements (10) inspected as defective by the DC test result of the DC test unit (170) are temporarily loaded on the tray (30).

Description

Device Sorting Device {Device handler}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an element sorting apparatus, and more particularly, to an element sorting apparatus for automatically classifying an element such as a semiconductor chip according to classification criteria.

Semiconductor devices (hereinafter referred to as "devices") undergo various tests such as electrical properties, heat or pressure reliability tests after the packaging process.

Among these tests, the burn-in test is a burn-in test, in which a plurality of devices are inserted into a burn-in board, and the burn-in board is placed in a burn-in test apparatus to apply heat or pressure for a predetermined time. It is a test to determine if a defect occurs in the back device.

 The device sorting device for burn-in test generally classifies (unloads) the device into each tray according to the classification criteria given according to the inspection result for each device such as good or bad from the burn-in board that has loaded the device that has undergone the burn-in test. It is a device that inserts (loads) a new device to perform burn-in test again in an empty place (socket) of burn-in board where the device is located.

On the other hand, the performance of the device sorting apparatus as described above is evaluated as the number of sorts per unit (UPH), UPH is required for the transfer of the device, the burn-in board transfer between each component constituting the device sorting device It depends on time.

Therefore, it is necessary to improve the structure and arrangement of each component in order to increase the UPH, which is the performance of the device sorting device.

As a device sorting apparatus for increasing the UPH as described above, Korean Patent No. 10-1133188 (Patent Document 1), Korean Patent No. 10-1177319 (Patent Document 2), Korean Patent Publication No. 10-2016-48628 ( Patent document 3) etc. are mentioned.

On the other hand, mass production is expanding with the expansion of the market for standardized devices such as SD RAM and NAND flash memory.

In addition, in the mass production of devices, the inspection demand for the devices also increases, and as a post-process, it is necessary to install a plurality of device sorting devices for device classification according to the inspection results.

An object of the present invention is to provide a device for supplying a burn-in test, a device sorting device for sorting a device that has undergone a burn-in test, comprising: a loading unit in which a device to be inspected is loaded, a DC test unit for performing a DC test, and a burn-in board The present invention provides a device sorting apparatus capable of efficiently performing a device sorting process while minimizing a footprint by optimizing an arrangement of an unloading unit such that the extracted devices are loaded in a tray.

The present invention was created in order to achieve the object of the present invention as described above, the present invention, the loading unit 100 is loaded with a tray 30 loaded with the elements 10 to be inspected; A DC test unit 170 which receives the elements 10 to be inspected from the loading unit 100 and performs a DC test; An X-Y table (410) for moving the burn-in board (20) on which the device to be inspected good in the DC test unit (170) is loaded in an empty position from which the elements (10) to be sorted are drawn out in the X-Y direction; An unloading unit 300 in which elements 10 to be sorted drawn out from the burn-in board 20 are loaded in a tray 30 corresponding to the classification criteria according to a preset classification criterion; The tray 30 is movably installed in a stacking position on the upper side of the DC test unit 170 and a avoiding position spaced horizontally away from the stacking position, so that the DC of the DC test unit 170 is placed on the tray 30. Disclosed is a device sorting apparatus comprising a first buffer tray unit 610 in which elements 10 inspected as a result of a test are temporarily loaded.

The device sorting apparatus according to the present invention is a device inspection device for supplying and sorting a device before and after an inspection such as a burn-in test. The tray transport direction of the unloading section in which the stacks are loaded and unloaded on the trays is arranged in parallel with each other, and the feeding and discharging of the tray to the apparatus is performed adjacent to the unloading section, thereby automating the feeding and discharging of the tray and significantly reducing the footprint. There is an advantage to reduce.

In addition, the device sorting apparatus according to the present invention, by optimizing the arrangement of the loading unit to be loaded with the device to be inspected, the DC test unit for performing the DC test, the unloading unit to load the elements drawn from the burn-in board to the tray There is an advantage in that the device sorting process can be efficiently performed while minimizing the footprint.

In addition, the device sorting apparatus according to the present invention, the use of the device by additionally provided with a module exchange unit for automatically replacing the test socket, tray, etc. of the DC test unit used in the device in accordance with the change in the external dimensions of the device, such as the plane size There is this convenient advantage.

In particular, the device sorting apparatus according to the present invention has an advantage of optimizing the arrangement by locating the module exchanger on the upper side of the device, minimizing the footprint and efficiently performing the device sorting process.

For example, the upper part of the module exchange part in which the test socket, tray, etc. of the DC test part is loaded is placed on the upper side, and in particular, at least a part of the module is shared with the transfer rail of the transfer tool, thereby optimizing the layout to minimize the footprint. There is an advantage that can efficiently perform the classification process.

1 is a plan view showing a device sorting apparatus according to the present invention.
FIG. 2 is a front view illustrating an arrangement example of transfer tools used in a process of transferring an element between a loading unit, a DC test unit, a first buffer tray unit, a burn-in board, and an unloading unit of the element sorting apparatus of FIG. 1. .
FIG. 3 is a side view illustrating an arrangement of a first tray transfer unit, transfer tools, and a second tray transfer unit of the device sorting apparatus of FIG. 1.

Hereinafter, the device sorting apparatus according to the present invention will be described with reference to the accompanying drawings.

Device sorting apparatus according to a first embodiment of the present invention, as shown in Figures 1 to 3, the loading unit 100 is loaded with a tray 30 loaded with the elements 10 to be inspected; A DC test unit 170 which receives the elements 10 to be inspected from the loading unit 100 and performs a DC test; An X-Y table 410 for moving the burn-in board 20 in which the device 10 to be inspected in good condition in the DC test unit 170 is loaded in the vacant place where the devices 10 to be classified are drawn out in the X-Y direction; An unloading unit 300 in which the element 10 to be sorted out from the burn-in board 20 is loaded in the tray 30 corresponding to the classification standard according to a preset classification standard; The tray 10 is installed to be movable to an evacuation position spaced apart from the loading position and the loading position on the upper side of the DC test unit 170 so that the devices 10 inspected as a result of the DC test of the DC test unit 170 are temporarily temporary. It includes a first buffer tray unit 610 to be loaded. .

The burn-in board 20 refers to a board on which the elements 10 are loaded to undergo a burn-in test in a burn-in test apparatus (not shown). The burn-in board 20 may test the electrical and signal characteristics under high temperature. ) Have sockets into which they are inserted.

The burn-in board 20 is mounted on the X-Y table 410 installed in the device sorting apparatus, and the devices 10 are loaded while the devices 10 which have been burn-in tested are unloaded.

The XY table 410 has a configuration in which the burn-in board 20 is loaded in order to load the burn-in board 20 into which the elements 10 are inserted and to unload the burn-in board 20 into which the elements 10 are inserted. 1, a burn-in board exchanger (not shown) for supplying a burn-in board 20 to perform the replacement of the element 10 or discharging the burn-in board 20 after the replacement of the element 10 is completed. ).

In the XY table 410, the elements 10 may be inserted into the empty positions of the burn-in board 20 by the first transfer tool 530, or the elements may be moved by the second transfer tool 520 from the burn-in board 20. It is configured to move the burn-in board 20 by being driven by the XY table driver (not shown) so that the 10) can be drawn out.

The XY table driving unit may include the second transfer tool 520 and the first transfer to facilitate the second transfer tool 520 and the first transfer tool 530 to withdraw or load the elements 10 from the burn-in board 20. Various configurations such as XY movement or XY-θ movement of the XY table 410 loaded with the burn-in board 20 in conjunction with the tool 530 are possible.

That is, the XY table driving unit, with the second transfer tool 520 withdraws the elements 10 from the burn-in board 20, and in conjunction with the first transfer tool 530 burn-in boards the elements 10 It may be configured to move the XY table 410 to insert into the vacant position of (20) and to move the XY table 410 to the burn-in board exchange position when insertion of the elements 10 into the burn-in board 20 is completed. .

On the other hand, the XY table 410 is installed in the main body 40 constituting the element sorting apparatus according to the present invention, the main body 40, the second transfer tool 520 and the first transfer tool 530 is The device 10 may include a top plate (not shown) having an opening (not shown) for drawing out or loading the elements 10 from the burn-in board 20.

In addition, an upper portion of the X-Y table 410 is provided with a socket press 45 for pressurizing a socket installed in the burn-in board 20 for the convenience of device withdrawal and loading in the burn-in board 20.

The socket press 45 to enable the withdrawal of the device plugged into the socket of the burn-in board 20 or to be stacked, and various configurations are possible according to the socket structure of the burn-in board 20.

On the other hand, the socket press 45, it is desirable to be changed according to the external standard of the device 10 is preferably installed to enable manual or automatic replacement.

And on the upper portion of the socket press 45, vision for aligning the position of the burn-in board 20 for the withdrawal and discharge of the device 10 by the first transfer tool 530 and the second transfer tool 520. An apparatus (not shown) may be installed.

The loading unit 100 is configured to load the trays 30 on which the plurality of elements 10 to be loaded on the burn-in board 20 may be configured.

On the other hand, the loading unit 100 is installed in the upper direction of the transfer direction of the tray 30, the inspection of the tray cover, the tray 30 itself, the element 10 contained in the tray 30, the recognition of the QR code, etc. 2D scanner 960 may be installed.

The loading unit 100, as in Patent Documents 1 to 3, respectively, a guide unit for guiding the tray 30 to be moved in the Y-axis direction, and a driving unit (not shown) for moving the tray 30 It is common to include.

Here, when the withdrawal position of the element 10 with respect to the burn-in board 20 and the arrangement direction of the unloading part 300 are X axes, a direction perpendicular to the X axis is defined as the Y axis.

The unloading unit 300 is configured to load the element 10 to be sorted out from the burn-in board 20 in the tray 30 corresponding to the classification criteria according to a preset classification criteria. It is possible.

For example, the unloading unit 300 may include at least one non-defective tray unit 310 in which a tray 30 on which the elements 10 to be classified as non-defective goods are placed, as shown in FIG. 1; At least one DC tray unit 310 in which a tray 30 on which the elements 10 inspected as defective as a result of the inspection by the DC test unit 170 are placed is positioned; The burn-in board 20 may include one or more reject tray units 330 on which the tray 30 on which the elements 10 to be classified into each classification class are placed in correspondence to the number of classification classes other than good products. have.

The non-defective tray unit 320 is a configuration in which the tray 30 on which the elements 10 to be classified as good products are placed, is configured similarly to the loading unit 100, and various configurations are possible.

The DC tray unit 310 is a configuration in which the tray 30 on which the elements 10 inspected as defective by the DC test unit 170 are placed is positioned, and is similar to the loading unit 100. Various configurations are possible.

The reject tray 330 is a configuration in which the tray 30 on which the elements 10 to be classified into each classification class are placed in correspondence with the number of classification classes other than good products in the burn-in board 20, and is loaded. Various configurations are possible, such as configured similarly to the unit 100.

Here, the reject tray unit 330, the number may be determined according to the number of classification classes.

Meanwhile, the non-defective tray 320, the DC tray 310, and the reject tray 330 may each include a guide unit for guiding the tray 30 to move in the Y-axis direction, and the tray 30. Various configurations are possible, including a driving unit for moving along the guide unit.

Meanwhile, after the elements 10 are withdrawn from the tray 30 in the loading unit 100, the empty trays 30 are provided with a first tray feeder 671-installed at the rear side of the apparatus, as shown in FIG. 1. 3) to the unloading unit 300.

In this case, the element 10 may remain in the tray 30, so that the elements 10 remaining in the tray 30 before the tray 30 is transferred from the loading unit 100 to the unloading unit 300. In order to remove the tray 30 to remove the remaining element 10 by rotating the tray 30 may be additionally installed.

As shown in FIG. 1, the tray rotating part 150 is installed on the first tray feed line TT1 of the tray 30 between the loading part 100 and the unloading part 300 and has a first tray. By receiving the tray 30 from the loading unit 100 by the sending unit 671 is configured to rotate the tray 30 and to deliver the tray 30 to the unloading unit 300.

In addition, on the first tray transfer line TT1 of the tray 30 between the loading unit 100 and the unloading unit 300, an empty tray 30 in which the element 10 is not loaded may be temporarily loaded. The first tray loading portion 161 may be located.

The first tray loading unit 161 may be an empty tray in which the device 10 is not loaded on the first tray transfer line TT1 of the tray 30 between the loading unit 100 and the unloading unit 300. Any configuration is possible as long as 30) can be temporarily loaded.

The DC test unit 170 is installed between the loading unit 100 and the socket press 45 is configured to perform a DC test by receiving the elements 10 to be inspected from the loading unit 100 can be configured in various ways Do.

The DC test unit 170 may be configured in a variety of configurations, such as a plurality of sockets that can be electrically connected to the elements 10, preferably the same number as the horizontal number of the tray 30 in the horizontal direction Sockets may be installed.

The test result of each device 10 of the DC test unit 170 is used as data for sorting in the DC tray unit 310 to be described later.

The device transfer from the tray 30 of the loading unit 100 to the DC test unit 170 is performed by the third transfer tool 510.

On the other hand, when the external specifications such as the size of the device 10 to be handled is different, the test socket constituting the DC test unit 170 needs to be replaced.

Prior to this, the test socket of the DC test unit 170 is preferably installed to enable automatic replacement with other types of test sockets loaded on the replacement part loading unit (not shown).

Here, in order to smoothly replace the test socket of the DC test unit 170, the test socket of the DC test unit 170 is preferably installed to be movable in the Y-axis direction.

The first buffer tray unit 610 is installed so that the tray 30 is movable to the avoiding position spaced apart from the loading position and the loading position on the upper side of the DC test unit 170, the DC test of the DC test unit 170 As a result, a variety of configurations are possible as a configuration in which the devices 10 inspected as defective are temporarily loaded.

For example, the first buffer tray unit 610 may be configured such that the tray 30 is movable in the X-axis direction like the loading unit 100.

In addition, the upper portion of the DC test unit 170 may be a stacking position, and the front and rear portions of the DC test unit 170 may be forward and rearward in the X-axis direction.

In addition, the DC test unit 170 may be configured to transfer two or more trays 30 for smooth delivery of the devices 10 inspected as a result of the DC test failure, the movement path is up and down for interference during the movement. It can be arranged as.

That is, the first buffer tray unit 610, the upper and lower movement sections for the tray 30 reciprocating in the Y-axis direction between the stacking position and the movement section (DC) of the DC transfer tool 550 up and down Is preferably set.

Meanwhile, the device 10 transfer process between the DC test unit 170 and the first buffer tray unit 610 may be performed by various methods for smooth operation of the handler.

As an example, after the device is transferred to the DC test unit 170 by the first transfer tool 510, if all of the DC test results are good, the second transfer tool 520 may be used as a burn-in board 40. Delivered immediately.

On the other hand, if there is a part of the device 10 checked as a result of the DC test, all the devices 10 loaded in the DC test unit 170 is drawn out by the first transfer tool 510 and then the first buffer tray All are loaded into the tray 30 of the part 610.

In addition, when all the elements 10 are stacked in the tray 30 of the first buffer tray unit 610, the tray 30 is moved on the transfer path DC of the DC transfer tool 550. At this time, when the tray 30 is moved on the feed path (DC) of the DC transfer tool 550, the other tray 30 receives the device 10 inspected as defective as a result of the DC test.

On the other hand, the DC transfer tool for the elements 10 inspected as a result of the DC test, except for the element 10 determined to be good in the tray 30 moved on the transfer path (DC) of the DC transfer tool 550 to be described later 550 is all delivered to the DC tray unit 302 so that only the good elements 10 remain in the tray 30.

On the other hand, the tray 30 in which all the elements 10 inspected as defective are removed is transferred to the burn-in board 40 by the second transfer tool 520 after being moved to the stacking position again.

In addition, the tray 30 may need to be replaced according to the external specification of the device 10, and similarly to the replacement process of the DC test unit 170, the replacement part loading part 680 illustrated in FIGS. 5 to 7 will be described later. It is desirable to install so that automatic replacement with other types of trays is possible.

For example, the tray 30 of the first buffer tray unit 610 is movable in the Y-axis direction and is installed to be movable up to the first tray transfer line TT1 described above. By the tray 30 of another standard may be delivered from the loading unit 100 or the first tray loading unit 161.

Meanwhile, the elements 10 may have various structures for smooth transfer of the elements 10, and a plurality of transfer tools may form various arrangements.

As an example, the transfer tools, as shown in Figures 1 to 3, the reciprocating movement in the X-axis direction between the loading unit 100 and the DC test unit 170 is installed a plurality of from the loading unit 100 A third transfer tool 510 which transfers the elements 10 to the DC test unit 170; The plurality of devices 10 installed in the X-axis direction between the stacking position of the device 10 with respect to the burn-in board 20 and the DC test unit 170 to be reciprocated and inspected as good in the DC test unit 170. A first transfer tool 530 for loading the burners onto the burn-in board 20; The device 10, which is installed between the withdrawal position of the element 10 with respect to the burn-in board 20 and the unloading unit 300, is to be classified as a good product from the second buffer tray unit 620, to the unloading unit 300. It may include a second transfer tool 520 to deliver.

Meanwhile, the arrangement of the elements 10 loaded on the burn-in board 20 is different from the arrangement of the elements 10 loaded on the tray 30 such as the loading unit 100, and the arrangement on the burn-in board 20. This is relatively many.

Accordingly, the first transfer tool 530 and the second transfer tool 520 for transferring or withdrawing the element 10 to the burn-in board 20 may transfer a large number of elements 10 relative to the remaining transfer tools. Preferably configured. For example, the first transfer tool 530 and the second transfer tool 520 may be 5 × 2, and the remaining transfer tools may be 5 × 1.

When configuring the transfer tools as described above, except for the position where the transfer of a relatively large number of elements 10, the use of the transfer tool for transferring a small number of elements 10 in a position requiring a relatively small number of transfers This can reduce the manufacturing cost of the device and at the same time improve the size and stability of the device.

The number of pickers in the first transfer tool 530 and the second transfer tool 520 in the horizontal direction may be determined by the first buffer tray unit 610 and the unloading unit 300 in consideration of the efficiency of the device 10. It may be configured to be equal to the number of transverse direction of the device receiving groove (not shown) for the loading of the (10).

On the other hand, the first transfer tool 530 and the second transfer tool 520, in consideration of each of the first transfer tool 530 and the second transfer tool 520 to transfer the elements 10 in consideration of Preferably, the number of the transverse directions of the pickers of the first transfer tool 530 and the second transfer tool 520 is the same.

On the other hand, it is common that the pitch between the elements 10 on the burn-in board 20 and the pitch between the elements 10 on the tray 30 are different (two times, etc.). Any one of the tool 530 and the second transfer tool 520 "and the third transfer tool 510 is preferably configured such that the pitch between the elements 10 picked up by the pickers is variable.

On the other hand, the third transfer tool 510, the first transfer tool 530 and the second transfer tool 520 is moved along the reciprocating movement line (G).

The sorting line S is set at a position spaced apart from the reciprocating line G in the Y-axis direction, and the DC test unit among the elements 10 loaded on the tray 30 in the unloading unit 300. The device 10 and the device 10 received from the second transfer tool 520, which were inspected as defective by the DC test result of the 170, according to the classification grade, the supply tray 320, the DC tray 310 and the re A sorting transfer tool 560 that is loaded into the tray 30 among the ejector trays 330 is installed to be movable along the sorting line S. FIG.

The sorting transfer tool 560 is installed to be movable along the sorting line S, and the DC of the DC test unit 170 among the elements 10 loaded on the tray 30 in the unloading unit 300. The device 10 and the device 10 received from the second transfer tool 520, which were inspected as a result of the test, are classified into a non-defective tray 320, a DC tray 310, and a reject tray 330 according to the classification grade. Among them, various configurations are possible as a configuration to be loaded into the tray 30.

Meanwhile, the sorting line S is defined as a movement path of the sorting transfer tool 560 along the sorting guide member 591 provided at a position spaced apart from the reciprocating line G in the Y-axis direction.

In particular, the sorting line (S), the position spaced apart from the reciprocating movement line (G) and the Y-axis direction is preferably installed in the vicinity of the second tray transfer portion 672 to minimize the interference between smooth sorting and other components.

On the other hand, the sorting transfer tool 560 when the sorting transfer tool 560 directly transfers the device 10, which is inspected as a defective result of the DC test of the DC test unit 170 described above directly from the first buffer tray unit 610 There is a problem that the movement path of the long to significantly reduce the working speed.

In addition, as the sorting guide member 591 for guiding the movement of the sorting transfer tool 560 is installed across the device in the X-axis direction, there are many problems in the device configuration, such as restricting the installation of other components.

Accordingly, the device sorting apparatus according to the present invention may move between the first buffer tray unit 610 and the unloading unit 300, in particular, the DC tray unit 310, resulting in a poor DC test result of the DC test unit 170. Preferably, the device 10 further includes a DC transfer tool 550 for transferring the first buffer tray part 610 and the unloading part 300, particularly the DC tray part 310.

The DC transfer tool 550 is moved between the first buffer tray part 610 and the unloading part 300, in particular the DC tray part 310, and inspected as a result of the DC test of the DC test part 170. Various configurations are possible as the element 10 is transferred to the first buffer tray part 610 and the unloading part 300, in particular, the DC tray part 310.

In particular, the DC transfer tool 550 has a smaller number of pickers, for example, two different from other transfer tools in consideration of the relatively small number of devices 10 inspected as a result of the DC test of the DC test unit 170. May include pickers.

On the other hand, the DC transfer tool 550, the first transfer tool 530, as shown in Figures 1 and 3 in order to ensure a stable movement in consideration of being moved longer than the moving section of the sorting transfer tool 560, ), The first transfer tool 530, the second transfer tool 520, and the third transfer tool () in the main guide member 592 guiding movement of the second transfer tool 520 and the third transfer tool 510. 510 may be installed to be movable in a state coupled to the main guide member 592 spaced apart from the movement path G and the Y-axis direction.

In addition, the DC transfer tool 550 is a movement section (G) of the first transfer tool 530, the second transfer tool 520 and the third transfer tool 510 spaced apart from the Y-axis direction ( It can be installed movably along DC).

On the other hand, the transfer tool (510, 520, 530, 540, 550, 560) each of the one or more pickers and pickers having a suction head for adsorbing the element 10 by a vacuum pressure at the end of the XZ, YZ or XYZ It may be configured to include a picker transfer device for moving to.

In particular, the transfer tools may be arranged in a row of pickers, or arranged in a row 5x2, 4x2.

On the other hand, the device sorting apparatus according to the present invention, as shown in Figure 1, includes a board loader 800 is installed on one side to be continuously supplied with the burn-in board (20).

The board loader 800 is configured to load and load the burn-in boards 20 into which the elements 10 are inserted, and to sequentially load the burn-in boards 20 into which the elements 10 are inserted and to carry out the burn-in test. That is, as a configuration for continuously exchanging the XY table 410 and the burn-in board 20, various configurations such as the board loader 800 disclosed in Patent Document 3 is possible.

On the other hand, the board loader 800 is preferably installed adjacent to the loading unit 100.

In particular, when the board loader 800 is installed adjacent to the loading unit 100, when the direction perpendicular to the tray conveying direction in the loading unit 100 is referred to as the Y axis, the board loader 800 is located in the X axis direction with respect to the loading unit 100. Preferably combined.

At this time, the rack 50 in which the burn-in boards 20 are loaded by the combination of the board loader 800 as described above may be introduced or discharged in the X axis direction near the right side of the apparatus, particularly the loading unit 100. have.

On the other hand, the camera in order to perform the function required in accordance with the design, such as the tray 30 in the transfer line of the tray 30, the top surface inspection of the device 10 loaded on the tray 30 in the loading unit 100, A first vision unit 191 such as a scanner may be installed.

The second vision unit 192, such as a camera or a scanner, which photographs the bottom surface of the device 10 picked up and transferred by the third transfer tool 510 between the loading unit 100 and the DC test unit 170. Can be installed.

In addition, the camera is installed between the DC test unit 170 and the stacking position of the element 10 on the burn-in board 20, the camera for photographing the bottom surface of the element 10 is picked up and transferred by the first transfer tool 530, A third vision unit 193 such as a scanner may be installed.

On the other hand, based on the reciprocating movement line (G) that the third transfer tool 510, the first transfer tool 530 and the second transfer tool 520 is moved, it is opposed to the first tray transfer line (TT1) At the position, a second tray transfer line TT2 may be set in which the second tray transfer unit 672 for transferring the tray 30 is moved between the loading unit 100 and the unloading unit 300.

The second tray feed line TT2 is disposed between the loading unit 100 and the unloading unit 300 at a position opposite to the first tray transfer line TT1 with respect to the reciprocating line G. It is set as a path | route which the 2nd tray conveyance part 672 which conveys 30 moves.

On the other hand, on the second tray transfer line TT2, a second tray loading portion 162 may be located to temporarily load the empty tray 30 is not loaded with the device 10.

The second tray loading unit 162 may include an empty tray in which the device 10 is not loaded on the second tray transfer line TT2 of the tray 30 between the loading unit 100 and the unloading unit 300. Any configuration is possible as long as 30) can be temporarily loaded.

In addition, in the second tray transfer line TT2, the tray 30 in which the elements 10 are filled in the sorting tray unit 330 described above is temporarily disposed between the loading unit 100 and the unloading unit 300. The sorting buffer 350 to be loaded may be set.

In addition, the second tray feed line TT2 may include a cover tray disposed on the uppermost side of the plurality of trays 30 supplied in a bundled unit from the outside between the loading unit 100 and the unloading unit 300. Cover tray unit 169 may be set.

On the other hand, the second tray transfer line (TT2), the tray 30 of the bundle unit filled with the elements 10 loaded on the burn-in board 20 is supplied from the outside, or the bundle unit filled with good quality elements 10 The tray 30 of the tray, the tray logistics unit 168 for discharging to the outside the tray 30 of the bundled unit is filled with a predetermined classification class 10 may be set.

Since the above has been described only with respect to some of the preferred embodiments that can be implemented by the present invention, the scope of the present invention, as is well known, should not be construed as limited to the above embodiments, the present invention described above It will be said that both the technical idea and the technical idea which together with the base are included in the scope of the present invention.

10 device 20 burn-in board 30 tray
100: loading unit 300: unloading unit

Claims (1)

A loading unit 100 on which a tray 30 on which the elements 10 to be inspected are loaded is loaded;
A DC test unit 170 which receives the elements 10 to be inspected from the loading unit 100 and performs a DC test;
An XY table (410) for moving the burn-in board (20) in which the device to be inspected good in the DC test unit (170) is loaded in the vacant position in which the elements (10) to be sorted are drawn out;
An unloading unit 300 in which elements 10 to be sorted drawn out from the burn-in board 20 are loaded in a tray 30 corresponding to the classification criteria according to a preset classification criteria;
The tray 30 is movably installed in a stacking position on the upper side of the DC test unit 170 and a avoiding position spaced horizontally away from the stacking position, so that the DC of the DC test unit 170 is placed on the tray 30. Device sorting apparatus comprising a first buffer tray unit 610 is temporarily loaded with the elements (10) inspected as a bad test result.

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