KR20190136696A - Swing type in-line manufacturing system for organic light emitting device - Google Patents

Abstract

The present invention relates to a swing type in-line manufacturing system for an organic light emitting device (OLED), capable of depositing various organic materials. According to the present invention, the swing type in-line manufacturing system for an OLED comprises: a first organic material deposition unit to deposit a first organic material on a target substrate; a transfer apparatus transferring the target substrate; and a second organic material deposition unit to deposit a second organic material on the target substrate transferred by the transfer apparatus. The first organic material deposition unit comprises: a first deposition chamber; and a linear deposition apparatus for an OLED installed in the first deposition chamber and lengthily arranged from a rotary shaft to be swung on the target substrate. The linear deposition apparatus for an OLED comprises: a linear body having a space formed therein to receive or guide the first organic material, having an organic material outlet formed on one side to discharge the evaporated first organic material to deposit the first organic material on the substrate, and overall lengthily formed in a longitudinal direction; and a surface heater attached to a surface of the linear body to heat the first organic material.

Description

Swing type in-line manufacturing system for organic light emitting device

The present invention relates to a swing type inline manufacturing system of an organic light emitting device, and more particularly, to a swing type inline manufacturing system of an organic light emitting device capable of depositing various organic materials.

In general, an organic light emitting device injects electrons and holes into the organic light emitting layer interposed between the two electrodes from a cathode for injecting electrons and an anode for injecting holes, respectively. The display device is configured to emit light when an exciton in which injected electrons and holes are combined falls from an excited state to a ground state.

Due to this principle, the organic light emitting diode is driven, and thus, unlike the conventional thin film liquid crystal display, it does not need a separate light source.

Typically, the organic light emitting layer of the organic electroluminescent device includes a plurality of functional layers (hole injection layer, hole transport layer, light emitting layer, electron transport layer, electron injection layer, etc.), and emit light through a combination and arrangement of such functional layers The performance is further improved.

In the manufacture of the organic light emitting device having the above-described configuration, the organic light emitting layer is generally formed by depositing an organic light emitting material on a substrate using a thermal vacuum deposition process.

The organic light emitting material forming the organic light emitting layer is positioned in a solid state inside the crucible including heating means capable of heating the entire body on the bottom and side surfaces. At this time, when the heating means provided in the crucible is heated in the chamber in which the vacuum is maintained to heat the crucible, the organic light emitting material positioned inside the crucible is sublimed by heating. The sublimed organic light emitting material is evaporated through the outlet of the crucible, and is selectively deposited on the substrate through a shadow mask having a plurality of openings located above the outlet of the crucible, thereby forming an organic light emitting layer on the substrate.

The crucible used to deposit the organic light emitting material using the thermal vacuum deposition on the substrate is heated to a high temperature by a heating means mounted therein, so that the crucible is not deformed at a high temperature, and heat transfer to the source material is smooth. It is preferably made of a relatively light material to facilitate the cleaning after the thermal vacuum deposition process. Therefore, the crucible is usually made of graphite, which is a ceramic material.

SUMMARY OF THE INVENTION An object of the present invention is to deposit various organic materials sequentially in a swing type, and waste by preventing the sublimed organic light emitting material from being rapidly cooled and trapped elsewhere in the target substrate in the process of being directed toward the target substrate. It is possible to reduce the organic matters, to improve the deposition efficiency of expensive organic matters, to facilitate the induction of sublimed organic light-emitting materials to improve the deposition property to the target substrate, the width of the extension portion narrower than the width of the base portion It is possible to improve the deposition uniformity of the deposited organic material layer, and to improve the ease of installation, adhesion, durability and thermal uniformity of parts by using a flexible surface heater. By using the layer in the surface heater to prevent the generation of foreign matters due to the heating layer The present invention provides a swing-type inline manufacturing system of an organic light emitting device that can prevent product defects. However, these problems are exemplary, and the scope of the present invention is not limited thereby.

Swing type in-line manufacturing system of the organic light emitting device according to the spirit of the present invention for solving the above problems, the first organic material deposition unit capable of depositing the first organic material on the target substrate; A transfer device for transferring the target substrate; And a second organic material deposition unit capable of depositing a second organic material on the target substrate transferred by the transfer device, wherein the first organic material deposition unit comprises: a first deposition chamber; And a linear deposition apparatus installed in the first deposition chamber, the linear deposition apparatus configured to extend from the rotational axis so as to swing on the target substrate, wherein the linear deposition apparatus for the organic light emitting element includes: A space for accommodating or guiding the first organic material is formed, and an organic material outlet for discharging the first organic material evaporated on one side is formed on the substrate so that the first organic material can be deposited on the substrate, and is formed to be long in the longitudinal direction. Linear body; And a planar heater attached to the surface of the linear body in a plane so as to heat the first organic material.

In addition, according to the present invention, the linear body, the first having a cylindrical or rectangular cylinder shape having a whole width, the base portion is formed with a slit on one side; An extension part having an overall rectangular shape having a second width narrower than the first width, and having an opening formed at one side thereof to be connected to the slit of the base part; And a nozzle installed at the organic material outlet of the extension part.

In addition, according to the present invention, the surface heater, the first glass layer of the flexible film form; A heat generating layer formed on the first glass layer and having a flexible film form in which heat is generated by receiving power; And a second glass layer formed on the heat generating layer and having a flexible film form.

In addition, according to the present invention, a sealing portion connecting the first glass layer and the second glass layer may be formed so that the heat generating layer is sealed by the first glass layer and the second glass layer.

In addition, according to the present invention, the sealing portion may be a third glass layer of a flexible film form.

In addition, the linear type manufacturing apparatus of the organic light emitting device according to the present invention, the horizontal body is supported horizontally from the top to the bottom so that the organic material is deposited downward on the substrate through the organic material outlet, the organic material evaporated in the vertical direction An organic material supply pipe having a bent part formed to be supplied and supplied in a horizontal direction to the inner space of the linear body; And a crucible connected vertically to the organic material supply pipe and heating the organic material source therein.

In addition, according to the present invention, the organic material supply pipe, the first organic material supply pipe is installed on one side of the linear body; includes, the crucible may include a first crucible connected to the first organic material supply pipe; .

In addition, the linear type manufacturing apparatus of the organic light emitting device according to the present invention, the linear body swings the substrate while the organic material is deposited so that the transfer device for transferring the linear body or the substrate relative to each other; can do.

As described above, the swing type in-line manufacturing system of the organic light emitting device of the present invention can deposit various organic materials sequentially in the swing type, and rapidly in the process of inducing the sublimed organic light emitting material in the crucible toward the target substrate By preventing cooling and being trapped elsewhere than the target substrate, waste organic materials can be saved, and the deposition efficiency of expensive organic materials can be improved. It is possible to improve the uniformity of the deposited organic material layer by improving the width of the extension portion to be narrower than the width of the base portion. And thermal uniformity, and the flexible glass layer, which is a clean material, By using it to prevent the occurrence of foreign matters due to the heating layer has the effect of preventing product defects. Of course, the scope of the present invention is not limited by these effects.

1 is a side view conceptually illustrating a swing type in-line manufacturing system of an organic light emitting device according to some embodiments of the present invention.
FIG. 2 is a plan view conceptually illustrating a swing-type inline manufacturing system of the organic light emitting device of FIG. 1.
3 is an external perspective view illustrating a linear type manufacturing apparatus of an organic light emitting device of the swing type inline manufacturing system of the organic light emitting device of FIG. 1.
4 is an exploded perspective view of parts of a linear type manufacturing apparatus for an organic light emitting device of the swing type inline manufacturing system of the organic light emitting device of FIG.
FIG. 5 is a cross-sectional view illustrating a surface heater of a linear type manufacturing apparatus of an organic light emitting device of a swing type inline manufacturing system of the organic light emitting device of FIG. 1.
FIG. 6 is a perspective view illustrating a linear type manufacturing apparatus of an organic light emitting device of the swing-type inline manufacturing system of the organic light emitting device of FIG. 1.
FIG. 7 is a side view illustrating a linear type manufacturing apparatus of an organic light emitting device of the swing type inline manufacturing system of the organic light emitting device of FIG. 6.

Hereinafter, various embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are provided to more fully explain the present invention to those skilled in the art, and the following examples can be modified in various other forms, and the scope of the present invention is It is not limited to an Example. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In addition, the thickness or size of each layer in the drawings is exaggerated for convenience and clarity of description.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms "a", "an" and "the" may include the plural forms as well, unless the context clearly indicates otherwise. Also, as used herein, "comprise" and / or "comprising" specifies the presence of the mentioned shapes, numbers, steps, actions, members, elements and / or groups of these. It is not intended to exclude the presence or the addition of one or more other shapes, numbers, acts, members, elements and / or groups.

Embodiments of the present invention will now be described with reference to the drawings, which schematically illustrate ideal embodiments of the present invention. In the figures, for example, variations in the shape shown may be expected, depending on manufacturing techniques and / or tolerances. Accordingly, embodiments of the inventive concept should not be construed as limited to the specific shapes of the regions shown herein, but should include, for example, changes in shape resulting from manufacturing.

Hereinafter, a swing type inline manufacturing system of an organic light emitting diode according to various embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a side view conceptually illustrating a swing type in-line manufacturing system 2000 of an organic light emitting diode according to some embodiments of the present invention. 2 is a plan view conceptually illustrating a swing type inline manufacturing system 2000 of the organic light emitting device of FIG. 1.

First, as shown in FIGS. 1 and 2, the swing-type inline manufacturing system 2000 of the organic light emitting diode according to some embodiments of the present invention may deposit the first organic material on the target substrate 1. A first organic material deposition unit E1, a second organic material deposition unit E2 capable of depositing a second organic material on the target substrate 1, and a third organic material may be deposited on the target substrate 1. The third organic material deposition unit E3 and the transfer apparatus 50 for transferring the target substrate 1 may be included.

Here, the first organic material deposition unit E1 is installed in the first deposition chamber C1 and the first deposition chamber C1, and is mounted on the target substrate 1 by the motor MT of FIG. 6. It may include a linear deposition apparatus 400 for an organic light emitting device is installed long from the rotating shaft (S) so that it can swing.

Therefore, according to the swing-type inline manufacturing system 2000 of the organic light emitting device of the present invention, various organic materials, that is, R, G, B light emitting layer, hole injection layer, hole transport layer, light emitting layer, electron transport layer, electron injection Various organic substances forming a layer or the like may be sequentially deposited on a substrate by equipment inlining.

In more detail, for example, the first organic material deposition unit E1 may be installed inside the first deposition chamber C1 and the first deposition chamber C1 and swing on the target substrate 1. It may include a linear deposition apparatus 400 for an organic light emitting device installed to extend from the rotation axis (S) rotated by the motor (MT) so as to be long.

Here, the second organic material deposition unit E2 may also include a second deposition chamber C2 and a linear deposition apparatus 200 for an organic light emitting device, and the third organic material deposition unit E3 may also include a third The deposition chamber C3 and the linear deposition apparatus 300 for the organic light emitting device may be included.

3 is an external perspective view illustrating a linear type manufacturing apparatus 400 for an organic light emitting device of the swing type in-line manufacturing system 2000 of the organic light emitting device according to some embodiments of the present invention. 4 is an exploded perspective view of parts of the linear type manufacturing apparatus 400 of the organic light emitting device of the swing type inline manufacturing system 2000 of the organic light emitting device of FIG. 1.

First, as shown in FIGS. 3 and 4, the linear type manufacturing apparatus 400 of the organic light emitting device according to some embodiments of the present invention may include a linear body 10 and a planar heater 20. Can be.

For example, as illustrated in FIGS. 3 and 4, the linear body 10 may have a cylindrical shape in which an internal space A may be formed to accommodate an organic material for an organic light emitting device or guide an evaporated organic material therein. Can be.

For example, as illustrated in FIGS. 3 and 4, the linear body 10 includes an organic outlet 10a through which the organic substance evaporated on one side thereof is discharged so that the organic substance may be deposited on a substrate 1. It is formed, it may be formed long in the longitudinal direction as a whole.

More specifically, for example, as shown in FIG. 4, the linear body 10 has a cylindrical or square shape having a first width W1 as a whole, and a base portion in which a slit S is formed at one side thereof. And an opening 12a having an overall rectangular shape having a second width W2 narrower than the first width W1, and connected to the slit S of the base portion 11 on one side thereof. An extension part 12 may be formed and a nozzle 13 installed at the organic material outlet 10a of the extension part 12.

Here, the substrate 1 or the target substrate may be various substrates capable of forming an organic light emitting device, and the substrate 1 may be entirely deposited or a pattern may be formed using a mask M. Can be deposited.

Therefore, the organic light-emitting material sublimed by the crucible, that is, the organic material, is stored primarily inside the base portion 11 of the linear body 10 having a wider width and is relatively narrow when the pressure of the internal organic material is increased. It can be directionally moved along the extension 12 having a width, thereby passing through the organic matter outlet 10a and guided by the nozzle toward the substrate 1.

Such, the linear body 10 as having a sufficient strength and durability to support the surface heater 20 to be described later, can be applied in a wide variety of shapes and types without being limited to the drawings. In addition, the linear body 10 may be made of various materials such as metal, ceramic, resin, graphite or the like with excellent thermal conductivity so that the thermal energy received from the surface heater 20 can be transferred to the organic material.

On the other hand, for example, as shown in Figures 3 and 4, the planar heater 20 is attached to the surface of the linear body 10 to the surface to heat the organic material, and flexible to facilitate the attachment It may be a heater formed of a material.

Therefore, the planar heater 20 may not only perform heating evenly in a large area, but also may be made of a flexible material and actively attached along the surface of the linear body 10.

Therefore, it is much better in terms of heat transfer efficiency and thermal uniformity than the method of attaching a heater of a solid material, which can greatly improve the performance of the product.

In addition, the planar heater 20 is wasted by preventing the organic light-emitting material sublimed in the crucible to be described later to be rapidly cooled in the process of being directed toward the substrate 1 to be trapped elsewhere than the substrate 1. It is possible to reduce the organic matter, to improve the deposition efficiency of expensive organic matter, to facilitate the induction of the sublimed organic light emitting material to improve the deposition property onto the substrate 1, and the The second width W2 may be made narrower than the first width W1 of the base part 11 to improve deposition uniformity of the deposited organic material layer, and the component may be formed using the planar heater 20 made of a flexible material. It is possible to improve the ease of installation, the adhesion and the durability and the thermal uniformity of the component during manufacturing.

FIG. 5 is a cross-sectional view illustrating the planar heater 20 of the linear type manufacturing apparatus 400 of the organic light emitting device of the swing type inline manufacturing system 2000 of the organic light emitting device of FIG. 1.

More specifically, for example, as shown in FIG. 5, the planar heater 20 is formed on the first glass layer 21 and the first glass layer 21 in the form of a flexible film. The film may include a heat generating layer 23 in the form of a flexible film that generates heat by being supplied with power, and a second glass layer 22 in the form of a flexible film.

For example, as illustrated in FIG. 5, the first glass layer 21 and the first heating layer 23 are sealed by the first glass layer 21 and the second glass layer 22. The sealing part 24 connecting the second glass layer 22 may be formed.

The sealing part 24 may be the third glass layer 241 in the form of a flexible film, and the first glass layer 21, the second glass layer 22, and the second glass may be provided. Both layers 241 may be made of the same material at the same time. However, the present invention is not limited thereto and may be manufactured in a wide variety of ways.

The flexible glass layer may be made of a very thin glass layer that is not easily broken, or may be manufactured by forming a carbon bonding layer or adding various resin composites to further strengthen the ductility. .

In addition, the heat generating layer 23 may be formed in the form of a heating wire, a heat generating planar body, a heating plate, a heating heating wire, etc. so as to generate heat by being supplied with power, and the material of the heating layer 23 may be, for example, resistance heating. This may be made of a material such as a metal or alloy such as nickel, chromium, copper, stainless steel, iron, chromium, alumina, molybdenum and the like.

For example, although FIG. 4 illustrates that the planar heater 20 is installed only on the bottom and left and right sides of the linear body 10, the front and rear surfaces are installed in the vicinity of the nozzle 13 and the organic material. (1) can be heated sufficiently.

In addition, the planar heater 20 may be attached to the surface instead of a single piece, various adhesive materials having excellent thermal conductivity may be applied therebetween.

Therefore, the sealing part 24 may not only protect the heat generating layer 23 from external materials, but also prevent foreign substances that may be generated in the heat generating layer 23 from leaking to the outside. It can make a good quality product.

FIG. 6 is a perspective view illustrating a linear type manufacturing apparatus 400 of an organic light emitting device of the swing type inline manufacturing system 2000 of the organic light emitting device of FIG. 1, and FIG. 7 is a swing type inline of the organic light emitting device of FIG. 6. It is a side view which shows the linear type manufacturing apparatus 400 of the organic light emitting element of the manufacturing system 2000. As shown in FIG.

6 and 7, the linear type manufacturing apparatus 400 of the organic light emitting device of the swing type in-line manufacturing system 2000 of the organic light emitting device according to some embodiments of the present invention may include the organic material. The linear body 10 is horizontally supported in a downward direction so that the organic material is evaporated in a vertical direction so as to be deposited downward on the substrate 1 through the organic outlet 10a. A crucible 40 for vertically connecting the organic material supply pipe 30 and the organic material supply pipe 30 in which the bent portion R is formed to be supplied to the internal space A in a horizontal direction, and heating the organic material source therein. It may further include.

More specifically, for example, as shown in FIG. 6, the organic material supply pipe 30 may include a first organic material supply pipe 31 installed on the left side of the linear body 10.

For example, as illustrated in FIG. 6, the crucible 40 may include a first crucible 41 connected to the first organic material supply pipe 31.

Therefore, the linear deposition apparatus 400 for the organic light emitting device may swing on the target substrate 1 by the motor MT, and deposit organic materials in a downward state while swinging or swinging. have.

In addition, for example, as shown in FIG. 7, the linear type manufacturing apparatus 400 of the organic light emitting device according to some embodiments of the present invention may include the linear body 10 swinging on the substrate 1. It may further include a transfer device 50 for transferring the substrate 1 relative to each other so that the organic material can be deposited.

The transfer device 50 may be applied to a variety of devices, such as various transfer arms, transfer robots, transfer, conveyor, and the like in the drawing illustrates a substrate transfer device for transferring the substrate 1, in addition, the linear body 10 Various conveying devices for conveying) may be applied.

Thus, as shown in FIGS. 6 and 7, the organic material sublimed from the crucible 40 is transferred while the substrate 1 or the linear body 10 is relatively transferred to each other by the transfer device 50. The organic material may be supplied to the linear body 10 along the organic material supply pipe 30, and the organic material may be guided in the direction of the extension part 12 from the base part 11 of the linear body 10 to the nozzle 13. It may be deposited downward on the substrate 1 through).

Therefore, using the linear type manufacturing apparatus 400 of the organic light emitting device according to some embodiments of the present invention it is possible to deposit the organic material on the substrate 1 from the top down while running as it is without inverting the bottom-up substrate. .

That is, the organic light emitting material sublimed in the crucible 40 is rapidly cooled in the process of being directed downward toward the substrate 1 to prevent the organic light emitting material from being trapped elsewhere except for the target substrate, thereby reducing wasted organic matter, and By using the planar heater 20 of the material to improve the ease of installation, adhesion and durability and thermal uniformity of the part during the manufacturing of the part, by using a flexible glass layer of a clean material for the planar heater 20 Product defects can be prevented by preventing the generation of foreign substances due to the heating layer.

Although the present invention has been described with reference to the embodiments shown in the drawings, this is merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

1: target substrate
M: mask
1-1: First Organics
1-2: 2nd organic matter
1-3: 3rd Organics
E1: first organic material deposition unit
E2: second organic material deposition unit
E3: third organic material deposition unit
C1: first deposition chamber
C2: second deposition chamber
C3: third deposition chamber
10: linear body
10a: organic matter outlet
A: internal space
11: base part
12: extension part
12a: opening
13: nozzle
20: face heater
S: Slit
21: first glass layer
22: second glass
23: heating layer
24: sealing part
241: third glass layer
R: Bend
30: organic matter supply pipe
31: first organic matter supply pipe
40: crucible
41: first crucible
50: conveying device
MT: motor
S: axis of rotation
400, 500, 600: Linear type manufacturing apparatus of an organic light emitting element
2000: Swing type inline manufacturing system of organic light emitting device

Claims (8)

A first organic material deposition unit capable of depositing a first organic material on a target substrate;
A transfer device for transferring the target substrate;
And a second organic material deposition unit capable of depositing a second organic material on the target substrate transferred by the transfer device.
The first organic material deposition unit,
A first deposition chamber; And
And a linear deposition apparatus installed in the first deposition chamber and installed from an axis of rotation so as to swing on the target substrate.
The linear deposition device for an organic light emitting device,
A space for accommodating or guiding the first organic material is formed therein, and an organic material outlet through which the first organic material evaporated is discharged on one side so that the first organic material is deposited on a substrate, and is formed in the overall length direction. A linear body formed to be long; And
And a planar heater attached to the surface of the linear body in a planar manner so as to heat the first organic material. The method of claim 1,
The linear body,
A base having an overall cylindrical or square shape having a first width and having slits formed on one side thereof;
An extension part having an overall rectangular shape having a second width narrower than the first width and having an opening formed at one side thereof to be connected to the slit of the base part; And
A nozzle installed at the organic material outlet of the extension part;
Including, Swing type in-line manufacturing system of the organic light emitting device. The method of claim 1,
The surface heater,
A first glass layer in the form of a flexible film;
A heat generating layer formed on the first glass layer and having a flexible film form in which heat is generated by receiving power; And
A second glass layer formed on the heat generating layer and in the form of a flexible film;
Including, Swing type in-line manufacturing system of the organic light emitting device. The method of claim 3, wherein
And a sealing portion connecting the first glass layer and the second glass layer such that the heat generating layer is sealed by the first glass layer and the second glass layer. The method of claim 4, wherein
The sealing unit is a swing-type inline manufacturing system of an organic light emitting device, which is a third glass layer in the form of a flexible film. The method of claim 1,
Horizontally supporting the linear body in a downward manner so that the organic material can be deposited downward on the substrate through the organic material discharge port, and receiving the organic material evaporated in a vertical direction to supply the organic material in the horizontal direction to the inner space of the linear body An organic material supply pipe in which a bent portion is formed; And
A crucible connected vertically to the organic material supply pipe and heating the organic material source therein;
Further comprising, Swing type in-line manufacturing system of the organic light emitting device. The method of claim 1,
The organic material supply pipe, the first organic material supply pipe is installed on the left side of the linear body; includes;
The crucible is a first type crucible connected to the first organic material supply pipe; Swing type in-line manufacturing system of the organic light emitting device. The method of claim 1,
A transfer device for transferring the linear body or the substrate relative to each other so that the organic material can be deposited while the linear body swings the substrate;
Further comprising, Swing type in-line manufacturing system of the organic light emitting device.

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