KR100703427B1 - Vapor deposition source and Vapor deposition apparatus having thereof - Google Patents

Abstract

The present invention relates to an evaporation source and a deposition apparatus employing the same, and includes a housing, a crucible embedded in the housing, a heating part installed in the housing to heat the crucible, and a deposition material evaporated from the crucible. The evaporation source is configured to include a nozzle unit installed to be injected to the substrate located outside the housing through the injection nozzle, and the evaporation apparatus is configured to deposit the deposition material on the substrate using the evaporation source.

As a result, the crucible and the nozzle part are made smaller and lighter than the conventional evaporation source disposed in different spaces, and the radiant heat emitted from the evaporation source is blocked as much as possible by limiting the diameter and the number of injection nozzles. It is deposited uniformly, and the output of the transfer unit for the movement of the evaporation source is also reduced, and a plurality of evaporation sources can be disposed can be concentrated injection of the deposition material can be improved product quality.

Evaporation source, substrate, evaporation apparatus, crucible

Description

Vapor deposition source and vapor deposition apparatus having the same

1 is a perspective view schematically showing an evaporation source according to an embodiment of the present invention;

2 is a cross-sectional view taken along the line A-A of FIG.

3 is a perspective view of the crucible shown in FIG. 2 alone;

4 is a perspective view of the plate heater shown in FIG.

5 is a cross-sectional view showing a housing and a heat insulating part of an evaporation source according to another embodiment of the present invention;

6 is a cross-sectional view showing a heat shield structure of the evaporation source according to another embodiment of the present invention;

7 is a schematic view schematically showing a deposition apparatus employing the evaporation source of FIG. 1;

8 is a perspective view schematically showing an embodiment of FIG. 7;

9 is a perspective view schematically showing another embodiment of FIG.

FIG. 10 is a side view schematically showing an embodiment of an evaporation source shown in FIGS. 8 and 9 and an injection range of inspection material sprayed from the evaporation source;

FIG. 11 is a side view schematically showing another embodiment of an evaporation source and a spraying range of a deposition material sprayed from the evaporation source shown in FIGS. 8 and 9.

<Description of Symbols for Main Parts of Drawings>

100 ... evaporator 110 ... housing,

120 ... crucible 130 ... heater,

140 ... blast nozzle 160 ... insulation material,

170 nozzle insulator 172 ...

180,190 ... 200 first and second thermal barrier plates,

210 ... chamber 220 ... substrate,

230 ... motor 240 ... mask

The present invention relates to an evaporation source and a deposition apparatus employing the same, and more particularly, to an evaporation source in which the crucible and the nozzle unit are embedded in one housing, and a deposition apparatus equipped with the evaporation source.

In general, the evaporator is used for thin film deposition of various electronic components, and is particularly used for forming thin films of electronic devices such as semiconductors, LCDs, organic field displays, and display devices.

In the organic light emitting display device, electrons and holes are injected into an emission layer from an electron injection electrode and a hole injection electrode, respectively, where the injected electrons and holes are combined. The light emitting display device emits light when the eciton falls from the excited state to the ground state.

In order to increase the luminous efficiency of the organic light emitting display device, holes and electrons should be more smoothly transported to the light emitting layer. For this purpose, an electron transfer layer (ETL) may be disposed between the cathode and the organic light emitting layer. The major transport layer may be disposed between the light emitting layers.

In addition, a hole injection layer (HIL) may be disposed between the anode and the hole transport layer, and an electron injection layer (EIL) may be disposed between the cathode and the electron transport layer.

Typical methods of forming a thin film on a substrate include evaporation, physical vapor deposition (PVD) such as ion-plation and sputtering, and chemical vapor deposition (CVD) by gas reaction. There is this.

Among them, a vacuum deposition method is mainly used for forming a thin film of a metal film or the like of an organic EL device.

As the evaporation source used in this vacuum deposition method, an evaporation source of indirect heating method (or induction heating method) is used. In this indirect heating method, the deposition material contained in the crucible is heated to a predetermined temperature (for example, about 1200 ° C for Al). An apparatus is provided, which is provided with a nozzle portion for injecting a deposition material emitted from a heater and a heated crucible onto a substrate to heat the crucible.

In addition, a plurality of heat insulators are provided throughout the evaporation source in order to eliminate the phenomenon that the high temperature heat generated by the heating unit is released to the outside of the evaporation source.

However, in view of the structure of such an evaporation source, a crucible and a heating part for heating the crucible are typically disposed in one partitioned space, and a nozzle part is disposed in another partitioned space so as to communicate with the crucible. The connection part of the crucible and the nozzle part is also provided with a heat insulating material to block heat.

Therefore, the volume of the evaporation source was inevitably increased, the installation cost of the heat insulating material installed in this large evaporation source was increased, and the transfer device for moving the evaporation source also had a problem such as requiring high power.

The present invention devised in view of the above problems, the crucible, the heating portion and the nozzle portion is disposed in one partitioned space evaporation source reduced in size, and vapor deposition for depositing the deposition material on the substrate using the evaporation source The object is to provide a device.

Evaporation source according to the present invention for achieving the above object, the housing, the crucible embedded in the housing, a heating unit installed in the surroundings to heat the crucible embedded in the housing, the evaporation material evaporated from the crucible It includes a nozzle unit installed to be sprayed to the substrate located on the outside of the housing through the injection nozzle.

The heating unit is provided with at least one plate heater provided to heat the crucible, the plate heater is refracted in alternating left and right while having a constant unit width to form a plate shape.

In addition, the housing is a cooling jacket having a cooling channel, one continuous pipe is bent may be arranged evenly over the entire portion of the cooling jacket, a plurality of pipes may be arranged for each portion of the cooling jacket.

On the other hand, the heat insulating portion disposed for the heat shield between the heating portion and the housing further comprises.

The heat insulating part is made of a single or multiple overlapping the heat insulating material is formed, the heat insulating material is a graphite felt material is applied, it is made of a nozzle insulating material arranged to surround the injection nozzle further comprises.

And, the heat insulating part is installed on the inner circumferential surface of the injection hole further comprises a heat shield for blocking the heat radiated through the injection nozzle.

The nozzle unit may include injection holes formed in the housing and the first insulating material so that the deposition material injected from the injection nozzle is discharged to the outside of the housing.

The spray nozzles are arranged at arbitrary intervals to ensure uniform film formation in the substrate, the diameter of which is 5 to 15 mm, and 1 to 20 for the length of 1 m of the substrate is preferably arranged.

The heat blocking plate may include a first heat blocking plate disposed to surround the inner circumferential surface of the injection hole and the outer circumferential surface of some housings around the injection hole, and the heat blocking plate may include a first heat blocking plate to protrude on the outer circumferential surface of the housing so as to be partitioned. This is done including.

On the other hand, the deposition apparatus employing the evaporation source having such a structure comprises an evaporation source and a transfer unit installed to transfer the evaporation source.

The transfer unit is made to move the evaporation source along the guide member by a ball screw rotated by the power of the motor.

A plurality of evaporation sources are disposed, and a deposition material sprayed from each evaporation source in a stationary state is installed to be concentrated within a predetermined range of a substrate, and an injection nozzle or an evaporation source of each evaporation source is inclined so as to concentrate the deposition material on the substrate. .

The evaporation source may include a housing, a crucible embedded in the housing, a heating unit installed in the housing to heat the crucible, and a vapor deposition material evaporated from the crucible on the outside of the housing through the injection nozzle. It is made to include a nozzle unit installed to be injected into.

Hereinafter, an evaporation source and a deposition apparatus employing the same according to the present invention will be described in detail with reference to the accompanying drawings.

1 is a perspective view schematically showing an evaporation source according to a preferred embodiment of the present invention, Figure 2 is a cross-sectional view taken along line AA of Figure 1, referring to the drawing, evaporation source 100 according to the present invention is a housing 110 While communicating with the crucible 120, a heating part provided with a heater 130 for heating the crucible 120, a heat insulating part provided with a plurality of heat insulating materials surrounding the heating part, and the crucible 120. It comprises a nozzle unit having a spray nozzle 140 for spraying the deposition material to the outside.

The crucible 120 is a deposition material is received, the heater 130 is disposed in the vicinity of the crucible 120 to heat the crucible 120, to block the high temperature heat generated by the heater 130 A reflector 162 is installed around the heater 130.

The heater 130 may be installed over the entire surface of the crucible 120 as needed, or may be installed on one or more selected surfaces.

In addition, a first heat shield plate 180 for blocking heat of the deposition material is installed at the tip of the injection nozzle 140 for spraying the deposition material evaporated from the crucible 120, and the first heat shield plate 180 is provided. A second heat shield plate 190 protrudes from the upper and lower portions of the housing 110 to prevent spreading of a deposition material and diffusion of radiant heat.

In addition, a thickness meter 142 is installed at one side of the evaporation source 100 to measure the deposition thickness of the deposition material injected through the injection nozzle 140.

3 is a perspective view of the crucible shown in FIG. 2 alone.

As shown in FIG. 3, the crucible 120 is preferably a substantially rectangular shape having an optimal accommodation space while being embedded in the housing 110, and the nozzle 140 mounted on the crucible 120 has a uniform film deposition degree in a substrate. It is desirable to be arranged at any interval to secure the.

At this time, it is important to minimize the area of the injection nozzle 140 in order to block the radiant heat emitted from the crucible 120 through the injection nozzle 140 as much as possible.

Therefore, the diameter of the spray nozzle 140 is ideally 5 to 15mm, which means that when the size of the spray nozzle 140 is smaller than 5mm, the deposition material sprayed onto the substrate may not be sufficiently delivered to uniformly deposit. When the diameter of the injection nozzle 140 is 15 mm or more, a predetermined or more radiant heat is emitted through the injection nozzle 140, thereby raising the temperature of the substrate.

4 is a perspective view of the plate heater shown in FIG.

Referring to FIG. 4, there is shown a plate heater 130 used to heat a rectangular crucible 120, the plate heater 130 having at least a crucible 120 having a constant width, height and length as a whole. The size is enough to cover one side of the), and if necessary, the crucible 120 may be manufactured to be accommodated therein.

In addition, the plate heater 130 has a predetermined width and is refracted in alternating left and right sides as shown in the drawing. Such a shape is capable of generating maximum heat for the same area in consideration of thermal conductivity and resistance.

On the other hand, a wire that is in contact with the heater 130 to apply electricity to the plate heater 130, and a power supply for supplying power to the wire is provided, the outside of the power supply to supply power safely It is preferable that the case 114 is installed so as to surround.

In addition, the housing 110 is a cooling jacket 112 is formed in the body as a cooling jacket, the cooling water passage 112 may be formed by arranging pipes, in which case one pipe is continuously It may be refracted to be evenly distributed over the entire portion of the cooling jacket, that is, the housing 110, or may be formed so that each pipe is divided into an upper surface, a side, and the like of the housing 110.

Of course, although not shown in the drawings, it is obvious that the cooling water tank and the pump should be provided so that the cooling water flows into the cooling water path (112).

The heat insulating material 160 is disposed on the inner surface of the housing 110.

The heat insulating material 160 is a component for blocking heat generated from the crucible 120 and the heater 130 as a part of the heat insulating part.

In this case, the heat insulator 160 is disposed to surround the entire surface of the housing 110, and is preferably made of graphite felt.

In addition, a nozzle insulation material 170 is installed at the tip end of the injection nozzle 140, wherein the nozzle insulation material 170 is disposed to surround the injection nozzle 140 installed in the crucible 120, the injection nozzle 140 It may be provided only at the periphery of the heat insulating material 160 and disposed at the same time, or may be disposed over the entire surface of the housing 120.

The nozzle insulation 170 is to prevent the condensation of the nozzle, it is preferably made of graphite felt (Graphite felt).

In addition, a first heat shield plate 180 is installed in the injection hole of the injection nozzle 140 to block heat of the deposition material, and the outer circumferential surface of the housing 110 is partitioned to include the first heat shield plate 180. The second heat shield plate 190 is protruded to be installed.

The first and second heat shield plates 180 and 190 may not only allow the deposition material to be intensively sprayed, but also to prevent diffusion of radiant heat emitted with the deposition material.

Here, the end of the injection nozzle 140 is disposed to the contact surface of the nozzle insulating material 170, the deposition material and heat sprayed from the injection nozzle 140 is in contact with the heat insulating material 160 and the housing 110. In order to exclude the first heat shield plate 180 is installed.

The first heat shield plate 180 has a hollow conical shape, the end portion of which is bent outwardly, and is mounted to block contact with heat even to a part of the outer surface of the housing 110.

In addition, a plurality of heater supporters 132 are installed to support the heaters 130 installed around the crucible 120.

The heater support 132 is installed to support the heater 130 and at the same time insulated, preferably made of a ceramic material, also made of boron nitride (BN) or aluminum oxide (Al ₂ O ₃ ) material. It is possible.

In the present invention, the heater 130 and the reflector 162 are arranged vertically symmetrically around the crucible 120 to heat the crucible 120 in the upper and lower parts.

In addition, a thermocouple 116 is installed on the rear surface of the housing 110 to control the temperature.

On the other hand, the present invention is not limited to the above-described embodiment in configuring the heat insulating portion and the heat shield structure.

That is, Figure 5 is a cross-sectional view showing the housing and the heat insulation of the evaporation source according to another embodiment of the present invention, Figure 6 is a cross-sectional view showing a heat shield structure of the evaporation source according to another embodiment of the present invention, The heat insulating part may be composed of a first heat insulating material 350 and a second heat insulating material 360.

In this case, the first heat insulating material 350 is in close contact with the inner surface of the housing 310, and the second heat insulating material 360 is disposed in close contact with the inner surface of the first heat insulating material 350.

In this case, the first insulation 350 is preferably made of alumina (Al 2 O 3) or mullite (mullite), the second insulation 360 is preferably made of graphite felt (Graphite felt).

In addition, the housing 310 is a cooling jacket, the cooling water passage 312 is formed in the body. The cooling water passage 312 may be configured by arranging pipes, and a cooling water tank and a pump may be provided to allow the cooling water to enter and exit the cooling water passage 312.

In addition, a first heat shield plate 380 is installed to exclude contact between the deposition material and the heat sprayed from the injection nozzle with the first heat insulating material 350 and the housing 310, and the first heat shield plate 380 is provided. ) May be mounted in the injection hole 372 formed in the first heat insulating material 350 and the housing 310 in a hollow cylindrical shape, and divided into a hollow cylindrical shape and its end portion is deflected outward as shown in the drawing. Mounted to the hole 372 may be mounted so as to block contact with heat even a part of the outer surface of the housing 310.

Meanwhile, hereinafter, a deposition apparatus equipped with an evaporation source having such a structure will be described in detail with reference to the drawings.

FIG. 7 is a schematic diagram schematically illustrating a deposition apparatus employing the evaporation source of FIG. 1.

Referring to FIG. 7, in the deposition apparatus 200 according to the present invention, an evaporation source 100 is installed toward a substrate 220 disposed in a granular shape in a vacuum chamber 210. The deposition material is sprayed on the substrate 220 while being reciprocated up and down by the transfer unit.

The transfer unit is for moving the evaporation source 100, the evaporation source 100 is moved along the guide member 234 by the ball screw 232 rotated by the motor 230.

In addition, a mask 240 that determines a deposition shape of the deposition material is disposed on the entire surface of the substrate 220.

8 and 9 are perspective views schematically showing the embodiment of FIG.

As shown in FIG. 8, the two evaporation sources 100 may be installed horizontally to move up and down, and as shown in FIG. 9, the two evaporation sources 100 may be disposed vertically to the left. It may be installed to move to the right.

Here, three or more evaporation sources may be installed as needed.

In addition, the vertical or horizontal of the evaporation source 100 refers to the arrangement position of the injection nozzle 140 in detail.

FIG. 10 is a side view schematically showing an embodiment of an injection range of the evaporation source and the inspection material injected from the evaporation source shown in FIGS. 8 and 9, and FIG. 11 is an injection from the evaporation source and the evaporation source shown in FIGS. 8 and 9. Another embodiment of the spray range of the deposited material is a schematic side view.

Referring to FIGS. 10 and 11, it is shown that deposition materials sprayed from two or more evaporation sources 100 have a predetermined overlapping range as they are deposited on the substrate 220.

In order to have such an overlapping range, the injection nozzle 140 installed in the crucible 120 may be inclined as in FIG. 10, or the evaporation source 100 may be inclined as in FIG. 11.

According to the present invention configured as described above, the crucible, the heating unit and the nozzle unit are installed in one partitioned space, so that the crucible and the nozzle unit are made smaller and lighter than conventional evaporation sources disposed in different spaces. In addition, by limiting the diameter and the number of injection nozzles, the radiant heat emitted from the evaporation source is blocked as much as possible, so that the deposited material is uniformly deposited.

In addition, the output of the transfer unit for the movement of the evaporation source is also reduced, a plurality of evaporation sources are arranged can be injected of the concentrated deposition material has the effect that the quality of the product can be improved.

Claims (25)

housing; A crucible embedded in the housing; A heating unit installed in the periphery of the crucible for heating the crucible while being embedded in the housing; A nozzle unit provided with a plurality of injection nozzles in the crucible to inject the deposition material evaporated from the crucible to a substrate located outside the housing; Evaporation source consisting of. The method of claim 1, The heating unit is an evaporation source, characterized in that provided with at least one heater installed to heat the crucible. The method of claim 2, The heater is an evaporation source, characterized in that the plate-shaped heater having a size covering at least one side of the crucible. The method of claim 3, The plate heater has a predetermined unit width while being refracted by alternating left and right to form a plate shape. The method of claim 1, And the housing is a cooling jacket having a cooling water passage. The method of claim 5, The cooling water passage is an evaporation source, characterized in that one continuous pipe is refracted and disposed evenly over the entire portion of the cooling jacket. The method of claim 5, The cooling water passage is an evaporation source, characterized in that a plurality of pipes are arranged for each portion of the cooling jacket. The method of claim 1, Evaporation source, characterized in that the inner surface further comprises a heat insulating portion disposed for the heat shield on the inner surface. The method of claim 8, Evaporation source, characterized in that the heat insulation comprises a heat insulating material arranged to be overlapped in a single or multiple. The method of claim 9, The insulation is an evaporation source, characterized in that the graphite felt material. The method of claim 8, Evaporation source, characterized in that the heat insulating portion further comprises a nozzle insulating material disposed to surround the injection nozzle. The method of claim 8, The heat insulating part is installed on the inner circumferential surface of the injection hole evaporation source characterized in that it further comprises a heat shield plate for blocking heat radiated through the injection nozzle. The method of claim 8, The heat insulation unit is an evaporation source, characterized in that further comprises a reflector installed around the heater. The method of claim 1, The nozzle unit comprises an injection hole formed in the housing and the first insulation so that the deposition material injected from the injection nozzle is discharged to the outside of the housing. The method of claim 14, The injection nozzle is an evaporation source, characterized in that the size of the diameter of 5 ~ 15mm. The method of claim 14, The spray nozzle is an evaporation source, characterized in that 1 to 20 are arranged with respect to the length 1m of the substrate. The method of claim 12, The heat shield plate is an evaporation source, characterized in that it comprises a first heat blocking plate disposed to surround the inner peripheral surface of the injection hole and the outer peripheral surface of the housing around the injection hole. The method of claim 17, The heat shield plate further comprises a second heat shield plate protruding on the outer circumferential surface of the housing so as to be partitioned including the first heat shield plate. A housing, a crucible embedded in the housing, a heating part installed in the periphery of the crucible for heating the crucible embedded in the housing, and a deposition material evaporated from the crucible to be sprayed onto a substrate located outside the housing. An evaporation source including a nozzle part including a plurality of injection nozzles in the crucible; A transfer unit installed to transfer the evaporation source; Deposition apparatus that comprises a. The method of claim 19, The transfer unit is a vapor deposition apparatus, characterized in that the evaporation source is moved along the guide member by a ball screw rotated by the power of the motor. The method of claim 19, And a plurality of evaporation sources are disposed and installed so that the deposition material sprayed from each evaporation source in a stopped state is concentrated within a predetermined range of the substrate. The method of claim 21, And an injection nozzle of each evaporation source is inclined so as to concentrate the deposition material on the substrate. The method of claim 21, And each evaporation source is inclined so as to concentrate the deposition material on the substrate. delete The method of claim 19, And the heating unit is provided with at least one heater installed to heat the crucible.

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